blob: c54a279995db5cc73695a8596c78b86fbc6d40c6 [file] [log] [blame]
* 3-terminal Vertical Parallel Plate Capacitor /w LI Shield (for S8Q/S8P ONLY)
* This is the ~50fF fixed capacitor model
* Fixed layout is here:
* /proj/tlib/s8rf/golden/s8rf/opus/s8rf/s8rf_xcmvpp8p6x7p9_m3_lishield/layout
.subckt xcmvpp8p6x7p9_m3_lishield c0 c1 b mf=1
.param
+ctot_a = '42.752e-15*xcmvpp8p6x7p9_m3_lishield_cor'
+cli2s = '4.241e-15*cli2s_vpp'
+rat_m3 = 0.160
+rat_m2 = 0.394
+rat_m1 = 0.404
+rat_m12li= 0.042
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='1.04828/sqrt(mf)*0.00399*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='1.04828/sqrt(mf)*0.00399*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='1.04828/sqrt(mf)*0.00399*rat_m1*ctot_a'
+cap_m12li= 'rat_m12li*ctot_a' dev/gauss='1.04828/sqrt(mf)*0.00399*rat_m12li*ctot_a'
+lm3 = 3.125
+wm3 = 0.30
+nfm3 = 22
+nvia2_c0 = 68
+nvia2_c1 = 17
+lm2 = 3.685
+wm2 = 0.140
+nfm2 = 48
+nvia_c0 = 84
+nvia_c1 = 42
+lm1 = 3.290
+wm1 = 0.140
+nfm1 = 52
+nmcon = 84
rm31 c0 z1 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 z1 c1 'cap_m3'
rvia2_1 c0 d0 'rcvia2/nvia2_c0'
rvia2_2 c1 d1 'rcvia2/nvia2_c1'
rm21 d0 a1 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 a1 d1 'cap_m2'
rvia1 d0 e0 'rcvia/nvia_c0'
rvia2 d1 e1 'rcvia/nvia_c1'
rm11 e0 b1 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 b1 e1 'cap_m1'
rmcon e0 f0 'rcl1/nmcon'
rliw f0 g0 'rl1'
cli2b g0 b 'cli2s'
cm12li e1 g0 'cap_m12li'
.ends xcmvpp8p6x7p9_m3_lishield
* 3-terminal Vertical Parallel Plate Capacitor /w LI Shield (for S8Q/S8P ONLY)
* This is the ~12fF fixed capacitor model
* Fixed layout is here:
* /proj/tlib/s8rf/golden/s8rf/opus/s8rf/s8rf_xcmvpp4p4x4p6_m3_lishield/layout
.subckt xcmvpp4p4x4p6_m3_lishield c0 c1 b mf=1
.param
+ctot_a = '10.694e-15*xcmvpp4p4x4p6_m3_lishield_cor'
+cli2s = '1.840e-15*cli2s_vpp'
+rat_m3 = 0.1636
+rat_m2 = 0.4604
+rat_m1 = 0.3318
+rat_m12li= 0.0442
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='1.03730/sqrt(mf)*0.00731*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='1.03730/sqrt(mf)*0.00731*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='1.03730/sqrt(mf)*0.00731*rat_m1*ctot_a'
+cap_m12li= 'rat_m12li*ctot_a' dev/gauss='1.03730/sqrt(mf)*0.00731*rat_m12li*ctot_a'
+lm3 = 1.50
+wm3 = 0.30
+nfm3 = 10
+nvia2_c0 = 32
+nvia2_c1 = 13
+lm2 = 1.585
+wm2 = 0.140
+nfm2 = 28
+nvia_c0 = 40
+nvia_c1 = 18
+lm1 = 1.665
+wm1 = 0.140
+nfm1 = 20
+nmcon = 42
rm31 c0 z1 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 z1 c1 'cap_m3'
rvia2_1 c0 d0 'rcvia2/nvia2_c0'
rvia2_2 c1 d1 'rcvia2/nvia2_c1'
rm21 d0 a1 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 a1 d1 'cap_m2'
rvia1 d0 e0 'rcvia/nvia_c0'
rvia2 d1 e1 'rcvia/nvia_c1'
rm11 e0 b1 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 b1 e1 'cap_m1'
rmcon e0 f0 'rcl1/nmcon'
rliw f0 g0 'rl1'
cli2b g0 b 'cli2s'
cm12li e1 g0 'cap_m12li'
.ends xcmvpp4p4x4p6_m3_lishield
* 3-terminal Vertical Parallel Plate Capacitor /w LI Shield (for S8Q/S8P ONLY)
* This is the ~115fF fixed capacitor model
* Fixed layout is here:
* /proj/tlib/s8rf/golden/s8rf/opus/s8rf/s8rf_xcmvpp11p5x11p7_m3_lishield/layout
.subckt xcmvpp11p5x11p7_m3_lishield c0 c1 b mf=1
.param
+ctot_a = '96.986e-15*xcmvpp11p5x11p7_m3_lishield_cor'
+cli2s = '7.433e-15*cli2s_vpp'
+rat_m3 = 0.1539
+rat_m2 = 0.4074
+rat_m1 = 0.4025
+rat_m12li= 0.0362
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='1.03787/sqrt(mf)*0.00284*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='1.03787/sqrt(mf)*0.00284*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='1.03787/sqrt(mf)*0.00284*rat_m1*ctot_a'
+cap_m12li= 'rat_m12li*ctot_a' dev/gauss='1.03787/sqrt(mf)*0.00284*rat_m12li*ctot_a'
+lm3 = 5.05
+wm3 = 0.30
+nfm3 = 34
+nvia2_c0 = 104
+nvia2_c1 = 49
+lm2 = 5.100
+wm2 = 0.140
+nfm2 = 76
+nvia_c0 = 124
+nvia_c1 = 62
+lm1 = 5.215
+wm1 = 0.140
+nfm1 = 72
+nmcon = 116
rm31 c0 z1 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 z1 c1 'cap_m3'
rvia2_1 c0 d0 'rcvia2/nvia2_c0'
rvia2_2 c1 d1 'rcvia2/nvia2_c1'
rm21 d0 a1 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 a1 d1 'cap_m2'
rvia1 d0 e0 'rcvia/nvia_c0'
rvia2 d1 e1 'rcvia/nvia_c1'
rm11 e0 b1 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 b1 e1 'cap_m1'
rmcon e0 f0 'rcl1/nmcon'
rliw f0 g0 'rl1'
cli2b g0 b 'cli2s'
cm12li e1 g0 'cap_m12li'
.ends xcmvpp11p5x11p7_m3_lishield
* 4-terminal Vertical Parallel Plate Capacitor /w LI-M3 fingers and M4 Shield (for S8Q/S8P ONLY)
* Fixed layout is here:
* //depot/icm/proj/s8rf2/dev/opus/s8rf2/s8rf2_xcmvpp11p5x11p7_m4shield
.subckt xcmvpp11p5x11p7_m4shield c0 c1 b m4 mf=1
.param
+ctot_a = '118.52e-15*xcmvpp11p5x11p7_m4shield_cor'
+cm4_c0 = '7.48e-15*c0m4m3_vpp'
+cm4_c1 = '5.06e-15*c1m4m3_vpp'
+c0_sub = '(4.99e-15-5.84e-16)*cli2s_vpp'
+c1_sub = '2.34e-15*cli2s_vpp'
+rat_m3 = 0.1539
+rat_m2 = 0.4074
+rat_m1 = 0.4025
+rat_li = 0.0362
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.35298*2)*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.35298*2)*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.35298*2)*rat_m1*ctot_a'
+cap_li = 'rat_li*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.35298*2)*rat_li*ctot_a'
+ll1 = 5.070
+lm1 = 5.215
+lm2 = 5.095
+lm3 = 5.050
+wl1 = 0.170
+wm1 = 0.140
+wm2 = 0.140
+wm3 = 0.300
+nfl1 = 62
+nfm1 = 72
+nfm2 = 72
+nfm3 = 34
+nvia2_c0 = 104
+nvia2_c1 = 49
+nvia_c0 = 124
+nvia_c1 = 62
+ncon_c0 = 116
+ncon_c1 = 28
cm4_0 m4 b0 'cm4_c0'
cm4_1 m4 b1 'cm4_c1'
rsm3 b0 b2 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 b2 b1 'cap_m3'
rvia2_0 b0 c0 'rcvia2/nvia2_c0'
rvia2_1 b1 c1 'rcvia2/nvia2_c1'
rsm2 c0 c2 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 c2 c1 'cap_m2'
rvia_0 c0 d0 'rcvia/nvia_c0'
rvia_1 c1 d1 'rcvia/nvia_c1'
rsm1 d0 d2 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 d2 d1 'cap_m1'
rcon1 d0 e0 'rcl1/ncon_c0'
rcon2 d1 e1 'rcl1/ncon_c1'
rli1 e0 e2 'rl1*ll1/wl1*(1/3)*(1/nfl1)'
cli e2 e1 'cap_li'
cli2b_0 e0 b 'c0_sub'
cli2b_1 e1 b 'c1_sub'
.ends xcmvpp11p5x11p7_m4shield
* 4-terminal Vertical Parallel Plate Capacitor /w LI-M3 fingers and Poly4 Shield (for S8Q/S8P ONLY)
* Fixed layout is here:
* //depot/icm/proj/s8rf2/dev/opus/s8rf2/s8rf2_xcmvpp11p5x11p7_polym4shield
.subckt xcmvpp11p5x11p7_polym4shield c0 c1 b m4 mf=1
.param
+ctot_a = '121.89e-15*xcmvpp11p5x11p7_m4shield_cor'
+cm4_c0 = '7.49e-15*c0m4m3_vpp'
+cm4_c1 = '5.06e-15*c1m4m3_vpp'
+cpl2s = '(17.7e-15-1.88e-15)*cpl2s_vpp'
+rat_m3 = 0.12
+rat_m2 = 0.37
+rat_m1 = 0.37
+rat_li = 0.12
+rat_li2p = 0.02
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.303*2)*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.303*2)*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.303*2)*rat_m1*ctot_a'
+cap_li = 'rat_li*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.303*2)*rat_li*ctot_a'
+cap_li2p = 'rat_li2p*ctot_a' dev/gauss='0.0283/sqrt(mf*11.5*11.7*0.303*2)*rat_li2p*ctot_a'
+ll1 = 5.070
+lm1 = 5.215
+lm2 = 5.095
+lm3 = 5.050
+wl1 = 0.170
+wm1 = 0.140
+wm2 = 0.140
+wm3 = 0.300
+nfl1 = 62
+nfm1 = 72
+nfm2 = 72
+nfm3 = 34
+nvia2_c0 = 104
+nvia2_c1 = 49
+nvia_c0 = 124
+nvia_c1 = 62
+ncon_c0 = 116
+ncon_c1 = 28
+nlicon = 126
cm4_0 m4 b0 'cm4_c0'
cm4_1 m4 b1 'cm4_c1'
rsm3 b0 b2 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 b2 b1 'cap_m3'
rvia2_0 b0 c0 'rcvia2/nvia2_c0'
rvia2_1 b1 c1 'rcvia2/nvia2_c1'
rsm2 c0 c2 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 c2 c1 'cap_m2'
rvia_0 c0 d0 'rcvia/nvia_c0'
rvia_1 c1 d1 'rcvia/nvia_c1'
rsm1 d0 d2 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 d2 d1 'cap_m1'
rcon1 d0 e0 'rcl1/ncon_c0'
rcon2 d1 e1 'rcl1/ncon_c1'
rli1 e0 e2 'rl1*ll1/wl1*(1/3)*(1/nfl1)'
cli e2 e1 'cap_li'
rlicon e0 f0 'rcp1/nlicon'
rpoly f0 f2 'rp1'
cl12p e1 f2 'cap_li2p'
cpl2b f0 b 'cpl2s'
.ends xcmvpp11p5x11p7_polym4shield
* 4-terminal Vertical Parallel Plate Capacitor /w LI-M3 fingers and Poly4 Shield (for S8Q/S8P ONLY)
* Fixed layout is here:
* //depot/icm/proj/s8rf2/dev/opus/s8rf2/s8rf2_xcmvpp6p8x6p1_polym4shield
.subckt xcmvpp6p8x6p1_polym4shield c0 c1 b m4 mf=1
.param
+ctot_a = '33.819e-15*xcmvpp6p8x6p1_cor'
+cm4_c0 = '2.75e-15*c0m4m3_vpp'
+cm4_c1 = '1.53e-15*c1m4m3_vpp'
+cpl2s = '(6.51e-15-1.05e-15)*cpl2s_vpp'
+rat_m3 = 0.12
+rat_m2 = 0.37
+rat_m1 = 0.37
+rat_li = 0.12
+rat_li2p = 0.02
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='0.0283/sqrt(mf*6.8*6.1*0.303*2)*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='0.0283/sqrt(mf*6.8*6.1*0.303*2)*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='0.0283/sqrt(mf*6.8*6.1*0.303*2)*rat_m1*ctot_a'
+cap_li = 'rat_li*ctot_a' dev/gauss='0.0283/sqrt(mf*6.8*6.1*0.303*2)*rat_li*ctot_a'
+cap_li2p = 'rat_li2p*ctot_a' dev/gauss='0.0283/sqrt(mf*6.8*6.1*0.303*2)*rat_li2p*ctot_a'
+ll1 = 2.73
+lm1 = 2.42
+lm2 = 2.77
+lm3 = 2.25
+wl1 = 0.170
+wm1 = 0.140
+wm2 = 0.140
+wm3 = 0.300
+nfl1 = 34
+nfm1 = 42
+nfm2 = 38
+nfm3 = 22
+nvia2_c0 = 48
+nvia2_c1 = 23
+nvia_c0 = 60
+nvia_c1 = 32
+ncon_c0 = 64
+ncon_c1 = 13
+nlicon = 68
cm4_0 m4 b0 'cm4_c0'
cm4_1 m4 b1 'cm4_c1'
rsm3 b0 b2 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 b2 b1 'cap_m3'
rvia2_0 b0 c0 'rcvia2/nvia2_c0'
rvia2_1 b1 c1 'rcvia2/nvia2_c1'
rsm2 c0 c2 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 c2 c1 'cap_m2'
rvia_0 c0 d0 'rcvia/nvia_c0'
rvia_1 c1 d1 'rcvia/nvia_c1'
rsm1 d0 d2 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 d2 d1 'cap_m1'
rcon1 d0 e0 'rcl1/ncon_c0'
rcon2 d1 e1 'rcl1/ncon_c1'
rli1 e0 e2 'rl1*ll1/wl1*(1/3)*(1/nfl1)'
cli e2 e1 'cap_li'
rlicon e0 f0 'rcp1/nlicon'
rpoly f0 f2 'rp1'
cl12p e1 f2 'cap_li2p'
cpl2b f0 b 'cpl2s'
.ends xcmvpp6p8x6p1_polym4shield
* 4-terminal Vertical Parallel Plate Capacitor /w M1-M3 fingers and LI4 Shield (for S8Q/S8P ONLY)
* Fixed layout is here:
* //depot/icm/proj/s8rf2/dev/opus/s8rf2/s8rf2_xcmvpp6p8x6p1_lim4shield
.subckt xcmvpp6p8x6p1_lim4shield c0 c1 b m4 mf=1
.param
+ctot_a = '26.560e-15*xcmvpp6p8x6p1_cor'
+cm4_c0 = '2.74e-15*c0m4m3_vpp'
+cm4_c1 = '1.53e-15*c1m4m3_vpp'
+cli2s = '(3.00e-15-3.26e-16)*cli2s_vpp'
+rat_m3 = 0.160
+rat_m2 = 0.394
+rat_m1 = 0.404
+rat_m12li= 0.042
+cap_m3 = 'rat_m3*ctot_a' dev/gauss='0.0283/sqrt(mf*6.1*6.8*0.34582*2)*rat_m3*ctot_a'
+cap_m2 = 'rat_m2*ctot_a' dev/gauss='0.0283/sqrt(mf*6.1*6.8*0.34582*2)*rat_m2*ctot_a'
+cap_m1 = 'rat_m1*ctot_a' dev/gauss='0.0283/sqrt(mf*6.1*6.8*0.34582*2)*rat_m1*ctot_a'
+cap_m12li= 'rat_m12li*ctot_a' dev/gauss='0.0283/sqrt(mf*6.1*6.8*0.34582*2)*rat_m12li*ctot_a'
+lm1 = 2.42
+lm2 = 2.77
+lm3 = 2.25
+wm1 = 0.140
+wm2 = 0.140
+wm3 = 0.300
+nfm1 = 42
+nfm2 = 38
+nfm3 = 22
+nvia2_c0 = 48
+nvia2_c1 = 23
+nvia_c0 = 60
+nvia_c1 = 32
+nmcon = 64
cm4_0 m4 c0 'cm4_c0'
cm4_1 m4 c1 'cm4_c1'
rm31 c0 z1 'rm3*lm3/wm3*(1/3)*(1/nfm3)'
cm3 z1 c1 'cap_m3'
rvia2_1 c0 d0 'rcvia2/nvia2_c0'
rvia2_2 c1 d1 'rcvia2/nvia2_c1'
rm21 d0 a1 'rm2*lm2/wm2*(1/3)*(1/nfm2)'
cm2 a1 d1 'cap_m2'
rvia1 d0 e0 'rcvia/nvia_c0'
rvia2 d1 e1 'rcvia/nvia_c1'
rm11 e0 b1 'rm1*lm1/wm1*(1/3)*(1/nfm1)'
cm1 b1 e1 'cap_m1'
rmcon e0 f0 'rcl1/nmcon'
rliw f0 g0 'rl1'
cli2b g0 b 'cli2s'
cm12li e1 g0 'cap_m12li'
.ends xcmvpp6p8x6p1_lim4shield