usr/local/share/pdk/sky130A/libs.tech/openlane/rules.openrcx.sky130A.min.magic

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000497977 4.50051e-05 0.0311943
0.34 0.000279412 4.50051e-05 0.0311943
0.425 0.000232192 4.50051e-05 0.0311943
0.51 0.000199448 4.50051e-05 0.0311943
0.595 0.000175236 4.50051e-05 0.0311943
0.68 0.000156519 4.50051e-05 0.0311943
0.765 0.000141568 4.50051e-05 0.0311943
0.85 0.000129322 4.50051e-05 0.0311943
1.02 0.000110405 4.50051e-05 0.0311943
1.36 8.56497e-05 4.50051e-05 0.0311943
1.7 3.92157e-05 4.50051e-05 0.0311943
2.04 0 4.50051e-05 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000497977 0.00016261 0.0311943
0.34 0.000279412 0.00016261 0.0311943
0.425 0.000232192 0.00016261 0.0311943
0.51 0.000199448 0.00016261 0.0311943
0.595 0.000175236 0.00016261 0.0311943
0.68 0.000156519 0.00016261 0.0311943
0.765 0.000141568 0.00016261 0.0311943
0.85 0.000129322 0.00016261 0.0311943
1.02 0.000110405 0.00016261 0.0311943
1.36 8.56497e-05 0.00016261 0.0311943
1.7 3.92157e-05 0.00016261 0.0311943
2.04 0 0.00016261 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000497977 0.000126933 0.0311943
0.34 0.000279412 0.000126933 0.0311943
0.425 0.000232192 0.000126933 0.0311943
0.51 0.000199448 0.000126933 0.0311943
0.595 0.000175236 0.000126933 0.0311943
0.68 0.000156519 0.000126933 0.0311943
0.765 0.000141568 0.000126933 0.0311943
0.85 0.000129322 0.000126933 0.0311943
1.02 0.000110405 0.000126933 0.0311943
1.36 8.56497e-05 0.000126933 0.0311943
1.7 3.92157e-05 0.000126933 0.0311943
2.04 0 0.000126933 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000497977 8.90919e-05 0.0311943
0.34 0.000279412 8.90919e-05 0.0311943
0.425 0.000232192 8.90919e-05 0.0311943
0.51 0.000199448 8.90919e-05 0.0311943
0.595 0.000175236 8.90919e-05 0.0311943
0.68 0.000156519 8.90919e-05 0.0311943
0.765 0.000141568 8.90919e-05 0.0311943
0.85 0.000129322 8.90919e-05 0.0311943
1.02 0.000110405 8.90919e-05 0.0311943
1.36 8.56497e-05 8.90919e-05 0.0311943
1.7 3.92157e-05 8.90919e-05 0.0311943
2.04 0 8.90919e-05 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000497977 7.92153e-05 0.0311943
0.34 0.000279412 7.92153e-05 0.0311943
0.425 0.000232192 7.92153e-05 0.0311943
0.51 0.000199448 7.92153e-05 0.0311943
0.595 0.000175236 7.92153e-05 0.0311943
0.68 0.000156519 7.92153e-05 0.0311943
0.765 0.000141568 7.92153e-05 0.0311943
0.85 0.000129322 7.92153e-05 0.0311943
1.02 0.000110405 7.92153e-05 0.0311943
1.36 8.56497e-05 7.92153e-05 0.0311943
1.7 3.92157e-05 7.92153e-05 0.0311943
2.04 0 7.92153e-05 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000497977 5.85915e-05 0.0311943
0.34 0.000279412 5.85915e-05 0.0311943
0.425 0.000232192 5.85915e-05 0.0311943
0.51 0.000199448 5.85915e-05 0.0311943
0.595 0.000175236 5.85915e-05 0.0311943
0.68 0.000156519 5.85915e-05 0.0311943
0.765 0.000141568 5.85915e-05 0.0311943
0.85 0.000129322 5.85915e-05 0.0311943
1.02 0.000110405 5.85915e-05 0.0311943
1.36 8.56497e-05 5.85915e-05 0.0311943
1.7 3.92157e-05 5.85915e-05 0.0311943
2.04 0 5.85915e-05 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.57172e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.18384e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.87576e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.21616e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000838745 4.36667e-05 0.000378788
0.28 0.000471303 4.36667e-05 0.000378788
0.35 0.000391492 4.36667e-05 0.000378788
0.42 0.000336067 4.36667e-05 0.000378788
0.49 0.000295057 4.36667e-05 0.000378788
0.56 0.000263348 4.36667e-05 0.000378788
0.63 0.000238021 4.36667e-05 0.000378788
0.7 0.000217283 4.36667e-05 0.000378788
0.84 0.000185267 4.36667e-05 0.000378788
1.12 0.000143435 4.36667e-05 0.000378788
1.4 0.000117182 4.36667e-05 0.000378788
1.68 0 9.77792e-05 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000838745 0.000119272 0.000378788
0.28 0.000471303 0.000119272 0.000378788
0.35 0.000391492 0.000119272 0.000378788
0.42 0.000336067 0.000119272 0.000378788
0.49 0.000295057 0.000119272 0.000378788
0.56 0.000263348 0.000119272 0.000378788
0.63 0.000238021 0.000119272 0.000378788
0.7 0.000217283 0.000119272 0.000378788
0.84 0.000185267 0.000119272 0.000378788
1.12 0.000143435 0.000119272 0.000378788
1.4 0.000117182 0.000119272 0.000378788
1.68 0 0.000173385 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000838745 0.000170271 0.000378788
0.28 0.000471303 0.000170271 0.000378788
0.35 0.000391492 0.000170271 0.000378788
0.42 0.000336067 0.000170271 0.000378788
0.49 0.000295057 0.000170271 0.000378788
0.56 0.000263348 0.000170271 0.000378788
0.63 0.000238021 0.000170271 0.000378788
0.7 0.000217283 0.000170271 0.000378788
0.84 0.000185267 0.000170271 0.000378788
1.12 0.000143435 0.000170271 0.000378788
1.4 0.000117182 0.000170271 0.000378788
1.68 0 0.000224384 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000838745 9.85447e-05 0.000378788
0.28 0.000471303 9.85447e-05 0.000378788
0.35 0.000391492 9.85447e-05 0.000378788
0.42 0.000336067 9.85447e-05 0.000378788
0.49 0.000295057 9.85447e-05 0.000378788
0.56 0.000263348 9.85447e-05 0.000378788
0.63 0.000238021 9.85447e-05 0.000378788
0.7 0.000217283 9.85447e-05 0.000378788
0.84 0.000185267 9.85447e-05 0.000378788
1.12 0.000143435 9.85447e-05 0.000378788
1.4 0.000117182 9.85447e-05 0.000378788
1.68 0 0.000152657 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000838745 8.06227e-05 0.000378788
0.28 0.000471303 8.06227e-05 0.000378788
0.35 0.000391492 8.06227e-05 0.000378788
0.42 0.000336067 8.06227e-05 0.000378788
0.49 0.000295057 8.06227e-05 0.000378788
0.56 0.000263348 8.06227e-05 0.000378788
0.63 0.000238021 8.06227e-05 0.000378788
0.7 0.000217283 8.06227e-05 0.000378788
0.84 0.000185267 8.06227e-05 0.000378788
1.12 0.000143435 8.06227e-05 0.000378788
1.4 0.000117182 8.06227e-05 0.000378788
1.68 0 0.000134735 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000838745 6.12349e-05 0.000378788
0.28 0.000471303 6.12349e-05 0.000378788
0.35 0.000391492 6.12349e-05 0.000378788
0.42 0.000336067 6.12349e-05 0.000378788
0.49 0.000295057 6.12349e-05 0.000378788
0.56 0.000263348 6.12349e-05 0.000378788
0.63 0.000238021 6.12349e-05 0.000378788
0.7 0.000217283 6.12349e-05 0.000378788
0.84 0.000185267 6.12349e-05 0.000378788
1.12 0.000143435 6.12349e-05 0.000378788
1.4 0.000117182 6.12349e-05 0.000378788
1.68 0 0.000115347 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.89495e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.22222e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.82828e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.33939e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000838745 0.000245877 0.000378788
0.28 0.000471303 0.000245877 0.000378788
0.35 0.000391492 0.000245877 0.000378788
0.42 0.000336067 0.000245877 0.000378788
0.49 0.000295057 0.000245877 0.000378788
0.56 0.000263348 0.000245877 0.000378788
0.63 0.000238021 0.000245877 0.000378788
0.7 0.000217283 0.000245877 0.000378788
0.84 0.000185267 0.000245877 0.000378788
1.12 0.000143435 0.000245877 0.000378788
1.4 0.000117182 0.000245877 0.000378788
1.68 0 0.00029999 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000838745 0.000174151 0.000378788
0.28 0.000471303 0.000174151 0.000378788
0.35 0.000391492 0.000174151 0.000378788
0.42 0.000336067 0.000174151 0.000378788
0.49 0.000295057 0.000174151 0.000378788
0.56 0.000263348 0.000174151 0.000378788
0.63 0.000238021 0.000174151 0.000378788
0.7 0.000217283 0.000174151 0.000378788
0.84 0.000185267 0.000174151 0.000378788
1.12 0.000143435 0.000174151 0.000378788
1.4 0.000117182 0.000174151 0.000378788
1.68 0 0.000228263 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000838745 0.000156228 0.000378788
0.28 0.000471303 0.000156228 0.000378788
0.35 0.000391492 0.000156228 0.000378788
0.42 0.000336067 0.000156228 0.000378788
0.49 0.000295057 0.000156228 0.000378788
0.56 0.000263348 0.000156228 0.000378788
0.63 0.000238021 0.000156228 0.000378788
0.7 0.000217283 0.000156228 0.000378788
0.84 0.000185267 0.000156228 0.000378788
1.12 0.000143435 0.000156228 0.000378788
1.4 0.000117182 0.000156228 0.000378788
1.68 0 0.000210341 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000838745 0.000136841 0.000378788
0.28 0.000471303 0.000136841 0.000378788
0.35 0.000391492 0.000136841 0.000378788
0.42 0.000336067 0.000136841 0.000378788
0.49 0.000295057 0.000136841 0.000378788
0.56 0.000263348 0.000136841 0.000378788
0.63 0.000238021 0.000136841 0.000378788
0.7 0.000217283 0.000136841 0.000378788
0.84 0.000185267 0.000136841 0.000378788
1.12 0.000143435 0.000136841 0.000378788
1.4 0.000117182 0.000136841 0.000378788
1.68 0 0.000190953 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000889851 3.99697e-05 0.000378788
0.28 0.000497251 3.99697e-05 0.000378788
0.35 0.000413304 3.99697e-05 0.000378788
0.42 0.000355285 3.99697e-05 0.000378788
0.49 0.000312469 3.99697e-05 0.000378788
0.56 0.000279405 3.99697e-05 0.000378788
0.63 0.000253003 3.99697e-05 0.000378788
0.7 0.000231378 3.99697e-05 0.000378788
0.84 0.00019795 3.99697e-05 0.000378788
1.12 0.000154118 3.99697e-05 0.000378788
1.4 0.000126457 3.99697e-05 0.000378788
1.68 0 0.000100095 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000889851 8.81281e-05 0.000378788
0.28 0.000497251 8.81281e-05 0.000378788
0.35 0.000413304 8.81281e-05 0.000378788
0.42 0.000355285 8.81281e-05 0.000378788
0.49 0.000312469 8.81281e-05 0.000378788
0.56 0.000279405 8.81281e-05 0.000378788
0.63 0.000253003 8.81281e-05 0.000378788
0.7 0.000231378 8.81281e-05 0.000378788
0.84 0.00019795 8.81281e-05 0.000378788
1.12 0.000154118 8.81281e-05 0.000378788
1.4 0.000126457 8.81281e-05 0.000378788
1.68 0 0.000148253 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000889851 0.000145812 0.000378788
0.28 0.000497251 0.000145812 0.000378788
0.35 0.000413304 0.000145812 0.000378788
0.42 0.000355285 0.000145812 0.000378788
0.49 0.000312469 0.000145812 0.000378788
0.56 0.000279405 0.000145812 0.000378788
0.63 0.000253003 0.000145812 0.000378788
0.7 0.000231378 0.000145812 0.000378788
0.84 0.00019795 0.000145812 0.000378788
1.12 0.000154118 0.000145812 0.000378788
1.4 0.000126457 0.000145812 0.000378788
1.68 0 0.000205937 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000889851 0.000123883 0.000378788
0.28 0.000497251 0.000123883 0.000378788
0.35 0.000413304 0.000123883 0.000378788
0.42 0.000355285 0.000123883 0.000378788
0.49 0.000312469 0.000123883 0.000378788
0.56 0.000279405 0.000123883 0.000378788
0.63 0.000253003 0.000123883 0.000378788
0.7 0.000231378 0.000123883 0.000378788
0.84 0.00019795 0.000123883 0.000378788
1.12 0.000154118 0.000123883 0.000378788
1.4 0.000126457 0.000123883 0.000378788
1.68 0 0.000184008 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000889851 8.55316e-05 0.000378788
0.28 0.000497251 8.55316e-05 0.000378788
0.35 0.000413304 8.55316e-05 0.000378788
0.42 0.000355285 8.55316e-05 0.000378788
0.49 0.000312469 8.55316e-05 0.000378788
0.56 0.000279405 8.55316e-05 0.000378788
0.63 0.000253003 8.55316e-05 0.000378788
0.7 0.000231378 8.55316e-05 0.000378788
0.84 0.00019795 8.55316e-05 0.000378788
1.12 0.000154118 8.55316e-05 0.000378788
1.4 0.000126457 8.55316e-05 0.000378788
1.68 0 0.000145657 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000889851 6.25593e-05 0.000378788
0.28 0.000497251 6.25593e-05 0.000378788
0.35 0.000413304 6.25593e-05 0.000378788
0.42 0.000355285 6.25593e-05 0.000378788
0.49 0.000312469 6.25593e-05 0.000378788
0.56 0.000279405 6.25593e-05 0.000378788
0.63 0.000253003 6.25593e-05 0.000378788
0.7 0.000231378 6.25593e-05 0.000378788
0.84 0.00019795 6.25593e-05 0.000378788
1.12 0.000154118 6.25593e-05 0.000378788
1.4 0.000126457 6.25593e-05 0.000378788
1.68 0 0.000122684 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.66061e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.50505e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.77172e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000889851 0.000172041 0.000378788
0.28 0.000497251 0.000172041 0.000378788
0.35 0.000413304 0.000172041 0.000378788
0.42 0.000355285 0.000172041 0.000378788
0.49 0.000312469 0.000172041 0.000378788
0.56 0.000279405 0.000172041 0.000378788
0.63 0.000253003 0.000172041 0.000378788
0.7 0.000231378 0.000172041 0.000378788
0.84 0.00019795 0.000172041 0.000378788
1.12 0.000154118 0.000172041 0.000378788
1.4 0.000126457 0.000172041 0.000378788
1.68 0 0.000232167 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000889851 0.00013369 0.000378788
0.28 0.000497251 0.00013369 0.000378788
0.35 0.000413304 0.00013369 0.000378788
0.42 0.000355285 0.00013369 0.000378788
0.49 0.000312469 0.00013369 0.000378788
0.56 0.000279405 0.00013369 0.000378788
0.63 0.000253003 0.00013369 0.000378788
0.7 0.000231378 0.00013369 0.000378788
0.84 0.00019795 0.00013369 0.000378788
1.12 0.000154118 0.00013369 0.000378788
1.4 0.000126457 0.00013369 0.000378788
1.68 0 0.000193815 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000889851 0.000110718 0.000378788
0.28 0.000497251 0.000110718 0.000378788
0.35 0.000413304 0.000110718 0.000378788
0.42 0.000355285 0.000110718 0.000378788
0.49 0.000312469 0.000110718 0.000378788
0.56 0.000279405 0.000110718 0.000378788
0.63 0.000253003 0.000110718 0.000378788
0.7 0.000231378 0.000110718 0.000378788
0.84 0.00019795 0.000110718 0.000378788
1.12 0.000154118 0.000110718 0.000378788
1.4 0.000126457 0.000110718 0.000378788
1.68 0 0.000170843 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000889851 0.000229725 0.000378788
0.28 0.000497251 0.000229725 0.000378788
0.35 0.000413304 0.000229725 0.000378788
0.42 0.000355285 0.000229725 0.000378788
0.49 0.000312469 0.000229725 0.000378788
0.56 0.000279405 0.000229725 0.000378788
0.63 0.000253003 0.000229725 0.000378788
0.7 0.000231378 0.000229725 0.000378788
0.84 0.00019795 0.000229725 0.000378788
1.12 0.000154118 0.000229725 0.000378788
1.4 0.000126457 0.000229725 0.000378788
1.68 0 0.00028985 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000889851 0.000191374 0.000378788
0.28 0.000497251 0.000191374 0.000378788
0.35 0.000413304 0.000191374 0.000378788
0.42 0.000355285 0.000191374 0.000378788
0.49 0.000312469 0.000191374 0.000378788
0.56 0.000279405 0.000191374 0.000378788
0.63 0.000253003 0.000191374 0.000378788
0.7 0.000231378 0.000191374 0.000378788
0.84 0.00019795 0.000191374 0.000378788
1.12 0.000154118 0.000191374 0.000378788
1.4 0.000126457 0.000191374 0.000378788
1.68 0 0.000251499 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000889851 0.000168401 0.000378788
0.28 0.000497251 0.000168401 0.000378788
0.35 0.000413304 0.000168401 0.000378788
0.42 0.000355285 0.000168401 0.000378788
0.49 0.000312469 0.000168401 0.000378788
0.56 0.000279405 0.000168401 0.000378788
0.63 0.000253003 0.000168401 0.000378788
0.7 0.000231378 0.000168401 0.000378788
0.84 0.00019795 0.000168401 0.000378788
1.12 0.000154118 0.000168401 0.000378788
1.4 0.000126457 0.000168401 0.000378788
1.68 0 0.000228526 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000554112 4.36465e-05 6.39731e-05
0.6 0.000311553 4.36465e-05 6.39731e-05
0.75 0.000258699 4.36465e-05 6.39731e-05
0.9 0.000221966 4.36465e-05 6.39731e-05
1.05 0.00019478 4.36465e-05 6.39731e-05
1.2 0.000173759 4.36465e-05 6.39731e-05
1.35 9.42761e-05 4.36465e-05 6.39731e-05
1.5 8.48485e-05 4.36465e-05 6.39731e-05
1.8 7.07071e-05 4.36465e-05 6.39731e-05
2.4 0 4.36465e-05 6.39731e-05
3 0 4.36465e-05 6.39731e-05
3.6 0 4.36465e-05 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000554112 9.96987e-05 6.39731e-05
0.6 0.000311553 9.96987e-05 6.39731e-05
0.75 0.000258699 9.96987e-05 6.39731e-05
0.9 0.000221966 9.96987e-05 6.39731e-05
1.05 0.00019478 9.96987e-05 6.39731e-05
1.2 0.000173759 9.96987e-05 6.39731e-05
1.35 9.42761e-05 9.96987e-05 6.39731e-05
1.5 8.48485e-05 9.96987e-05 6.39731e-05
1.8 7.07071e-05 9.96987e-05 6.39731e-05
2.4 0 9.96987e-05 6.39731e-05
3 0 9.96987e-05 6.39731e-05
3.6 0 9.96987e-05 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000554112 0.000141874 6.39731e-05
0.6 0.000311553 0.000141874 6.39731e-05
0.75 0.000258699 0.000141874 6.39731e-05
0.9 0.000221966 0.000141874 6.39731e-05
1.05 0.00019478 0.000141874 6.39731e-05
1.2 0.000173759 0.000141874 6.39731e-05
1.35 9.42761e-05 0.000141874 6.39731e-05
1.5 8.48485e-05 0.000141874 6.39731e-05
1.8 7.07071e-05 0.000141874 6.39731e-05
2.4 0 0.000141874 6.39731e-05
3 0 0.000141874 6.39731e-05
3.6 0 0.000141874 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000554112 0.000201823 6.39731e-05
0.6 0.000311553 0.000201823 6.39731e-05
0.75 0.000258699 0.000201823 6.39731e-05
0.9 0.000221966 0.000201823 6.39731e-05
1.05 0.00019478 0.000201823 6.39731e-05
1.2 0.000173759 0.000201823 6.39731e-05
1.35 9.42761e-05 0.000201823 6.39731e-05
1.5 8.48485e-05 0.000201823 6.39731e-05
1.8 7.07071e-05 0.000201823 6.39731e-05
2.4 0 0.000201823 6.39731e-05
3 0 0.000201823 6.39731e-05
3.6 0 0.000201823 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000172394 6.39731e-05
0.6 0.000311553 0.000172394 6.39731e-05
0.75 0.000258699 0.000172394 6.39731e-05
0.9 0.000221966 0.000172394 6.39731e-05
1.05 0.00019478 0.000172394 6.39731e-05
1.2 0.000173759 0.000172394 6.39731e-05
1.35 9.42761e-05 0.000172394 6.39731e-05
1.5 8.48485e-05 0.000172394 6.39731e-05
1.8 7.07071e-05 0.000172394 6.39731e-05
2.4 0 0.000172394 6.39731e-05
3 0 0.000172394 6.39731e-05
3.6 0 0.000172394 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 8.62741e-05 6.39731e-05
0.6 0.000311553 8.62741e-05 6.39731e-05
0.75 0.000258699 8.62741e-05 6.39731e-05
0.9 0.000221966 8.62741e-05 6.39731e-05
1.05 0.00019478 8.62741e-05 6.39731e-05
1.2 0.000173759 8.62741e-05 6.39731e-05
1.35 9.42761e-05 8.62741e-05 6.39731e-05
1.5 8.48485e-05 8.62741e-05 6.39731e-05
1.8 7.07071e-05 8.62741e-05 6.39731e-05
2.4 0 8.62741e-05 6.39731e-05
3 0 8.62741e-05 6.39731e-05
3.6 0 8.62741e-05 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54545e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.43434e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000228446 6.39731e-05
0.6 0.000311553 0.000228446 6.39731e-05
0.75 0.000258699 0.000228446 6.39731e-05
0.9 0.000221966 0.000228446 6.39731e-05
1.05 0.00019478 0.000228446 6.39731e-05
1.2 0.000173759 0.000228446 6.39731e-05
1.35 9.42761e-05 0.000228446 6.39731e-05
1.5 8.48485e-05 0.000228446 6.39731e-05
1.8 7.07071e-05 0.000228446 6.39731e-05
2.4 0 0.000228446 6.39731e-05
3 0 0.000228446 6.39731e-05
3.6 0 0.000228446 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 0.000142326 6.39731e-05
0.6 0.000311553 0.000142326 6.39731e-05
0.75 0.000258699 0.000142326 6.39731e-05
0.9 0.000221966 0.000142326 6.39731e-05
1.05 0.00019478 0.000142326 6.39731e-05
1.2 0.000173759 0.000142326 6.39731e-05
1.35 9.42761e-05 0.000142326 6.39731e-05
1.5 8.48485e-05 0.000142326 6.39731e-05
1.8 7.07071e-05 0.000142326 6.39731e-05
2.4 0 0.000142326 6.39731e-05
3 0 0.000142326 6.39731e-05
3.6 0 0.000142326 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000270621 6.39731e-05
0.6 0.000311553 0.000270621 6.39731e-05
0.75 0.000258699 0.000270621 6.39731e-05
0.9 0.000221966 0.000270621 6.39731e-05
1.05 0.00019478 0.000270621 6.39731e-05
1.2 0.000173759 0.000270621 6.39731e-05
1.35 9.42761e-05 0.000270621 6.39731e-05
1.5 8.48485e-05 0.000270621 6.39731e-05
1.8 7.07071e-05 0.000270621 6.39731e-05
2.4 0 0.000270621 6.39731e-05
3 0 0.000270621 6.39731e-05
3.6 0 0.000270621 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 0.000184501 6.39731e-05
0.6 0.000311553 0.000184501 6.39731e-05
0.75 0.000258699 0.000184501 6.39731e-05
0.9 0.000221966 0.000184501 6.39731e-05
1.05 0.00019478 0.000184501 6.39731e-05
1.2 0.000173759 0.000184501 6.39731e-05
1.35 9.42761e-05 0.000184501 6.39731e-05
1.5 8.48485e-05 0.000184501 6.39731e-05
1.8 7.07071e-05 0.000184501 6.39731e-05
2.4 0 0.000184501 6.39731e-05
3 0 0.000184501 6.39731e-05
3.6 0 0.000184501 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000554112 0.000330571 6.39731e-05
0.6 0.000311553 0.000330571 6.39731e-05
0.75 0.000258699 0.000330571 6.39731e-05
0.9 0.000221966 0.000330571 6.39731e-05
1.05 0.00019478 0.000330571 6.39731e-05
1.2 0.000173759 0.000330571 6.39731e-05
1.35 9.42761e-05 0.000330571 6.39731e-05
1.5 8.48485e-05 0.000330571 6.39731e-05
1.8 7.07071e-05 0.000330571 6.39731e-05
2.4 0 0.000330571 6.39731e-05
3 0 0.000330571 6.39731e-05
3.6 0 0.000330571 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000554112 0.000244451 6.39731e-05
0.6 0.000311553 0.000244451 6.39731e-05
0.75 0.000258699 0.000244451 6.39731e-05
0.9 0.000221966 0.000244451 6.39731e-05
1.05 0.00019478 0.000244451 6.39731e-05
1.2 0.000173759 0.000244451 6.39731e-05
1.35 9.42761e-05 0.000244451 6.39731e-05
1.5 8.48485e-05 0.000244451 6.39731e-05
1.8 7.07071e-05 0.000244451 6.39731e-05
2.4 0 0.000244451 6.39731e-05
3 0 0.000244451 6.39731e-05
3.6 0 0.000244451 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000562124 3.89596e-05 6.39731e-05
0.6 0.000314638 3.89596e-05 6.39731e-05
0.75 0.000261521 3.89596e-05 6.39731e-05
0.9 0.000224763 3.89596e-05 6.39731e-05
1.05 0.000197615 3.89596e-05 6.39731e-05
1.2 0.000112795 3.89596e-05 6.39731e-05
1.35 0.000100262 3.89596e-05 6.39731e-05
1.5 9.02357e-05 3.89596e-05 6.39731e-05
1.8 7.51966e-05 3.89596e-05 6.39731e-05
2.4 0 3.89596e-05 6.39731e-05
3 0 3.89596e-05 6.39731e-05
3.6 0 3.89596e-05 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000562124 7.96056e-05 6.39731e-05
0.6 0.000314638 7.96056e-05 6.39731e-05
0.75 0.000261521 7.96056e-05 6.39731e-05
0.9 0.000224763 7.96056e-05 6.39731e-05
1.05 0.000197615 7.96056e-05 6.39731e-05
1.2 0.000112795 7.96056e-05 6.39731e-05
1.35 0.000100262 7.96056e-05 6.39731e-05
1.5 9.02357e-05 7.96056e-05 6.39731e-05
1.8 7.51966e-05 7.96056e-05 6.39731e-05
2.4 0 7.96056e-05 6.39731e-05
3 0 7.96056e-05 6.39731e-05
3.6 0 7.96056e-05 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000562124 0.00010049 6.39731e-05
0.6 0.000314638 0.00010049 6.39731e-05
0.75 0.000261521 0.00010049 6.39731e-05
0.9 0.000224763 0.00010049 6.39731e-05
1.05 0.000197615 0.00010049 6.39731e-05
1.2 0.000112795 0.00010049 6.39731e-05
1.35 0.000100262 0.00010049 6.39731e-05
1.5 9.02357e-05 0.00010049 6.39731e-05
1.8 7.51966e-05 0.00010049 6.39731e-05
2.4 0 0.00010049 6.39731e-05
3 0 0.00010049 6.39731e-05
3.6 0 0.00010049 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000562124 0.000117313 6.39731e-05
0.6 0.000314638 0.000117313 6.39731e-05
0.75 0.000261521 0.000117313 6.39731e-05
0.9 0.000224763 0.000117313 6.39731e-05
1.05 0.000197615 0.000117313 6.39731e-05
1.2 0.000112795 0.000117313 6.39731e-05
1.35 0.000100262 0.000117313 6.39731e-05
1.5 9.02357e-05 0.000117313 6.39731e-05
1.8 7.51966e-05 0.000117313 6.39731e-05
2.4 0 0.000117313 6.39731e-05
3 0 0.000117313 6.39731e-05
3.6 0 0.000117313 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000562124 0.000147545 6.39731e-05
0.6 0.000314638 0.000147545 6.39731e-05
0.75 0.000261521 0.000147545 6.39731e-05
0.9 0.000224763 0.000147545 6.39731e-05
1.05 0.000197615 0.000147545 6.39731e-05
1.2 0.000112795 0.000147545 6.39731e-05
1.35 0.000100262 0.000147545 6.39731e-05
1.5 9.02357e-05 0.000147545 6.39731e-05
1.8 7.51966e-05 0.000147545 6.39731e-05
2.4 0 0.000147545 6.39731e-05
3 0 0.000147545 6.39731e-05
3.6 0 0.000147545 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.00011345 6.39731e-05
0.6 0.000314638 0.00011345 6.39731e-05
0.75 0.000261521 0.00011345 6.39731e-05
0.9 0.000224763 0.00011345 6.39731e-05
1.05 0.000197615 0.00011345 6.39731e-05
1.2 0.000112795 0.00011345 6.39731e-05
1.35 0.000100262 0.00011345 6.39731e-05
1.5 9.02357e-05 0.00011345 6.39731e-05
1.8 7.51966e-05 0.00011345 6.39731e-05
2.4 0 0.00011345 6.39731e-05
3 0 0.00011345 6.39731e-05
3.6 0 0.00011345 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.80808e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.000154096 6.39731e-05
0.6 0.000314638 0.000154096 6.39731e-05
0.75 0.000261521 0.000154096 6.39731e-05
0.9 0.000224763 0.000154096 6.39731e-05
1.05 0.000197615 0.000154096 6.39731e-05
1.2 0.000112795 0.000154096 6.39731e-05
1.35 0.000100262 0.000154096 6.39731e-05
1.5 9.02357e-05 0.000154096 6.39731e-05
1.8 7.51966e-05 0.000154096 6.39731e-05
2.4 0 0.000154096 6.39731e-05
3 0 0.000154096 6.39731e-05
3.6 0 0.000154096 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.00017498 6.39731e-05
0.6 0.000314638 0.00017498 6.39731e-05
0.75 0.000261521 0.00017498 6.39731e-05
0.9 0.000224763 0.00017498 6.39731e-05
1.05 0.000197615 0.00017498 6.39731e-05
1.2 0.000112795 0.00017498 6.39731e-05
1.35 0.000100262 0.00017498 6.39731e-05
1.5 9.02357e-05 0.00017498 6.39731e-05
1.8 7.51966e-05 0.00017498 6.39731e-05
2.4 0 0.00017498 6.39731e-05
3 0 0.00017498 6.39731e-05
3.6 0 0.00017498 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.000191803 6.39731e-05
0.6 0.000314638 0.000191803 6.39731e-05
0.75 0.000261521 0.000191803 6.39731e-05
0.9 0.000224763 0.000191803 6.39731e-05
1.05 0.000197615 0.000191803 6.39731e-05
1.2 0.000112795 0.000191803 6.39731e-05
1.35 0.000100262 0.000191803 6.39731e-05
1.5 9.02357e-05 0.000191803 6.39731e-05
1.8 7.51966e-05 0.000191803 6.39731e-05
2.4 0 0.000191803 6.39731e-05
3 0 0.000191803 6.39731e-05
3.6 0 0.000191803 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000562124 0.000222035 6.39731e-05
0.6 0.000314638 0.000222035 6.39731e-05
0.75 0.000261521 0.000222035 6.39731e-05
0.9 0.000224763 0.000222035 6.39731e-05
1.05 0.000197615 0.000222035 6.39731e-05
1.2 0.000112795 0.000222035 6.39731e-05
1.35 0.000100262 0.000222035 6.39731e-05
1.5 9.02357e-05 0.000222035 6.39731e-05
1.8 7.51966e-05 0.000222035 6.39731e-05
2.4 0 0.000222035 6.39731e-05
3 0 0.000222035 6.39731e-05
3.6 0 0.000222035 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000160354 4.46364e-05 6.62879e-06
3.2 0 4.46364e-05 6.62879e-06
4 0 4.46364e-05 6.62879e-06
4.8 0 4.46364e-05 6.62879e-06
5.6 0 4.46364e-05 6.62879e-06
6.4 0 4.46364e-05 6.62879e-06
7.2 0 4.46364e-05 6.62879e-06
8 0 4.46364e-05 6.62879e-06
9.6 0 4.46364e-05 6.62879e-06
12.8 0 4.46364e-05 6.62879e-06
16 0 4.46364e-05 6.62879e-06
19.2 0 4.46364e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000160354 0.000146457 6.62879e-06
3.2 0 0.000146457 6.62879e-06
4 0 0.000146457 6.62879e-06
4.8 0 0.000146457 6.62879e-06
5.6 0 0.000146457 6.62879e-06
6.4 0 0.000146457 6.62879e-06
7.2 0 0.000146457 6.62879e-06
8 0 0.000146457 6.62879e-06
9.6 0 0.000146457 6.62879e-06
12.8 0 0.000146457 6.62879e-06
16 0 0.000146457 6.62879e-06
19.2 0 0.000146457 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000160354 0.000212019 6.62879e-06
3.2 0 0.000212019 6.62879e-06
4 0 0.000212019 6.62879e-06
4.8 0 0.000212019 6.62879e-06
5.6 0 0.000212019 6.62879e-06
6.4 0 0.000212019 6.62879e-06
7.2 0 0.000212019 6.62879e-06
8 0 0.000212019 6.62879e-06
9.6 0 0.000212019 6.62879e-06
12.8 0 0.000212019 6.62879e-06
16 0 0.000212019 6.62879e-06
19.2 0 0.000212019 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000160354 0.00026288 6.62879e-06
3.2 0 0.00026288 6.62879e-06
4 0 0.00026288 6.62879e-06
4.8 0 0.00026288 6.62879e-06
5.6 0 0.00026288 6.62879e-06
6.4 0 0.00026288 6.62879e-06
7.2 0 0.00026288 6.62879e-06
8 0 0.00026288 6.62879e-06
9.6 0 0.00026288 6.62879e-06
12.8 0 0.00026288 6.62879e-06
16 0 0.00026288 6.62879e-06
19.2 0 0.00026288 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000160354 0.000244318 6.62879e-06
3.2 0 0.000244318 6.62879e-06
4 0 0.000244318 6.62879e-06
4.8 0 0.000244318 6.62879e-06
5.6 0 0.000244318 6.62879e-06
6.4 0 0.000244318 6.62879e-06
7.2 0 0.000244318 6.62879e-06
8 0 0.000244318 6.62879e-06
9.6 0 0.000244318 6.62879e-06
12.8 0 0.000244318 6.62879e-06
16 0 0.000244318 6.62879e-06
19.2 0 0.000244318 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000160354 0.000414985 6.62879e-06
3.2 0 0.000414985 6.62879e-06
4 0 0.000414985 6.62879e-06
4.8 0 0.000414985 6.62879e-06
5.6 0 0.000414985 6.62879e-06
6.4 0 0.000414985 6.62879e-06
7.2 0 0.000414985 6.62879e-06
8 0 0.000414985 6.62879e-06
9.6 0 0.000414985 6.62879e-06
12.8 0 0.000414985 6.62879e-06
16 0 0.000414985 6.62879e-06
19.2 0 0.000414985 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0