blob: 75a544990e074059f0128829380f963ed65567a5 [file] [log] [blame]
* File: sky130_fd_sc_ls__o2111ai_2.pex.spice
* Created: Wed Sep 2 11:16:56 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%D1 1 3 4 6 7 9 10 12 13 16 18
c48 7 0 2.41312e-19 $X=0.99 $Y=1.22
r49 21 22 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.27
+ $Y=1.385 $X2=0.27 $Y2=1.385
r50 18 22 3.14303 $w=3.28e-07 $l=9e-08 $layer=LI1_cond $X=0.27 $Y=1.295 $X2=0.27
+ $Y2=1.385
r51 16 17 0.533186 $w=4.52e-07 $l=5e-09 $layer=POLY_cond $X=0.99 $Y=1.492
+ $X2=0.995 $Y2=1.492
r52 15 16 45.854 $w=4.52e-07 $l=4.3e-07 $layer=POLY_cond $X=0.56 $Y=1.492
+ $X2=0.99 $Y2=1.492
r53 14 15 1.59956 $w=4.52e-07 $l=1.5e-08 $layer=POLY_cond $X=0.545 $Y=1.492
+ $X2=0.56 $Y2=1.492
r54 13 21 32.3493 $w=3.3e-07 $l=1.85e-07 $layer=POLY_cond $X=0.455 $Y=1.385
+ $X2=0.27 $Y2=1.385
r55 13 14 13.1977 $w=4.52e-07 $l=1.45186e-07 $layer=POLY_cond $X=0.455 $Y=1.385
+ $X2=0.545 $Y2=1.492
r56 10 17 28.877 $w=1.5e-07 $l=2.73e-07 $layer=POLY_cond $X=0.995 $Y=1.765
+ $X2=0.995 $Y2=1.492
r57 10 12 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=0.995 $Y=1.765
+ $X2=0.995 $Y2=2.4
r58 7 16 28.877 $w=1.5e-07 $l=2.72e-07 $layer=POLY_cond $X=0.99 $Y=1.22 $X2=0.99
+ $Y2=1.492
r59 7 9 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=0.99 $Y=1.22 $X2=0.99
+ $Y2=0.74
r60 4 15 28.877 $w=1.5e-07 $l=2.72e-07 $layer=POLY_cond $X=0.56 $Y=1.22 $X2=0.56
+ $Y2=1.492
r61 4 6 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=0.56 $Y=1.22 $X2=0.56
+ $Y2=0.74
r62 1 14 28.877 $w=1.5e-07 $l=2.73e-07 $layer=POLY_cond $X=0.545 $Y=1.765
+ $X2=0.545 $Y2=1.492
r63 1 3 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=0.545 $Y=1.765
+ $X2=0.545 $Y2=2.4
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%C1 3 5 7 10 12 14 15 22
c59 22 0 4.60698e-20 $X=1.92 $Y=1.532
c60 12 0 2.47931e-20 $X=1.945 $Y=1.765
c61 5 0 1.55562e-19 $X=1.495 $Y=1.765
c62 3 0 8.60869e-20 $X=1.42 $Y=0.74
r63 22 23 3.0125 $w=4e-07 $l=2.5e-08 $layer=POLY_cond $X=1.92 $Y=1.532 $X2=1.945
+ $Y2=1.532
r64 20 22 8.435 $w=4e-07 $l=7e-08 $layer=POLY_cond $X=1.85 $Y=1.532 $X2=1.92
+ $Y2=1.532
r65 20 21 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=1.85
+ $Y=1.465 $X2=1.85 $Y2=1.465
r66 18 20 42.7775 $w=4e-07 $l=3.55e-07 $layer=POLY_cond $X=1.495 $Y=1.532
+ $X2=1.85 $Y2=1.532
r67 17 18 9.0375 $w=4e-07 $l=7.5e-08 $layer=POLY_cond $X=1.42 $Y=1.532 $X2=1.495
+ $Y2=1.532
r68 15 21 3.75725 $w=5.52e-07 $l=1.7e-07 $layer=LI1_cond $X=1.68 $Y=1.295
+ $X2=1.68 $Y2=1.465
r69 12 23 25.8619 $w=1.5e-07 $l=2.33e-07 $layer=POLY_cond $X=1.945 $Y=1.765
+ $X2=1.945 $Y2=1.532
r70 12 14 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=1.945 $Y=1.765
+ $X2=1.945 $Y2=2.4
r71 8 22 25.8619 $w=1.5e-07 $l=2.32e-07 $layer=POLY_cond $X=1.92 $Y=1.3 $X2=1.92
+ $Y2=1.532
r72 8 10 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=1.92 $Y=1.3 $X2=1.92
+ $Y2=0.74
r73 5 18 25.8619 $w=1.5e-07 $l=2.33e-07 $layer=POLY_cond $X=1.495 $Y=1.765
+ $X2=1.495 $Y2=1.532
r74 5 7 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=1.495 $Y=1.765
+ $X2=1.495 $Y2=2.4
r75 1 17 25.8619 $w=1.5e-07 $l=2.32e-07 $layer=POLY_cond $X=1.42 $Y=1.3 $X2=1.42
+ $Y2=1.532
r76 1 3 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=1.42 $Y=1.3 $X2=1.42
+ $Y2=0.74
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%B1 1 3 4 6 8 11 15 17 19 22 23 24 25
r64 30 31 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=3.29
+ $Y=1.515 $X2=3.29 $Y2=1.515
r65 25 31 8.30831 $w=4.28e-07 $l=3.1e-07 $layer=LI1_cond $X=3.6 $Y=1.565
+ $X2=3.29 $Y2=1.565
r66 24 31 4.55617 $w=4.28e-07 $l=1.7e-07 $layer=LI1_cond $X=3.12 $Y=1.565
+ $X2=3.29 $Y2=1.565
r67 23 24 12.8645 $w=4.28e-07 $l=4.8e-07 $layer=LI1_cond $X=2.64 $Y=1.565
+ $X2=3.12 $Y2=1.565
r68 22 30 7.86876 $w=3.3e-07 $l=4.5e-08 $layer=POLY_cond $X=3.335 $Y=1.515
+ $X2=3.29 $Y2=1.515
r69 20 21 8.39946 $w=3.73e-07 $l=6.5e-08 $layer=POLY_cond $X=2.845 $Y=1.557
+ $X2=2.91 $Y2=1.557
r70 19 30 53.3327 $w=3.3e-07 $l=3.05e-07 $layer=POLY_cond $X=2.985 $Y=1.515
+ $X2=3.29 $Y2=1.515
r71 19 21 10.4507 $w=3.73e-07 $l=9.3675e-08 $layer=POLY_cond $X=2.985 $Y=1.515
+ $X2=2.91 $Y2=1.557
r72 13 22 32.1775 $w=3.3e-07 $l=1.98997e-07 $layer=POLY_cond $X=3.41 $Y=1.35
+ $X2=3.335 $Y2=1.515
r73 13 15 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=3.41 $Y=1.35
+ $X2=3.41 $Y2=0.74
r74 9 21 24.162 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=2.91 $Y=1.35 $X2=2.91
+ $Y2=1.557
r75 9 11 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.91 $Y=1.35 $X2=2.91
+ $Y2=0.74
r76 6 20 24.162 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=2.845 $Y=1.765
+ $X2=2.845 $Y2=1.557
r77 6 8 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=2.845 $Y=1.765
+ $X2=2.845 $Y2=2.4
r78 5 17 7.1379 $w=1.5e-07 $l=9e-08 $layer=POLY_cond $X=2.485 $Y=1.605 $X2=2.395
+ $Y2=1.605
r79 4 20 29.4111 $w=3.73e-07 $l=1.11445e-07 $layer=POLY_cond $X=2.755 $Y=1.605
+ $X2=2.845 $Y2=1.557
r80 4 5 138.447 $w=1.5e-07 $l=2.7e-07 $layer=POLY_cond $X=2.755 $Y=1.605
+ $X2=2.485 $Y2=1.605
r81 1 17 64.3434 $w=1.8e-07 $l=1.6e-07 $layer=POLY_cond $X=2.395 $Y=1.765
+ $X2=2.395 $Y2=1.605
r82 1 3 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=2.395 $Y=1.765
+ $X2=2.395 $Y2=2.4
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%A2 3 5 7 10 12 14 15 16 24
c48 24 0 1.8469e-19 $X=4.29 $Y=1.557
c49 16 0 1.49274e-19 $X=4.56 $Y=1.665
c50 12 0 1.88567e-19 $X=4.305 $Y=1.765
r51 24 25 1.9127 $w=3.78e-07 $l=1.5e-08 $layer=POLY_cond $X=4.29 $Y=1.557
+ $X2=4.305 $Y2=1.557
r52 22 24 20.4021 $w=3.78e-07 $l=1.6e-07 $layer=POLY_cond $X=4.13 $Y=1.557
+ $X2=4.29 $Y2=1.557
r53 22 23 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=4.13
+ $Y=1.515 $X2=4.13 $Y2=1.515
r54 20 22 35.0661 $w=3.78e-07 $l=2.75e-07 $layer=POLY_cond $X=3.855 $Y=1.557
+ $X2=4.13 $Y2=1.557
r55 19 20 1.9127 $w=3.78e-07 $l=1.5e-08 $layer=POLY_cond $X=3.84 $Y=1.557
+ $X2=3.855 $Y2=1.557
r56 16 23 11.5244 $w=4.28e-07 $l=4.3e-07 $layer=LI1_cond $X=4.56 $Y=1.565
+ $X2=4.13 $Y2=1.565
r57 15 23 1.34005 $w=4.28e-07 $l=5e-08 $layer=LI1_cond $X=4.08 $Y=1.565 $X2=4.13
+ $Y2=1.565
r58 12 25 24.4846 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=4.305 $Y=1.765
+ $X2=4.305 $Y2=1.557
r59 12 14 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=4.305 $Y=1.765
+ $X2=4.305 $Y2=2.4
r60 8 24 24.4846 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=4.29 $Y=1.35
+ $X2=4.29 $Y2=1.557
r61 8 10 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=4.29 $Y=1.35 $X2=4.29
+ $Y2=0.74
r62 5 20 24.4846 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=3.855 $Y=1.765
+ $X2=3.855 $Y2=1.557
r63 5 7 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=3.855 $Y=1.765
+ $X2=3.855 $Y2=2.4
r64 1 19 24.4846 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=3.84 $Y=1.35
+ $X2=3.84 $Y2=1.557
r65 1 3 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=3.84 $Y=1.35 $X2=3.84
+ $Y2=0.74
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%A1 3 5 7 10 12 14 15 16 23
c44 16 0 1.8469e-19 $X=5.52 $Y=1.665
c45 5 0 1.49274e-19 $X=4.755 $Y=1.765
r46 23 25 0.669444 $w=3.6e-07 $l=5e-09 $layer=POLY_cond $X=5.25 $Y=1.557
+ $X2=5.255 $Y2=1.557
r47 23 24 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=5.25
+ $Y=1.515 $X2=5.25 $Y2=1.515
r48 21 23 4.01667 $w=3.6e-07 $l=3e-08 $layer=POLY_cond $X=5.22 $Y=1.557 $X2=5.25
+ $Y2=1.557
r49 20 21 62.2583 $w=3.6e-07 $l=4.65e-07 $layer=POLY_cond $X=4.755 $Y=1.557
+ $X2=5.22 $Y2=1.557
r50 19 20 4.68611 $w=3.6e-07 $l=3.5e-08 $layer=POLY_cond $X=4.72 $Y=1.557
+ $X2=4.755 $Y2=1.557
r51 16 24 7.23627 $w=4.28e-07 $l=2.7e-07 $layer=LI1_cond $X=5.52 $Y=1.565
+ $X2=5.25 $Y2=1.565
r52 15 24 5.62821 $w=4.28e-07 $l=2.1e-07 $layer=LI1_cond $X=5.04 $Y=1.565
+ $X2=5.25 $Y2=1.565
r53 12 25 23.3057 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=5.255 $Y=1.765
+ $X2=5.255 $Y2=1.557
r54 12 14 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=5.255 $Y=1.765
+ $X2=5.255 $Y2=2.4
r55 8 21 23.3057 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=5.22 $Y=1.35
+ $X2=5.22 $Y2=1.557
r56 8 10 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=5.22 $Y=1.35 $X2=5.22
+ $Y2=0.74
r57 5 20 23.3057 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=4.755 $Y=1.765
+ $X2=4.755 $Y2=1.557
r58 5 7 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=4.755 $Y=1.765
+ $X2=4.755 $Y2=2.4
r59 1 19 23.3057 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=4.72 $Y=1.35
+ $X2=4.72 $Y2=1.557
r60 1 3 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=4.72 $Y=1.35 $X2=4.72
+ $Y2=0.74
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%VPWR 1 2 3 4 5 16 18 24 26 30 34 38 40 42
+ 47 52 62 63 69 72 75 78
c80 38 0 1.88567e-19 $X=4.98 $Y=2.455
r81 78 79 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=5.04 $Y=3.33
+ $X2=5.04 $Y2=3.33
r82 75 76 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=3.12 $Y=3.33
+ $X2=3.12 $Y2=3.33
r83 72 73 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.16 $Y=3.33
+ $X2=2.16 $Y2=3.33
r84 70 73 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=1.2 $Y=3.33
+ $X2=2.16 $Y2=3.33
r85 69 70 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=3.33 $X2=1.2
+ $Y2=3.33
r86 66 67 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r87 63 79 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=5.52 $Y=3.33
+ $X2=5.04 $Y2=3.33
r88 62 63 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=5.52 $Y=3.33
+ $X2=5.52 $Y2=3.33
r89 60 78 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=5.145 $Y=3.33
+ $X2=4.98 $Y2=3.33
r90 60 62 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=5.145 $Y=3.33
+ $X2=5.52 $Y2=3.33
r91 59 79 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=4.56 $Y=3.33
+ $X2=5.04 $Y2=3.33
r92 58 59 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=4.56 $Y=3.33
+ $X2=4.56 $Y2=3.33
r93 56 59 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=3.6 $Y=3.33
+ $X2=4.56 $Y2=3.33
r94 56 76 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=3.6 $Y=3.33
+ $X2=3.12 $Y2=3.33
r95 55 58 62.631 $w=1.68e-07 $l=9.6e-07 $layer=LI1_cond $X=3.6 $Y=3.33 $X2=4.56
+ $Y2=3.33
r96 55 56 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=3.6 $Y=3.33 $X2=3.6
+ $Y2=3.33
r97 53 75 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=3.235 $Y=3.33
+ $X2=3.11 $Y2=3.33
r98 53 55 23.8128 $w=1.68e-07 $l=3.65e-07 $layer=LI1_cond $X=3.235 $Y=3.33
+ $X2=3.6 $Y2=3.33
r99 52 78 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.815 $Y=3.33
+ $X2=4.98 $Y2=3.33
r100 52 58 16.6364 $w=1.68e-07 $l=2.55e-07 $layer=LI1_cond $X=4.815 $Y=3.33
+ $X2=4.56 $Y2=3.33
r101 51 73 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=2.16 $Y2=3.33
r102 50 51 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r103 48 72 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.255 $Y=3.33
+ $X2=2.17 $Y2=3.33
r104 48 50 25.1176 $w=1.68e-07 $l=3.85e-07 $layer=LI1_cond $X=2.255 $Y=3.33
+ $X2=2.64 $Y2=3.33
r105 47 75 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=2.985 $Y=3.33
+ $X2=3.11 $Y2=3.33
r106 47 50 22.508 $w=1.68e-07 $l=3.45e-07 $layer=LI1_cond $X=2.985 $Y=3.33
+ $X2=2.64 $Y2=3.33
r107 46 70 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=1.2 $Y2=3.33
r108 46 67 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=0.24 $Y2=3.33
r109 45 46 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r110 43 66 3.96192 $w=1.7e-07 $l=2.03e-07 $layer=LI1_cond $X=0.405 $Y=3.33
+ $X2=0.202 $Y2=3.33
r111 43 45 20.5508 $w=1.68e-07 $l=3.15e-07 $layer=LI1_cond $X=0.405 $Y=3.33
+ $X2=0.72 $Y2=3.33
r112 42 69 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.105 $Y=3.33
+ $X2=1.23 $Y2=3.33
r113 42 45 25.1176 $w=1.68e-07 $l=3.85e-07 $layer=LI1_cond $X=1.105 $Y=3.33
+ $X2=0.72 $Y2=3.33
r114 40 76 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=2.88 $Y=3.33
+ $X2=3.12 $Y2=3.33
r115 40 51 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=2.88 $Y=3.33
+ $X2=2.64 $Y2=3.33
r116 36 78 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.98 $Y=3.245
+ $X2=4.98 $Y2=3.33
r117 36 38 27.5888 $w=3.28e-07 $l=7.9e-07 $layer=LI1_cond $X=4.98 $Y=3.245
+ $X2=4.98 $Y2=2.455
r118 32 75 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=3.11 $Y=3.245
+ $X2=3.11 $Y2=3.33
r119 32 34 36.4172 $w=2.48e-07 $l=7.9e-07 $layer=LI1_cond $X=3.11 $Y=3.245
+ $X2=3.11 $Y2=2.455
r120 28 72 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.17 $Y=3.245
+ $X2=2.17 $Y2=3.33
r121 28 30 51.5401 $w=1.68e-07 $l=7.9e-07 $layer=LI1_cond $X=2.17 $Y=3.245
+ $X2=2.17 $Y2=2.455
r122 27 69 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.355 $Y=3.33
+ $X2=1.23 $Y2=3.33
r123 26 72 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.085 $Y=3.33
+ $X2=2.17 $Y2=3.33
r124 26 27 47.6257 $w=1.68e-07 $l=7.3e-07 $layer=LI1_cond $X=2.085 $Y=3.33
+ $X2=1.355 $Y2=3.33
r125 22 69 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=1.23 $Y=3.245
+ $X2=1.23 $Y2=3.33
r126 22 24 43.3319 $w=2.48e-07 $l=9.4e-07 $layer=LI1_cond $X=1.23 $Y=3.245
+ $X2=1.23 $Y2=2.305
r127 18 21 38.2611 $w=2.48e-07 $l=8.3e-07 $layer=LI1_cond $X=0.28 $Y=1.985
+ $X2=0.28 $Y2=2.815
r128 16 66 3.18124 $w=2.5e-07 $l=1.17707e-07 $layer=LI1_cond $X=0.28 $Y=3.245
+ $X2=0.202 $Y2=3.33
r129 16 21 19.822 $w=2.48e-07 $l=4.3e-07 $layer=LI1_cond $X=0.28 $Y=3.245
+ $X2=0.28 $Y2=2.815
r130 5 38 300 $w=1.7e-07 $l=6.85912e-07 $layer=licon1_PDIFF $count=2 $X=4.83
+ $Y=1.84 $X2=4.98 $Y2=2.455
r131 4 34 300 $w=1.7e-07 $l=6.85912e-07 $layer=licon1_PDIFF $count=2 $X=2.92
+ $Y=1.84 $X2=3.07 $Y2=2.455
r132 3 30 300 $w=1.7e-07 $l=6.85912e-07 $layer=licon1_PDIFF $count=2 $X=2.02
+ $Y=1.84 $X2=2.17 $Y2=2.455
r133 2 24 300 $w=1.7e-07 $l=5.5608e-07 $layer=licon1_PDIFF $count=2 $X=1.07
+ $Y=1.84 $X2=1.27 $Y2=2.305
r134 1 21 400 $w=1.7e-07 $l=1.04499e-06 $layer=licon1_PDIFF $count=1 $X=0.175
+ $Y=1.84 $X2=0.32 $Y2=2.815
r135 1 18 400 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_PDIFF $count=1 $X=0.175
+ $Y=1.84 $X2=0.32 $Y2=1.985
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%Y 1 2 3 4 5 18 20 24 26 30 32 36 42 44 45
+ 46 47 48 49 57 65 75
c86 57 0 4.60698e-20 $X=0.77 $Y=1.345
c87 45 0 1.55562e-19 $X=0.635 $Y=1.21
c88 20 0 2.47931e-20 $X=1.555 $Y=1.885
r89 62 65 0.523838 $w=3.28e-07 $l=1.5e-08 $layer=LI1_cond $X=0.77 $Y=1.97
+ $X2=0.77 $Y2=1.985
r90 57 75 2.07824 $w=3.3e-07 $l=5.09902e-08 $layer=LI1_cond $X=0.77 $Y=1.345
+ $X2=0.772 $Y2=1.295
r91 48 49 12.9213 $w=3.28e-07 $l=3.7e-07 $layer=LI1_cond $X=0.77 $Y=2.405
+ $X2=0.77 $Y2=2.775
r92 47 58 2.88756 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.77 $Y=1.885
+ $X2=0.77 $Y2=1.8
r93 47 62 2.88756 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.77 $Y=1.885
+ $X2=0.77 $Y2=1.97
r94 47 48 12.5721 $w=3.28e-07 $l=3.6e-07 $layer=LI1_cond $X=0.77 $Y=2.045
+ $X2=0.77 $Y2=2.405
r95 47 65 2.09535 $w=3.28e-07 $l=6e-08 $layer=LI1_cond $X=0.77 $Y=2.045 $X2=0.77
+ $Y2=1.985
r96 46 58 4.71454 $w=3.28e-07 $l=1.35e-07 $layer=LI1_cond $X=0.77 $Y=1.665
+ $X2=0.77 $Y2=1.8
r97 45 75 0.7625 $w=2.88e-07 $l=1.8e-08 $layer=LI1_cond $X=0.772 $Y=1.277
+ $X2=0.772 $Y2=1.295
r98 45 46 10.5815 $w=3.28e-07 $l=3.03e-07 $layer=LI1_cond $X=0.77 $Y=1.362
+ $X2=0.77 $Y2=1.665
r99 45 57 0.593683 $w=3.28e-07 $l=1.7e-08 $layer=LI1_cond $X=0.77 $Y=1.362
+ $X2=0.77 $Y2=1.345
r100 39 40 1.74613 $w=3.28e-07 $l=5e-08 $layer=LI1_cond $X=1.72 $Y=1.985
+ $X2=1.72 $Y2=2.035
r101 36 39 3.49225 $w=3.28e-07 $l=1e-07 $layer=LI1_cond $X=1.72 $Y=1.885
+ $X2=1.72 $Y2=1.985
r102 33 42 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.785 $Y=2.035
+ $X2=2.62 $Y2=2.035
r103 32 44 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.915 $Y=2.035
+ $X2=4.08 $Y2=2.035
r104 32 33 73.7219 $w=1.68e-07 $l=1.13e-06 $layer=LI1_cond $X=3.915 $Y=2.035
+ $X2=2.785 $Y2=2.035
r105 28 42 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.62 $Y=2.12
+ $X2=2.62 $Y2=2.035
r106 28 30 24.2711 $w=3.28e-07 $l=6.95e-07 $layer=LI1_cond $X=2.62 $Y=2.12
+ $X2=2.62 $Y2=2.815
r107 27 40 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.885 $Y=2.035
+ $X2=1.72 $Y2=2.035
r108 26 42 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.455 $Y=2.035
+ $X2=2.62 $Y2=2.035
r109 26 27 37.1872 $w=1.68e-07 $l=5.7e-07 $layer=LI1_cond $X=2.455 $Y=2.035
+ $X2=1.885 $Y2=2.035
r110 22 40 2.96841 $w=3.28e-07 $l=8.5e-08 $layer=LI1_cond $X=1.72 $Y=2.12
+ $X2=1.72 $Y2=2.035
r111 22 24 24.2711 $w=3.28e-07 $l=6.95e-07 $layer=LI1_cond $X=1.72 $Y=2.12
+ $X2=1.72 $Y2=2.815
r112 21 47 3.80956 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.935 $Y=1.885
+ $X2=0.77 $Y2=1.885
r113 20 36 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.555 $Y=1.885
+ $X2=1.72 $Y2=1.885
r114 20 21 40.4492 $w=1.68e-07 $l=6.2e-07 $layer=LI1_cond $X=1.555 $Y=1.885
+ $X2=0.935 $Y2=1.885
r115 16 45 11.7675 $w=2.88e-07 $l=2.92711e-07 $layer=LI1_cond $X=0.815 $Y=1.005
+ $X2=0.772 $Y2=1.277
r116 16 18 6.68417 $w=2.48e-07 $l=1.45e-07 $layer=LI1_cond $X=0.815 $Y=1.005
+ $X2=0.815 $Y2=0.86
r117 5 44 300 $w=1.7e-07 $l=3.4187e-07 $layer=licon1_PDIFF $count=2 $X=3.93
+ $Y=1.84 $X2=4.08 $Y2=2.115
r118 4 42 400 $w=1.7e-07 $l=3.4187e-07 $layer=licon1_PDIFF $count=1 $X=2.47
+ $Y=1.84 $X2=2.62 $Y2=2.115
r119 4 30 400 $w=1.7e-07 $l=1.04732e-06 $layer=licon1_PDIFF $count=1 $X=2.47
+ $Y=1.84 $X2=2.62 $Y2=2.815
r120 3 39 400 $w=1.7e-07 $l=2.10357e-07 $layer=licon1_PDIFF $count=1 $X=1.57
+ $Y=1.84 $X2=1.72 $Y2=1.985
r121 3 24 400 $w=1.7e-07 $l=1.04732e-06 $layer=licon1_PDIFF $count=1 $X=1.57
+ $Y=1.84 $X2=1.72 $Y2=2.815
r122 2 49 400 $w=1.7e-07 $l=1.04732e-06 $layer=licon1_PDIFF $count=1 $X=0.62
+ $Y=1.84 $X2=0.77 $Y2=2.815
r123 2 65 400 $w=1.7e-07 $l=2.10357e-07 $layer=licon1_PDIFF $count=1 $X=0.62
+ $Y=1.84 $X2=0.77 $Y2=1.985
r124 1 18 182 $w=1.7e-07 $l=5.55608e-07 $layer=licon1_NDIFF $count=1 $X=0.635
+ $Y=0.37 $X2=0.775 $Y2=0.86
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%A_697_368# 1 2 3 12 14 15 16 19 20 22 24
r39 22 29 2.6405 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=5.48 $Y=2.12 $X2=5.48
+ $Y2=2.035
r40 22 24 24.2711 $w=3.28e-07 $l=6.95e-07 $layer=LI1_cond $X=5.48 $Y=2.12
+ $X2=5.48 $Y2=2.815
r41 21 27 3.40825 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=4.615 $Y=2.035
+ $X2=4.53 $Y2=2.035
r42 20 29 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=5.315 $Y=2.035
+ $X2=5.48 $Y2=2.035
r43 20 21 45.6684 $w=1.68e-07 $l=7e-07 $layer=LI1_cond $X=5.315 $Y=2.035
+ $X2=4.615 $Y2=2.035
r44 17 19 5.87166 $w=1.68e-07 $l=9e-08 $layer=LI1_cond $X=4.53 $Y=2.905 $X2=4.53
+ $Y2=2.815
r45 16 27 3.40825 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=4.53 $Y=2.12 $X2=4.53
+ $Y2=2.035
r46 16 19 45.3422 $w=1.68e-07 $l=6.95e-07 $layer=LI1_cond $X=4.53 $Y=2.12
+ $X2=4.53 $Y2=2.815
r47 14 17 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=4.445 $Y=2.99
+ $X2=4.53 $Y2=2.905
r48 14 15 47.6257 $w=1.68e-07 $l=7.3e-07 $layer=LI1_cond $X=4.445 $Y=2.99
+ $X2=3.715 $Y2=2.99
r49 10 15 7.14316 $w=1.7e-07 $l=1.62019e-07 $layer=LI1_cond $X=3.59 $Y=2.905
+ $X2=3.715 $Y2=2.99
r50 10 12 20.744 $w=2.48e-07 $l=4.5e-07 $layer=LI1_cond $X=3.59 $Y=2.905
+ $X2=3.59 $Y2=2.455
r51 3 29 400 $w=1.7e-07 $l=3.4187e-07 $layer=licon1_PDIFF $count=1 $X=5.33
+ $Y=1.84 $X2=5.48 $Y2=2.115
r52 3 24 400 $w=1.7e-07 $l=1.04732e-06 $layer=licon1_PDIFF $count=1 $X=5.33
+ $Y=1.84 $X2=5.48 $Y2=2.815
r53 2 27 400 $w=1.7e-07 $l=3.4187e-07 $layer=licon1_PDIFF $count=1 $X=4.38
+ $Y=1.84 $X2=4.53 $Y2=2.115
r54 2 19 400 $w=1.7e-07 $l=1.04732e-06 $layer=licon1_PDIFF $count=1 $X=4.38
+ $Y=1.84 $X2=4.53 $Y2=2.815
r55 1 12 300 $w=1.7e-07 $l=6.83667e-07 $layer=licon1_PDIFF $count=2 $X=3.485
+ $Y=1.84 $X2=3.63 $Y2=2.455
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%A_40_74# 1 2 3 12 14 15 17 25 26
c40 17 0 1.39672e-19 $X=1.205 $Y=0.84
r41 25 26 9.7361 $w=5.33e-07 $l=1.65e-07 $layer=LI1_cond $X=2.135 $Y=0.862
+ $X2=1.97 $Y2=0.862
r42 21 23 3.40825 $w=1.7e-07 $l=1.11018e-07 $layer=LI1_cond $X=1.29 $Y=0.925
+ $X2=1.205 $Y2=0.985
r43 21 26 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=1.29 $Y=0.925
+ $X2=1.97 $Y2=0.925
r44 17 23 3.40825 $w=1.7e-07 $l=1.45e-07 $layer=LI1_cond $X=1.205 $Y=0.84
+ $X2=1.205 $Y2=0.985
r45 17 19 21.2032 $w=1.68e-07 $l=3.25e-07 $layer=LI1_cond $X=1.205 $Y=0.84
+ $X2=1.205 $Y2=0.515
r46 16 19 5.87166 $w=1.68e-07 $l=9e-08 $layer=LI1_cond $X=1.205 $Y=0.425
+ $X2=1.205 $Y2=0.515
r47 14 16 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.12 $Y=0.34
+ $X2=1.205 $Y2=0.425
r48 14 15 39.7968 $w=1.68e-07 $l=6.1e-07 $layer=LI1_cond $X=1.12 $Y=0.34
+ $X2=0.51 $Y2=0.34
r49 10 15 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=0.345 $Y=0.425
+ $X2=0.51 $Y2=0.34
r50 10 12 3.14303 $w=3.28e-07 $l=9e-08 $layer=LI1_cond $X=0.345 $Y=0.425
+ $X2=0.345 $Y2=0.515
r51 3 25 182 $w=1.7e-07 $l=5.55608e-07 $layer=licon1_NDIFF $count=1 $X=1.995
+ $Y=0.37 $X2=2.135 $Y2=0.86
r52 2 23 182 $w=1.7e-07 $l=6.61306e-07 $layer=licon1_NDIFF $count=1 $X=1.065
+ $Y=0.37 $X2=1.205 $Y2=0.965
r53 2 19 182 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=1 $X=1.065
+ $Y=0.37 $X2=1.205 $Y2=0.515
r54 1 12 91 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_NDIFF $count=2 $X=0.2
+ $Y=0.37 $X2=0.345 $Y2=0.515
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%A_299_74# 1 2 7 11 13
c26 13 0 1.01641e-19 $X=1.635 $Y=0.34
c27 7 0 8.60869e-20 $X=3.03 $Y=0.34
r28 13 16 7.33373 $w=3.28e-07 $l=2.1e-07 $layer=LI1_cond $X=1.635 $Y=0.34
+ $X2=1.635 $Y2=0.55
r29 9 11 7.33373 $w=3.28e-07 $l=2.1e-07 $layer=LI1_cond $X=3.195 $Y=0.425
+ $X2=3.195 $Y2=0.635
r30 8 13 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.8 $Y=0.34 $X2=1.635
+ $Y2=0.34
r31 7 9 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.03 $Y=0.34
+ $X2=3.195 $Y2=0.425
r32 7 8 80.246 $w=1.68e-07 $l=1.23e-06 $layer=LI1_cond $X=3.03 $Y=0.34 $X2=1.8
+ $Y2=0.34
r33 2 11 182 $w=1.7e-07 $l=3.54789e-07 $layer=licon1_NDIFF $count=1 $X=2.985
+ $Y=0.37 $X2=3.195 $Y2=0.635
r34 1 16 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=1.495 $Y=0.37
+ $X2=1.635 $Y2=0.55
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%A_510_74# 1 2 3 4 15 17 18 21 23 27 29 33
+ 35 36
r63 31 33 22.8184 $w=2.48e-07 $l=4.95e-07 $layer=LI1_cond $X=5.475 $Y=1.01
+ $X2=5.475 $Y2=0.515
r64 30 36 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=4.67 $Y=1.095
+ $X2=4.545 $Y2=1.095
r65 29 31 7.14316 $w=1.7e-07 $l=1.62019e-07 $layer=LI1_cond $X=5.35 $Y=1.095
+ $X2=5.475 $Y2=1.01
r66 29 30 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=5.35 $Y=1.095
+ $X2=4.67 $Y2=1.095
r67 25 36 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=4.545 $Y=1.01
+ $X2=4.545 $Y2=1.095
r68 25 27 22.8184 $w=2.48e-07 $l=4.95e-07 $layer=LI1_cond $X=4.545 $Y=1.01
+ $X2=4.545 $Y2=0.515
r69 24 35 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=3.71 $Y=1.095
+ $X2=3.625 $Y2=1.095
r70 23 36 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=4.42 $Y=1.095
+ $X2=4.545 $Y2=1.095
r71 23 24 46.3209 $w=1.68e-07 $l=7.1e-07 $layer=LI1_cond $X=4.42 $Y=1.095
+ $X2=3.71 $Y2=1.095
r72 19 35 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=3.625 $Y=1.01
+ $X2=3.625 $Y2=1.095
r73 19 21 32.2941 $w=1.68e-07 $l=4.95e-07 $layer=LI1_cond $X=3.625 $Y=1.01
+ $X2=3.625 $Y2=0.515
r74 17 35 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=3.54 $Y=1.095
+ $X2=3.625 $Y2=1.095
r75 17 18 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=3.54 $Y=1.095
+ $X2=2.86 $Y2=1.095
r76 13 18 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=2.695 $Y=1.01
+ $X2=2.86 $Y2=1.095
r77 13 15 5.23838 $w=3.28e-07 $l=1.5e-07 $layer=LI1_cond $X=2.695 $Y=1.01
+ $X2=2.695 $Y2=0.86
r78 4 33 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=5.295
+ $Y=0.37 $X2=5.435 $Y2=0.515
r79 3 27 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=4.365
+ $Y=0.37 $X2=4.505 $Y2=0.515
r80 2 21 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=3.485
+ $Y=0.37 $X2=3.625 $Y2=0.515
r81 1 15 182 $w=1.7e-07 $l=5.57808e-07 $layer=licon1_NDIFF $count=1 $X=2.55
+ $Y=0.37 $X2=2.695 $Y2=0.86
.ends
.subckt PM_SKY130_FD_SC_LS__O2111AI_2%VGND 1 2 9 13 15 17 25 32 33 36 39
r58 39 40 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=5.04 $Y=0 $X2=5.04
+ $Y2=0
r59 36 37 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=4.08 $Y=0 $X2=4.08
+ $Y2=0
r60 33 40 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=5.52 $Y=0 $X2=5.04
+ $Y2=0
r61 32 33 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=5.52 $Y=0 $X2=5.52
+ $Y2=0
r62 30 39 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=5.17 $Y=0 $X2=5.005
+ $Y2=0
r63 30 32 22.8342 $w=1.68e-07 $l=3.5e-07 $layer=LI1_cond $X=5.17 $Y=0 $X2=5.52
+ $Y2=0
r64 29 40 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=4.56 $Y=0 $X2=5.04
+ $Y2=0
r65 29 37 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=4.56 $Y=0 $X2=4.08
+ $Y2=0
r66 28 29 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=4.56 $Y=0 $X2=4.56
+ $Y2=0
r67 26 36 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.22 $Y=0 $X2=4.055
+ $Y2=0
r68 26 28 22.1818 $w=1.68e-07 $l=3.4e-07 $layer=LI1_cond $X=4.22 $Y=0 $X2=4.56
+ $Y2=0
r69 25 39 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.84 $Y=0 $X2=5.005
+ $Y2=0
r70 25 28 18.2674 $w=1.68e-07 $l=2.8e-07 $layer=LI1_cond $X=4.84 $Y=0 $X2=4.56
+ $Y2=0
r71 24 37 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=3.6 $Y=0 $X2=4.08
+ $Y2=0
r72 23 24 2.325 $w=1.7e-07 $l=6.8e-07 $layer=mcon $count=4 $X=3.6 $Y=0 $X2=3.6
+ $Y2=0
r73 19 23 219.209 $w=1.68e-07 $l=3.36e-06 $layer=LI1_cond $X=0.24 $Y=0 $X2=3.6
+ $Y2=0
r74 19 20 2.325 $w=1.7e-07 $l=6.8e-07 $layer=mcon $count=4 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r75 17 36 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.89 $Y=0 $X2=4.055
+ $Y2=0
r76 17 23 18.9198 $w=1.68e-07 $l=2.9e-07 $layer=LI1_cond $X=3.89 $Y=0 $X2=3.6
+ $Y2=0
r77 15 24 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=2.88 $Y=0 $X2=3.6
+ $Y2=0
r78 15 20 0.73586 $w=4.9e-07 $l=2.64e-06 $layer=MET1_cond $X=2.88 $Y=0 $X2=0.24
+ $Y2=0
r79 11 39 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=5.005 $Y=0.085
+ $X2=5.005 $Y2=0
r80 11 13 17.8105 $w=3.28e-07 $l=5.1e-07 $layer=LI1_cond $X=5.005 $Y=0.085
+ $X2=5.005 $Y2=0.595
r81 7 36 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.055 $Y=0.085
+ $X2=4.055 $Y2=0
r82 7 9 17.8105 $w=3.28e-07 $l=5.1e-07 $layer=LI1_cond $X=4.055 $Y=0.085
+ $X2=4.055 $Y2=0.595
r83 2 13 182 $w=1.7e-07 $l=3.1285e-07 $layer=licon1_NDIFF $count=1 $X=4.795
+ $Y=0.37 $X2=5.005 $Y2=0.595
r84 1 9 182 $w=1.7e-07 $l=2.86575e-07 $layer=licon1_NDIFF $count=1 $X=3.915
+ $Y=0.37 $X2=4.055 $Y2=0.595
.ends