| * Copyright 2020 The SkyWater PDK Authors |
| * |
| * Licensed under the Apache License, Version 2.0 (the "License"); |
| * you may not use this file except in compliance with the License. |
| * You may obtain a copy of the License at |
| * |
| * https://www.apache.org/licenses/LICENSE-2.0 |
| * |
| * Unless required by applicable law or agreed to in writing, software |
| * distributed under the License is distributed on an "AS IS" BASIS, |
| * WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| * See the License for the specific language governing permissions and |
| * limitations under the License. |
| |
| * SKY130 Spice File. |
| .subckt sky130_fd_pr__cap_mim_m3_2 c0 c1 w=1 l=1 mf=1 |
| .param wc = 'w+m4_dw*1e6+tol_m4*1e6' |
| .param lc = 'l+m4_dw*1e6+tol_m4*1e6' |
| .param via4_spacing = '(0.28+0.31+0.140)*(0.28+0.31+0.140)' |
| .param num_contacts = '(wc*lc/via4_spacing)' |
| .param r1 = 'rm4*(lc)/(wc)' |
| .param r2 = 'rcvia4/num_contacts' |
| .param carea = 'camimc*(wc)*(lc)' |
| .param cperim = 'cpmimc*((wc)+(lc))*2' |
| .param czero = 'carea + cperim' dev/gauss='0.01*2.8*(carea + cperim)/sqrt(wc*lc*mf)' |
| c1 c0 a 'czero' tc1 = 0 tc2 = 0.0 |
| rs1 a b1 'r1' tc1 = {tc1rm4} tc2 = {tc2rm4} |
| rs2 b1 c1 'r2' tc1 = {tc1rvia4} tc2 = {tc2rvia4} |
| .ends sky130_fd_pr__cap_mim_m3_2 |
