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Tim 'mithro' Ansellb844d2f2020-07-19 14:21:30 -07001Layer Resistivity (mohms/sq)
2Poly 48200
3Local interconnect 12800
4Metal1 125
5Metal2 125
6Metal3 47
7Metal4 47
8Metal5 29
9Deep nwell 2200000
10Pwell (in deep nwell) 3050000
11Nwell 1700000
12N-diffusion 120000
13P-diffusion 197000
14HV N-diffusion 114000
15HV P-diffusion 191000
16XHR poly resistor 319800
17UHR poly resistor 2000000
18LICON contact 15000
19MCON contact 152000
20VIA 4500
21VIA2 3410
22VIA3 3410
23VIA4 380