| #------------------------------------------------------- |
| # SkyWater |
| #------------------------------------------------------- |
| # Technology LEF file for |
| # Process: S8 130nm / 180nm hybrid |
| # Metal stack option: s8phirs_10r |
| # Standard cell libraries: Standard (scs8hs, scs8ms, scs8ls, scs8lp) |
| # Reference: S8_TDR_2018-03-30.pdf |
| # Date: March 20, 2019 |
| #------------------------------------------------------ |
| |
| VERSION 5.7 ; |
| BUSBITCHARS "[]" ; |
| DIVIDERCHAR "/" ; |
| |
| UNITS |
| DATABASE MICRONS 200 ; |
| CAPACITANCE PICOFARADS 1 ; |
| CURRENT MILLIAMPS 1 ; |
| RESISTANCE OHMS 1 ; |
| END UNITS |
| |
| MANUFACTURINGGRID 0.005 ; |
| CLEARANCEMEASURE EUCLIDEAN ; |
| |
| SITE s8_osu130 |
| CLASS CORE ; |
| SIZE 0.11 BY 7.2 ; |
| END s8_osu130 |
| |
| LAYER diff |
| TYPE MASTERSLICE ; |
| END diff |
| |
| LAYER poly |
| TYPE MASTERSLICE ; |
| END poly |
| |
| LAYER licon1 |
| TYPE CUT ; |
| END licon1 |
| |
| LAYER li1 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.40 ; |
| OFFSET 0 ; |
| |
| WIDTH 0.170 ; # LI 1 |
| SPACING 0.170 ; # LI 2 |
| AREA 0.0561 ; # LI 6 |
| THICKNESS 0.10 ; |
| |
| RESISTANCE RPERSQ 12.8 ; |
| END li1 |
| |
| LAYER mcon |
| TYPE CUT ; |
| WIDTH 0.17 ; # Mcon 1 |
| SPACING 0.17 ; # Mcon 2 |
| ENCLOSURE BELOW 0.0 0.0 ; # Mcon 4 |
| ENCLOSURE ABOVE 0.030 0.060 ; # Met1 4 / Met1 5 |
| END mcon |
| |
| LAYER met1 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.40 ; |
| OFFSET 0 ; |
| |
| WIDTH 0.140 ; # Met1 1 |
| SPACING 0.140 ; # Met1 2 |
| SPACING 0.280 RANGE 3.001 100 ; # Met1 3b |
| AREA 0.083 ; # Met1 6 |
| THICKNESS 0.36 ; |
| |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNACUMAREARATIO 2200 ; |
| ANTENNAAREARATIO 400 ; |
| ANTENNADIFFAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 0.35 ; |
| |
| MAXIMUMDENSITY 70.0 ; |
| DENSITYCHECKWINDOW 700.0 700.0 ; |
| DENSITYCHECKSTEP 70.0 ; |
| |
| RESISTANCE RPERSQ 0.125 ; |
| END met1 |
| |
| LAYER via1 |
| TYPE CUT ; |
| WIDTH 0.15 ; # Via 1a |
| SPACING 0.17 ; # Via 2 |
| ENCLOSURE BELOW 0.055 0.085 ; # Via 4a / Via 5a |
| ENCLOSURE ABOVE 0.055 0.085 ; # Met2 4 / Met2 5 |
| END via1 |
| |
| LAYER met2 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| |
| PITCH 0.48 ; |
| OFFSET 0.24 ; |
| |
| WIDTH 0.140 ; # Met2 1 |
| SPACING 0.140 ; # Met2 2 |
| SPACING 0.280 RANGE 3.001 100 ; # Met2 3b |
| AREA 0.0676 ; # Met2 6 |
| THICKNESS 0.36 ; |
| |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNACUMAREARATIO 2200 ; |
| ANTENNAAREARATIO 400 ; |
| ANTENNADIFFAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 0.35 ; |
| |
| MAXIMUMDENSITY 70.0 ; |
| DENSITYCHECKWINDOW 700.0 700.0 ; |
| DENSITYCHECKSTEP 70.0 ; |
| RESISTANCE RPERSQ 0.125 ; |
| END met2 |
| |
| LAYER via2 |
| TYPE CUT ; |
| WIDTH 0.20 ; # Via2 1 |
| SPACING 0.20 ; # Via2 2 |
| ENCLOSURE BELOW 0.040 0.085 ; # Via2 4 |
| ENCLOSURE ABOVE 0.065 0.065 ; # Met3 4 |
| |
| END via2 |
| |
| LAYER met3 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.74 ; |
| OFFSET 0.37 ; |
| |
| WIDTH 0.300 ; # Met3 1 |
| SPACING 0.300 ; # Met3 2 |
| AREA 0.240 ; # Met3 6 |
| THICKNESS 0.845 ; |
| |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNACUMAREARATIO 2200 ; |
| ANTENNAAREARATIO 400 ; |
| ANTENNADIFFAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 0.8 ; |
| |
| MAXIMUMDENSITY 70.0 ; |
| DENSITYCHECKWINDOW 700.0 700.0 ; |
| DENSITYCHECKSTEP 70.0 ; |
| RESISTANCE RPERSQ 0.047 ; |
| END met3 |
| |
| LAYER via3 |
| TYPE CUT ; |
| |
| WIDTH 0.20 ; # Via3 1 |
| SPACING 0.20 ; # Via3 2 |
| ENCLOSURE BELOW 0.060 0.090 ; # Via3 4 / Via3 5 |
| ENCLOSURE ABOVE 0.065 0.065 ; # Met4 3 |
| END via3 |
| |
| LAYER met4 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| |
| PITCH 0.96 ; |
| OFFSET 0.48 ; |
| |
| WIDTH 0.300 ; # Met4 1 |
| SPACING 0.300 ; # Met4 2 |
| AREA 0.240 ; # Met4 4a |
| |
| THICKNESS 0.845 ; |
| |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNACUMAREARATIO 2200 ; |
| ANTENNAAREARATIO 400 ; |
| ANTENNADIFFAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 0.8 ; |
| |
| MAXIMUMDENSITY 70.0 ; |
| DENSITYCHECKWINDOW 700.0 700.0 ; |
| DENSITYCHECKSTEP 70.0 ; |
| RESISTANCE RPERSQ 0.047 ; |
| END met4 |
| |
| LAYER via4 |
| TYPE CUT ; |
| |
| WIDTH 0.80 ; # Via4 1 |
| SPACING 0.80 ; # Via4 2 |
| ENCLOSURE BELOW 0.190 0.190 ; # Via4 4 |
| ENCLOSURE ABOVE 0.310 0.310 ; # Met5 3 |
| |
| END via4 |
| |
| LAYER met5 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 3.7 ; |
| OFFSET 1.85 ; |
| |
| WIDTH 1.600 ; # Met5 1 |
| SPACING 1.600 ; # Met5 2 |
| AREA 4.000 ; # Met5 4 |
| |
| THICKNESS 1.26 ; |
| |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNACUMAREARATIO 2200 ; |
| ANTENNAAREARATIO 400 ; |
| ANTENNADIFFAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 1.2 ; |
| |
| RESISTANCE RPERSQ 0.0285 ; |
| END met5 |
| |
| LAYER PR_bndry |
| TYPE MASTERSLICE ; |
| END PR_bndry |
| |
| #--------------------------------- |
| # Via Definitions |
| #--------------------------------- |
| |
| #--------------------------------- |
| # MCON |
| #--------------------------------- |
| |
| VIA MCON_HH DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.165 -0.085 0.165 0.085 ; |
| LAYER met1 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| END MCON_HH |
| |
| VIA MCON_HV DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.165 -0.085 0.165 0.085 ; |
| LAYER met1 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| END MCON_HV |
| |
| VIA MCON_VH DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.165 0.085 0.165 ; |
| LAYER met1 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| END MCON_VH |
| |
| VIA MCON_VV DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.165 0.085 0.165 ; |
| LAYER met1 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| END MCON_VV |
| |
| VIARULE MCON_GEN GENERATE |
| LAYER li1 ; |
| ENCLOSURE 0.000 0.080 ; |
| LAYER met1 ; |
| ENCLOSURE 0.030 0.060 ; |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.360 BY 0.360 ; |
| END MCON_GEN |
| |
| #--------------------------------- |
| # VIA1 |
| #--------------------------------- |
| |
| VIA VIA1_HH DEFAULT |
| LAYER via1 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| LAYER met2 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| END VIA1_HH |
| |
| VIA VIA1_HV DEFAULT |
| LAYER via1 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| LAYER met2 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| END VIA1_HV |
| |
| VIA VIA1_VH DEFAULT |
| LAYER via1 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| LAYER met2 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| END VIA1_VH |
| |
| VIA VIA1_VV DEFAULT |
| LAYER via1 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| LAYER met2 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| END VIA1_VV |
| |
| VIARULE VIA1_GEN GENERATE |
| LAYER met1 ; |
| ENCLOSURE 0.055 0.085 ; |
| LAYER met2 ; |
| ENCLOSURE 0.055 0.085 ; |
| LAYER via1 ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.320 BY 0.320 ; |
| END VIA1_GEN |
| |
| #--------------------------------- |
| # VIA2 |
| #--------------------------------- |
| |
| VIA VIA2_H DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.185 -0.14 0.185 0.14 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END VIA2_H |
| |
| VIA VIA2_V DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.14 -0.185 0.14 0.185 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END VIA2_V |
| |
| VIARULE VIA2_GEN GENERATE |
| LAYER met2 ; |
| ENCLOSURE 0.040 0.085 ; |
| LAYER met3 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.40 BY 0.40 ; |
| END VIA2_GEN |
| |
| #--------------------------------- |
| # VIA3 |
| #--------------------------------- |
| |
| VIA VIA3_H DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.19 -0.16 0.19 0.16 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END VIA3_H |
| |
| VIA VIA3_V DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.16 -0.19 0.16 0.19 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END VIA3_V |
| |
| VIARULE VIA3_GEN GENERATE |
| LAYER met3 ; |
| ENCLOSURE 0.06 0.09 ; |
| LAYER met4 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.40 BY 0.40 ; |
| END VIA3_GEN |
| |
| #--------------------------------- |
| # VIA4 |
| #--------------------------------- |
| |
| VIA VIA4_O DEFAULT |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| LAYER met4 ; |
| RECT -0.59 -0.59 0.59 0.59 ; |
| LAYER met5 ; |
| RECT -0.71 -0.71 0.71 0.71 ; |
| END VIA4_O |
| |
| VIARULE VIA4_GEN GENERATE |
| LAYER met4 ; |
| ENCLOSURE 0.190 0.190 ; |
| LAYER met5 ; |
| ENCLOSURE 0.310 0.310 ; |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| SPACING 1.60 BY 1.60 ; |
| END VIA4_GEN |
| |
| END LIBRARY |
