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Tim 'mithro' Ansellbcb4ed02020-07-23 19:24:47 -07001Symbol,Explanation,Unit
2PI,Perimeter of Interconnect,um
3FLT,Final Layer thickness,um
4W,Width of MOS Transistor,um
5L,Length of MOS Transistor,um
6A,Area of MOS Transistor gate (= W x L),um2
7CA,Area of contact or via,um2
8SW,Sidewall area (= PI x FLT),um2
9EA,"Etched area (= CA for horizontal, = SW for vertical areas)",um2