Tim 'mithro' Ansell | 6e8b54e | 2020-07-25 17:09:17 -0700 | [diff] [blame] | 1 | %!PS-Adobe-3.0 |
| 2 | %%Title: metal_stack.ps |
| 3 | %%Creator: XCircuit v0.0 rev-145403803 |
| 4 | %%CreationDate: Wed Jun 17 12:42:51 2020 |
| 5 | %%Pages: 7 |
| 6 | %%BoundingBox: 0 0 612 792 |
| 7 | %%DocumentNeededResources: font Times-Roman Times-RomanISO Symbol |
| 8 | %%EndComments |
| 9 | %%BeginProlog |
| 10 | % |
| 11 | % PostScript prolog for output from xcircuit |
| 12 | % Version: 3.9 |
| 13 | % |
| 14 | % Electrical circuit (and otherwise general) drawing program |
| 15 | % |
| 16 | % Written by Tim Edwards 8/5/93--4/12/16 (tim@opencircuitdesign.com) |
| 17 | % The Johns Hopkins University (1993-2004) |
| 18 | % MultiGiG, Inc. (2004-2012) |
| 19 | % Open Circuit Design (2012-2016) |
| 20 | % |
| 21 | %%BeginResource: procset XCIRCproc 3.9 1 |
| 22 | % |
| 23 | % supporting definitions --- these are the primary xcircuit types. |
| 24 | |
| 25 | /XCIRCsave save def |
| 26 | /topmat matrix currentmatrix def |
| 27 | |
| 28 | /fontslant { /slant exch def [1 0 slant 1 0 0] |
| 29 | exch findfont exch makefont dup length dict /ndict exch def |
| 30 | { 1 index /FID ne { ndict 3 1 roll put } { pop pop } ifelse } forall |
| 31 | ndict definefont pop} def |
| 32 | /ul { count 0 gt { dup type /stringtype eq showflag 1 eq and { gsave |
| 33 | currentpoint topmat setmatrix 0 0 moveto 2 index stringwidth pop (_) |
| 34 | false charpath flattenpath pathbbox grestore exch pop 1 index |
| 35 | sub setlinewidth exch pop currentpoint 3 -1 roll add moveto 0 |
| 36 | rlineto stroke moveto } if } if } def |
| 37 | /ol { count 0 gt { dup type /stringtype eq showflag 1 eq and { gsave gsave |
| 38 | currentpoint topmat setmatrix 2 index stringwidth pop 3 index |
| 39 | true charpath flattenpath pathbbox grestore exch pop |
| 40 | exch pop topmat setmatrix (_) true charpath pathbbox grestore |
| 41 | exch pop 1 index sub setlinewidth exch pop currentpoint |
| 42 | exch 4 1 roll exch sub add moveto pop 0 rlineto stroke |
| 43 | moveto } if } if } def |
| 44 | /stW { gsave currentpoint newpath moveto true charpath flattenpath |
| 45 | pathbbox pop exch pop sub grestore } def |
| 46 | /Ts {mark Tabs aload pop counttomark 1 add array astore /Tabs exch def Tabs |
| 47 | 0 currentpoint pop put} def |
| 48 | /Tbn {mark Tabs aload pop counttomark dup 2 add 1 roll cleartomark 1 sub} def |
| 49 | /Tb { 0 1 Tbn {Tabs exch get dup currentpoint pop lt |
| 50 | {currentpoint exch pop moveto exit} {pop} ifelse } for } def |
| 51 | /Tf { Tbn -1 0 {Tabs exch get dup currentpoint pop gt |
| 52 | {currentpoint exch pop moveto exit} {pop} ifelse } for } def |
| 53 | /qS { (aa) stW (a a) stW sub 4 div 0 Kn } def |
| 54 | /hS { qS qS } def |
| 55 | /pspc 0 def |
| 56 | /cf0 { scalefont setfont } bind def |
| 57 | /Kn { dup kY add /kY exch def rmoveto } bind def |
| 58 | /ss { /fscale fscale 0.67 mul def currentfont 0.67 cf0 0 fscale0 fscale mul |
| 59 | 0.33 mul neg Kn} def |
| 60 | /Ss { /fscale fscale 0.67 mul def currentfont 0.67 cf0 0 fscale0 fscale mul |
| 61 | 0.67 mul Kn } def |
| 62 | /ns { 0 kY neg Kn /kY 0 def /fscale 1.0 def xfont0 1.0 cf0 } def |
| 63 | /MR { /twidth exch def } def |
| 64 | /CRx { } def |
| 65 | /CR { ns 0 /Bline Bline fscale0 neg add def Bline moveto CRx } def |
| 66 | /cf { dup type /realtype ne {1.0} if exch findfont exch kY 0 eq |
| 67 | { 40 mul dup /fscale0 exch def cf0 /xfont0 currentfont def} |
| 68 | {fscale0 mul fscale mul cf0} ifelse } def |
| 69 | /ctmk { counttomark dup 2 add -1 roll pop } bind def |
| 70 | /label { gsave translate 0 0 moveto dup scale neg |
| 71 | /rotval exch def /twidth 100000 def /just exch def just 128 and |
| 72 | 0 gt {/mshow {pop} def} {/mshow {show} def} ifelse just 16 and 0 |
| 73 | gt {gsave rotval rotate 0 1 dtransform gsave pagemat setmatrix |
| 74 | idtransform exch grestore 1 0 dtransform gsave pagemat setmatrix |
| 75 | idtransform exch grestore dup abs 1e-9 lt {pop mul 0 gt} {3 1 roll |
| 76 | pop pop 0 lt} ifelse grestore {-1 /rotval rotval neg def /just just |
| 77 | dup 3 and 1 ne {3 xor} if def} {1} ifelse exch -1e-9 lt {-1 /rotval |
| 78 | rotval neg def /just just dup 12 and 4 ne {12 xor} if def} {1} |
| 79 | ifelse scale } if /showflag 0 def /fspc pspc def /Bline 0 def |
| 80 | /numlines 0 def /padding 0 array def /Tabs 0 array def |
| 81 | /fscale 1.0 def /kY 0 def gsave /CRx { linewid padding |
| 82 | aload pop numlines 1 add dup /numlines exch def array astore |
| 83 | /padding exch def /linewid 0 def } def dup 1 add copy dup 1 0 |
| 84 | dtransform exch atan rotate {exch dup type /stringtype eq {gsave dup |
| 85 | gsave newpath 0 0 moveto true charpath flattenpath pathbbox pop exch |
| 86 | pop exch pop grestore currentpoint pop add dup /linewid exch def twidth |
| 87 | ge {grestore CR exch 1 add dup 2 add {CR} exch 1 roll exch} {grestore} |
| 88 | ifelse true charpath flattenpath} {dup type /arraytype eq {exec} {12 |
| 89 | string cvs true charpath flattenpath} ifelse} ifelse} repeat |
| 90 | CRx /CRx {padding aload pop just 1280 and 0 gt {blockwid exch sub just |
| 91 | 1024 and 0 gt {0.5 mul} if} {pop 0} ifelse 0 rmoveto numlines 1 sub |
| 92 | dup /numlines exch def array astore /padding exch def} def exch pop |
| 93 | pathbbox grestore 4 copy pop exch pop exch sub /blockwid exch def |
| 94 | 3 -1 roll pop 3 1 roll just 1 and 0 gt {just 2 and |
| 95 | 0 gt {exch pop neg fspc sub} {exch sub 0.5 mul neg} ifelse} {pop neg |
| 96 | fspc add} ifelse exch Bline exch just 4 and 0 gt {just 8 and 0 gt |
| 97 | {exch pop neg fspc sub} {add 0.5 mul neg} ifelse} {pop neg fspc add} |
| 98 | ifelse rotval rotate Kn currentpoint translate /showflag 1 def /Bline |
| 99 | 0 def /Tabs 0 array def /fscale 1.0 def /kY 0 def CRx {dup type |
| 100 | /stringtype eq {mshow} {dup type /arraytype eq {exec} {12 string cvs |
| 101 | mshow} ifelse} ifelse} repeat grestore endclip} def |
| 102 | /pinlabel { 4 index 32 and 0 ne hlevel 0 eq or { /pspc 10 def label |
| 103 | /pspc 0 def } { pop pop pop pop pop {pop} repeat } ifelse } def |
| 104 | /pinglobal { pinlabel } def |
| 105 | /infolabel { pinlabel } def |
| 106 | /graphic { gsave 4 index cvx exec /DataSource get resetfile translate 0 0 |
| 107 | moveto neg rotate dup scale cvx exec image grestore endclip} def |
| 108 | |
| 109 | /scb { setrgbcolor } bind def /sce { defColor aload pop scb } bind def |
| 110 | /cRedef {/defColor currentcolor 3 array astore def} def |
| 111 | /begingate {dup type /dicttype ne {1 dict} if begin % default params |
| 112 | dup type /dicttype ne {1 dict} if begin % instanced params |
| 113 | /hlevel hlevel 1 add def /defColor currentcolor sce 3 array astore |
| 114 | def gsave sce dup type /nametype eq { pop } if translate 0 0 moveto |
| 115 | neg rotate dup type /nametype eq not { dup abs currentlinewidth exch |
| 116 | div setlinewidth } { pop } ifelse dup abs scale clipped 1 and 1 eq |
| 117 | {/clipped clipped 1 add def} if} bind def |
| 118 | /endgate { /hlevel hlevel 1 sub def grestore defColor aload pop cRedef |
| 119 | scb end end endclip} bind def |
| 120 | |
| 121 | /hlevel 0 def |
| 122 | /endclip {clipped 1 and 1 eq {grestore /clipped clipped 1 sub def} if} def |
| 123 | /tmpa [1 0 0 1 0 0] def |
| 124 | /gar {8 8 true tmpa {<c0 c0 00 00 0c 0c 00 00>} imagemask} bind |
| 125 | {8 8 true tmpa {<30 70 60 02 03 07 06 20>} imagemask} bind |
| 126 | {8 8 true tmpa {<0c 1e 1e 0c c0 e1 e1 c0>} imagemask} bind |
| 127 | {8 8 true tmpa {<0f 0f 0f 0f f0 f0 f0 f0>} imagemask} bind |
| 128 | {8 8 true tmpa {<3f f3 e1 e1 f3 3f 1e 1e>} imagemask} bind |
| 129 | {8 8 true tmpa {<df cf 8f 9f fd fc f8 f9>} imagemask} bind |
| 130 | {8 8 true tmpa {<ff 3f 3f ff ff f3 f3 ff>} imagemask} bind 7 array astore def |
| 131 | /ppaint { gsave clip tmpa dup setmatrix pathbbox neg exch neg 4 2 roll |
| 132 | neg 4 -1 roll 2 copy gt {exch} if 8 div ceiling 8 mul 4 2 roll neg 2 copy |
| 133 | gt {exch} if 8 div ceiling 8 mul 3 -1 roll -8 5 -1 roll |
| 134 | { 3 index exch 5 exch put dup -8 3 index { 3 index |
| 135 | exch 4 exch put 3 index exec } for } for pop pop pop pop grestore } bind def |
| 136 | /setstyles { |
| 137 | currentlinewidth mul setlinewidth /style exch def style 2048 and 0 gt |
| 138 | clipped 1 and 0 eq and {clip newpath /clipped clipped 1 add def} { |
| 139 | style 1 and 0 gt not {closepath} if |
| 140 | style 1024 and 0 gt {2 setlinecap 0 setlinejoin} if |
| 141 | style 2 and 0 gt {currentlinewidth 4 mul dup 2 array astore 0 setdash} if |
| 142 | style 4 and 0 gt {0.5 currentlinewidth 4 mul 2 array astore 0 setdash} if |
| 143 | gsave style 16 and 0 gt { style 224 and -5 bitshift style 256 and 0 gt { |
| 144 | 7 exch sub 8 div dup 1 exch sub currentrgbcolor 3 array astore |
| 145 | {3 copy mul add 4 1 roll pop} forall pop pop setrgbcolor eofill} |
| 146 | {dup 7 lt {gar exch get ppaint} {pop eofill} ifelse} ifelse} |
| 147 | {style 256 and 0 gt {1 setgray eofill} if} ifelse grestore style 8 and 0 gt |
| 148 | style 512 eq or {newpath} {stroke} ifelse grestore endclip} ifelse} def |
| 149 | |
| 150 | /addtoy {exch dup dup 2 mul 3 add 1 roll -1 1 { 4 1 roll dup 4 1 roll add |
| 151 | 4 -1 roll 2 mul 1 add index 2 mul 2 add 2 roll} for pop} def |
| 152 | /addtoy1 {1 exch addtoy pop} def |
| 153 | /addtoy3 {3 exch addtoy pop} def |
| 154 | /addtoy4 {4 exch addtoy pop} def |
| 155 | /addtox {exch dup dup 2 mul 3 add 1 roll -1 1 { 4 1 roll dup 4 1 roll 3 -1 roll |
| 156 | add exch 4 -1 roll 2 mul 1 add index 2 mul 2 add 2 roll} for pop} def |
| 157 | /addtox1 {1 exch addtox pop} def |
| 158 | /addtox3 {3 exch addtox pop} def |
| 159 | /addtox4 {4 exch addtox pop} def |
| 160 | /polygon { gsave /num exch def moveto num 1 sub {lineto} repeat setstyles } def |
| 161 | /xcarc { gsave newpath arc setstyles } def |
| 162 | /elb { matrix currentmatrix 7 -1 roll 7 -1 roll translate 5 1 roll 4 -1 roll |
| 163 | 3 index div 1 scale } def |
| 164 | /ele { 0 4 1 roll 0 4 1 roll } bind def |
| 165 | /ellipse { gsave elb newpath ele arc setmatrix setstyles } def |
| 166 | /pellip { elb ele arc setmatrix } def |
| 167 | /nellip { elb ele arcn setmatrix } def |
| 168 | /spline { gsave moveto curveto setstyles } def |
| 169 | /polyc { {lineto} repeat } bind def |
| 170 | /beginpath { gsave moveto } bind def |
| 171 | /endpath { setstyles } bind def |
| 172 | /bop { 1 setlinecap 2 setlinejoin 6 setmiterlimit 0 0 0 scb cRedef |
| 173 | /clipped 0 def} def |
| 174 | /psinsertion {/PSobj save def /showpage {} def /setpagedevice {pop} def bop |
| 175 | rotate translate dup scale} def |
| 176 | /end_insert {PSobj restore} def |
| 177 | /setpagemat {/pagemat matrix currentmatrix def} def |
| 178 | /inchscale {setpagemat 0.375 mul dup scale} def |
| 179 | /cmscale {setpagemat 0.35433071 mul dup scale} def |
| 180 | |
| 181 | %%EndResource |
| 182 | %%EndProlog |
| 183 | /Times-Roman findfont dup length dict begin |
| 184 | {1 index /FID ne {def} {pop pop} ifelse} forall |
| 185 | /Encoding ISOLatin1Encoding def currentdict end |
| 186 | /Times-RomanISO exch definefont pop |
| 187 | |
| 188 | % XCircuit output starts here. |
| 189 | |
| 190 | %%BeginSetup |
| 191 | |
| 192 | /generic::arrowhead { |
| 193 | % nonetwork |
| 194 | begingate |
| 195 | 8 -28 beginpath |
| 196 | 3 -18 3 -15 0 0 curveto |
| 197 | -3 -15 -3 -18 -8 -28 curveto |
| 198 | -2 -26 2 -26 8 -28 curveto |
| 199 | 249 |
| 200 | 1.000 endpath |
| 201 | endgate |
| 202 | } def |
| 203 | |
| 204 | |
| 205 | %%EndSetup |
| 206 | |
| 207 | %%Page: metal_stack 1 |
| 208 | %%PageOrientation: Portrait |
| 209 | %%PageBoundingBox: 0 0 612 792 |
| 210 | /pgsave save def bop |
| 211 | % 32.00 8.00 gridspace |
| 212 | 0.6922 inchscale |
| 213 | 2.6000 setlinewidth 1376 1320 translate |
| 214 | |
| 215 | 0.796 0.953 0.953 scb |
| 216 | 496 1.000 -304 480 -304 496 -168 496 -168 480 4 polygon |
| 217 | 0.800 0.800 0.800 scb |
| 218 | 496 1.000 -296 288 -296 320 -200 320 -200 288 4 polygon |
| 219 | 496 1.000 -288 496 -288 544 -192 544 -192 496 4 polygon |
| 220 | 496 1.000 -368 -336 -368 -288 -272 -288 -272 -336 4 polygon |
| 221 | 496 1.000 -48 -256 -48 -176 48 -176 48 -256 4 polygon |
| 222 | 496 1.000 -48 -96 -48 -32 48 -32 48 -96 4 polygon |
| 223 | 496 1.000 -48 48 -48 112 48 112 48 48 4 polygon |
| 224 | 496 1.000 -48 256 -48 320 48 320 48 256 4 polygon |
| 225 | 496 1.000 -48 464 -48 544 112 544 112 464 4 polygon |
| 226 | 496 1.000 -48 -448 -48 -288 48 -288 48 -448 4 polygon |
| 227 | 0.984 0.996 0.765 scb |
| 228 | -640 -448 beginpath |
| 229 | -640 -512 1 polyc |
| 230 | -640 -530 -626 -544 -608 -544 curveto |
| 231 | 368 -544 1 |
| 232 | polyc |
| 233 | 386 -544 400 -530 400 -512 curveto |
| 234 | 400 -448 1 polyc |
| 235 | 497 1.000 endpath |
| 236 | 0.980 0.792 0.541 scb |
| 237 | -192 -448 beginpath |
| 238 | -192 -464 1 polyc |
| 239 | -192 -482 -178 -496 -160 -496 curveto |
| 240 | 320 -496 1 |
| 241 | polyc |
| 242 | 338 -496 352 -482 352 -464 curveto |
| 243 | 352 -448 1 polyc |
| 244 | 497 1.000 endpath |
| 245 | 1.000 0.753 0.796 scb |
| 246 | 496 1.000 -400 -400 -400 -336 -240 -336 -240 -400 4 polygon |
| 247 | 496 1.000 112 -432 112 -368 320 -368 320 -432 4 polygon |
| 248 | 0.812 0.996 0.812 scb |
| 249 | 496 1.000 -480 -288 -480 -256 432 -256 432 -288 4 polygon |
| 250 | 0.796 0.953 0.953 scb |
| 251 | 496 1.000 -480 -176 -480 -96 464 -96 464 -176 4 polygon |
| 252 | 496 1.000 -480 -32 -480 48 464 48 464 -32 4 polygon |
| 253 | 496 1.000 -480 112 -480 256 496 256 496 112 4 polygon |
| 254 | 496 1.000 -480 320 -480 464 496 464 496 320 4 polygon |
| 255 | 496 1.000 -464 544 -464 752 448 752 448 544 4 polygon |
| 256 | sce |
| 257 | (SkyWater Sky130A metal stack \(not to scale!\):) {/Times-Roman cf} 2 16 0.000 |
| 258 | 1.000 -544 1008 label |
| 259 | 1 1.000 -680 -448 496 -448 2 polygon |
| 260 | 1 1.000 -192 -448 -192 -464 2 polygon |
| 261 | 1 1.000 352 -448 352 -464 2 polygon |
| 262 | 1 1.000 -160 -464 32 180.000 270.000 xcarc |
| 263 | 1 1.000 -160 -496 320 -496 2 polygon |
| 264 | 1 1.000 320 -464 32 -90.000 0.000 xcarc |
| 265 | 1 1.000 -640 -448 -640 -512 2 polygon |
| 266 | 1 1.000 400 -448 400 -512 2 polygon |
| 267 | 1 1.000 -608 -544 368 -544 2 polygon |
| 268 | 1 1.000 -608 -512 32 180.000 270.000 xcarc |
| 269 | 1 1.000 368 -512 32 -90.000 0.000 xcarc |
| 270 | (diffusion) {/Times-Roman cf} 2 16 0.000 0.700 -48 -480 label |
| 271 | (nwell) {/Times-Roman cf} 2 16 0.000 0.700 -304 -496 label |
| 272 | 0 1.000 112 -432 112 -368 320 -368 320 -432 4 polygon |
| 273 | (gate) {CR} (polysilicon) {/Times-Roman cf} 4 1045 0.000 0.700 224 -400 label |
| 274 | 0 1.000 -48 -448 -48 -288 48 -288 48 -448 4 polygon |
| 275 | (licon) {/Times-Roman cf} 2 21 0.000 0.700 0 -376 label |
| 276 | 0 1.000 -480 -288 -480 -256 432 -256 432 -288 4 polygon |
| 277 | (li) {/Times-Roman cf} 2 21 0.000 0.700 0 -272 label |
| 278 | 0 1.000 -480 -176 -480 -96 464 -96 464 -176 4 polygon |
| 279 | (metal1) {/Times-Roman cf} 2 17 0.000 0.700 0 -144 label |
| 280 | 0 1.000 -480 -32 -480 48 464 48 464 -32 4 polygon |
| 281 | (metal2) {/Times-Roman cf} 2 17 0.000 0.700 0 0 label |
| 282 | 0 1.000 -480 112 -480 256 496 256 496 112 4 polygon |
| 283 | (metal3) {/Times-Roman cf} 2 17 0.000 0.700 0 176 label |
| 284 | 0 1.000 -480 320 -480 464 496 464 496 320 4 polygon |
| 285 | (metal4) {/Times-Roman cf} 2 17 0.000 0.700 0 384 label |
| 286 | 0 1.000 -464 544 -464 752 448 752 448 544 4 polygon |
| 287 | (metal5) {/Times-Roman cf} 2 17 0.000 0.700 0 640 label |
| 288 | 0 1.000 -48 -256 -48 -176 48 -176 48 -256 4 polygon |
| 289 | (mcon) {/Times-Roman cf} 2 21 0.000 0.700 0 -224 label |
| 290 | (licon) {/Times-Roman cf} 2 17 0.000 0.700 -320 -320 label |
| 291 | 0 1.000 -48 -96 -48 -32 48 -32 48 -96 4 polygon |
| 292 | 0 1.000 -48 48 -48 112 48 112 48 48 4 polygon |
| 293 | 0 1.000 -48 256 -48 320 48 320 48 256 4 polygon |
| 294 | 0 1.000 -48 464 -48 544 112 544 112 464 4 polygon |
| 295 | (via1) {/Times-Roman cf} 2 21 0.000 0.700 0 -64 label |
| 296 | (via2) {/Times-Roman cf} 2 21 0.000 0.700 0 80 label |
| 297 | (via3) {/Times-Roman cf} 2 21 0.000 0.700 0 288 label |
| 298 | (via4) {/Times-Roman cf} 2 21 0.000 0.700 32 496 label |
| 299 | 1 1.000 -384 848 -384 896 2 polygon |
| 300 | 1 1.000 400 848 400 896 2 polygon |
| 301 | 1 1.000 432 928 672 928 2 polygon |
| 302 | 1 1.000 -416 928 -896 928 2 polygon |
| 303 | 1 1.000 -416 896 32 0.000 90.000 xcarc |
| 304 | 1 1.000 432 896 32 90.000 180.000 xcarc |
| 305 | (glass cut) {/Times-Roman cf} 2 17 0.000 0.700 32 880 label |
| 306 | 0.000 0.000 1.000 scb |
| 307 | (PI1 K=2.94) {/Times-Roman cf} 2 17 0.000 0.700 -648 696 label |
| 308 | 0.600 0.600 0.600 scb |
| 309 | 1 1.000 592 -448 704 -448 2 polygon |
| 310 | 1 1.000 416 -496 704 -496 2 polygon |
| 311 | sce |
| 312 | 1.000 0.000 672 -496 generic::arrowhead |
| 313 | -1.000 180.000 672 -448 generic::arrowhead |
| 314 | (\265m) {/Times-RomanISO cf} {hS} (0.12) {/Times-Roman cf} 5 17 0.000 0.700 672 |
| 315 | -480 label |
| 316 | 0.600 0.600 0.600 scb |
| 317 | 1 1.000 384 -432 624 -432 2 polygon |
| 318 | 1 1.000 384 -368 624 -368 2 polygon |
| 319 | sce |
| 320 | 1 1.000 560 -368 560 -320 2 polygon |
| 321 | 1 1.000 560 -432 560 -480 2 polygon |
| 322 | 1.000 0.000 560 -432 generic::arrowhead |
| 323 | -1.000 180.000 560 -368 generic::arrowhead |
| 324 | (\265m) {/Times-RomanISO cf} {hS} (0.18) {/Times-Roman cf} 5 21 0.000 0.700 592 |
| 325 | -400 label |
| 326 | 0.600 0.600 0.600 scb |
| 327 | 1 1.000 512 -288 608 -288 2 polygon |
| 328 | 1 1.000 440 -256 608 -256 2 polygon |
| 329 | sce |
| 330 | 1 1.000 592 -256 592 -208 2 polygon |
| 331 | 1 1.000 592 -288 592 -336 2 polygon |
| 332 | 1.000 0.000 592 -288 generic::arrowhead |
| 333 | -1.000 180.000 592 -256 generic::arrowhead |
| 334 | (\265m) {/Times-RomanISO cf} {hS} (0.1) {/Times-Roman cf} 5 20 0.000 0.700 624 |
| 335 | -272 label |
| 336 | 0.600 0.600 0.600 scb |
| 337 | 1 1.000 512 -176 608 -176 2 polygon |
| 338 | 1 1.000 512 -96 608 -96 2 polygon |
| 339 | sce |
| 340 | 1.000 0.000 592 -96 generic::arrowhead |
| 341 | -1.000 180.000 592 -176 generic::arrowhead |
| 342 | 1 1.000 592 -176 592 -96 2 polygon |
| 343 | (\265m) {hS} {/Times-RomanISO cf} (0.36) {/Times-Roman cf} 5 16 0.000 0.700 624 |
| 344 | -144 label |
| 345 | 0.600 0.600 0.600 scb |
| 346 | 1 1.000 512 -32 608 -32 2 polygon |
| 347 | 1 1.000 512 48 608 48 2 polygon |
| 348 | sce |
| 349 | 1.000 0.000 592 48 generic::arrowhead |
| 350 | -1.000 180.000 592 -32 generic::arrowhead |
| 351 | 1 1.000 592 -32 592 48 2 polygon |
| 352 | (\265m) {hS} {/Times-RomanISO cf} (0.36) {/Times-Roman cf} 5 16 0.000 0.700 624 |
| 353 | 0 label |
| 354 | 0.600 0.600 0.600 scb |
| 355 | 1 1.000 512 112 608 112 2 polygon |
| 356 | 1 1.000 512 256 608 256 2 polygon |
| 357 | sce |
| 358 | 1.000 0.000 592 256 generic::arrowhead |
| 359 | -1.000 180.000 592 112 generic::arrowhead |
| 360 | 1 1.000 592 112 592 256 2 polygon |
| 361 | (\265m) {hS} {/Times-RomanISO cf} (0.845) {/Times-Roman cf} 5 16 0.000 0.700 |
| 362 | 624 176 label |
| 363 | 0.600 0.600 0.600 scb |
| 364 | 1 1.000 512 320 608 320 2 polygon |
| 365 | 1 1.000 512 464 608 464 2 polygon |
| 366 | sce |
| 367 | 1.000 0.000 592 464 generic::arrowhead |
| 368 | -1.000 180.000 592 320 generic::arrowhead |
| 369 | 1 1.000 592 320 592 464 2 polygon |
| 370 | (\265m) {hS} {/Times-RomanISO cf} (0.845) {/Times-Roman cf} 5 16 0.000 0.700 |
| 371 | 624 384 label |
| 372 | 0.600 0.600 0.600 scb |
| 373 | 1 1.000 512 544 608 544 2 polygon |
| 374 | 1 1.000 512 752 624 752 2 polygon |
| 375 | sce |
| 376 | 1.000 0.000 560 752 generic::arrowhead |
| 377 | -1.000 180.000 560 544 generic::arrowhead |
| 378 | 1 1.000 560 544 560 752 2 polygon |
| 379 | (\265m) {hS} {/Times-RomanISO cf} (1.26) {/Times-Roman cf} 5 16 0.000 0.700 592 |
| 380 | 640 label |
| 381 | 1 1.000 672 -448 672 -384 2 polygon |
| 382 | 1 1.000 672 -496 672 -560 2 polygon |
| 383 | 0 1.000 -400 -400 -400 -336 -240 -336 -240 -400 4 polygon |
| 384 | (field poly) {/Times-Roman cf} 2 21 0.000 0.700 -320 -368 label |
| 385 | 0.600 0.600 0.600 scb |
| 386 | 1 1.000 -696 -448 -1072 -448 2 polygon |
| 387 | 1 1.000 -736 -400 -824 -400 2 polygon |
| 388 | sce |
| 389 | 1 1.000 -752 -448 -752 -512 2 polygon |
| 390 | 1.000 0.000 -752 -448 generic::arrowhead |
| 391 | 1 1.000 -752 -400 -752 -352 2 polygon |
| 392 | -1.000 180.000 -752 -400 generic::arrowhead |
| 393 | 0.600 0.600 0.600 scb |
| 394 | 1 1.000 -768 -288 -872 -288 2 polygon |
| 395 | sce |
| 396 | 1 1.000 -848 -448 -848 -384 2 polygon |
| 397 | 1.000 0.000 -848 -288 generic::arrowhead |
| 398 | -1.000 180.000 -848 -448 generic::arrowhead |
| 399 | (\265m) {/Times-RomanISO cf} {hS} (0.3262) {/Times-Roman cf} 5 17 0.000 0.700 |
| 400 | -760 -432 label |
| 401 | (\265m) {/Times-RomanISO cf} {hS} (0.9361) {/Times-Roman cf} 5 23 0.000 0.700 |
| 402 | -776 -368 label |
| 403 | 0.600 0.600 0.600 scb |
| 404 | 1 1.000 -768 -176 -984 -176 2 polygon |
| 405 | sce |
| 406 | 1 1.000 -848 -352 -848 -288 2 polygon |
| 407 | 1 1.000 -976 -448 -976 -256 2 polygon |
| 408 | 1 1.000 -976 -216 -976 -176 2 polygon |
| 409 | -1.000 180.000 -976 -448 generic::arrowhead |
| 410 | 1.000 0.000 -976 -176 generic::arrowhead |
| 411 | (\265m) {hS} {/Times-RomanISO cf} (1.3761) {/Times-Roman cf} 5 17 0.000 0.700 |
| 412 | -928 -248 label |
| 413 | 0.600 0.600 0.600 scb |
| 414 | 1 1.000 -768 -32 -1000 -32 2 polygon |
| 415 | sce |
| 416 | 1 1.000 -992 -80 -992 -32 2 polygon |
| 417 | 1.000 0.000 -992 -32 generic::arrowhead |
| 418 | (\265m) {hS} {/Times-RomanISO cf} (2.0061) {/Times-Roman cf} 5 17 0.000 0.700 |
| 419 | -936 -112 label |
| 420 | 0.600 0.600 0.600 scb |
| 421 | 1 1.000 -768 112 -1016 112 2 polygon |
| 422 | sce |
| 423 | 1 1.000 -1008 64 -1008 112 2 polygon |
| 424 | 1.000 0.000 -1008 112 generic::arrowhead |
| 425 | (\265m) {/Times-RomanISO cf} {hS} (2.7861) {/Times-Roman cf} 5 17 0.000 0.700 |
| 426 | -952 32 label |
| 427 | 0.600 0.600 0.600 scb |
| 428 | 1 1.000 -768 320 -1032 320 2 polygon |
| 429 | sce |
| 430 | 1 1.000 -1024 256 -1024 320 2 polygon |
| 431 | 1.000 0.000 -1024 320 generic::arrowhead |
| 432 | (\265m) {/Times-RomanISO cf} {hS} (4.0211) {/Times-Roman cf} 5 17 0.000 0.700 |
| 433 | -968 224 label |
| 434 | 0.600 0.600 0.600 scb |
| 435 | 1 1.000 -824 544 -1048 544 2 polygon |
| 436 | sce |
| 437 | 1 1.000 -1040 464 -1040 544 2 polygon |
| 438 | 1.000 0.000 -1040 544 generic::arrowhead |
| 439 | (\265m) {/Times-RomanISO cf} {hS} (5.3711) {/Times-Roman cf} 5 17 0.000 0.700 |
| 440 | -984 432 label |
| 441 | 0.800 0.800 0.800 scb |
| 442 | 1 1.000 -912 928 -1088 928 2 polygon |
| 443 | sce |
| 444 | 1 1.000 -1056 816 -1056 928 2 polygon |
| 445 | 1.000 0.000 -1056 928 generic::arrowhead |
| 446 | (\265m) {/Times-RomanISO cf} {hS} (11.8834) {/Times-Roman cf} 5 17 0.000 0.700 |
| 447 | -1016 784 label |
| 448 | 0.600 0.600 0.600 scb |
| 449 | 3 1.000 -720 -400 -448 -400 2 polygon |
| 450 | 0.000 0.000 1.000 scb |
| 451 | (FOX K=3.9) {/Times-Roman cf} 2 19 0.000 0.700 -536 -432 label |
| 452 | sce |
| 453 | (p-substrate) {/Times-Roman cf} 2 16 0.000 0.700 448 -528 label |
| 454 | 0.000 0.000 1.000 scb |
| 455 | (PSG K=3.9) {/Times-Roman cf} 2 23 0.000 0.700 -600 -344 label |
| 456 | (LINT K=7.3) {/Times-Roman cf} 2 23 0.000 0.700 408 -240 label |
| 457 | 0.600 0.600 0.600 scb |
| 458 | 3 1.000 -480 -288 -760 -288 2 polygon |
| 459 | 0.000 0.000 1.000 scb |
| 460 | (NILD2 K=4.05) {/Times-Roman cf} 2 23 0.000 0.700 -576 -216 label |
| 461 | 0.600 0.600 0.600 scb |
| 462 | 3 1.000 -752 -176 -480 -176 2 polygon |
| 463 | 3 1.000 -752 -32 -480 -32 2 polygon |
| 464 | 3 1.000 -752 112 -480 112 2 polygon |
| 465 | 3 1.000 -752 320 -480 320 2 polygon |
| 466 | 3 1.000 -808 544 -488 544 2 polygon |
| 467 | 0.000 0.000 1.000 scb |
| 468 | (NILD3_C K=3.5) {/Times-Roman cf} 2 19 0.000 0.700 440 -80 label |
| 469 | (NILD4 K=4.2) {/Times-Roman cf} 2 19 0.000 0.700 -576 24 label |
| 470 | (NILD5 K=4.1) {/Times-Roman cf} 2 19 0.000 0.700 -576 200 label |
| 471 | (NILD6 K=4.0) {/Times-Roman cf} 2 19 0.000 0.700 -576 408 label |
| 472 | (NILD3 K=4.5) {/Times-Roman cf} 2 19 0.000 0.700 -576 -120 label |
| 473 | (NILD4_C K=3.5) {/Times-Roman cf} 2 19 0.000 0.700 440 64 label |
| 474 | (TOPOX K=3.9) {/Times-Roman cf} 2 19 0.000 0.700 304 784 label |
| 475 | sce |
| 476 | (0.0) {/Times-Roman cf} 2 23 0.000 0.700 -1088 -448 label |
| 477 | 1 1.000 -432 -224 -432 -272 2 polygon |
| 478 | 1.000 0.000 -432 -224 generic::arrowhead |
| 479 | -1.000 180.000 -432 -176 generic::arrowhead |
| 480 | 1.000 0.000 -448 -32 generic::arrowhead |
| 481 | -1.000 180.000 -448 -96 generic::arrowhead |
| 482 | 1 1.000 -448 -32 -448 -96 2 polygon |
| 483 | 1.000 0.000 -448 112 generic::arrowhead |
| 484 | -1.000 180.000 -448 48 generic::arrowhead |
| 485 | 1 1.000 -448 112 -448 48 2 polygon |
| 486 | 1.000 0.000 -448 320 generic::arrowhead |
| 487 | -1.000 180.000 -448 256 generic::arrowhead |
| 488 | 1 1.000 -448 320 -448 256 2 polygon |
| 489 | 1.000 0.000 -448 544 generic::arrowhead |
| 490 | -1.000 180.000 -448 464 generic::arrowhead |
| 491 | 1 1.000 -448 544 -448 464 2 polygon |
| 492 | 1.000 0.000 -192 928 generic::arrowhead |
| 493 | -1.000 180.000 -192 752 generic::arrowhead |
| 494 | 1 1.000 -192 928 -192 752 2 polygon |
| 495 | 0.600 0.600 0.600 scb |
| 496 | 1 1.000 -384 928 -160 928 2 polygon |
| 497 | sce |
| 498 | (\265m) {hS} {/Times-RomanISO cf} (0.265) {/Times-Roman cf} 5 20 0.000 0.700 |
| 499 | -472 -200 label |
| 500 | 0 1.000 -368 -336 -368 -288 -272 -288 -272 -336 4 polygon |
| 501 | (\265m) {hS} {/Times-RomanISO cf} (0.27) {/Times-Roman cf} 5 20 0.000 0.700 |
| 502 | -432 -64 label |
| 503 | (\265m) {hS} {/Times-RomanISO cf} (0.42) {/Times-Roman cf} 5 20 0.000 0.700 |
| 504 | -432 80 label |
| 505 | (\265m) {hS} {/Times-RomanISO cf} (0.39) {/Times-Roman cf} 5 20 0.000 0.700 |
| 506 | -432 288 label |
| 507 | (\265m) {hS} {/Times-RomanISO cf} (0.505) {/Times-Roman cf} 5 20 0.000 0.700 |
| 508 | -432 504 label |
| 509 | (\265m) {hS} {/Times-RomanISO cf} (5.2523) {/Times-Roman cf} 5 20 0.000 0.700 |
| 510 | -176 824 label |
| 511 | 0.000 0.000 1.000 scb |
| 512 | (IOX K=3.9) {/Times-Roman cf} 2 23 0.000 0.700 272 -312 label |
| 513 | (SPNIT K=7.5) {/Times-Roman cf} 2 23 0.000 0.700 304 -352 label |
| 514 | sce |
| 515 | 0 1.000 320 -432 320 -368 336 -368 336 -432 4 polygon |
| 516 | 1 1.000 336 -432 368 -432 368 -336 64 -336 64 -432 5 polygon |
| 517 | 0 1.000 464 -176 464 -96 496 -96 496 -176 4 polygon |
| 518 | 0 1.000 464 -32 464 48 496 48 496 -32 4 polygon |
| 519 | 0 1.000 -240 -400 -240 -336 -224 -336 -224 -400 4 polygon |
| 520 | 1 1.000 -224 -400 -192 -400 -192 -304 3 polygon |
| 521 | 1 1.000 -400 -400 -416 -400 -416 -336 -400 -336 4 polygon |
| 522 | 1 1.000 -416 -400 -448 -400 -448 -304 3 polygon |
| 523 | 1 1.000 -448 -304 -368 -304 2 polygon |
| 524 | 1 1.000 -192 -304 -272 -304 2 polygon |
| 525 | 1 1.000 64 -432 96 -432 2 polygon |
| 526 | 0 1.000 96 -432 96 -368 112 -368 112 -432 4 polygon |
| 527 | 0.600 0.600 0.600 scb |
| 528 | 1 1.000 384 -336 512 -336 2 polygon |
| 529 | sce |
| 530 | (\265m) {/Times-RomanISO cf} {hS} (0.121) {/Times-Roman cf} 5 20 0.000 0.700 |
| 531 | 400 -352 label |
| 532 | 0.600 0.600 0.600 scb |
| 533 | 1 1.000 448 80 464 80 480 32 3 polygon |
| 534 | 1 1.000 448 -72 464 -72 480 -120 3 polygon |
| 535 | 1 1.000 328 -376 312 -312 280 -312 3 polygon |
| 536 | sce |
| 537 | 1.000 0.000 416 -368 generic::arrowhead |
| 538 | 1 1.000 416 -368 416 -408 2 polygon |
| 539 | -1.000 180.000 416 -336 generic::arrowhead |
| 540 | 1 1.000 416 -336 416 -296 2 polygon |
| 541 | 0.600 0.600 0.600 scb |
| 542 | 3 1.000 -192 -400 -48 -400 2 polygon |
| 543 | sce |
| 544 | (\265m) {/Times-RomanISO cf} {hS} (0.6099) {/Times-Roman cf} 5 23 0.000 0.700 |
| 545 | -64 -352 label |
| 546 | 1 1.000 -128 -336 -128 -288 2 polygon |
| 547 | 1 1.000 -128 -368 -128 -400 2 polygon |
| 548 | -1.000 180.000 -128 -400 generic::arrowhead |
| 549 | 1.000 0.000 -128 -288 generic::arrowhead |
| 550 | 1 1.000 464 -264 464 -224 48 -224 3 polygon |
| 551 | 0.600 0.600 0.600 scb |
| 552 | 1 1.000 -144 -224 -208 -224 2 polygon |
| 553 | sce |
| 554 | -1.000 180.000 -176 -224 generic::arrowhead |
| 555 | 1.000 0.000 -176 -256 generic::arrowhead |
| 556 | 1 1.000 -176 -256 -176 -304 2 polygon |
| 557 | 1 1.000 -176 -224 -176 -184 2 polygon |
| 558 | (\265m) {hS} {/Times-RomanISO cf} (0.075) {/Times-Roman cf} 5 21 0.000 0.700 |
| 559 | -176 -240 label |
| 560 | 1 1.000 464 -264 496 -264 2 polygon |
| 561 | 1 1.000 496 -288 432 -288 2 polygon |
| 562 | 1 1.000 -544 -256 -512 -256 -512 -224 -48 -224 4 polygon |
| 563 | 0.600 0.600 0.600 scb |
| 564 | 3 1.000 -552 -256 -760 -256 2 polygon |
| 565 | 0.000 0.000 1.000 scb |
| 566 | (LINT K=7.3) {/Times-Roman cf} 2 23 0.000 0.700 -600 -272 label |
| 567 | 0.600 0.600 0.600 scb |
| 568 | 1 1.000 -768 -256 -920 -256 2 polygon |
| 569 | sce |
| 570 | 1 1.000 -904 -304 -904 -256 2 polygon |
| 571 | 1.000 0.000 -904 -256 generic::arrowhead |
| 572 | -1.000 180.000 -904 -448 generic::arrowhead |
| 573 | 1 1.000 -904 -448 -904 -344 2 polygon |
| 574 | (\265m) {/Times-RomanISO cf} {hS} (1.0111) {/Times-Roman cf} 5 23 0.000 0.700 |
| 575 | -856 -320 label |
| 576 | 1 1.000 -432 -176 -432 -128 2 polygon |
| 577 | 1 1.000 -368 752 -368 776 -480 776 -480 544 4 polygon |
| 578 | 1 1.000 352 752 352 776 464 776 3 polygon |
| 579 | 1 1.000 464 776 464 544 448 544 3 polygon |
| 580 | 0.600 0.600 0.600 scb |
| 581 | 1 1.000 512 776 624 776 2 polygon |
| 582 | sce |
| 583 | 1 1.000 616 712 616 752 2 polygon |
| 584 | 1 1.000 616 776 616 856 2 polygon |
| 585 | 1.000 0.000 616 752 generic::arrowhead |
| 586 | -1.000 180.000 616 776 generic::arrowhead |
| 587 | (\265m) {hS} {/Times-RomanISO cf} (0.09) {/Times-Roman cf} 5 16 0.000 0.700 640 |
| 588 | 752 label |
| 589 | 0.600 0.600 0.600 scb |
| 590 | 1 1.000 312 792 344 792 368 760 3 polygon |
| 591 | 0.000 0.000 1.000 scb |
| 592 | (TOPNIT K=7.5) {/Times-Roman cf} 2 19 0.000 0.700 -544 560 label |
| 593 | sce |
| 594 | 1 1.000 -552 592 -512 592 -512 848 -368 848 -368 776 5 polygon |
| 595 | 1 1.000 352 776 352 848 488 848 488 600 496 600 5 polygon |
| 596 | 1 1.000 464 544 496 544 2 polygon |
| 597 | 0.600 0.600 0.600 scb |
| 598 | 3 1.000 -552 592 -832 592 2 polygon |
| 599 | sce |
| 600 | 1 1.000 -824 544 -824 472 2 polygon |
| 601 | 1 1.000 -824 592 -824 656 2 polygon |
| 602 | -1.000 180.000 -824 592 generic::arrowhead |
| 603 | 1.000 0.000 -824 544 generic::arrowhead |
| 604 | 1 1.000 -480 544 -464 544 2 polygon |
| 605 | 0.600 0.600 0.600 scb |
| 606 | 1 1.000 -352 848 -264 848 2 polygon |
| 607 | 1 1.000 -360 776 -264 776 2 polygon |
| 608 | sce |
| 609 | 1 1.000 -328 776 -328 848 2 polygon |
| 610 | 1.000 0.000 -328 848 generic::arrowhead |
| 611 | -1.000 180.000 -328 776 generic::arrowhead |
| 612 | (\265m) {hS} {/Times-RomanISO cf} (0.54) {/Times-Roman cf} 5 20 0.000 0.700 |
| 613 | -312 808 label |
| 614 | (\265m) {/Times-RomanISO cf} {hS} (0.3777) {/Times-Roman cf} 5 17 0.000 0.700 |
| 615 | -824 560 label |
| 616 | 1 1.000 -784 784 -784 928 2 polygon |
| 617 | -1.000 180.000 -784 592 generic::arrowhead |
| 618 | 1.000 0.000 -784 928 generic::arrowhead |
| 619 | 1 1.000 -784 592 -784 736 2 polygon |
| 620 | (\265m) {/Times-RomanISO cf} {hS} (6.1346) {/Times-Roman cf} 5 17 0.000 0.700 |
| 621 | -760 752 label |
| 622 | -1.000 180.000 -992 -448 generic::arrowhead |
| 623 | 1 1.000 -992 -448 -992 -120 2 polygon |
| 624 | -1.000 180.000 -1008 -448 generic::arrowhead |
| 625 | 1 1.000 -1008 -448 -1008 24 2 polygon |
| 626 | -1.000 180.000 -1024 -448 generic::arrowhead |
| 627 | 1 1.000 -1024 -448 -1024 216 2 polygon |
| 628 | -1.000 180.000 -1040 -448 generic::arrowhead |
| 629 | 1 1.000 -1040 -448 -1040 416 2 polygon |
| 630 | 1 1.000 -1056 -448 -1056 776 2 polygon |
| 631 | -1.000 180.000 -1056 -448 generic::arrowhead |
| 632 | 0 1.000 -304 480 -304 496 -168 496 -168 480 4 polygon |
| 633 | 0 1.000 -288 496 -288 544 -192 544 -192 496 4 polygon |
| 634 | 0 1.000 -296 288 -296 320 -200 320 -200 288 4 polygon |
| 635 | 0.796 0.953 0.953 scb |
| 636 | 496 1.000 -312 272 -312 288 -176 288 -176 272 4 polygon |
| 637 | sce |
| 638 | 0 1.000 -312 272 -312 288 -176 288 -176 272 4 polygon |
| 639 | (cap2m) {/Times-Roman cf} 2 16 0.000 0.700 -152 480 label |
| 640 | (via4) {/Times-Roman cf} 2 21 0.000 0.700 -240 520 label |
| 641 | (via3) {/Times-Roman cf} 2 21 0.000 0.700 -248 304 label |
| 642 | (capm) {/Times-Roman cf} 2 16 0.000 0.700 -160 272 label |
| 643 | 0.600 0.600 0.600 scb |
| 644 | 1 1.000 -432 -336 -520 -336 2 polygon |
| 645 | sce |
| 646 | -1.000 180.000 -496 -288 generic::arrowhead |
| 647 | 1 1.000 -496 -240 -496 -288 2 polygon |
| 648 | 1.000 0.000 -496 -336 generic::arrowhead |
| 649 | 1 1.000 -496 -336 -496 -384 2 polygon |
| 650 | (\265m) {hS} {/Times-RomanISO cf} (0.4299) {/Times-Roman cf} 5 21 0.000 0.700 |
| 651 | -520 -312 label |
| 652 | 0.400 0.400 0.400 scb |
| 653 | 1 1.000 -448 -416 -448 -592 2 polygon |
| 654 | 1 1.000 -416 -416 -416 -624 2 polygon |
| 655 | 1 1.000 -400 -416 -400 -624 2 polygon |
| 656 | sce |
| 657 | 1 1.000 -560 672 -512 672 2 polygon |
| 658 | 1 1.000 -480 672 -384 672 2 polygon |
| 659 | 1 1.000 -528 624 -480 624 2 polygon |
| 660 | 1 1.000 -464 624 -384 624 2 polygon |
| 661 | 1.000 90.000 -512 672 generic::arrowhead |
| 662 | 1.000 90.000 -480 624 generic::arrowhead |
| 663 | -1.000 270.000 -464 624 generic::arrowhead |
| 664 | -1.000 270.000 -480 672 generic::arrowhead |
| 665 | -1.000 270.000 -416 -576 generic::arrowhead |
| 666 | 1.000 90.000 -448 -576 generic::arrowhead |
| 667 | 1.000 90.000 -416 -608 generic::arrowhead |
| 668 | -1.000 270.000 -400 -608 generic::arrowhead |
| 669 | 1 1.000 -480 -608 -416 -608 2 polygon |
| 670 | 1 1.000 -400 -608 -320 -608 2 polygon |
| 671 | 1 1.000 -416 -576 -320 -576 2 polygon |
| 672 | 1 1.000 -448 -576 -512 -576 2 polygon |
| 673 | 1 1.000 544 0 496 0 2 polygon |
| 674 | 1 1.000 464 0 384 0 2 polygon |
| 675 | 1.000 90.000 464 0 generic::arrowhead |
| 676 | -1.000 270.000 496 0 generic::arrowhead |
| 677 | (\265m) {/Times-RomanISO cf} {hS} (0.006) {/Times-Roman cf} 5 20 0.000 0.700 |
| 678 | -296 -608 label |
| 679 | (\265m) {/Times-RomanISO cf} {hS} (0.0431) {/Times-Roman cf} 5 20 0.000 0.700 |
| 680 | -296 -576 label |
| 681 | (\265m) {/Times-RomanISO cf} {hS} (0.4223) {/Times-Roman cf} 5 20 0.000 0.700 |
| 682 | -376 672 label |
| 683 | (\265m) {/Times-RomanISO cf} {hS} (0.070) {/Times-Roman cf} 5 20 0.000 0.700 |
| 684 | -376 624 label |
| 685 | (\265m) {/Times-RomanISO cf} {hS} (0.030) {/Times-Roman cf} 5 23 0.000 0.700 |
| 686 | 376 0 label |
| 687 | 1 1.000 464 -144 384 -144 2 polygon |
| 688 | 1.000 90.000 464 -144 generic::arrowhead |
| 689 | (\265m) {/Times-RomanISO cf} {hS} (0.030) {/Times-Roman cf} 5 23 360.000 0.700 |
| 690 | 376 -144 label |
| 691 | 1 1.000 544 -144 496 -144 2 polygon |
| 692 | -1.000 270.000 496 -144 generic::arrowhead |
| 693 | 0.600 0.600 0.600 scb |
| 694 | 1 1.000 432 -248 432 -192 2 polygon |
| 695 | 1 1.000 464 -216 464 -192 2 polygon |
| 696 | sce |
| 697 | 1.000 90.000 432 -200 generic::arrowhead |
| 698 | -1.000 270.000 464 -200 generic::arrowhead |
| 699 | 1 1.000 544 -200 464 -200 2 polygon |
| 700 | 1 1.000 432 -200 384 -200 2 polygon |
| 701 | (\265m) {/Times-RomanISO cf} {hS} (0.075) {/Times-Roman cf} 5 23 0.000 0.700 |
| 702 | 368 -200 label |
| 703 | pgsave restore showpage |
| 704 | |
| 705 | %%Page: captables 2 |
| 706 | %%PageOrientation: Portrait |
| 707 | %%PageBoundingBox: 0 0 612 792 |
| 708 | /pgsave save def bop |
| 709 | % 32.00 8.00 gridspace |
| 710 | 1.0000 inchscale |
| 711 | 2.6000 setlinewidth 861 1371 translate |
| 712 | |
| 713 | 0.647 0.165 0.165 scb |
| 714 | (SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1056 |
| 715 | 1280 label |
| 716 | sce |
| 717 | 1 1.000 -1056 1264 768 1264 2 polygon |
| 718 | 0.000 0.000 1.000 scb |
| 719 | (n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1056 436 label |
| 720 | (substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1056 388 label |
| 721 | (diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1056 484 label |
| 722 | (poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1054 580 label |
| 723 | (li) {/Times-Roman cf} 2 28 0.000 1.000 -1056 676 label |
| 724 | (metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1056 772 label |
| 725 | (metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1056 868 label |
| 726 | (metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1056 964 label |
| 727 | (metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1056 1060 label |
| 728 | (poly) {/Times-Roman cf} 2 19 0.000 1.000 224 1136 label |
| 729 | (li) {/Times-Roman cf} 2 19 0.000 1.000 32 1136 label |
| 730 | (metal1) {/Times-Roman cf} 2 19 0.000 1.000 -80 1136 label |
| 731 | (metal2) {/Times-Roman cf} 2 19 0.000 1.000 -240 1136 label |
| 732 | (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -400 1136 label |
| 733 | (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -560 1136 label |
| 734 | (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -720 1136 label |
| 735 | sce |
| 736 | 1 1.000 304 432 -864 432 2 polygon |
| 737 | 1 1.000 304 528 -864 528 2 polygon |
| 738 | 1 1.000 128 624 -864 624 2 polygon |
| 739 | 1 1.000 -48 720 -864 720 2 polygon |
| 740 | 1 1.000 -208 816 -864 816 2 polygon |
| 741 | 1 1.000 -368 912 -864 912 2 polygon |
| 742 | 1 1.000 -528 1008 -864 1008 2 polygon |
| 743 | 1 1.000 -688 1104 -864 1104 2 polygon |
| 744 | 0.180 0.545 0.341 scb |
| 745 | (Inter-layer distances \(microns\)) {/Times-Roman cf} 2 16 0.000 1.000 -1056 |
| 746 | 1216 label |
| 747 | sce |
| 748 | (0.3262) {/Times-Roman cf} 2 21 0.000 1.000 224 480 label |
| 749 | (0.9361) {/Times-Roman cf} 2 21 0.000 1.000 48 480 label |
| 750 | (1.3761) {/Times-Roman cf} 2 21 0.000 1.000 -128 480 label |
| 751 | (2.0061) {/Times-Roman cf} 2 21 0.000 1.000 -288 480 label |
| 752 | (4.0211) {/Times-Roman cf} 2 21 0.000 1.000 -608 480 label |
| 753 | (2.7861) {/Times-Roman cf} 2 21 0.000 1.000 -448 480 label |
| 754 | (5.3711) {/Times-Roman cf} 2 21 0.000 1.000 -768 480 label |
| 755 | (0.4299) {/Times-Roman cf} 2 21 0.000 1.000 48 576 label |
| 756 | (0.27) {/Times-Roman cf} 2 21 0.000 1.000 -288 768 label |
| 757 | (0.42) {/Times-Roman cf} 2 21 0.000 1.000 -448 864 label |
| 758 | (0.39) {/Times-Roman cf} 2 21 0.000 1.000 -608 960 label |
| 759 | (0.505) {/Times-Roman cf} 2 21 0.000 1.000 -768 1056 label |
| 760 | 1 1.000 -864 1104 -864 432 2 polygon |
| 761 | 1 1.000 304 528 304 432 2 polygon |
| 762 | 1 1.000 128 624 128 432 2 polygon |
| 763 | 1 1.000 -48 720 -48 432 2 polygon |
| 764 | 1 1.000 -208 816 -208 432 2 polygon |
| 765 | 1 1.000 -368 912 -368 432 2 polygon |
| 766 | 1 1.000 -528 1008 -528 432 2 polygon |
| 767 | 1 1.000 -688 1104 -688 432 2 polygon |
| 768 | (1.74) {/Times-Roman cf} 2 21 0.000 1.000 -768 960 label |
| 769 | (3.005) {/Times-Roman cf} 2 21 0.000 1.000 -768 864 label |
| 770 | (3.635) {/Times-Roman cf} 2 21 0.000 1.000 -768 768 label |
| 771 | (4.335) {/Times-Roman cf} 2 21 0.000 1.000 -768 672 label |
| 772 | (4.8649) {/Times-Roman cf} 2 21 0.000 1.000 -768 576 label |
| 773 | (1.655) {/Times-Roman cf} 2 21 0.000 1.000 -608 864 label |
| 774 | (2.285) {/Times-Roman cf} 2 21 0.000 1.000 -608 768 label |
| 775 | (2.985) {/Times-Roman cf} 2 21 0.000 1.000 -608 672 label |
| 776 | (3.5149) {/Times-Roman cf} 2 21 0.000 1.000 -608 576 label |
| 777 | (1.05) {/Times-Roman cf} 2 21 0.000 1.000 -448 768 label |
| 778 | (1.75) {/Times-Roman cf} 2 21 0.000 1.000 -448 672 label |
| 779 | (2.2799) {/Times-Roman cf} 2 21 0.000 1.000 -448 576 label |
| 780 | (0.97) {/Times-Roman cf} 2 21 0.000 1.000 -288 672 label |
| 781 | (1.4999) {/Times-Roman cf} 2 21 0.000 1.000 -288 576 label |
| 782 | (0.34) {/Times-Roman cf} 2 21 0.000 1.000 -128 672 label |
| 783 | (0.8699) {/Times-Roman cf} 2 21 0.000 1.000 -128 576 label |
| 784 | 0.180 0.545 0.341 scb |
| 785 | (Inter-layer capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1056 240 label |
| 786 | sce |
| 787 | (\)) {ns} (2) {Ss} (\265m) {/Times-RomanISO cf} (\(final values in aF/) |
| 788 | {/Times-Roman cf} 8 16 0.000 1.000 -640 240 label |
| 789 | (70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -784 48 label |
| 790 | (20.4659) {/Times-Roman cf} 2 16 0.000 1.000 -784 -48 label |
| 791 | (93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -528 -48 label |
| 792 | (22.0677) {/Times-Roman cf} 2 16 0.000 1.000 -544 -144 label |
| 793 | (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -304 -144 label |
| 794 | (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -80 -240 label |
| 795 | (92.872) {/Times-Roman cf} 2 16 0.000 1.000 432 -432 label |
| 796 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 416 -528 label |
| 797 | (105.8571) {/Times-Roman cf} 2 16 0.000 1.000 672 -528 label |
| 798 | (11.9856) {/Times-Roman cf} 2 16 0.000 1.000 -784 -144 label |
| 799 | (10.0109) {/Times-Roman cf} 2 16 0.000 1.000 -784 -240 label |
| 800 | (16.1884) {/Times-Roman cf} 2 16 0.000 1.000 -544 -240 label |
| 801 | (36.0337) {/Times-Roman cf} 2 16 0.000 1.000 -304 -240 label |
| 802 | (8.5302) {/Times-Roman cf} 2 16 0.000 1.000 -768 -336 label |
| 803 | (12.640) {/Times-Roman cf} 2 16 0.000 1.000 -544 -336 label |
| 804 | (22.177) {/Times-Roman cf} 2 16 0.000 1.000 -304 -336 label |
| 805 | (7.6460) {/Times-Roman cf} 2 16 0.000 1.000 -768 -432 label |
| 806 | (10.791) {/Times-Roman cf} 2 16 0.000 1.000 -544 -432 label |
| 807 | (17.051) {/Times-Roman cf} 2 16 0.000 1.000 -304 -432 label |
| 808 | (6.7968) {/Times-Roman cf} 2 16 0.000 1.000 -768 -528 label |
| 809 | (9.1734) {/Times-Roman cf} 2 16 0.000 1.000 -528 -528 label |
| 810 | (13.335) {/Times-Roman cf} 2 16 0.000 1.000 -304 -528 label |
| 811 | (18.514) {/Times-Roman cf} 2 16 0.000 1.000 -64 -528 label |
| 812 | (26.009) {/Times-Roman cf} 2 16 0.000 1.000 176 -528 label |
| 813 | (45.235) {/Times-Roman cf} 2 16 0.000 1.000 176 -432 label |
| 814 | (26.544) {/Times-Roman cf} 2 16 0.000 1.000 -64 -432 label |
| 815 | (41.466) {/Times-Roman cf} 2 16 0.000 1.000 -64 -336 label |
| 816 | (116.96) {/Times-Roman cf} 2 16 0.000 1.000 176 -336 label |
| 817 | 0.000 0.000 1.000 scb |
| 818 | (n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -556 label |
| 819 | (substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -604 label |
| 820 | (diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -508 label |
| 821 | (poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1038 -412 label |
| 822 | (li) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -316 label |
| 823 | (metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -220 label |
| 824 | (metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -124 label |
| 825 | (metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -28 label |
| 826 | (metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1040 68 label |
| 827 | (poly) {/Times-Roman cf} 2 19 0.000 1.000 800 144 label |
| 828 | (li) {/Times-Roman cf} 2 19 0.000 1.000 496 144 label |
| 829 | (metal1) {/Times-Roman cf} 2 19 0.000 1.000 320 144 label |
| 830 | (metal2) {/Times-Roman cf} 2 19 0.000 1.000 80 144 label |
| 831 | (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -160 144 label |
| 832 | (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -416 144 label |
| 833 | (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -688 144 label |
| 834 | sce |
| 835 | 1 1.000 864 -560 -848 -560 2 polygon |
| 836 | 1 1.000 864 -464 -848 -464 2 polygon |
| 837 | 1 1.000 624 -368 -848 -368 2 polygon |
| 838 | 1 1.000 368 -272 -848 -272 2 polygon |
| 839 | 1 1.000 128 -176 -848 -176 2 polygon |
| 840 | 1 1.000 -112 -80 -848 -80 2 polygon |
| 841 | 1 1.000 -352 16 -848 16 2 polygon |
| 842 | 1 1.000 -592 112 -848 112 2 polygon |
| 843 | 1 1.000 -848 112 -848 -560 2 polygon |
| 844 | 1 1.000 864 -464 864 -560 2 polygon |
| 845 | 1 1.000 624 -368 624 -560 2 polygon |
| 846 | 1 1.000 368 -272 368 -560 2 polygon |
| 847 | 1 1.000 128 -176 128 -560 2 polygon |
| 848 | 1 1.000 -112 -80 -112 -560 2 polygon |
| 849 | 1 1.000 -352 16 -352 -560 2 polygon |
| 850 | 1 1.000 -592 112 -592 -560 2 polygon |
| 851 | {ns} (\2616) {/Times-Roman cf} {Ss} (, so divide by 1.0e) {ns} (2) {Ss} (\265m) |
| 852 | {/Times-RomanISO cf} (Note: LEF CPERSQDIST is in pF/) {/Times-Roman cf} 12 16 |
| 853 | 0.000 1.000 -128 240 label |
| 854 | 0.000 0.000 1.000 scb |
| 855 | (n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1532 label |
| 856 | (substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1580 label |
| 857 | (diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1484 label |
| 858 | (poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1038 -1388 label |
| 859 | (li) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1292 label |
| 860 | (metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1196 label |
| 861 | (metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1100 label |
| 862 | (metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1004 label |
| 863 | (metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -908 label |
| 864 | (poly) {/Times-Roman cf} 2 19 0.000 1.000 800 -832 label |
| 865 | (li) {/Times-Roman cf} 2 19 0.000 1.000 496 -832 label |
| 866 | (metal1) {/Times-Roman cf} 2 19 0.000 1.000 320 -832 label |
| 867 | (metal2) {/Times-Roman cf} 2 19 0.000 1.000 80 -832 label |
| 868 | (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -160 -832 label |
| 869 | (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -416 -832 label |
| 870 | (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -688 -832 label |
| 871 | sce |
| 872 | 1 1.000 864 -1536 -848 -1536 2 polygon |
| 873 | 1 1.000 864 -1440 -848 -1440 2 polygon |
| 874 | 1 1.000 624 -1344 -848 -1344 2 polygon |
| 875 | 1 1.000 368 -1248 -848 -1248 2 polygon |
| 876 | 1 1.000 128 -1152 -848 -1152 2 polygon |
| 877 | 1 1.000 -112 -1056 -848 -1056 2 polygon |
| 878 | 1 1.000 -352 -960 -848 -960 2 polygon |
| 879 | 1 1.000 -592 -864 -848 -864 2 polygon |
| 880 | 1 1.000 -848 -864 -848 -1536 2 polygon |
| 881 | 1 1.000 864 -1440 864 -1536 2 polygon |
| 882 | 1 1.000 624 -1344 624 -1536 2 polygon |
| 883 | 1 1.000 368 -1248 368 -1536 2 polygon |
| 884 | 1 1.000 128 -1152 128 -1536 2 polygon |
| 885 | 1 1.000 -112 -1056 -112 -1536 2 polygon |
| 886 | 1 1.000 -352 -960 -352 -1536 2 polygon |
| 887 | 1 1.000 -592 -864 -592 -1536 2 polygon |
| 888 | 0.180 0.545 0.341 scb |
| 889 | (Fringe capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1040 -720 label |
| 890 | sce |
| 891 | (\265m\)) {/Times-RomanISO cf} (\(values in aF/) {/Times-Roman cf} 4 16 0.000 |
| 892 | 1.000 -624 -720 label |
| 893 | {ns} (\2616) {/Times-Roman cf} {Ss} (\265m, so divide by 1.0e) |
| 894 | {/Times-RomanISO cf} (Note: LEF EDGECAPACITANCE is in pF/) {/Times-Roman cf} 8 |
| 895 | 16 0.000 1.000 -112 -720 label |
| 896 | (102.25) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1504 label |
| 897 | (99.483) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1504 label |
| 898 | (116.62) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1504 label |
| 899 | (94.529) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1504 label |
| 900 | (106.39) {/Times-Roman cf} 2 16 0.000 1.000 192 -1504 label |
| 901 | (72.763) {/Times-Roman cf} 2 16 0.000 1.000 432 -1504 label |
| 902 | (141.68) {/Times-Roman cf} 2 16 0.000 1.000 688 -1504 label |
| 903 | (109.36) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1408 label |
| 904 | (109.04) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1408 label |
| 905 | (135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1408 label |
| 906 | (115.79) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1408 label |
| 907 | (152.95) {/Times-Roman cf} 2 16 0.000 1.000 192 -1408 label |
| 908 | (120.86) {/Times-Roman cf} 2 16 0.000 1.000 432 -1408 label |
| 909 | (113.11) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1312 label |
| 910 | (114.74) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1312 label |
| 911 | (150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1312 label |
| 912 | (137.79) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1312 label |
| 913 | (249.97) {/Times-Roman cf} 2 16 0.000 1.000 192 -1312 label |
| 914 | (119.67) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1216 label |
| 915 | (125.83) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1216 label |
| 916 | (191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1216 label |
| 917 | (273.21) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1216 label |
| 918 | (129.16) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1120 label |
| 919 | (144.86) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1120 label |
| 920 | (341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1120 label |
| 921 | (168.89) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1024 label |
| 922 | (351.52) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1024 label |
| 923 | (378.01) {/Times-Roman cf} 2 16 0.000 1.000 -784 -928 label |
| 924 | 0.180 0.545 0.341 scb |
| 925 | (Sidewall capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1040 -1696 label |
| 926 | sce |
| 927 | (\265m\)) {/Times-RomanISO cf} (\(values in aF/) {/Times-Roman cf} 4 16 0.000 |
| 928 | 1.000 -624 -1696 label |
| 929 | 0.000 0.000 1.000 scb |
| 930 | (poly) {/Times-Roman cf} 2 19 0.000 1.000 784 -1776 label |
| 931 | (li) {/Times-Roman cf} 2 19 0.000 1.000 480 -1776 label |
| 932 | (metal1) {/Times-Roman cf} 2 19 0.000 1.000 304 -1776 label |
| 933 | (metal2) {/Times-Roman cf} 2 19 0.000 1.000 64 -1776 label |
| 934 | (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -176 -1776 label |
| 935 | (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -432 -1776 label |
| 936 | (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -704 -1776 label |
| 937 | sce |
| 938 | 1 1.000 864 -1824 -848 -1824 2 polygon |
| 939 | 1 1.000 -848 -1920 -848 -1824 2 polygon |
| 940 | 1 1.000 864 -1920 864 -1824 2 polygon |
| 941 | 1 1.000 624 -1920 624 -1824 2 polygon |
| 942 | 1 1.000 368 -1920 368 -1824 2 polygon |
| 943 | 1 1.000 128 -1920 128 -1824 2 polygon |
| 944 | 1 1.000 -112 -1920 -112 -1824 2 polygon |
| 945 | 1 1.000 -352 -1920 -352 -1824 2 polygon |
| 946 | 1 1.000 -592 -1920 -592 -1824 2 polygon |
| 947 | 1 1.000 864 -1920 -848 -1920 2 polygon |
| 948 | (77.267) {/Times-Roman cf} 2 21 0.000 1.000 -736 -1872 label |
| 949 | (29.9265) {/Times-Roman cf} 2 21 0.000 1.000 -480 -1872 label |
| 950 | (30.675) {/Times-Roman cf} 2 21 0.000 1.000 -240 -1872 label |
| 951 | (13.387) {/Times-Roman cf} 2 21 0.000 1.000 0 -1872 label |
| 952 | (14.343) {/Times-Roman cf} 2 21 0.000 1.000 240 -1872 label |
| 953 | (3.937) {/Times-Roman cf} 2 21 0.000 1.000 496 -1872 label |
| 954 | (6.710) {/Times-Roman cf} 2 21 0.000 1.000 736 -1872 label |
| 955 | 0.820 0.039 0.859 scb |
| 956 | 0 1.000 112 -1936 112 -256 384 -256 384 -1936 4 polygon |
| 957 | pgsave restore showpage |
| 958 | |
| 959 | %%Page: worksheet1 3 |
| 960 | %%PageOrientation: Portrait |
| 961 | %%PageBoundingBox: 0 0 612 792 |
| 962 | /pgsave save def bop |
| 963 | % 32.00 8.00 gridspace |
| 964 | 0.6922 inchscale |
| 965 | 2.6000 setlinewidth 822 1572 translate |
| 966 | |
| 967 | 0.180 0.545 0.341 scb |
| 968 | (Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072 |
| 969 | 1024 label |
| 970 | sce |
| 971 | (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 912 label |
| 972 | (0.505) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 973 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 848 label |
| 974 | (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 784 label |
| 975 | (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 976 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 720 label |
| 977 | (0.39) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 978 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 672 label |
| 979 | (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 608 label |
| 980 | (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 981 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 544 label |
| 982 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 983 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 496 label |
| 984 | (0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 985 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 448 label |
| 986 | (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 384 label |
| 987 | (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 988 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 320 label |
| 989 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 990 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 272 label |
| 991 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 992 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 224 label |
| 993 | (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 994 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 176 label |
| 995 | (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 112 label |
| 996 | (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 997 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 48 label |
| 998 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 999 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 0 label |
| 1000 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1001 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -48 label |
| 1002 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1003 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -96 label |
| 1004 | (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1005 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -144 label |
| 1006 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1007 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -192 label |
| 1008 | (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -256 label |
| 1009 | (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1010 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 -320 label |
| 1011 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1012 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 -368 label |
| 1013 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1014 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -416 label |
| 1015 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1016 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -464 label |
| 1017 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1018 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -512 label |
| 1019 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1020 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -560 label |
| 1021 | (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1022 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -992 -608 label |
| 1023 | (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -736 label |
| 1024 | (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1025 | (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 -800 label |
| 1026 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1027 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 -848 label |
| 1028 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1029 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -896 label |
| 1030 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1031 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -944 label |
| 1032 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1033 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -992 label |
| 1034 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1035 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -1040 label |
| 1036 | (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1037 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -992 -1088 label |
| 1038 | (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 784 label |
| 1039 | (0.39) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1040 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 720 label |
| 1041 | (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 608 label |
| 1042 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1043 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 544 label |
| 1044 | (0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1045 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 496 label |
| 1046 | (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 384 label |
| 1047 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1048 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 320 label |
| 1049 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1050 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 272 label |
| 1051 | (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1052 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 224 label |
| 1053 | (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 112 label |
| 1054 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1055 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 48 label |
| 1056 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1057 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 0 label |
| 1058 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1059 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -48 label |
| 1060 | (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1061 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -96 label |
| 1062 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1063 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -144 label |
| 1064 | (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -256 label |
| 1065 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1066 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 -320 label |
| 1067 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1068 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 -368 label |
| 1069 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1070 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -416 label |
| 1071 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1072 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -464 label |
| 1073 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1074 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -512 label |
| 1075 | (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -736 label |
| 1076 | (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1077 | (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 -800 label |
| 1078 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1079 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 -848 label |
| 1080 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1081 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -896 label |
| 1082 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1083 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -944 label |
| 1084 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1085 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -992 label |
| 1086 | (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1087 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -1040 label |
| 1088 | (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 608 label |
| 1089 | (0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1090 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 544 label |
| 1091 | (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 384 label |
| 1092 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1093 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 320 label |
| 1094 | (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1095 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 272 label |
| 1096 | (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 112 label |
| 1097 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1098 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 48 label |
| 1099 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1100 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 0 label |
| 1101 | (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1102 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -48 label |
| 1103 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1104 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -96 label |
| 1105 | (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -256 label |
| 1106 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1107 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 -320 label |
| 1108 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1109 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -368 label |
| 1110 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1111 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -416 label |
| 1112 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1113 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -464 label |
| 1114 | (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -736 label |
| 1115 | (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1116 | (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 -800 label |
| 1117 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1118 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -848 label |
| 1119 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1120 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -896 label |
| 1121 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1122 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -944 label |
| 1123 | (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1124 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -992 label |
| 1125 | (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 240 384 label |
| 1126 | (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1127 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 320 label |
| 1128 | (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 240 112 label |
| 1129 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1130 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 48 label |
| 1131 | (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1132 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 0 label |
| 1133 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1134 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -48 label |
| 1135 | (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 256 -256 label |
| 1136 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1137 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -320 label |
| 1138 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1139 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -368 label |
| 1140 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1141 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -416 label |
| 1142 | (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 256 -736 label |
| 1143 | (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1144 | (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -800 label |
| 1145 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1146 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -848 label |
| 1147 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1148 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -896 label |
| 1149 | (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1150 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -944 label |
| 1151 | (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 672 112 label |
| 1152 | (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1153 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 48 label |
| 1154 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1155 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 0 label |
| 1156 | (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 688 -256 label |
| 1157 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1158 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -320 label |
| 1159 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1160 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -368 label |
| 1161 | (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 688 -736 label |
| 1162 | (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1163 | (4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -800 label |
| 1164 | (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1165 | (7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -848 label |
| 1166 | (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1167 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -896 label |
| 1168 | (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -256 label |
| 1169 | (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -736 label |
| 1170 | (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1171 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 1168 -800 label |
| 1172 | (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1456 -736 label |
| 1173 | (0.3262) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1174 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 1520 -800 label |
| 1175 | (\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464 |
| 1176 | 1024 label |
| 1177 | 0.647 0.165 0.165 scb |
| 1178 | (SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1072 |
| 1179 | 1080 label |
| 1180 | sce |
| 1181 | 1 1.000 -1080 1064 1784 1064 2 polygon |
| 1182 | ( \(used in magic tech file extract section\)) {ns} (2) {Ss} (\265m) |
| 1183 | {/Times-RomanISO cf} (8.854 to get result in aF/) {/Times-Roman cf} ( = ) {ns} |
| 1184 | (0) {ss} (e) {/Symbol cf} (Use ) {/Times-Roman cf} 16 16 0.000 1.000 -1024 |
| 1185 | -1192 label |
| 1186 | (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1187 | (7.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -656 label |
| 1188 | (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1189 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -560 label |
| 1190 | (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1191 | (7.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -608 label |
| 1192 | (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1193 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -512 label |
| 1194 | (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1195 | (7.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -560 label |
| 1196 | (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1197 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -464 label |
| 1198 | (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1199 | (7.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -512 label |
| 1200 | (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1201 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -416 label |
| 1202 | (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1203 | (7.5) {/Times-Roman cf} 13 16 0.000 1.000 752 -464 label |
| 1204 | (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1205 | (3.9) {/Times-Roman cf} 13 16 0.000 1.000 1104 -320 label |
| 1206 | (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| 1207 | (7.5) {/Times-Roman cf} 13 16 0.000 1.000 1104 -368 label |
| 1208 | pgsave restore showpage |
| 1209 | |
| 1210 | %%Page: worksheet2 4 |
| 1211 | %%PageOrientation: Portrait |
| 1212 | %%PageBoundingBox: 0 0 612 792 |
| 1213 | /pgsave save def bop |
| 1214 | % 32.00 8.00 gridspace |
| 1215 | 0.6922 inchscale |
| 1216 | 2.6000 setlinewidth 814 1600 translate |
| 1217 | |
| 1218 | 0.180 0.545 0.341 scb |
| 1219 | (Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072 |
| 1220 | 992 label |
| 1221 | sce |
| 1222 | (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 880 label |
| 1223 | (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 752 label |
| 1224 | (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 576 label |
| 1225 | (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 352 label |
| 1226 | (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -992 144 label |
| 1227 | (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 80 label |
| 1228 | (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -288 label |
| 1229 | (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -768 label |
| 1230 | (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 752 label |
| 1231 | (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 576 label |
| 1232 | (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 352 label |
| 1233 | (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 80 label |
| 1234 | (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -288 label |
| 1235 | (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -768 label |
| 1236 | (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 576 label |
| 1237 | (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 352 label |
| 1238 | (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 80 label |
| 1239 | (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -288 label |
| 1240 | (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -768 label |
| 1241 | (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 256 352 label |
| 1242 | (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 256 80 label |
| 1243 | (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 272 -288 label |
| 1244 | (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 272 -768 label |
| 1245 | (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 688 80 label |
| 1246 | (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 704 -288 label |
| 1247 | (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 704 -768 label |
| 1248 | (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -288 label |
| 1249 | (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -768 label |
| 1250 | (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1464 -768 label |
| 1251 | (\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464 |
| 1252 | 992 label |
| 1253 | (70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -992 816 label |
| 1254 | (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 688 label |
| 1255 | (93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -992 640 label |
| 1256 | (93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -544 688 label |
| 1257 | (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 512 label |
| 1258 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 464 label |
| 1259 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 512 label |
| 1260 | (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -992 416 label |
| 1261 | (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -544 464 label |
| 1262 | (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -96 512 label |
| 1263 | (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 288 label |
| 1264 | (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 16 label |
| 1265 | (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -352 label |
| 1266 | (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -832 label |
| 1267 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 240 label |
| 1268 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -32 label |
| 1269 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -400 label |
| 1270 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -880 label |
| 1271 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -832 label |
| 1272 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -352 label |
| 1273 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 16 label |
| 1274 | (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 288 label |
| 1275 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 192 label |
| 1276 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 240 label |
| 1277 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 288 label |
| 1278 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -80 label |
| 1279 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -32 label |
| 1280 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 16 label |
| 1281 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -448 label |
| 1282 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -400 label |
| 1283 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -352 label |
| 1284 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -928 label |
| 1285 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -880 label |
| 1286 | (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -832 label |
| 1287 | (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -544 192 label |
| 1288 | (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -96 240 label |
| 1289 | (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 336 288 label |
| 1290 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -128 label |
| 1291 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -80 label |
| 1292 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -32 label |
| 1293 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 16 label |
| 1294 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -496 label |
| 1295 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -448 label |
| 1296 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -400 label |
| 1297 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -352 label |
| 1298 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -976 label |
| 1299 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -928 label |
| 1300 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -880 label |
| 1301 | (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -832 label |
| 1302 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -224 label |
| 1303 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -176 label |
| 1304 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -128 label |
| 1305 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -80 label |
| 1306 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -32 label |
| 1307 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -592 label |
| 1308 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -544 label |
| 1309 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -496 label |
| 1310 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -448 label |
| 1311 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -400 label |
| 1312 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1072 label |
| 1313 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1024 label |
| 1314 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -976 label |
| 1315 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -928 label |
| 1316 | (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -880 label |
| 1317 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1120 label |
| 1318 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1072 label |
| 1319 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -96 -1024 label |
| 1320 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 336 -976 label |
| 1321 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 768 -928 label |
| 1322 | (\) to get final interlayer capacitor value.) {ns} (N) {ss} ( + ... + 1/C) {ns} |
| 1323 | (1) {ss} ( + 1/C) {ns} (0) {ss} ( = 1/C) {ns} (tot) {ss} |
| 1324 | (Add these in parallel combination \(1/C) {/Times-Roman cf} 18 16 0.000 1.000 |
| 1325 | -992 -1216 label |
| 1326 | (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 1184 -832 label |
| 1327 | (105.8571) {/Times-Roman cf} 2 16 0.000 1.000 1520 -832 label |
| 1328 | 1 1.000 -1072 1032 1792 1032 2 polygon |
| 1329 | 0.647 0.165 0.165 scb |
| 1330 | (SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1064 |
| 1331 | 1048 label |
| 1332 | sce |
| 1333 | (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -992 -640 label |
| 1334 | (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -992 -688 label |
| 1335 | (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -544 -592 label |
| 1336 | (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -544 -640 label |
| 1337 | (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -96 -544 label |
| 1338 | (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -96 -592 label |
| 1339 | (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 336 -496 label |
| 1340 | (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 336 -544 label |
| 1341 | (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 768 -448 label |
| 1342 | (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 768 -496 label |
| 1343 | (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 1184 -352 label |
| 1344 | (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 1184 -400 label |
| 1345 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1024 label |
| 1346 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -976 label |
| 1347 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -928 label |
| 1348 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -880 label |
| 1349 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -832 label |
| 1350 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -544 label |
| 1351 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -496 label |
| 1352 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -448 label |
| 1353 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -400 label |
| 1354 | (98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -352 label |
| 1355 | (135.320) {/Times-Roman cf} 2 16 0.000 1.000 -992 -176 label |
| 1356 | (135.320) {/Times-Roman cf} 2 16 0.000 1.000 -544 -128 label |
| 1357 | (135.320) {/Times-Roman cf} 2 16 0.000 1.000 -96 -80 label |
| 1358 | (135.320) {/Times-Roman cf} 2 16 0.000 1.000 336 -32 label |
| 1359 | (135.320) {/Times-Roman cf} 2 16 0.000 1.000 768 16 label |
| 1360 | pgsave restore showpage |
| 1361 | |
| 1362 | %%Page: worksheet3 5 |
| 1363 | %%PageOrientation: Portrait |
| 1364 | %%PageBoundingBox: 0 0 612 792 |
| 1365 | /pgsave save def bop |
| 1366 | % 32.00 8.00 gridspace |
| 1367 | 0.6922 inchscale |
| 1368 | 2.6000 setlinewidth 1277 1656 translate |
| 1369 | |
| 1370 | 0.647 0.165 0.165 scb |
| 1371 | (Interlayer \(fringe\) capacitance worksheet:) {/Times-Roman cf} 2 16 0.000 |
| 1372 | 1.000 -1280 896 label |
| 1373 | sce |
| 1374 | ( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C) |
| 1375 | {/Times-Roman cf} 6 16 0.000 1.000 -1280 800 label |
| 1376 | 1 1.000 -456 808 -344 808 2 polygon |
| 1377 | (K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -408 |
| 1378 | 824 label |
| 1379 | (log\(h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -392 792 label |
| 1380 | (where h is the distance between layers and t is the sidewall thickness.) |
| 1381 | {/Times-Roman cf} 2 16 0.000 1.000 -224 800 label |
| 1382 | (Use geometric mean for K \(instead of doing series capacitor additions\).) |
| 1383 | {/Times-Roman cf} 2 16 0.000 1.000 -1288 680 label |
| 1384 | ( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2) |
| 1385 | {/Times-Roman cf} 8 16 0.000 1.000 -216 744 label |
| 1386 | ( \(5-3\) = \(1.35/1.74\) * 4.0 + \(0.39/1.74\) * 4.1 = 4.0224) {ns} (eff) {ss} |
| 1387 | (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 560 label |
| 1388 | |
| 1389 | ( \(5-2\) = \(1.35/3.005\) * 4.0 + \(1.235/3.005\) * 4.1 + \(0.42/3.005\) * 4.2 = 4.0691) |
| 1390 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 512 label |
| 1391 | |
| 1392 | ( \(5-1\) = \(1.35/3.635\) * 4.0 + \(1.235/3.635\) * 4.1 + \(0.78/3.635\) * 4.2 + \(0.27/3.635\) * 4.5 = 4.114) |
| 1393 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 464 label |
| 1394 | |
| 1395 | ( \(5-li\) = \(1.35/4.335\) * 4.0 + \(1.235/4.335\) * 4.1 + \(0.78/4.335\) * 4.2 + \(0.63/4.335\) * 4.5 + \(0.265/4.335\) * 4.05 + \(0.075/4.335\) * 7.3 = 4.1973) |
| 1396 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 416 label |
| 1397 | |
| 1398 | (+ \(0.075/4.8649\) * 7.3 + \(0.3089/4.8649\) * 3.9 + \(0.121/4.8649\) * 7.5 = 4.2575) |
| 1399 | {CR} |
| 1400 | ( \(5-poly\) = \(1.35/4.8649\) * 4.0 + \(1.235/4.8649\) * 4.1 + \(0.78/4.8649\) * 4.2 + \(0.63/4.8649\) * 4.5 + \(0.365/4.8649\) * 4.05) |
| 1401 | {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 320 label |
| 1402 | (+ \(0.075/5.3711\) * 7.3 + \(0.9361/5.3711\) * 3.9 = 4.1427) {CR} |
| 1403 | ( \(5-sub\) = \(1.35/5.3711\) * 4.0 + \(1.235/5.3711\) * 4.1 + \(0.78/5.3711\) * 4.2 + \(0.63/5.3711\) * 4.5 + \(0.365/5.3711\) * 4.05) |
| 1404 | {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 224 label |
| 1405 | ( \(4-3\) = 4.1 ) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| 1406 | 128 label |
| 1407 | ( \(4-2\) = \(1.235/1.655\) * 4.1 + \(0.42/1.655\) * 4.2 = 4.1254) {ns} (eff) |
| 1408 | {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 80 label |
| 1409 | |
| 1410 | ( \(4-1\) = \(1.235/2.285\) * 4.1 + \(0.78/2.285\) * 4.2 + \(0.27/2.285\) * 4.5 = 4.1814) |
| 1411 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 32 label |
| 1412 | |
| 1413 | ( \(4-li\) = \(1.235/2.985\) * 4.1 + \(0.78/2.985\) * 4.2 + \(0.63/2.985\) * 4.5 + \(0.265/2.985\) * 4.05 + \(0.075/2.985\) * 7.3 = 4.2865) |
| 1414 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -16 label |
| 1415 | |
| 1416 | (+ \(0.075/3.5149\) * 7.3 + \(0.3089/3.5149\) * 3.9 + \(0.121/3.5149\) * 7.5 = 4.3564) |
| 1417 | {CR} |
| 1418 | ( \(4-poly\) = \(1.235/3.5149\) + \(0.78/3.5149\) * 4.2 + \(0.63/3.5149\) * 4.5 + \(0.365/3.5149\) * 4.05) |
| 1419 | {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -112 label |
| 1420 | (+ \(0.075/4.0211\) * 7.3 + \(0.9361/4.0211\) * 3.9 = 4.1907) {CR} |
| 1421 | ( \(4-sub\) = \(1.235/4.0211\) * 4.1 + \(0.78/4.0211\) * 4.2 + \(0.63/4.0211\) * 4.5 + \(0.365/4.0211\) * 4.05) |
| 1422 | {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -208 label |
| 1423 | ( \(5-4\) = 4.0) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| 1424 | 608 label |
| 1425 | ( \(3-2\) = 4.2) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| 1426 | -288 label |
| 1427 | ( \(3-1\) = \(0.78/1.05\) * 4.2 + \(0.27/1.05\) * 4.5 = 4.2771 ) {ns} (eff) |
| 1428 | {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -336 label |
| 1429 | |
| 1430 | ( \(3-li\) = \(0.78/1.75\) * 4.2 + \(0.63/1.75\) * 4.5 + \(0.265/1.75\) * 4.05 + \(0.075/1.75\) * 7.3 = 4.4181) |
| 1431 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -384 label |
| 1432 | |
| 1433 | (+ \(0.075/2.2799\) * 7.3 + \(0.3089/2.2799\) * 3.9 + \(0.121/2.2799\) * 7.5 = 4.4954) |
| 1434 | {CR} |
| 1435 | ( \(3-poly\) = \(0.78/2.2799\) * 4.2 + \(0.63/2.2799\) * 4.5 + \(0.365/2.2799\) * 4.05) |
| 1436 | {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -480 label |
| 1437 | |
| 1438 | ( \(3-sub\) = \(0.78/2.7861\) * 4.2 + \(0.63/2.7861\) * 4.5 + \(0.365/2.7861\) * 4.05 + \(0.075/2.7861\) * 7.3 + \(0.9361/2.7861\) * 3.9 = 4.2308) |
| 1439 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -528 label |
| 1440 | ( \(2-1\) = 4.5) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| 1441 | -608 label |
| 1442 | |
| 1443 | ( \(2-li\) = \(0.63/0.97\) * 4.5 + \(0.265/0.97\) * 4.05 + \(0.075/0.97\) * 7.3 = 4.5936) |
| 1444 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -656 label |
| 1445 | |
| 1446 | ( \(2-poly\) = \(0.63/1.4999\) * 4.5 + \(0.365/1.4999\) * 4.05 + \(0.075/1.4999\) * 7.3 + \(0.3089/1.4999\) * 3.9 + \(0.121/1.4999\) * 7.5 = 4.6489) |
| 1447 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -704 label |
| 1448 | |
| 1449 | ( \(2-sub\) = \(0.63/2.0061\) * 4.5 + \(0.365/2.0061\) * 4.05 + \(0.075/2.0061\) * 7.3 + \(0.9361/2.0061\) * 3.9 = 4.2428) |
| 1450 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -752 label |
| 1451 | ( \(1-li\) = \(0.265/0.34\) * 4.05 + \(0.075/0.34\) * 7.3 = 4.7669) {ns} (eff) |
| 1452 | {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -832 label |
| 1453 | |
| 1454 | ( \(1-poly\) = \(0.265/0.7699\) + \(0.075/0.7699\) * 7.3 + \(0.3089/0.7699\) * 3.9 + \(0.121/0.7699\) * 7.5 = 4.8486) |
| 1455 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -880 label |
| 1456 | |
| 1457 | ( \(1-sub\) = \(0.365/1.3761\) * 4.05 + \(0.075/1.3761\) * 7.3 + \(0.9361/1.3761\) * 3.9 = 4.1251) |
| 1458 | {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -928 label |
| 1459 | ( \(li-poly\) = \(0.3089/0.4299\) * 3.9 + \(0.121/0.4299\) * 7.5 = 4.9133) {ns} |
| 1460 | (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -1024 label |
| 1461 | ( \(li-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 |
| 1462 | -1280 -1072 label |
| 1463 | ( \(poly-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 |
| 1464 | -1280 -1152 label |
| 1465 | 1 1.000 -1280 192 1008 192 2 polygon |
| 1466 | 1 1.000 -1280 -240 1008 -240 2 polygon |
| 1467 | 1 1.000 -1280 -560 1008 -560 2 polygon |
| 1468 | 1 1.000 -1280 -784 1008 -784 2 polygon |
| 1469 | 1 1.000 -1280 -960 1008 -960 2 polygon |
| 1470 | 1 1.000 -1280 -1104 1008 -1104 2 polygon |
| 1471 | 1 1.000 -1280 -1184 1008 -1184 2 polygon |
| 1472 | 1 1.000 -1280 656 1008 656 2 polygon |
| 1473 | pgsave restore showpage |
| 1474 | |
| 1475 | %%Page: worksheet4 6 |
| 1476 | %%PageOrientation: Portrait |
| 1477 | %%PageBoundingBox: 0 0 612 792 |
| 1478 | /pgsave save def bop |
| 1479 | % 32.00 8.00 gridspace |
| 1480 | 0.6922 inchscale |
| 1481 | 2.6000 setlinewidth 939 1793 translate |
| 1482 | |
| 1483 | 0.000 0.000 1.000 scb |
| 1484 | (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896 label |
| 1485 | (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 720 label |
| 1486 | (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -832 720 label |
| 1487 | (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 544 label |
| 1488 | (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -832 544 label |
| 1489 | (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -384 544 label |
| 1490 | (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label |
| 1491 | (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -832 352 label |
| 1492 | (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -384 352 label |
| 1493 | (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 48 352 label |
| 1494 | (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label |
| 1495 | (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -832 160 label |
| 1496 | (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -384 160 label |
| 1497 | (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 48 160 label |
| 1498 | (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 480 160 label |
| 1499 | (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -64 label |
| 1500 | (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -64 label |
| 1501 | (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -64 label |
| 1502 | (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 48 -64 label |
| 1503 | (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 480 -64 label |
| 1504 | (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 896 -64 label |
| 1505 | (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -272 label |
| 1506 | (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -272 label |
| 1507 | (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -272 label |
| 1508 | (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 48 -272 label |
| 1509 | (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 480 -272 label |
| 1510 | (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 896 -272 label |
| 1511 | (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1248 -272 label |
| 1512 | sce |
| 1513 | |
| 1514 | (\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\)) |
| 1515 | {/Times-Roman cf} 2 16 0.000 1.000 -864 896 label |
| 1516 | (55.631 * 4.0) {/Times-Roman cf} 2 16 0.000 1.000 -1248 848 label |
| 1517 | 1 1.000 -1264 832 -1024 832 2 polygon |
| 1518 | (log\(1 + 2\2640.505/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1152 800 label |
| 1519 | (55.631 * 4.0224) {/Times-Roman cf} 2 16 0.000 1.000 -1264 672 label |
| 1520 | 1 1.000 -1264 656 -1024 656 2 polygon |
| 1521 | (log\(1 + 2\2641.74/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 624 label |
| 1522 | (55.631 * 4.0691) {/Times-Roman cf} 2 16 0.000 1.000 -1264 496 label |
| 1523 | 1 1.000 -1264 480 -1024 480 2 polygon |
| 1524 | (log\(1 + 2\2643.005/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 448 label |
| 1525 | (55.631 * 4.114) {/Times-Roman cf} 2 16 0.000 1.000 -1264 304 label |
| 1526 | 1 1.000 -1264 288 -1024 288 2 polygon |
| 1527 | (log\(1 + 2\2643.635/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 256 label |
| 1528 | (55.631 * 4.1973) {/Times-Roman cf} 2 16 0.000 1.000 -1264 112 label |
| 1529 | 1 1.000 -1264 96 -1024 96 2 polygon |
| 1530 | (log\(1 + 2\2644.335/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 64 label |
| 1531 | (55.631 * 4.2575) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -112 label |
| 1532 | 1 1.000 -1264 -128 -1024 -128 2 polygon |
| 1533 | (log\(1 + 2\2644.8649/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 -160 |
| 1534 | label |
| 1535 | (55.631 * 4.1427) {/Times-Roman cf} 2 16 0.000 1.000 -1248 -320 label |
| 1536 | 1 1.000 -1248 -336 -1008 -336 2 polygon |
| 1537 | (log\(1 + 2\2645.3711/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1120 -368 |
| 1538 | label |
| 1539 | (55.631 * 4.1) {/Times-Roman cf} 2 16 0.000 1.000 -832 672 label |
| 1540 | 1 1.000 -832 656 -592 656 2 polygon |
| 1541 | (log\(1 + 2\2640.39/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 624 label |
| 1542 | 1 1.000 -832 480 -592 480 2 polygon |
| 1543 | (log\(1 + 2\2641.655/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 448 label |
| 1544 | (55.631 * 4.1254) {/Times-Roman cf} 2 16 0.000 1.000 -832 496 label |
| 1545 | 1 1.000 -832 288 -592 288 2 polygon |
| 1546 | (log\(1 + 2\2642.285/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 256 label |
| 1547 | (55.631 * 4.2865) {/Times-Roman cf} 2 16 0.000 1.000 -832 112 label |
| 1548 | 1 1.000 -832 96 -592 96 2 polygon |
| 1549 | (log\(1 + 2\2642.985/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 64 label |
| 1550 | (55.631 * 4.3564) {/Times-Roman cf} 2 16 0.000 1.000 -832 -112 label |
| 1551 | 1 1.000 -832 -128 -592 -128 2 polygon |
| 1552 | (log\(1 + 2\2643.5149/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 -160 |
| 1553 | label |
| 1554 | (55.631 * 4.1907) {/Times-Roman cf} 2 16 0.000 1.000 -816 -320 label |
| 1555 | 1 1.000 -816 -336 -576 -336 2 polygon |
| 1556 | (log\(1 + 2\2644.0211/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -688 -368 |
| 1557 | label |
| 1558 | (55.631 * 4.1814) {/Times-Roman cf} 2 16 0.000 1.000 -832 304 label |
| 1559 | (55.631 * 4.2308) {/Times-Roman cf} 2 16 0.000 1.000 -352 -320 label |
| 1560 | 1 1.000 -352 -336 -112 -336 2 polygon |
| 1561 | (log\(1 + 2\2642.7861/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -224 -368 |
| 1562 | label |
| 1563 | (55.631 * 4.4954) {/Times-Roman cf} 2 16 0.000 1.000 -368 -112 label |
| 1564 | 1 1.000 -368 -128 -128 -128 2 polygon |
| 1565 | (log\(1 + 2\2642.2799/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 -160 |
| 1566 | label |
| 1567 | 1 1.000 -368 96 -128 96 2 polygon |
| 1568 | (log\(1 + 2\2641.75/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 64 label |
| 1569 | (55.631 * 4.4181) {/Times-Roman cf} 2 16 0.000 1.000 -368 112 label |
| 1570 | 1 1.000 -368 288 -128 288 2 polygon |
| 1571 | (log\(1 + 2\2641.05/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 256 label |
| 1572 | (55.631 * 4.2771) {/Times-Roman cf} 2 16 0.000 1.000 -368 304 label |
| 1573 | 1 1.000 -368 480 -128 480 2 polygon |
| 1574 | (log\(1 + 2\2640.42/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 448 label |
| 1575 | (55.631 * 4.2) {/Times-Roman cf} 2 16 0.000 1.000 -368 496 label |
| 1576 | 1 1.000 48 288 288 288 2 polygon |
| 1577 | (log\(1 + 2\2640.27/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 256 label |
| 1578 | (55.631 * 4.5) {/Times-Roman cf} 2 16 0.000 1.000 48 304 label |
| 1579 | 1 1.000 48 96 288 96 2 polygon |
| 1580 | (log\(1 + 2\2640.97/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 176 64 label |
| 1581 | (55.631 * 4.5936) {/Times-Roman cf} 2 16 0.000 1.000 48 112 label |
| 1582 | (55.631 * 4.6489) {/Times-Roman cf} 2 16 0.000 1.000 48 -112 label |
| 1583 | 1 1.000 48 -128 288 -128 2 polygon |
| 1584 | (log\(1 + 2\2641.4999/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 -160 label |
| 1585 | (55.631 * 4.2428) {/Times-Roman cf} 2 16 0.000 1.000 64 -320 label |
| 1586 | 1 1.000 64 -336 304 -336 2 polygon |
| 1587 | (log\(1 + 2\2642.0061/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 192 -368 label |
| 1588 | (55.631 * 4.1251) {/Times-Roman cf} 2 16 0.000 1.000 512 -320 label |
| 1589 | 1 1.000 512 -336 752 -336 2 polygon |
| 1590 | (log\(1 + 2\2641.3761/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 640 -368 label |
| 1591 | (55.631 * 4.8486) {/Times-Roman cf} 2 16 0.000 1.000 496 -112 label |
| 1592 | 1 1.000 496 -128 736 -128 2 polygon |
| 1593 | (log\(1 + 2\2640.8699/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 624 -160 label |
| 1594 | (log\(1 + 2\2640.34/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 624 64 label |
| 1595 | (55.631 * 4.7669) {/Times-Roman cf} 2 16 0.000 1.000 496 112 label |
| 1596 | 1 1.000 496 96 736 96 2 polygon |
| 1597 | (55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 896 -320 label |
| 1598 | 1 1.000 896 -336 1136 -336 2 polygon |
| 1599 | (log\(1 + 2\2640.9361/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1024 -368 label |
| 1600 | (55.631 * 4.9133) {/Times-Roman cf} 2 16 0.000 1.000 880 -112 label |
| 1601 | 1 1.000 880 -128 1120 -128 2 polygon |
| 1602 | (log\(1 + 2\2640.4299/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1008 -160 label |
| 1603 | (55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 1280 -320 label |
| 1604 | 1 1.000 1280 -336 1520 -336 2 polygon |
| 1605 | (log\(1 + 2\2640.3262/0.18\)) {/Times-Roman cf} 2 21 0.000 1.000 1408 -368 |
| 1606 | label |
| 1607 | 1 1.000 -1344 -496 1760 -496 2 polygon |
| 1608 | 0.000 0.000 1.000 scb |
| 1609 | (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -592 label |
| 1610 | (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -768 label |
| 1611 | (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -768 label |
| 1612 | (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -944 label |
| 1613 | (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -944 label |
| 1614 | (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -944 label |
| 1615 | (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1136 label |
| 1616 | (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1136 label |
| 1617 | (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1136 label |
| 1618 | (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1136 label |
| 1619 | (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1328 label |
| 1620 | (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1328 label |
| 1621 | (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1328 label |
| 1622 | (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1328 label |
| 1623 | (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1328 label |
| 1624 | (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1536 label |
| 1625 | (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1536 label |
| 1626 | (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1536 label |
| 1627 | (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1536 label |
| 1628 | (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1536 label |
| 1629 | (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1536 label |
| 1630 | (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1744 label |
| 1631 | (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1744 label |
| 1632 | (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1744 label |
| 1633 | (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1744 label |
| 1634 | (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1744 label |
| 1635 | (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1744 label |
| 1636 | (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1264 -1744 label |
| 1637 | sce |
| 1638 | |
| 1639 | (\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\)) |
| 1640 | {/Times-Roman cf} 2 16 0.000 1.000 -848 -592 label |
| 1641 | 0.647 0.165 0.165 scb |
| 1642 | (Interlayer \(fringe\) capacitance worksheet \(continued from last page\):) |
| 1643 | {/Times-Roman cf} 2 16 0.000 1.000 -1280 1280 label |
| 1644 | sce |
| 1645 | ( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C) |
| 1646 | {/Times-Roman cf} 6 16 0.000 1.000 -1280 1184 label |
| 1647 | 1 1.000 -448 1184 -272 1184 2 polygon |
| 1648 | (K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -368 |
| 1649 | 1200 label |
| 1650 | (log\(1 + 2h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -352 1168 label |
| 1651 | (where h is the distance between layers and t is the sidewall thickness.) |
| 1652 | {/Times-Roman cf} 2 16 0.000 1.000 -192 1184 label |
| 1653 | ( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2) |
| 1654 | {/Times-Roman cf} 8 16 0.000 1.000 -176 1120 label |
| 1655 | 1 1.000 -1296 960 1824 960 2 polygon |
| 1656 | |
| 1657 | (match, although there are also more complicated expressions \(all are ultimately approximations to the exact field equation solutions\).) |
| 1658 | {CR} |
| 1659 | (Note that all \(?\) texts seem to use "log\(h/t\)" which is entirely nonsensical as it implies negative fringe capacitance for h < t. The above expression is a better) |
| 1660 | {/Times-Roman cf} 4 16 0.000 1.000 -1280 1008 label |
| 1661 | (378.01) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -688 label |
| 1662 | (168.89) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -864 label |
| 1663 | (129.16) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -1056 label |
| 1664 | (119.67) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1232 label |
| 1665 | (109.36) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1648 label |
| 1666 | (102.25) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1840 label |
| 1667 | (113.11) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1440 label |
| 1668 | (351.52) {/Times-Roman cf} 2 16 0.000 1.000 -720 -864 label |
| 1669 | (144.86) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1056 label |
| 1670 | (125.83) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1232 label |
| 1671 | (109.04) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1632 label |
| 1672 | (114.74) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1440 label |
| 1673 | (341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1040 label |
| 1674 | (191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1232 label |
| 1675 | (150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1440 label |
| 1676 | (273.21) {/Times-Roman cf} 2 16 0.000 1.000 128 -1248 label |
| 1677 | (99.483) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1840 label |
| 1678 | (135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1632 label |
| 1679 | (116.62) {/Times-Roman cf} 2 16 0.000 1.000 -272 -1824 label |
| 1680 | (137.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1440 label |
| 1681 | (115.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1632 label |
| 1682 | (94.529) {/Times-Roman cf} 2 16 0.000 1.000 144 -1824 label |
| 1683 | (249.97) {/Times-Roman cf} 2 16 0.000 1.000 544 -1440 label |
| 1684 | (152.95) {/Times-Roman cf} 2 16 0.000 1.000 560 -1632 label |
| 1685 | (106.39) {/Times-Roman cf} 2 16 0.000 1.000 576 -1824 label |
| 1686 | (120.86) {/Times-Roman cf} 2 16 0.000 1.000 960 -1632 label |
| 1687 | (72.763) {/Times-Roman cf} 2 16 0.000 1.000 976 -1824 label |
| 1688 | (141.68) {/Times-Roman cf} 2 16 0.000 1.000 1312 -1824 label |
| 1689 | pgsave restore showpage |
| 1690 | |
| 1691 | %%Page: worksheet5 7 |
| 1692 | %%PageOrientation: Portrait |
| 1693 | %%PageBoundingBox: 0 0 612 792 |
| 1694 | /pgsave save def bop |
| 1695 | % 32.00 8.00 gridspace |
| 1696 | 0.6922 inchscale |
| 1697 | 2.6000 setlinewidth 1412 988 translate |
| 1698 | |
| 1699 | (Sidewall capacitance worksheet:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896 |
| 1700 | label |
| 1701 | |
| 1702 | (\265m separation. For an answer in units per micron, assume 1\265m length as well.) |
| 1703 | {/Times-RomanISO cf} (Capacitance \(in magic\251s tech file\) is measured at 1) |
| 1704 | {/Times-Roman cf} 4 16 0.000 1.000 -1280 832 label |
| 1705 | {ns} (0) {ss} (e) {/Symbol cf} ( = K ) {ns} (ox) {ss} |
| 1706 | (Capacitance is then just the usual equation, C) {/Times-Roman cf} 11 16 0.000 |
| 1707 | 1.000 -1280 768 label |
| 1708 | ( = 8.854) {ns} (0) {ss} (e) {/Symbol cf} (with ) {/Times-Roman cf} 8 16 0.000 |
| 1709 | 1.000 -192 768 label |
| 1710 | (metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 400 label |
| 1711 | (4.0 * 8.854 * 0.845 = 29.9265) {/Times-Roman cf} 2 16 360.000 1.000 -1088 |
| 1712 | 400 label |
| 1713 | ( h) {/Times-Roman cf} 2 16 0.000 1.000 -416 768 label |
| 1714 | (and where h is the layer thickness.) {/Times-Roman cf} 2 16 0.000 1.000 128 |
| 1715 | 768 label |
| 1716 | (h) {/Times-Roman cf} 2 16 0.000 1.000 -848 528 label |
| 1717 | (0) {ss} (e) {/Symbol cf} 4 16 0.000 1.000 -976 528 label |
| 1718 | (K) {/Times-Roman cf} 2 17 0.000 1.000 -1072 528 label |
| 1719 | (sidewall) {ss} (C) {/Times-Roman cf} 4 16 0.000 1.000 -704 528 label |
| 1720 | (metal5:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 448 label |
| 1721 | (metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label |
| 1722 | (metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 304 label |
| 1723 | (metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 256 label |
| 1724 | (li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 208 label |
| 1725 | (poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label |
| 1726 | 1 1.000 -1280 496 -320 496 2 polygon |
| 1727 | |
| 1728 | (For side-extending dielectric, use a pro-rated K \(values for horizontal thickness of these dielectrics not shown on the first page\).) |
| 1729 | {/Times-Roman cf} 2 16 0.000 1.000 -1280 640 label |
| 1730 | (\265m\)) {/Times-RomanISO cf} (\(aF/) {/Times-Roman cf} 4 16 0.000 1.000 -560 |
| 1731 | 528 label |
| 1732 | (4.1 * 8.854 * 0.845 = 30.675) {/Times-Roman cf} 2 16 360.000 1.000 -1088 352 |
| 1733 | label |
| 1734 | (4.2 * 8.854 * 0.36 = 13.387) {/Times-Roman cf} 2 16 360.000 1.000 -1088 304 |
| 1735 | label |
| 1736 | (4.5 * 8.854 * 0.36 = 14.343) {/Times-Roman cf} 2 16 360.000 1.000 -1088 256 |
| 1737 | label |
| 1738 | (6.926 * 8.854 * 1.26 = 77.267) {/Times-Roman cf} 2 16 360.000 1.000 -1088 |
| 1739 | 448 label |
| 1740 | (2.94\) = 6.926) {hS} (\264) {hS} (\(0.07 + 0.4223\)\)) {hS} |
| 1741 | (7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.4223) {hS} (\264) {hS} (3.9\) + \(2) |
| 1742 | {hS} (\264) {hS} (0.07) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K) |
| 1743 | {/Times-Roman cf} 28 16 0.000 1.000 -448 448 label |
| 1744 | (4.05\) = 4.447) {hS} (\264) {hS} (\(0.061\)\)) {hS} (7.3\) + \(\(1 - 2) {hS} |
| 1745 | (\264) {hS} (0.061) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K) |
| 1746 | {/Times-Roman cf} 20 16 0.000 1.000 -448 208 label |
| 1747 | (4.447 * 8.854 * 0.1 = 3.937) {/Times-Roman cf} 2 16 360.000 1.000 -1088 208 |
| 1748 | label |
| 1749 | (3.9\) = 4.210) {hS} (\264) {hS} (\(0.006 + 0.0431\)\)) {hS} |
| 1750 | (7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.0431) {hS} (\264) {hS} (3.9\) + \(2) |
| 1751 | {hS} (\264) {hS} (0.006) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K) |
| 1752 | {/Times-Roman cf} 28 16 0.000 1.000 -448 160 label |
| 1753 | (4.21 * 8.854 * 0.18 = 6.710) {/Times-Roman cf} 2 16 360.000 1.000 -1088 160 |
| 1754 | label |
| 1755 | pgsave restore showpage |
| 1756 | |
| 1757 | %%Trailer |
| 1758 | XCIRCsave restore |
| 1759 | %%EOF |