| ***This is the model file for MIM Capacitor. This doesn't conserve charge. |
| .subckt xcmimc c0 c1 b w=1 l=1 mf=1 |
| *****via_spacing from S8TDR Rules = via2.1a + via.2 + capm.4 |
| .param wc = 'w+m2_dw*1e6+tol_m2*1e6' |
| .param lc = 'l+m2_dw*1e6+tol_m2*1e6' |
| .param via_spacing = '(0.28+0.28+0.140)*(0.28+0.28+0.140)' $area of a single via2 with spacing (physical) (from TDR*E) |
| .param num_contacts = '(wc*lc/via_spacing)' |
| .param r1 = 'rm3*(lc)/(wc)' |
| .param r2 = 'rcvia2/num_contacts' |
| .param vc1 = -25e-6 $$ Parts per million/Volts |
| .param vc2 = 90e-6 $$ Parts per million/Volts^2 |
| .param carea = 'camimc*(wc)*(lc)' |
| .param cperim = 'cpmimc*((wc)+(lc))*2' |
| .param czero = 'carea + cperim' dev/gauss='0.01*2.8*(carea + cperim)/sqrt(wc*lc*mf)' |
| .param cpar_area = 'mcm2f_ca_w_1_120_s_3_500*(wc+0.28)*(lc+0.28)*1e-12' |
| .param cpar_perim = 'mcm2f_cf_w_1_120_s_3_500*((wc+0.28)+(lc+0.28))*2*1e-6' |
| |
| c1 c0 a 'czero*(1+vc1*(v(c0)-v(c1))+vc2*(v(c0)-v(c1))*(v(c0)-v(c1)))' tc1=0 tc2=0 |
| |
| rs1 a b1 'r1' tc1=tc1rm2 tc2=tc2rm2 $$use M2 tco's |
| rs2 b1 c1 'r2' tc1=tc1rvia2 tc2=tc2rvia2 $$us3 rcvia2 tco's |
| |
| ***Use Rescap elements for the M1-Field Parasitic capacitance structures |
| ***Must convert from w/l from um to m to align w/RESCAP element units of F/m^2, F/m |
| cox_1 c1 b 'cpar_area' tc1=0 tc2=0 |
| cox_2 c1 b 'cpar_perim' tc1=0 tc2=0 |
| |
| .ends xcmimc |
| |
| ***** xcmimc2 is identical to xcmimc except it has not bulk terminal and no parasitic to bulk |
| .subckt xcmimc2 c0 c1 w=1 l=1 mf=1 |
| *****via_spacing from S8TDR Rules = via2.1a + via.2 + capm.4 |
| .param wc = 'w+m2_dw*1e6+tol_m2*1e6' |
| .param lc = 'l+m2_dw*1e6+tol_m2*1e6' |
| .param via_spacing = '(0.28+0.28+0.140)*(0.28+0.28+0.140)' $area of a single via2 with spacing (physical) (from TDR*E) |
| .param num_contacts = '(wc*lc/via_spacing)' |
| .param r1 = 'rm3*(lc)/(wc)' |
| .param r2 = 'rcvia2/num_contacts' |
| .param vc1 = -25e-6 $$ Parts per million/Volts |
| .param vc2 = 90e-6 $$ Parts per million/Volts^2 |
| .param carea = 'camimc*(wc)*(lc)' |
| .param cperim = 'cpmimc*((wc)+(lc))*2' |
| .param czero = 'carea + cperim' dev/gauss='0.01*2.8*(carea + cperim)/sqrt(wc*lc*mf)' |
| |
| c1 c0 a 'czero*(1+vc1*(v(c0)-v(c1))+vc2*(v(c0)-v(c1))*(v(c0)-v(c1)))' tc1=0 tc2=0 |
| |
| rs1 a b1 'r1' tc1=tc1rm2 tc2=tc2rm2 $$use M2 tco's |
| rs2 b1 c1 'r2' tc1=tc1rvia2 tc2=tc2rvia2 $$us3 rcvia2 tco's |
| |
| .ends xcmimc2 |
