tech/sky130_fd_sc_hs.tlef

# Copyright 2020 The SkyWater PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
#     https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.
#
# SPDX-License-Identifier: Apache-2.0

VERSION 5.7 ;

BUSBITCHARS "[]" ;
DIVIDERCHAR "/" ;

UNITS
  TIME NANOSECONDS 1 ;
  CAPACITANCE PICOFARADS 1 ;
  RESISTANCE OHMS 1 ;
  DATABASE MICRONS 1000 ;
END UNITS

MANUFACTURINGGRID 0.005 ;

# Standard density, single height
SITE unit
  SYMMETRY Y ;
  CLASS CORE ;
  SIZE 0.48 BY 3.33 ;
END unit

# Standard density, double height
SITE unitdbl
  SYMMETRY Y ;
  CLASS CORE ;
  SIZE 0.48 BY 6.66 ;
END unitdbl

LAYER li1
  TYPE ROUTING ;
  DIRECTION VERTICAL ;

  PITCH 0.48 ;
  MINWIDTH 0.17 ;

  WIDTH 0.17 ;          # LI 1
  # SPACING  0.17 ;     # LI 2
  SPACINGTABLE
     PARALLELRUNLENGTH 0
     WIDTH 0 0.17 ;
  AREA 0.0561 ;         # LI 6
  THICKNESS 0.1 ;
  EDGECAPACITANCE 3.26E-6 ;
  CAPACITANCE CPERSQDIST 36.9E-6 ;
  RESISTANCE RPERSQ 12.2 ;

  ANTENNADIFFSIDEAREARATIO PWL ( ( 0 75 ) ( 0.0125 75 ) ( 0.0225 85.125 ) ( 22.5 10200 ) ) ;
END li1

LAYER mcon
  TYPE CUT ;

  WIDTH 0.17 ;                # Mcon 1
  SPACING 0.19 ;              # Mcon 2
  ENCLOSURE BELOW 0 0 ;       # Mcon 4
  ENCLOSURE ABOVE 0.03 0.06 ; # Met1 4 / Met1 5

  ANTENNADIFFAREARATIO PWL ( ( 0 3 ) ( 0.0125 3 ) ( 0.0225 3.405 ) ( 22.5 408 ) ) ;
  DCCURRENTDENSITY AVERAGE 0.36 ; # mA per via Iavg_max at Tj = 90oC

END mcon

LAYER met1
  TYPE ROUTING ;
  DIRECTION HORIZONTAL ;

  PITCH 0.37 ;
  MINENCLOSEDAREA 0.14 ;
  MINWIDTH 0.14 ;

  WIDTH 0.14 ;                     # Met1 1
  # SPACING 0.14 ;                 # Met1 2
  # SPACING 0.28 RANGE 3.001 100 ; # Met1 3b
  SPACINGTABLE
     PARALLELRUNLENGTH 0
     WIDTH 0 0.14
     WIDTH 3 0.28 ;
  AREA 0.083 ;                     # Met1 6
  THICKNESS 0.35 ;

  ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ;

  EDGECAPACITANCE 1.79E-6 ;
  CAPACITANCE CPERSQDIST 25.8E-6 ;
  DCCURRENTDENSITY AVERAGE 2.8 ; # mA/um Iavg_max at Tj = 90oC
  ACCURRENTDENSITY RMS 6.1 ; # mA/um Irms_max at Tj = 90oC

  RESISTANCE RPERSQ 0.125 ;
END met1

LAYER via
  TYPE CUT ;
  WIDTH 0.15 ;                  # Via 1a
  SPACING 0.17 ;                # Via 2
  ENCLOSURE BELOW 0.055 0.085 ; # Via 4a / Via 5a
  ENCLOSURE ABOVE 0.055 0.085 ; # Met2 4 / Met2 5

  ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ;
  DCCURRENTDENSITY AVERAGE 0.29 ; # mA per via Iavg_max at Tj = 90oC
END via

LAYER met2
  TYPE ROUTING ;
  DIRECTION VERTICAL ;

  PITCH 0.48 ;
  MINENCLOSEDAREA 0.14 ;
  MINWIDTH 0.14 ;

  WIDTH 0.14 ;                        # Met2 1
  # SPACING  0.14 ;                   # Met2 2
  # SPACING  0.28 RANGE 3.001 100 ;   # Met2 3b
  SPACINGTABLE
     PARALLELRUNLENGTH 0
     WIDTH 0 0.14
     WIDTH 3 0.28 ;
  AREA 0.0676 ;                       # Met2 6
  THICKNESS 0.35 ;

  EDGECAPACITANCE 1.22E-6 ;
  CAPACITANCE CPERSQDIST 17.5E-6 ;
  RESISTANCE RPERSQ 0.125 ;
  DCCURRENTDENSITY AVERAGE 2.8 ; # mA/um Iavg_max at Tj = 90oC
  ACCURRENTDENSITY RMS 6.1 ; # mA/um Irms_max at Tj = 90oC
  ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ;
END met2

# ******** Layer via2, type routing, number 44 **************
LAYER via2
  TYPE CUT ;
  WIDTH 0.2 ;                   # Via2 1
  SPACING 0.2 ;                 # Via2 2
  ENCLOSURE BELOW 0.04 0.085 ;  # Via2 4
  ENCLOSURE ABOVE 0.065 0.065 ; # Met3 4
  ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ;
  DCCURRENTDENSITY AVERAGE 0.48 ; # mA per via Iavg_max at Tj = 90oC
END via2

LAYER met3
  TYPE ROUTING ;
  DIRECTION HORIZONTAL ;

  PITCH 0.74 ;
  MINWIDTH 0.3 ;

  WIDTH 0.3 ;              # Met3 1
  # SPACING 0.3 ;          # Met3 2
  SPACINGTABLE
     PARALLELRUNLENGTH 0
     WIDTH 0 0.3
     WIDTH 3 0.4 ;
  AREA 0.24 ;              # Met3 6
  THICKNESS 0.8 ;

  EDGECAPACITANCE 1.86E-6 ;
  CAPACITANCE CPERSQDIST 12.6E-6 ;
  RESISTANCE RPERSQ 0.047 ;
  DCCURRENTDENSITY AVERAGE 6.8 ; # mA/um Iavg_max at Tj = 90oC
  ACCURRENTDENSITY RMS 14.9 ; # mA/um Irms_max at Tj = 90oC

  ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ;
END met3

LAYER via3
  TYPE CUT ;
  WIDTH 0.2 ;                   # Via3 1
  SPACING 0.2 ;                 # Via3 2
  ENCLOSURE BELOW 0.06 0.09 ;   # Via3 4 / Via3 5
  ENCLOSURE ABOVE 0.065 0.065 ; # Met4 3
  ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ;
  DCCURRENTDENSITY AVERAGE 0.48 ; # mA per via Iavg_max at Tj = 90oC
END via3

LAYER met4
  TYPE ROUTING ;
  DIRECTION VERTICAL ;

  PITCH 0.96 ;
  MINWIDTH 0.3 ;

  WIDTH 0.3 ;             # Met4 1
  # SPACING  0.3 ;             # Met4 2
  SPACINGTABLE
     PARALLELRUNLENGTH 0
     WIDTH 0 0.3
     WIDTH 3 0.4 ;
  AREA 0.24 ;              # Met4 4a

  THICKNESS 0.8 ;

  EDGECAPACITANCE 1.29E-6 ;
  CAPACITANCE CPERSQDIST 8.67E-6 ;
  RESISTANCE RPERSQ 0.047 ;
  DCCURRENTDENSITY AVERAGE 6.8 ; # mA/um Iavg_max at Tj = 90oC
  ACCURRENTDENSITY RMS 14.9 ; # mA/um Irms_max at Tj = 90oC

  ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ;
END met4

LAYER via4
  TYPE CUT ;

  WIDTH 0.8 ;                 # Via4 1
  SPACING 0.8 ;               # Via4 2
  ENCLOSURE BELOW 0.19 0.19 ; # Via4 4
  ENCLOSURE ABOVE 0.31 0.31 ; # Met5 3
  ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ;
  DCCURRENTDENSITY AVERAGE 2.49 ; # mA per via Iavg_max at Tj = 90oC
END via4

LAYER met5
  TYPE ROUTING ;
  DIRECTION HORIZONTAL ;

  PITCH 3.33 ;
  MINWIDTH 1.6 ;

  WIDTH 1.6 ;            # Met5 1
  #SPACING  1.6 ;        # Met5 2
  SPACINGTABLE
     PARALLELRUNLENGTH 0
     WIDTH 0 1.6 ;
  AREA 4 ;               # Met5 4

  THICKNESS 1.2 ;

  EDGECAPACITANCE 4.96E-6 ;
  CAPACITANCE CPERSQDIST 6.48E-6 ;
  RESISTANCE RPERSQ 0.0285 ;
  DCCURRENTDENSITY AVERAGE 10.17 ; # mA/um Iavg_max at Tj = 90oC
  ACCURRENTDENSITY RMS 22.34 ; # mA/um Irms_max at Tj = 90oC

  ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ;
END met5


### Routing via cells section   ###
# Plus via rule, metals are along the prefered direction
VIA L1M1_PR DEFAULT
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER li1 ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER met1 ;
  RECT -0.145 -0.115 0.145 0.115 ;
END L1M1_PR

VIARULE L1M1_PR GENERATE
  LAYER li1 ;
  ENCLOSURE 0 0 ;
  LAYER met1 ;
  ENCLOSURE 0.06 0.03 ;
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  SPACING 0.36 BY 0.36 ;
END L1M1_PR

# Plus via rule, metals are along the non prefered direction
VIA L1M1_PR_R DEFAULT
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER li1 ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER met1 ;
  RECT -0.115 -0.145 0.115 0.145 ;
END L1M1_PR_R

VIARULE L1M1_PR_R GENERATE
  LAYER li1 ;
  ENCLOSURE 0 0 ;
  LAYER met1 ;
  ENCLOSURE 0.03 0.06 ;
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  SPACING 0.36 BY 0.36 ;
END L1M1_PR_R

# Minus via rule, lower layer metal is along prefered direction
VIA L1M1_PR_M DEFAULT
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER li1 ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER met1 ;
  RECT -0.115 -0.145 0.115 0.145 ;
END L1M1_PR_M

VIARULE L1M1_PR_M GENERATE
  LAYER li1 ;
  ENCLOSURE 0 0 ;
  LAYER met1 ;
  ENCLOSURE 0.03 0.06 ;
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  SPACING 0.36 BY 0.36 ;
END L1M1_PR_M

# Minus via rule, upper layer metal is along prefered direction
VIA L1M1_PR_MR DEFAULT
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER li1 ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER met1 ;
  RECT -0.145 -0.115 0.145 0.115 ;
END L1M1_PR_MR

VIARULE L1M1_PR_MR GENERATE
  LAYER li1 ;
  ENCLOSURE 0 0 ;
  LAYER met1 ;
  ENCLOSURE 0.06 0.03 ;
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  SPACING 0.36 BY 0.36 ;
END L1M1_PR_MR

# Centered via rule, we really do not want to use it
VIA L1M1_PR_C DEFAULT
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER li1 ;
  RECT -0.085 -0.085 0.085 0.085 ;
  LAYER met1 ;
  RECT -0.145 -0.145 0.145 0.145 ;
END L1M1_PR_C

VIARULE L1M1_PR_C GENERATE
  LAYER li1 ;
  ENCLOSURE 0 0 ;
  LAYER met1 ;
  ENCLOSURE 0.06 0.06 ;
  LAYER mcon ;
  RECT -0.085 -0.085 0.085 0.085 ;
  SPACING 0.36 BY 0.36 ;
END L1M1_PR_C

# Plus via rule, metals are along the prefered direction
VIA M1M2_PR DEFAULT
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  LAYER met1 ;
  RECT -0.16 -0.13 0.16 0.13 ;
  LAYER met2 ;
  RECT -0.13 -0.16 0.13 0.16 ;
END M1M2_PR

VIARULE M1M2_PR GENERATE
  LAYER met1 ;
  ENCLOSURE 0.085 0.055 ;
  LAYER met2 ;
  ENCLOSURE 0.055 0.085 ;
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  SPACING 0.32 BY 0.32 ;
END M1M2_PR

# Plus via rule, metals are along the non prefered direction
VIA M1M2_PR_R DEFAULT
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  LAYER met1 ;
  RECT -0.13 -0.16 0.13 0.16 ;
  LAYER met2 ;
  RECT -0.16 -0.13 0.16 0.13 ;
END M1M2_PR_R

VIARULE M1M2_PR_R GENERATE
  LAYER met1 ;
  ENCLOSURE 0.055 0.085 ;
  LAYER met2 ;
  ENCLOSURE 0.085 0.055 ;
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  SPACING 0.32 BY 0.32 ;
END M1M2_PR_R

# Minus via rule, lower layer metal is along prefered direction
VIA M1M2_PR_M DEFAULT
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  LAYER met1 ;
  RECT -0.16 -0.13 0.16 0.13 ;
  LAYER met2 ;
  RECT -0.16 -0.13 0.16 0.13 ;
END M1M2_PR_M

VIARULE M1M2_PR_M GENERATE
  LAYER met1 ;
  ENCLOSURE 0.085 0.055 ;
  LAYER met2 ;
  ENCLOSURE 0.085 0.055 ;
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  SPACING 0.32 BY 0.32 ;
END M1M2_PR_M

# Minus via rule, upper layer metal is along prefered direction
VIA M1M2_PR_MR DEFAULT
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  LAYER met1 ;
  RECT -0.13 -0.16 0.13 0.16 ;
  LAYER met2 ;
  RECT -0.13 -0.16 0.13 0.16 ;
END M1M2_PR_MR

VIARULE M1M2_PR_MR GENERATE
  LAYER met1 ;
  ENCLOSURE 0.055 0.085 ;
  LAYER met2 ;
  ENCLOSURE 0.055 0.085 ;
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  SPACING 0.32 BY 0.32 ;
END M1M2_PR_MR

# Centered via rule, we really do not want to use it
VIA M1M2_PR_C DEFAULT
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  LAYER met1 ;
  RECT -0.16 -0.16 0.16 0.16 ;
  LAYER met2 ;
  RECT -0.16 -0.16 0.16 0.16 ;
END M1M2_PR_C

VIARULE M1M2_PR_C GENERATE
  LAYER met1 ;
  ENCLOSURE 0.085 0.085 ;
  LAYER met2 ;
  ENCLOSURE 0.085 0.085 ;
  LAYER via ;
  RECT -0.075 -0.075 0.075 0.075 ;
  SPACING 0.32 BY 0.32 ;
END M1M2_PR_C

# Plus via rule, metals are along the prefered direction
VIA M2M3_PR DEFAULT
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met2 ;
  RECT -0.14 -0.185 0.14 0.185 ;
  LAYER met3 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M2M3_PR

VIARULE M2M3_PR GENERATE
  LAYER met2 ;
  ENCLOSURE 0.04 0.085 ;
  LAYER met3 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M2M3_PR

# Plus via rule, metals are along the non prefered direction
VIA M2M3_PR_R DEFAULT
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met2 ;
  RECT -0.185 -0.14 0.185 0.14 ;
  LAYER met3 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M2M3_PR_R

VIARULE M2M3_PR_R GENERATE
  LAYER met2 ;
  ENCLOSURE 0.085 0.04 ;
  LAYER met3 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M2M3_PR_R

# Minus via rule, lower layer metal is along prefered direction
VIA M2M3_PR_M DEFAULT
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met2 ;
  RECT -0.14 -0.185 0.14 0.185 ;
  LAYER met3 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M2M3_PR_M

VIARULE M2M3_PR_M GENERATE
  LAYER met2 ;
  ENCLOSURE 0.04 0.085 ;
  LAYER met3 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M2M3_PR_M

# Minus via rule, upper layer metal is along prefered direction
VIA M2M3_PR_MR DEFAULT
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met2 ;
  RECT -0.185 -0.14 0.185 0.14 ;
  LAYER met3 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M2M3_PR_MR

VIARULE M2M3_PR_MR GENERATE
  LAYER met2 ;
  ENCLOSURE 0.085 0.04 ;
  LAYER met3 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M2M3_PR_MR

# Centered via rule, we really do not want to use it
VIA M2M3_PR_C DEFAULT
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met2 ;
  RECT -0.185 -0.185 0.185 0.185 ;
  LAYER met3 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M2M3_PR_C

VIARULE M2M3_PR_C GENERATE
  LAYER met2 ;
  ENCLOSURE 0.085 0.085 ;
  LAYER met3 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via2 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M2M3_PR_C

# Plus via rule, metals are along the prefered direction
VIA M3M4_PR DEFAULT
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met3 ;
  RECT -0.19 -0.16 0.19 0.16 ;
  LAYER met4 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M3M4_PR

VIARULE M3M4_PR GENERATE
  LAYER met3 ;
  ENCLOSURE 0.09 0.06 ;
  LAYER met4 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M3M4_PR

# Plus via rule, metals are along the non prefered direction
VIA M3M4_PR_R DEFAULT
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met3 ;
  RECT -0.16 -0.19 0.16 0.19 ;
  LAYER met4 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M3M4_PR_R

VIARULE M3M4_PR_R GENERATE
  LAYER met3 ;
  ENCLOSURE 0.06 0.09 ;
  LAYER met4 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M3M4_PR_R

# Minus via rule, lower layer metal is along prefered direction
VIA M3M4_PR_M DEFAULT
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met3 ;
  RECT -0.19 -0.16 0.19 0.16 ;
  LAYER met4 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M3M4_PR_M

VIARULE M3M4_PR_M GENERATE
  LAYER met3 ;
  ENCLOSURE 0.09 0.06 ;
  LAYER met4 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M3M4_PR_M

# Minus via rule, upper layer metal is along prefered direction
VIA M3M4_PR_MR DEFAULT
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met3 ;
  RECT -0.16 -0.19 0.16 0.19 ;
  LAYER met4 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M3M4_PR_MR

VIARULE M3M4_PR_MR GENERATE
  LAYER met3 ;
  ENCLOSURE 0.06 0.09 ;
  LAYER met4 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M3M4_PR_MR

# Centered via rule, we really do not want to use it
VIA M3M4_PR_C DEFAULT
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  LAYER met3 ;
  RECT -0.19 -0.19 0.19 0.19 ;
  LAYER met4 ;
  RECT -0.165 -0.165 0.165 0.165 ;
END M3M4_PR_C

VIARULE M3M4_PR_C GENERATE
  LAYER met3 ;
  ENCLOSURE 0.09 0.09 ;
  LAYER met4 ;
  ENCLOSURE 0.065 0.065 ;
  LAYER via3 ;
  RECT -0.1 -0.1 0.1 0.1 ;
  SPACING 0.4 BY 0.4 ;
END M3M4_PR_C

# Plus via rule, metals are along the prefered direction
VIA M4M5_PR DEFAULT
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  LAYER met4 ;
  RECT -0.59 -0.59 0.59 0.59 ;
  LAYER met5 ;
  RECT -0.71 -0.71 0.71 0.71 ;
END M4M5_PR

VIARULE M4M5_PR GENERATE
  LAYER met4 ;
  ENCLOSURE 0.19 0.19 ;
  LAYER met5 ;
  ENCLOSURE 0.31 0.31 ;
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  SPACING 1.6 BY 1.6 ;
END M4M5_PR

# Plus via rule, metals are along the non prefered direction
VIA M4M5_PR_R DEFAULT
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  LAYER met4 ;
  RECT -0.59 -0.59 0.59 0.59 ;
  LAYER met5 ;
  RECT -0.71 -0.71 0.71 0.71 ;
END M4M5_PR_R

VIARULE M4M5_PR_R GENERATE
  LAYER met4 ;
  ENCLOSURE 0.19 0.19 ;
  LAYER met5 ;
  ENCLOSURE 0.31 0.31 ;
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  SPACING 1.6 BY 1.6 ;
END M4M5_PR_R

# Minus via rule, lower layer metal is along prefered direction
VIA M4M5_PR_M DEFAULT
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  LAYER met4 ;
  RECT -0.59 -0.59 0.59 0.59 ;
  LAYER met5 ;
  RECT -0.71 -0.71 0.71 0.71 ;
END M4M5_PR_M

VIARULE M4M5_PR_M GENERATE
  LAYER met4 ;
  ENCLOSURE 0.19 0.19 ;
  LAYER met5 ;
  ENCLOSURE 0.31 0.31 ;
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  SPACING 1.6 BY 1.6 ;
END M4M5_PR_M

# Minus via rule, upper layer metal is along prefered direction
VIA M4M5_PR_MR DEFAULT
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  LAYER met4 ;
  RECT -0.59 -0.59 0.59 0.59 ;
  LAYER met5 ;
  RECT -0.71 -0.71 0.71 0.71 ;
END M4M5_PR_MR

VIARULE M4M5_PR_MR GENERATE
  LAYER met4 ;
  ENCLOSURE 0.19 0.19 ;
  LAYER met5 ;
  ENCLOSURE 0.31 0.31 ;
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  SPACING 1.6 BY 1.6 ;
END M4M5_PR_MR

# Centered via rule, we really do not want to use it
VIA M4M5_PR_C DEFAULT
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  LAYER met4 ;
  RECT -0.59 -0.59 0.59 0.59 ;
  LAYER met5 ;
  RECT -0.71 -0.71 0.71 0.71 ;
END M4M5_PR_C

VIARULE M4M5_PR_C GENERATE
  LAYER met4 ;
  ENCLOSURE 0.19 0.19 ;
  LAYER met5 ;
  ENCLOSURE 0.31 0.31 ;
  LAYER via4 ;
  RECT -0.4 -0.4 0.4 0.4 ;
  SPACING 1.6 BY 1.6 ;
END M4M5_PR_C
###  end of single via cells   ###

END LIBRARY