blob: b532e173ce4b0df9fa2f247307698137d5864cf5 [file] [log] [blame]
Tim 'mithro' Ansell6e8b54e2020-07-25 17:09:17 -07001%!PS-Adobe-3.0
2%%Title: metal_stack.ps
3%%Creator: XCircuit v0.0 rev-145403803
4%%CreationDate: Wed Jun 17 12:42:51 2020
5%%Pages: 7
6%%BoundingBox: 0 0 612 792
7%%DocumentNeededResources: font Times-Roman Times-RomanISO Symbol
8%%EndComments
9%%BeginProlog
10%
11% PostScript prolog for output from xcircuit
12% Version: 3.9
13%
14% Electrical circuit (and otherwise general) drawing program
15%
16% Written by Tim Edwards 8/5/93--4/12/16 (tim@opencircuitdesign.com)
17% The Johns Hopkins University (1993-2004)
18% MultiGiG, Inc. (2004-2012)
19% Open Circuit Design (2012-2016)
20%
21%%BeginResource: procset XCIRCproc 3.9 1
22%
23% supporting definitions --- these are the primary xcircuit types.
24
25/XCIRCsave save def
26/topmat matrix currentmatrix def
27
28/fontslant { /slant exch def [1 0 slant 1 0 0]
29 exch findfont exch makefont dup length dict /ndict exch def
30 { 1 index /FID ne { ndict 3 1 roll put } { pop pop } ifelse } forall
31 ndict definefont pop} def
32/ul { count 0 gt { dup type /stringtype eq showflag 1 eq and { gsave
33 currentpoint topmat setmatrix 0 0 moveto 2 index stringwidth pop (_)
34 false charpath flattenpath pathbbox grestore exch pop 1 index
35 sub setlinewidth exch pop currentpoint 3 -1 roll add moveto 0
36 rlineto stroke moveto } if } if } def
37/ol { count 0 gt { dup type /stringtype eq showflag 1 eq and { gsave gsave
38 currentpoint topmat setmatrix 2 index stringwidth pop 3 index
39 true charpath flattenpath pathbbox grestore exch pop
40 exch pop topmat setmatrix (_) true charpath pathbbox grestore
41 exch pop 1 index sub setlinewidth exch pop currentpoint
42 exch 4 1 roll exch sub add moveto pop 0 rlineto stroke
43 moveto } if } if } def
44/stW { gsave currentpoint newpath moveto true charpath flattenpath
45 pathbbox pop exch pop sub grestore } def
46/Ts {mark Tabs aload pop counttomark 1 add array astore /Tabs exch def Tabs
47 0 currentpoint pop put} def
48/Tbn {mark Tabs aload pop counttomark dup 2 add 1 roll cleartomark 1 sub} def
49/Tb { 0 1 Tbn {Tabs exch get dup currentpoint pop lt
50 {currentpoint exch pop moveto exit} {pop} ifelse } for } def
51/Tf { Tbn -1 0 {Tabs exch get dup currentpoint pop gt
52 {currentpoint exch pop moveto exit} {pop} ifelse } for } def
53/qS { (aa) stW (a a) stW sub 4 div 0 Kn } def
54/hS { qS qS } def
55/pspc 0 def
56/cf0 { scalefont setfont } bind def
57/Kn { dup kY add /kY exch def rmoveto } bind def
58/ss { /fscale fscale 0.67 mul def currentfont 0.67 cf0 0 fscale0 fscale mul
59 0.33 mul neg Kn} def
60/Ss { /fscale fscale 0.67 mul def currentfont 0.67 cf0 0 fscale0 fscale mul
61 0.67 mul Kn } def
62/ns { 0 kY neg Kn /kY 0 def /fscale 1.0 def xfont0 1.0 cf0 } def
63/MR { /twidth exch def } def
64/CRx { } def
65/CR { ns 0 /Bline Bline fscale0 neg add def Bline moveto CRx } def
66/cf { dup type /realtype ne {1.0} if exch findfont exch kY 0 eq
67 { 40 mul dup /fscale0 exch def cf0 /xfont0 currentfont def}
68 {fscale0 mul fscale mul cf0} ifelse } def
69/ctmk { counttomark dup 2 add -1 roll pop } bind def
70/label { gsave translate 0 0 moveto dup scale neg
71 /rotval exch def /twidth 100000 def /just exch def just 128 and
72 0 gt {/mshow {pop} def} {/mshow {show} def} ifelse just 16 and 0
73 gt {gsave rotval rotate 0 1 dtransform gsave pagemat setmatrix
74 idtransform exch grestore 1 0 dtransform gsave pagemat setmatrix
75 idtransform exch grestore dup abs 1e-9 lt {pop mul 0 gt} {3 1 roll
76 pop pop 0 lt} ifelse grestore {-1 /rotval rotval neg def /just just
77 dup 3 and 1 ne {3 xor} if def} {1} ifelse exch -1e-9 lt {-1 /rotval
78 rotval neg def /just just dup 12 and 4 ne {12 xor} if def} {1}
79 ifelse scale } if /showflag 0 def /fspc pspc def /Bline 0 def
80 /numlines 0 def /padding 0 array def /Tabs 0 array def
81 /fscale 1.0 def /kY 0 def gsave /CRx { linewid padding
82 aload pop numlines 1 add dup /numlines exch def array astore
83 /padding exch def /linewid 0 def } def dup 1 add copy dup 1 0
84 dtransform exch atan rotate {exch dup type /stringtype eq {gsave dup
85 gsave newpath 0 0 moveto true charpath flattenpath pathbbox pop exch
86 pop exch pop grestore currentpoint pop add dup /linewid exch def twidth
87 ge {grestore CR exch 1 add dup 2 add {CR} exch 1 roll exch} {grestore}
88 ifelse true charpath flattenpath} {dup type /arraytype eq {exec} {12
89 string cvs true charpath flattenpath} ifelse} ifelse} repeat
90 CRx /CRx {padding aload pop just 1280 and 0 gt {blockwid exch sub just
91 1024 and 0 gt {0.5 mul} if} {pop 0} ifelse 0 rmoveto numlines 1 sub
92 dup /numlines exch def array astore /padding exch def} def exch pop
93 pathbbox grestore 4 copy pop exch pop exch sub /blockwid exch def
94 3 -1 roll pop 3 1 roll just 1 and 0 gt {just 2 and
95 0 gt {exch pop neg fspc sub} {exch sub 0.5 mul neg} ifelse} {pop neg
96 fspc add} ifelse exch Bline exch just 4 and 0 gt {just 8 and 0 gt
97 {exch pop neg fspc sub} {add 0.5 mul neg} ifelse} {pop neg fspc add}
98 ifelse rotval rotate Kn currentpoint translate /showflag 1 def /Bline
99 0 def /Tabs 0 array def /fscale 1.0 def /kY 0 def CRx {dup type
100 /stringtype eq {mshow} {dup type /arraytype eq {exec} {12 string cvs
101 mshow} ifelse} ifelse} repeat grestore endclip} def
102/pinlabel { 4 index 32 and 0 ne hlevel 0 eq or { /pspc 10 def label
103 /pspc 0 def } { pop pop pop pop pop {pop} repeat } ifelse } def
104/pinglobal { pinlabel } def
105/infolabel { pinlabel } def
106/graphic { gsave 4 index cvx exec /DataSource get resetfile translate 0 0
107 moveto neg rotate dup scale cvx exec image grestore endclip} def
108
109/scb { setrgbcolor } bind def /sce { defColor aload pop scb } bind def
110/cRedef {/defColor currentcolor 3 array astore def} def
111/begingate {dup type /dicttype ne {1 dict} if begin % default params
112 dup type /dicttype ne {1 dict} if begin % instanced params
113 /hlevel hlevel 1 add def /defColor currentcolor sce 3 array astore
114 def gsave sce dup type /nametype eq { pop } if translate 0 0 moveto
115 neg rotate dup type /nametype eq not { dup abs currentlinewidth exch
116 div setlinewidth } { pop } ifelse dup abs scale clipped 1 and 1 eq
117 {/clipped clipped 1 add def} if} bind def
118/endgate { /hlevel hlevel 1 sub def grestore defColor aload pop cRedef
119 scb end end endclip} bind def
120
121/hlevel 0 def
122/endclip {clipped 1 and 1 eq {grestore /clipped clipped 1 sub def} if} def
123/tmpa [1 0 0 1 0 0] def
124/gar {8 8 true tmpa {<c0 c0 00 00 0c 0c 00 00>} imagemask} bind
125{8 8 true tmpa {<30 70 60 02 03 07 06 20>} imagemask} bind
126{8 8 true tmpa {<0c 1e 1e 0c c0 e1 e1 c0>} imagemask} bind
127{8 8 true tmpa {<0f 0f 0f 0f f0 f0 f0 f0>} imagemask} bind
128{8 8 true tmpa {<3f f3 e1 e1 f3 3f 1e 1e>} imagemask} bind
129{8 8 true tmpa {<df cf 8f 9f fd fc f8 f9>} imagemask} bind
130{8 8 true tmpa {<ff 3f 3f ff ff f3 f3 ff>} imagemask} bind 7 array astore def
131/ppaint { gsave clip tmpa dup setmatrix pathbbox neg exch neg 4 2 roll
132 neg 4 -1 roll 2 copy gt {exch} if 8 div ceiling 8 mul 4 2 roll neg 2 copy
133 gt {exch} if 8 div ceiling 8 mul 3 -1 roll -8 5 -1 roll
134 { 3 index exch 5 exch put dup -8 3 index { 3 index
135 exch 4 exch put 3 index exec } for } for pop pop pop pop grestore } bind def
136/setstyles {
137 currentlinewidth mul setlinewidth /style exch def style 2048 and 0 gt
138 clipped 1 and 0 eq and {clip newpath /clipped clipped 1 add def} {
139 style 1 and 0 gt not {closepath} if
140 style 1024 and 0 gt {2 setlinecap 0 setlinejoin} if
141 style 2 and 0 gt {currentlinewidth 4 mul dup 2 array astore 0 setdash} if
142 style 4 and 0 gt {0.5 currentlinewidth 4 mul 2 array astore 0 setdash} if
143 gsave style 16 and 0 gt { style 224 and -5 bitshift style 256 and 0 gt {
144 7 exch sub 8 div dup 1 exch sub currentrgbcolor 3 array astore
145 {3 copy mul add 4 1 roll pop} forall pop pop setrgbcolor eofill}
146 {dup 7 lt {gar exch get ppaint} {pop eofill} ifelse} ifelse}
147 {style 256 and 0 gt {1 setgray eofill} if} ifelse grestore style 8 and 0 gt
148 style 512 eq or {newpath} {stroke} ifelse grestore endclip} ifelse} def
149
150/addtoy {exch dup dup 2 mul 3 add 1 roll -1 1 { 4 1 roll dup 4 1 roll add
151 4 -1 roll 2 mul 1 add index 2 mul 2 add 2 roll} for pop} def
152/addtoy1 {1 exch addtoy pop} def
153/addtoy3 {3 exch addtoy pop} def
154/addtoy4 {4 exch addtoy pop} def
155/addtox {exch dup dup 2 mul 3 add 1 roll -1 1 { 4 1 roll dup 4 1 roll 3 -1 roll
156 add exch 4 -1 roll 2 mul 1 add index 2 mul 2 add 2 roll} for pop} def
157/addtox1 {1 exch addtox pop} def
158/addtox3 {3 exch addtox pop} def
159/addtox4 {4 exch addtox pop} def
160/polygon { gsave /num exch def moveto num 1 sub {lineto} repeat setstyles } def
161/xcarc { gsave newpath arc setstyles } def
162/elb { matrix currentmatrix 7 -1 roll 7 -1 roll translate 5 1 roll 4 -1 roll
163 3 index div 1 scale } def
164/ele { 0 4 1 roll 0 4 1 roll } bind def
165/ellipse { gsave elb newpath ele arc setmatrix setstyles } def
166/pellip { elb ele arc setmatrix } def
167/nellip { elb ele arcn setmatrix } def
168/spline { gsave moveto curveto setstyles } def
169/polyc { {lineto} repeat } bind def
170/beginpath { gsave moveto } bind def
171/endpath { setstyles } bind def
172/bop { 1 setlinecap 2 setlinejoin 6 setmiterlimit 0 0 0 scb cRedef
173 /clipped 0 def} def
174/psinsertion {/PSobj save def /showpage {} def /setpagedevice {pop} def bop
175 rotate translate dup scale} def
176/end_insert {PSobj restore} def
177/setpagemat {/pagemat matrix currentmatrix def} def
178/inchscale {setpagemat 0.375 mul dup scale} def
179/cmscale {setpagemat 0.35433071 mul dup scale} def
180
181%%EndResource
182%%EndProlog
183/Times-Roman findfont dup length dict begin
184{1 index /FID ne {def} {pop pop} ifelse} forall
185/Encoding ISOLatin1Encoding def currentdict end
186/Times-RomanISO exch definefont pop
187
188% XCircuit output starts here.
189
190%%BeginSetup
191
192/generic::arrowhead {
193% nonetwork
194begingate
1958 -28 beginpath
1963 -18 3 -15 0 0 curveto
197-3 -15 -3 -18 -8 -28 curveto
198-2 -26 2 -26 8 -28 curveto
199249
2001.000 endpath
201endgate
202} def
203
204
205%%EndSetup
206
207%%Page: metal_stack 1
208%%PageOrientation: Portrait
209%%PageBoundingBox: 0 0 612 792
210/pgsave save def bop
211% 32.00 8.00 gridspace
2120.6922 inchscale
2132.6000 setlinewidth 1376 1320 translate
214
2150.796 0.953 0.953 scb
216496 1.000 -304 480 -304 496 -168 496 -168 480 4 polygon
2170.800 0.800 0.800 scb
218496 1.000 -296 288 -296 320 -200 320 -200 288 4 polygon
219496 1.000 -288 496 -288 544 -192 544 -192 496 4 polygon
220496 1.000 -368 -336 -368 -288 -272 -288 -272 -336 4 polygon
221496 1.000 -48 -256 -48 -176 48 -176 48 -256 4 polygon
222496 1.000 -48 -96 -48 -32 48 -32 48 -96 4 polygon
223496 1.000 -48 48 -48 112 48 112 48 48 4 polygon
224496 1.000 -48 256 -48 320 48 320 48 256 4 polygon
225496 1.000 -48 464 -48 544 112 544 112 464 4 polygon
226496 1.000 -48 -448 -48 -288 48 -288 48 -448 4 polygon
2270.984 0.996 0.765 scb
228-640 -448 beginpath
229-640 -512 1 polyc
230-640 -530 -626 -544 -608 -544 curveto
231368 -544 1
232polyc
233386 -544 400 -530 400 -512 curveto
234400 -448 1 polyc
235497 1.000 endpath
2360.980 0.792 0.541 scb
237-192 -448 beginpath
238-192 -464 1 polyc
239-192 -482 -178 -496 -160 -496 curveto
240320 -496 1
241polyc
242338 -496 352 -482 352 -464 curveto
243352 -448 1 polyc
244497 1.000 endpath
2451.000 0.753 0.796 scb
246496 1.000 -400 -400 -400 -336 -240 -336 -240 -400 4 polygon
247496 1.000 112 -432 112 -368 320 -368 320 -432 4 polygon
2480.812 0.996 0.812 scb
249496 1.000 -480 -288 -480 -256 432 -256 432 -288 4 polygon
2500.796 0.953 0.953 scb
251496 1.000 -480 -176 -480 -96 464 -96 464 -176 4 polygon
252496 1.000 -480 -32 -480 48 464 48 464 -32 4 polygon
253496 1.000 -480 112 -480 256 496 256 496 112 4 polygon
254496 1.000 -480 320 -480 464 496 464 496 320 4 polygon
255496 1.000 -464 544 -464 752 448 752 448 544 4 polygon
256sce
257(SkyWater Sky130A metal stack \(not to scale!\):) {/Times-Roman cf} 2 16 0.000
2581.000 -544 1008 label
2591 1.000 -680 -448 496 -448 2 polygon
2601 1.000 -192 -448 -192 -464 2 polygon
2611 1.000 352 -448 352 -464 2 polygon
2621 1.000 -160 -464 32 180.000 270.000 xcarc
2631 1.000 -160 -496 320 -496 2 polygon
2641 1.000 320 -464 32 -90.000 0.000 xcarc
2651 1.000 -640 -448 -640 -512 2 polygon
2661 1.000 400 -448 400 -512 2 polygon
2671 1.000 -608 -544 368 -544 2 polygon
2681 1.000 -608 -512 32 180.000 270.000 xcarc
2691 1.000 368 -512 32 -90.000 0.000 xcarc
270(diffusion) {/Times-Roman cf} 2 16 0.000 0.700 -48 -480 label
271(nwell) {/Times-Roman cf} 2 16 0.000 0.700 -304 -496 label
2720 1.000 112 -432 112 -368 320 -368 320 -432 4 polygon
273(gate) {CR} (polysilicon) {/Times-Roman cf} 4 1045 0.000 0.700 224 -400 label
2740 1.000 -48 -448 -48 -288 48 -288 48 -448 4 polygon
275(licon) {/Times-Roman cf} 2 21 0.000 0.700 0 -376 label
2760 1.000 -480 -288 -480 -256 432 -256 432 -288 4 polygon
277(li) {/Times-Roman cf} 2 21 0.000 0.700 0 -272 label
2780 1.000 -480 -176 -480 -96 464 -96 464 -176 4 polygon
279(metal1) {/Times-Roman cf} 2 17 0.000 0.700 0 -144 label
2800 1.000 -480 -32 -480 48 464 48 464 -32 4 polygon
281(metal2) {/Times-Roman cf} 2 17 0.000 0.700 0 0 label
2820 1.000 -480 112 -480 256 496 256 496 112 4 polygon
283(metal3) {/Times-Roman cf} 2 17 0.000 0.700 0 176 label
2840 1.000 -480 320 -480 464 496 464 496 320 4 polygon
285(metal4) {/Times-Roman cf} 2 17 0.000 0.700 0 384 label
2860 1.000 -464 544 -464 752 448 752 448 544 4 polygon
287(metal5) {/Times-Roman cf} 2 17 0.000 0.700 0 640 label
2880 1.000 -48 -256 -48 -176 48 -176 48 -256 4 polygon
289(mcon) {/Times-Roman cf} 2 21 0.000 0.700 0 -224 label
290(licon) {/Times-Roman cf} 2 17 0.000 0.700 -320 -320 label
2910 1.000 -48 -96 -48 -32 48 -32 48 -96 4 polygon
2920 1.000 -48 48 -48 112 48 112 48 48 4 polygon
2930 1.000 -48 256 -48 320 48 320 48 256 4 polygon
2940 1.000 -48 464 -48 544 112 544 112 464 4 polygon
295(via1) {/Times-Roman cf} 2 21 0.000 0.700 0 -64 label
296(via2) {/Times-Roman cf} 2 21 0.000 0.700 0 80 label
297(via3) {/Times-Roman cf} 2 21 0.000 0.700 0 288 label
298(via4) {/Times-Roman cf} 2 21 0.000 0.700 32 496 label
2991 1.000 -384 848 -384 896 2 polygon
3001 1.000 400 848 400 896 2 polygon
3011 1.000 432 928 672 928 2 polygon
3021 1.000 -416 928 -896 928 2 polygon
3031 1.000 -416 896 32 0.000 90.000 xcarc
3041 1.000 432 896 32 90.000 180.000 xcarc
305(glass cut) {/Times-Roman cf} 2 17 0.000 0.700 32 880 label
3060.000 0.000 1.000 scb
307(PI1 K=2.94) {/Times-Roman cf} 2 17 0.000 0.700 -648 696 label
3080.600 0.600 0.600 scb
3091 1.000 592 -448 704 -448 2 polygon
3101 1.000 416 -496 704 -496 2 polygon
311sce
3121.000 0.000 672 -496 generic::arrowhead
313-1.000 180.000 672 -448 generic::arrowhead
314(\265m) {/Times-RomanISO cf} {hS} (0.12) {/Times-Roman cf} 5 17 0.000 0.700 672
315-480 label
3160.600 0.600 0.600 scb
3171 1.000 384 -432 624 -432 2 polygon
3181 1.000 384 -368 624 -368 2 polygon
319sce
3201 1.000 560 -368 560 -320 2 polygon
3211 1.000 560 -432 560 -480 2 polygon
3221.000 0.000 560 -432 generic::arrowhead
323-1.000 180.000 560 -368 generic::arrowhead
324(\265m) {/Times-RomanISO cf} {hS} (0.18) {/Times-Roman cf} 5 21 0.000 0.700 592
325-400 label
3260.600 0.600 0.600 scb
3271 1.000 512 -288 608 -288 2 polygon
3281 1.000 440 -256 608 -256 2 polygon
329sce
3301 1.000 592 -256 592 -208 2 polygon
3311 1.000 592 -288 592 -336 2 polygon
3321.000 0.000 592 -288 generic::arrowhead
333-1.000 180.000 592 -256 generic::arrowhead
334(\265m) {/Times-RomanISO cf} {hS} (0.1) {/Times-Roman cf} 5 20 0.000 0.700 624
335-272 label
3360.600 0.600 0.600 scb
3371 1.000 512 -176 608 -176 2 polygon
3381 1.000 512 -96 608 -96 2 polygon
339sce
3401.000 0.000 592 -96 generic::arrowhead
341-1.000 180.000 592 -176 generic::arrowhead
3421 1.000 592 -176 592 -96 2 polygon
343(\265m) {hS} {/Times-RomanISO cf} (0.36) {/Times-Roman cf} 5 16 0.000 0.700 624
344-144 label
3450.600 0.600 0.600 scb
3461 1.000 512 -32 608 -32 2 polygon
3471 1.000 512 48 608 48 2 polygon
348sce
3491.000 0.000 592 48 generic::arrowhead
350-1.000 180.000 592 -32 generic::arrowhead
3511 1.000 592 -32 592 48 2 polygon
352(\265m) {hS} {/Times-RomanISO cf} (0.36) {/Times-Roman cf} 5 16 0.000 0.700 624
3530 label
3540.600 0.600 0.600 scb
3551 1.000 512 112 608 112 2 polygon
3561 1.000 512 256 608 256 2 polygon
357sce
3581.000 0.000 592 256 generic::arrowhead
359-1.000 180.000 592 112 generic::arrowhead
3601 1.000 592 112 592 256 2 polygon
361(\265m) {hS} {/Times-RomanISO cf} (0.845) {/Times-Roman cf} 5 16 0.000 0.700
362624 176 label
3630.600 0.600 0.600 scb
3641 1.000 512 320 608 320 2 polygon
3651 1.000 512 464 608 464 2 polygon
366sce
3671.000 0.000 592 464 generic::arrowhead
368-1.000 180.000 592 320 generic::arrowhead
3691 1.000 592 320 592 464 2 polygon
370(\265m) {hS} {/Times-RomanISO cf} (0.845) {/Times-Roman cf} 5 16 0.000 0.700
371624 384 label
3720.600 0.600 0.600 scb
3731 1.000 512 544 608 544 2 polygon
3741 1.000 512 752 624 752 2 polygon
375sce
3761.000 0.000 560 752 generic::arrowhead
377-1.000 180.000 560 544 generic::arrowhead
3781 1.000 560 544 560 752 2 polygon
379(\265m) {hS} {/Times-RomanISO cf} (1.26) {/Times-Roman cf} 5 16 0.000 0.700 592
380640 label
3811 1.000 672 -448 672 -384 2 polygon
3821 1.000 672 -496 672 -560 2 polygon
3830 1.000 -400 -400 -400 -336 -240 -336 -240 -400 4 polygon
384(field poly) {/Times-Roman cf} 2 21 0.000 0.700 -320 -368 label
3850.600 0.600 0.600 scb
3861 1.000 -696 -448 -1072 -448 2 polygon
3871 1.000 -736 -400 -824 -400 2 polygon
388sce
3891 1.000 -752 -448 -752 -512 2 polygon
3901.000 0.000 -752 -448 generic::arrowhead
3911 1.000 -752 -400 -752 -352 2 polygon
392-1.000 180.000 -752 -400 generic::arrowhead
3930.600 0.600 0.600 scb
3941 1.000 -768 -288 -872 -288 2 polygon
395sce
3961 1.000 -848 -448 -848 -384 2 polygon
3971.000 0.000 -848 -288 generic::arrowhead
398-1.000 180.000 -848 -448 generic::arrowhead
399(\265m) {/Times-RomanISO cf} {hS} (0.3262) {/Times-Roman cf} 5 17 0.000 0.700
400-760 -432 label
401(\265m) {/Times-RomanISO cf} {hS} (0.9361) {/Times-Roman cf} 5 23 0.000 0.700
402-776 -368 label
4030.600 0.600 0.600 scb
4041 1.000 -768 -176 -984 -176 2 polygon
405sce
4061 1.000 -848 -352 -848 -288 2 polygon
4071 1.000 -976 -448 -976 -256 2 polygon
4081 1.000 -976 -216 -976 -176 2 polygon
409-1.000 180.000 -976 -448 generic::arrowhead
4101.000 0.000 -976 -176 generic::arrowhead
411(\265m) {hS} {/Times-RomanISO cf} (1.3761) {/Times-Roman cf} 5 17 0.000 0.700
412-928 -248 label
4130.600 0.600 0.600 scb
4141 1.000 -768 -32 -1000 -32 2 polygon
415sce
4161 1.000 -992 -80 -992 -32 2 polygon
4171.000 0.000 -992 -32 generic::arrowhead
418(\265m) {hS} {/Times-RomanISO cf} (2.0061) {/Times-Roman cf} 5 17 0.000 0.700
419-936 -112 label
4200.600 0.600 0.600 scb
4211 1.000 -768 112 -1016 112 2 polygon
422sce
4231 1.000 -1008 64 -1008 112 2 polygon
4241.000 0.000 -1008 112 generic::arrowhead
425(\265m) {/Times-RomanISO cf} {hS} (2.7861) {/Times-Roman cf} 5 17 0.000 0.700
426-952 32 label
4270.600 0.600 0.600 scb
4281 1.000 -768 320 -1032 320 2 polygon
429sce
4301 1.000 -1024 256 -1024 320 2 polygon
4311.000 0.000 -1024 320 generic::arrowhead
432(\265m) {/Times-RomanISO cf} {hS} (4.0211) {/Times-Roman cf} 5 17 0.000 0.700
433-968 224 label
4340.600 0.600 0.600 scb
4351 1.000 -824 544 -1048 544 2 polygon
436sce
4371 1.000 -1040 464 -1040 544 2 polygon
4381.000 0.000 -1040 544 generic::arrowhead
439(\265m) {/Times-RomanISO cf} {hS} (5.3711) {/Times-Roman cf} 5 17 0.000 0.700
440-984 432 label
4410.800 0.800 0.800 scb
4421 1.000 -912 928 -1088 928 2 polygon
443sce
4441 1.000 -1056 816 -1056 928 2 polygon
4451.000 0.000 -1056 928 generic::arrowhead
446(\265m) {/Times-RomanISO cf} {hS} (11.8834) {/Times-Roman cf} 5 17 0.000 0.700
447-1016 784 label
4480.600 0.600 0.600 scb
4493 1.000 -720 -400 -448 -400 2 polygon
4500.000 0.000 1.000 scb
451(FOX K=3.9) {/Times-Roman cf} 2 19 0.000 0.700 -536 -432 label
452sce
453(p-substrate) {/Times-Roman cf} 2 16 0.000 0.700 448 -528 label
4540.000 0.000 1.000 scb
455(PSG K=3.9) {/Times-Roman cf} 2 23 0.000 0.700 -600 -344 label
456(LINT K=7.3) {/Times-Roman cf} 2 23 0.000 0.700 408 -240 label
4570.600 0.600 0.600 scb
4583 1.000 -480 -288 -760 -288 2 polygon
4590.000 0.000 1.000 scb
460(NILD2 K=4.05) {/Times-Roman cf} 2 23 0.000 0.700 -576 -216 label
4610.600 0.600 0.600 scb
4623 1.000 -752 -176 -480 -176 2 polygon
4633 1.000 -752 -32 -480 -32 2 polygon
4643 1.000 -752 112 -480 112 2 polygon
4653 1.000 -752 320 -480 320 2 polygon
4663 1.000 -808 544 -488 544 2 polygon
4670.000 0.000 1.000 scb
468(NILD3_C K=3.5) {/Times-Roman cf} 2 19 0.000 0.700 440 -80 label
469(NILD4 K=4.2) {/Times-Roman cf} 2 19 0.000 0.700 -576 24 label
470(NILD5 K=4.1) {/Times-Roman cf} 2 19 0.000 0.700 -576 200 label
471(NILD6 K=4.0) {/Times-Roman cf} 2 19 0.000 0.700 -576 408 label
472(NILD3 K=4.5) {/Times-Roman cf} 2 19 0.000 0.700 -576 -120 label
473(NILD4_C K=3.5) {/Times-Roman cf} 2 19 0.000 0.700 440 64 label
474(TOPOX K=3.9) {/Times-Roman cf} 2 19 0.000 0.700 304 784 label
475sce
476(0.0) {/Times-Roman cf} 2 23 0.000 0.700 -1088 -448 label
4771 1.000 -432 -224 -432 -272 2 polygon
4781.000 0.000 -432 -224 generic::arrowhead
479-1.000 180.000 -432 -176 generic::arrowhead
4801.000 0.000 -448 -32 generic::arrowhead
481-1.000 180.000 -448 -96 generic::arrowhead
4821 1.000 -448 -32 -448 -96 2 polygon
4831.000 0.000 -448 112 generic::arrowhead
484-1.000 180.000 -448 48 generic::arrowhead
4851 1.000 -448 112 -448 48 2 polygon
4861.000 0.000 -448 320 generic::arrowhead
487-1.000 180.000 -448 256 generic::arrowhead
4881 1.000 -448 320 -448 256 2 polygon
4891.000 0.000 -448 544 generic::arrowhead
490-1.000 180.000 -448 464 generic::arrowhead
4911 1.000 -448 544 -448 464 2 polygon
4921.000 0.000 -192 928 generic::arrowhead
493-1.000 180.000 -192 752 generic::arrowhead
4941 1.000 -192 928 -192 752 2 polygon
4950.600 0.600 0.600 scb
4961 1.000 -384 928 -160 928 2 polygon
497sce
498(\265m) {hS} {/Times-RomanISO cf} (0.265) {/Times-Roman cf} 5 20 0.000 0.700
499-472 -200 label
5000 1.000 -368 -336 -368 -288 -272 -288 -272 -336 4 polygon
501(\265m) {hS} {/Times-RomanISO cf} (0.27) {/Times-Roman cf} 5 20 0.000 0.700
502-432 -64 label
503(\265m) {hS} {/Times-RomanISO cf} (0.42) {/Times-Roman cf} 5 20 0.000 0.700
504-432 80 label
505(\265m) {hS} {/Times-RomanISO cf} (0.39) {/Times-Roman cf} 5 20 0.000 0.700
506-432 288 label
507(\265m) {hS} {/Times-RomanISO cf} (0.505) {/Times-Roman cf} 5 20 0.000 0.700
508-432 504 label
509(\265m) {hS} {/Times-RomanISO cf} (5.2523) {/Times-Roman cf} 5 20 0.000 0.700
510-176 824 label
5110.000 0.000 1.000 scb
512(IOX K=3.9) {/Times-Roman cf} 2 23 0.000 0.700 272 -312 label
513(SPNIT K=7.5) {/Times-Roman cf} 2 23 0.000 0.700 304 -352 label
514sce
5150 1.000 320 -432 320 -368 336 -368 336 -432 4 polygon
5161 1.000 336 -432 368 -432 368 -336 64 -336 64 -432 5 polygon
5170 1.000 464 -176 464 -96 496 -96 496 -176 4 polygon
5180 1.000 464 -32 464 48 496 48 496 -32 4 polygon
5190 1.000 -240 -400 -240 -336 -224 -336 -224 -400 4 polygon
5201 1.000 -224 -400 -192 -400 -192 -304 3 polygon
5211 1.000 -400 -400 -416 -400 -416 -336 -400 -336 4 polygon
5221 1.000 -416 -400 -448 -400 -448 -304 3 polygon
5231 1.000 -448 -304 -368 -304 2 polygon
5241 1.000 -192 -304 -272 -304 2 polygon
5251 1.000 64 -432 96 -432 2 polygon
5260 1.000 96 -432 96 -368 112 -368 112 -432 4 polygon
5270.600 0.600 0.600 scb
5281 1.000 384 -336 512 -336 2 polygon
529sce
530(\265m) {/Times-RomanISO cf} {hS} (0.121) {/Times-Roman cf} 5 20 0.000 0.700
531400 -352 label
5320.600 0.600 0.600 scb
5331 1.000 448 80 464 80 480 32 3 polygon
5341 1.000 448 -72 464 -72 480 -120 3 polygon
5351 1.000 328 -376 312 -312 280 -312 3 polygon
536sce
5371.000 0.000 416 -368 generic::arrowhead
5381 1.000 416 -368 416 -408 2 polygon
539-1.000 180.000 416 -336 generic::arrowhead
5401 1.000 416 -336 416 -296 2 polygon
5410.600 0.600 0.600 scb
5423 1.000 -192 -400 -48 -400 2 polygon
543sce
544(\265m) {/Times-RomanISO cf} {hS} (0.6099) {/Times-Roman cf} 5 23 0.000 0.700
545-64 -352 label
5461 1.000 -128 -336 -128 -288 2 polygon
5471 1.000 -128 -368 -128 -400 2 polygon
548-1.000 180.000 -128 -400 generic::arrowhead
5491.000 0.000 -128 -288 generic::arrowhead
5501 1.000 464 -264 464 -224 48 -224 3 polygon
5510.600 0.600 0.600 scb
5521 1.000 -144 -224 -208 -224 2 polygon
553sce
554-1.000 180.000 -176 -224 generic::arrowhead
5551.000 0.000 -176 -256 generic::arrowhead
5561 1.000 -176 -256 -176 -304 2 polygon
5571 1.000 -176 -224 -176 -184 2 polygon
558(\265m) {hS} {/Times-RomanISO cf} (0.075) {/Times-Roman cf} 5 21 0.000 0.700
559-176 -240 label
5601 1.000 464 -264 496 -264 2 polygon
5611 1.000 496 -288 432 -288 2 polygon
5621 1.000 -544 -256 -512 -256 -512 -224 -48 -224 4 polygon
5630.600 0.600 0.600 scb
5643 1.000 -552 -256 -760 -256 2 polygon
5650.000 0.000 1.000 scb
566(LINT K=7.3) {/Times-Roman cf} 2 23 0.000 0.700 -600 -272 label
5670.600 0.600 0.600 scb
5681 1.000 -768 -256 -920 -256 2 polygon
569sce
5701 1.000 -904 -304 -904 -256 2 polygon
5711.000 0.000 -904 -256 generic::arrowhead
572-1.000 180.000 -904 -448 generic::arrowhead
5731 1.000 -904 -448 -904 -344 2 polygon
574(\265m) {/Times-RomanISO cf} {hS} (1.0111) {/Times-Roman cf} 5 23 0.000 0.700
575-856 -320 label
5761 1.000 -432 -176 -432 -128 2 polygon
5771 1.000 -368 752 -368 776 -480 776 -480 544 4 polygon
5781 1.000 352 752 352 776 464 776 3 polygon
5791 1.000 464 776 464 544 448 544 3 polygon
5800.600 0.600 0.600 scb
5811 1.000 512 776 624 776 2 polygon
582sce
5831 1.000 616 712 616 752 2 polygon
5841 1.000 616 776 616 856 2 polygon
5851.000 0.000 616 752 generic::arrowhead
586-1.000 180.000 616 776 generic::arrowhead
587(\265m) {hS} {/Times-RomanISO cf} (0.09) {/Times-Roman cf} 5 16 0.000 0.700 640
588752 label
5890.600 0.600 0.600 scb
5901 1.000 312 792 344 792 368 760 3 polygon
5910.000 0.000 1.000 scb
592(TOPNIT K=7.5) {/Times-Roman cf} 2 19 0.000 0.700 -544 560 label
593sce
5941 1.000 -552 592 -512 592 -512 848 -368 848 -368 776 5 polygon
5951 1.000 352 776 352 848 488 848 488 600 496 600 5 polygon
5961 1.000 464 544 496 544 2 polygon
5970.600 0.600 0.600 scb
5983 1.000 -552 592 -832 592 2 polygon
599sce
6001 1.000 -824 544 -824 472 2 polygon
6011 1.000 -824 592 -824 656 2 polygon
602-1.000 180.000 -824 592 generic::arrowhead
6031.000 0.000 -824 544 generic::arrowhead
6041 1.000 -480 544 -464 544 2 polygon
6050.600 0.600 0.600 scb
6061 1.000 -352 848 -264 848 2 polygon
6071 1.000 -360 776 -264 776 2 polygon
608sce
6091 1.000 -328 776 -328 848 2 polygon
6101.000 0.000 -328 848 generic::arrowhead
611-1.000 180.000 -328 776 generic::arrowhead
612(\265m) {hS} {/Times-RomanISO cf} (0.54) {/Times-Roman cf} 5 20 0.000 0.700
613-312 808 label
614(\265m) {/Times-RomanISO cf} {hS} (0.3777) {/Times-Roman cf} 5 17 0.000 0.700
615-824 560 label
6161 1.000 -784 784 -784 928 2 polygon
617-1.000 180.000 -784 592 generic::arrowhead
6181.000 0.000 -784 928 generic::arrowhead
6191 1.000 -784 592 -784 736 2 polygon
620(\265m) {/Times-RomanISO cf} {hS} (6.1346) {/Times-Roman cf} 5 17 0.000 0.700
621-760 752 label
622-1.000 180.000 -992 -448 generic::arrowhead
6231 1.000 -992 -448 -992 -120 2 polygon
624-1.000 180.000 -1008 -448 generic::arrowhead
6251 1.000 -1008 -448 -1008 24 2 polygon
626-1.000 180.000 -1024 -448 generic::arrowhead
6271 1.000 -1024 -448 -1024 216 2 polygon
628-1.000 180.000 -1040 -448 generic::arrowhead
6291 1.000 -1040 -448 -1040 416 2 polygon
6301 1.000 -1056 -448 -1056 776 2 polygon
631-1.000 180.000 -1056 -448 generic::arrowhead
6320 1.000 -304 480 -304 496 -168 496 -168 480 4 polygon
6330 1.000 -288 496 -288 544 -192 544 -192 496 4 polygon
6340 1.000 -296 288 -296 320 -200 320 -200 288 4 polygon
6350.796 0.953 0.953 scb
636496 1.000 -312 272 -312 288 -176 288 -176 272 4 polygon
637sce
6380 1.000 -312 272 -312 288 -176 288 -176 272 4 polygon
639(cap2m) {/Times-Roman cf} 2 16 0.000 0.700 -152 480 label
640(via4) {/Times-Roman cf} 2 21 0.000 0.700 -240 520 label
641(via3) {/Times-Roman cf} 2 21 0.000 0.700 -248 304 label
642(capm) {/Times-Roman cf} 2 16 0.000 0.700 -160 272 label
6430.600 0.600 0.600 scb
6441 1.000 -432 -336 -520 -336 2 polygon
645sce
646-1.000 180.000 -496 -288 generic::arrowhead
6471 1.000 -496 -240 -496 -288 2 polygon
6481.000 0.000 -496 -336 generic::arrowhead
6491 1.000 -496 -336 -496 -384 2 polygon
650(\265m) {hS} {/Times-RomanISO cf} (0.4299) {/Times-Roman cf} 5 21 0.000 0.700
651-520 -312 label
6520.400 0.400 0.400 scb
6531 1.000 -448 -416 -448 -592 2 polygon
6541 1.000 -416 -416 -416 -624 2 polygon
6551 1.000 -400 -416 -400 -624 2 polygon
656sce
6571 1.000 -560 672 -512 672 2 polygon
6581 1.000 -480 672 -384 672 2 polygon
6591 1.000 -528 624 -480 624 2 polygon
6601 1.000 -464 624 -384 624 2 polygon
6611.000 90.000 -512 672 generic::arrowhead
6621.000 90.000 -480 624 generic::arrowhead
663-1.000 270.000 -464 624 generic::arrowhead
664-1.000 270.000 -480 672 generic::arrowhead
665-1.000 270.000 -416 -576 generic::arrowhead
6661.000 90.000 -448 -576 generic::arrowhead
6671.000 90.000 -416 -608 generic::arrowhead
668-1.000 270.000 -400 -608 generic::arrowhead
6691 1.000 -480 -608 -416 -608 2 polygon
6701 1.000 -400 -608 -320 -608 2 polygon
6711 1.000 -416 -576 -320 -576 2 polygon
6721 1.000 -448 -576 -512 -576 2 polygon
6731 1.000 544 0 496 0 2 polygon
6741 1.000 464 0 384 0 2 polygon
6751.000 90.000 464 0 generic::arrowhead
676-1.000 270.000 496 0 generic::arrowhead
677(\265m) {/Times-RomanISO cf} {hS} (0.006) {/Times-Roman cf} 5 20 0.000 0.700
678-296 -608 label
679(\265m) {/Times-RomanISO cf} {hS} (0.0431) {/Times-Roman cf} 5 20 0.000 0.700
680-296 -576 label
681(\265m) {/Times-RomanISO cf} {hS} (0.4223) {/Times-Roman cf} 5 20 0.000 0.700
682-376 672 label
683(\265m) {/Times-RomanISO cf} {hS} (0.070) {/Times-Roman cf} 5 20 0.000 0.700
684-376 624 label
685(\265m) {/Times-RomanISO cf} {hS} (0.030) {/Times-Roman cf} 5 23 0.000 0.700
686376 0 label
6871 1.000 464 -144 384 -144 2 polygon
6881.000 90.000 464 -144 generic::arrowhead
689(\265m) {/Times-RomanISO cf} {hS} (0.030) {/Times-Roman cf} 5 23 360.000 0.700
690376 -144 label
6911 1.000 544 -144 496 -144 2 polygon
692-1.000 270.000 496 -144 generic::arrowhead
6930.600 0.600 0.600 scb
6941 1.000 432 -248 432 -192 2 polygon
6951 1.000 464 -216 464 -192 2 polygon
696sce
6971.000 90.000 432 -200 generic::arrowhead
698-1.000 270.000 464 -200 generic::arrowhead
6991 1.000 544 -200 464 -200 2 polygon
7001 1.000 432 -200 384 -200 2 polygon
701(\265m) {/Times-RomanISO cf} {hS} (0.075) {/Times-Roman cf} 5 23 0.000 0.700
702368 -200 label
703pgsave restore showpage
704
705%%Page: captables 2
706%%PageOrientation: Portrait
707%%PageBoundingBox: 0 0 612 792
708/pgsave save def bop
709% 32.00 8.00 gridspace
7101.0000 inchscale
7112.6000 setlinewidth 861 1371 translate
712
7130.647 0.165 0.165 scb
714(SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1056
7151280 label
716sce
7171 1.000 -1056 1264 768 1264 2 polygon
7180.000 0.000 1.000 scb
719(n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1056 436 label
720(substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1056 388 label
721(diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1056 484 label
722(poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1054 580 label
723(li) {/Times-Roman cf} 2 28 0.000 1.000 -1056 676 label
724(metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1056 772 label
725(metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1056 868 label
726(metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1056 964 label
727(metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1056 1060 label
728(poly) {/Times-Roman cf} 2 19 0.000 1.000 224 1136 label
729(li) {/Times-Roman cf} 2 19 0.000 1.000 32 1136 label
730(metal1) {/Times-Roman cf} 2 19 0.000 1.000 -80 1136 label
731(metal2) {/Times-Roman cf} 2 19 0.000 1.000 -240 1136 label
732(metal3) {/Times-Roman cf} 2 19 0.000 1.000 -400 1136 label
733(metal4) {/Times-Roman cf} 2 19 0.000 1.000 -560 1136 label
734(metal5) {/Times-Roman cf} 2 19 0.000 1.000 -720 1136 label
735sce
7361 1.000 304 432 -864 432 2 polygon
7371 1.000 304 528 -864 528 2 polygon
7381 1.000 128 624 -864 624 2 polygon
7391 1.000 -48 720 -864 720 2 polygon
7401 1.000 -208 816 -864 816 2 polygon
7411 1.000 -368 912 -864 912 2 polygon
7421 1.000 -528 1008 -864 1008 2 polygon
7431 1.000 -688 1104 -864 1104 2 polygon
7440.180 0.545 0.341 scb
745(Inter-layer distances \(microns\)) {/Times-Roman cf} 2 16 0.000 1.000 -1056
7461216 label
747sce
748(0.3262) {/Times-Roman cf} 2 21 0.000 1.000 224 480 label
749(0.9361) {/Times-Roman cf} 2 21 0.000 1.000 48 480 label
750(1.3761) {/Times-Roman cf} 2 21 0.000 1.000 -128 480 label
751(2.0061) {/Times-Roman cf} 2 21 0.000 1.000 -288 480 label
752(4.0211) {/Times-Roman cf} 2 21 0.000 1.000 -608 480 label
753(2.7861) {/Times-Roman cf} 2 21 0.000 1.000 -448 480 label
754(5.3711) {/Times-Roman cf} 2 21 0.000 1.000 -768 480 label
755(0.4299) {/Times-Roman cf} 2 21 0.000 1.000 48 576 label
756(0.27) {/Times-Roman cf} 2 21 0.000 1.000 -288 768 label
757(0.42) {/Times-Roman cf} 2 21 0.000 1.000 -448 864 label
758(0.39) {/Times-Roman cf} 2 21 0.000 1.000 -608 960 label
759(0.505) {/Times-Roman cf} 2 21 0.000 1.000 -768 1056 label
7601 1.000 -864 1104 -864 432 2 polygon
7611 1.000 304 528 304 432 2 polygon
7621 1.000 128 624 128 432 2 polygon
7631 1.000 -48 720 -48 432 2 polygon
7641 1.000 -208 816 -208 432 2 polygon
7651 1.000 -368 912 -368 432 2 polygon
7661 1.000 -528 1008 -528 432 2 polygon
7671 1.000 -688 1104 -688 432 2 polygon
768(1.74) {/Times-Roman cf} 2 21 0.000 1.000 -768 960 label
769(3.005) {/Times-Roman cf} 2 21 0.000 1.000 -768 864 label
770(3.635) {/Times-Roman cf} 2 21 0.000 1.000 -768 768 label
771(4.335) {/Times-Roman cf} 2 21 0.000 1.000 -768 672 label
772(4.8649) {/Times-Roman cf} 2 21 0.000 1.000 -768 576 label
773(1.655) {/Times-Roman cf} 2 21 0.000 1.000 -608 864 label
774(2.285) {/Times-Roman cf} 2 21 0.000 1.000 -608 768 label
775(2.985) {/Times-Roman cf} 2 21 0.000 1.000 -608 672 label
776(3.5149) {/Times-Roman cf} 2 21 0.000 1.000 -608 576 label
777(1.05) {/Times-Roman cf} 2 21 0.000 1.000 -448 768 label
778(1.75) {/Times-Roman cf} 2 21 0.000 1.000 -448 672 label
779(2.2799) {/Times-Roman cf} 2 21 0.000 1.000 -448 576 label
780(0.97) {/Times-Roman cf} 2 21 0.000 1.000 -288 672 label
781(1.4999) {/Times-Roman cf} 2 21 0.000 1.000 -288 576 label
782(0.34) {/Times-Roman cf} 2 21 0.000 1.000 -128 672 label
783(0.8699) {/Times-Roman cf} 2 21 0.000 1.000 -128 576 label
7840.180 0.545 0.341 scb
785(Inter-layer capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1056 240 label
786sce
787(\)) {ns} (2) {Ss} (\265m) {/Times-RomanISO cf} (\(final values in aF/)
788{/Times-Roman cf} 8 16 0.000 1.000 -640 240 label
789(70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -784 48 label
790(20.4659) {/Times-Roman cf} 2 16 0.000 1.000 -784 -48 label
791(93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -528 -48 label
792(22.0677) {/Times-Roman cf} 2 16 0.000 1.000 -544 -144 label
793(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -304 -144 label
794(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -80 -240 label
795(92.872) {/Times-Roman cf} 2 16 0.000 1.000 432 -432 label
796(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 416 -528 label
797(105.8571) {/Times-Roman cf} 2 16 0.000 1.000 672 -528 label
798(11.9856) {/Times-Roman cf} 2 16 0.000 1.000 -784 -144 label
799(10.0109) {/Times-Roman cf} 2 16 0.000 1.000 -784 -240 label
800(16.1884) {/Times-Roman cf} 2 16 0.000 1.000 -544 -240 label
801(36.0337) {/Times-Roman cf} 2 16 0.000 1.000 -304 -240 label
802(8.5302) {/Times-Roman cf} 2 16 0.000 1.000 -768 -336 label
803(12.640) {/Times-Roman cf} 2 16 0.000 1.000 -544 -336 label
804(22.177) {/Times-Roman cf} 2 16 0.000 1.000 -304 -336 label
805(7.6460) {/Times-Roman cf} 2 16 0.000 1.000 -768 -432 label
806(10.791) {/Times-Roman cf} 2 16 0.000 1.000 -544 -432 label
807(17.051) {/Times-Roman cf} 2 16 0.000 1.000 -304 -432 label
808(6.7968) {/Times-Roman cf} 2 16 0.000 1.000 -768 -528 label
809(9.1734) {/Times-Roman cf} 2 16 0.000 1.000 -528 -528 label
810(13.335) {/Times-Roman cf} 2 16 0.000 1.000 -304 -528 label
811(18.514) {/Times-Roman cf} 2 16 0.000 1.000 -64 -528 label
812(26.009) {/Times-Roman cf} 2 16 0.000 1.000 176 -528 label
813(45.235) {/Times-Roman cf} 2 16 0.000 1.000 176 -432 label
814(26.544) {/Times-Roman cf} 2 16 0.000 1.000 -64 -432 label
815(41.466) {/Times-Roman cf} 2 16 0.000 1.000 -64 -336 label
816(116.96) {/Times-Roman cf} 2 16 0.000 1.000 176 -336 label
8170.000 0.000 1.000 scb
818(n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -556 label
819(substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -604 label
820(diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -508 label
821(poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1038 -412 label
822(li) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -316 label
823(metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -220 label
824(metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -124 label
825(metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -28 label
826(metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1040 68 label
827(poly) {/Times-Roman cf} 2 19 0.000 1.000 800 144 label
828(li) {/Times-Roman cf} 2 19 0.000 1.000 496 144 label
829(metal1) {/Times-Roman cf} 2 19 0.000 1.000 320 144 label
830(metal2) {/Times-Roman cf} 2 19 0.000 1.000 80 144 label
831(metal3) {/Times-Roman cf} 2 19 0.000 1.000 -160 144 label
832(metal4) {/Times-Roman cf} 2 19 0.000 1.000 -416 144 label
833(metal5) {/Times-Roman cf} 2 19 0.000 1.000 -688 144 label
834sce
8351 1.000 864 -560 -848 -560 2 polygon
8361 1.000 864 -464 -848 -464 2 polygon
8371 1.000 624 -368 -848 -368 2 polygon
8381 1.000 368 -272 -848 -272 2 polygon
8391 1.000 128 -176 -848 -176 2 polygon
8401 1.000 -112 -80 -848 -80 2 polygon
8411 1.000 -352 16 -848 16 2 polygon
8421 1.000 -592 112 -848 112 2 polygon
8431 1.000 -848 112 -848 -560 2 polygon
8441 1.000 864 -464 864 -560 2 polygon
8451 1.000 624 -368 624 -560 2 polygon
8461 1.000 368 -272 368 -560 2 polygon
8471 1.000 128 -176 128 -560 2 polygon
8481 1.000 -112 -80 -112 -560 2 polygon
8491 1.000 -352 16 -352 -560 2 polygon
8501 1.000 -592 112 -592 -560 2 polygon
851{ns} (\2616) {/Times-Roman cf} {Ss} (, so divide by 1.0e) {ns} (2) {Ss} (\265m)
852{/Times-RomanISO cf} (Note: LEF CPERSQDIST is in pF/) {/Times-Roman cf} 12 16
8530.000 1.000 -128 240 label
8540.000 0.000 1.000 scb
855(n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1532 label
856(substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1580 label
857(diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1484 label
858(poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1038 -1388 label
859(li) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1292 label
860(metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1196 label
861(metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1100 label
862(metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1004 label
863(metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -908 label
864(poly) {/Times-Roman cf} 2 19 0.000 1.000 800 -832 label
865(li) {/Times-Roman cf} 2 19 0.000 1.000 496 -832 label
866(metal1) {/Times-Roman cf} 2 19 0.000 1.000 320 -832 label
867(metal2) {/Times-Roman cf} 2 19 0.000 1.000 80 -832 label
868(metal3) {/Times-Roman cf} 2 19 0.000 1.000 -160 -832 label
869(metal4) {/Times-Roman cf} 2 19 0.000 1.000 -416 -832 label
870(metal5) {/Times-Roman cf} 2 19 0.000 1.000 -688 -832 label
871sce
8721 1.000 864 -1536 -848 -1536 2 polygon
8731 1.000 864 -1440 -848 -1440 2 polygon
8741 1.000 624 -1344 -848 -1344 2 polygon
8751 1.000 368 -1248 -848 -1248 2 polygon
8761 1.000 128 -1152 -848 -1152 2 polygon
8771 1.000 -112 -1056 -848 -1056 2 polygon
8781 1.000 -352 -960 -848 -960 2 polygon
8791 1.000 -592 -864 -848 -864 2 polygon
8801 1.000 -848 -864 -848 -1536 2 polygon
8811 1.000 864 -1440 864 -1536 2 polygon
8821 1.000 624 -1344 624 -1536 2 polygon
8831 1.000 368 -1248 368 -1536 2 polygon
8841 1.000 128 -1152 128 -1536 2 polygon
8851 1.000 -112 -1056 -112 -1536 2 polygon
8861 1.000 -352 -960 -352 -1536 2 polygon
8871 1.000 -592 -864 -592 -1536 2 polygon
8880.180 0.545 0.341 scb
889(Fringe capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1040 -720 label
890sce
891(\265m\)) {/Times-RomanISO cf} (\(values in aF/) {/Times-Roman cf} 4 16 0.000
8921.000 -624 -720 label
893{ns} (\2616) {/Times-Roman cf} {Ss} (\265m, so divide by 1.0e)
894{/Times-RomanISO cf} (Note: LEF EDGECAPACITANCE is in pF/) {/Times-Roman cf} 8
89516 0.000 1.000 -112 -720 label
896(102.25) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1504 label
897(99.483) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1504 label
898(116.62) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1504 label
899(94.529) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1504 label
900(106.39) {/Times-Roman cf} 2 16 0.000 1.000 192 -1504 label
901(72.763) {/Times-Roman cf} 2 16 0.000 1.000 432 -1504 label
902(141.68) {/Times-Roman cf} 2 16 0.000 1.000 688 -1504 label
903(109.36) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1408 label
904(109.04) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1408 label
905(135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1408 label
906(115.79) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1408 label
907(152.95) {/Times-Roman cf} 2 16 0.000 1.000 192 -1408 label
908(120.86) {/Times-Roman cf} 2 16 0.000 1.000 432 -1408 label
909(113.11) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1312 label
910(114.74) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1312 label
911(150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1312 label
912(137.79) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1312 label
913(249.97) {/Times-Roman cf} 2 16 0.000 1.000 192 -1312 label
914(119.67) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1216 label
915(125.83) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1216 label
916(191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1216 label
917(273.21) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1216 label
918(129.16) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1120 label
919(144.86) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1120 label
920(341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1120 label
921(168.89) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1024 label
922(351.52) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1024 label
923(378.01) {/Times-Roman cf} 2 16 0.000 1.000 -784 -928 label
9240.180 0.545 0.341 scb
925(Sidewall capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1040 -1696 label
926sce
927(\265m\)) {/Times-RomanISO cf} (\(values in aF/) {/Times-Roman cf} 4 16 0.000
9281.000 -624 -1696 label
9290.000 0.000 1.000 scb
930(poly) {/Times-Roman cf} 2 19 0.000 1.000 784 -1776 label
931(li) {/Times-Roman cf} 2 19 0.000 1.000 480 -1776 label
932(metal1) {/Times-Roman cf} 2 19 0.000 1.000 304 -1776 label
933(metal2) {/Times-Roman cf} 2 19 0.000 1.000 64 -1776 label
934(metal3) {/Times-Roman cf} 2 19 0.000 1.000 -176 -1776 label
935(metal4) {/Times-Roman cf} 2 19 0.000 1.000 -432 -1776 label
936(metal5) {/Times-Roman cf} 2 19 0.000 1.000 -704 -1776 label
937sce
9381 1.000 864 -1824 -848 -1824 2 polygon
9391 1.000 -848 -1920 -848 -1824 2 polygon
9401 1.000 864 -1920 864 -1824 2 polygon
9411 1.000 624 -1920 624 -1824 2 polygon
9421 1.000 368 -1920 368 -1824 2 polygon
9431 1.000 128 -1920 128 -1824 2 polygon
9441 1.000 -112 -1920 -112 -1824 2 polygon
9451 1.000 -352 -1920 -352 -1824 2 polygon
9461 1.000 -592 -1920 -592 -1824 2 polygon
9471 1.000 864 -1920 -848 -1920 2 polygon
948(77.267) {/Times-Roman cf} 2 21 0.000 1.000 -736 -1872 label
949(29.9265) {/Times-Roman cf} 2 21 0.000 1.000 -480 -1872 label
950(30.675) {/Times-Roman cf} 2 21 0.000 1.000 -240 -1872 label
951(13.387) {/Times-Roman cf} 2 21 0.000 1.000 0 -1872 label
952(14.343) {/Times-Roman cf} 2 21 0.000 1.000 240 -1872 label
953(3.937) {/Times-Roman cf} 2 21 0.000 1.000 496 -1872 label
954(6.710) {/Times-Roman cf} 2 21 0.000 1.000 736 -1872 label
9550.820 0.039 0.859 scb
9560 1.000 112 -1936 112 -256 384 -256 384 -1936 4 polygon
957pgsave restore showpage
958
959%%Page: worksheet1 3
960%%PageOrientation: Portrait
961%%PageBoundingBox: 0 0 612 792
962/pgsave save def bop
963% 32.00 8.00 gridspace
9640.6922 inchscale
9652.6000 setlinewidth 822 1572 translate
966
9670.180 0.545 0.341 scb
968(Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072
9691024 label
970sce
971(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 912 label
972(0.505) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
973(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 848 label
974(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 784 label
975(1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
976(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 720 label
977(0.39) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
978(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 672 label
979(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 608 label
980(1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
981(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 544 label
982(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
983(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 496 label
984(0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
985(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 448 label
986(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 384 label
987(1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
988(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 320 label
989(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
990(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 272 label
991(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
992(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 224 label
993(0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
994(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 176 label
995(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 112 label
996(1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
997(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 48 label
998(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
999(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 0 label
1000(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1001(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -48 label
1002(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1003(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -96 label
1004(0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1005(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -144 label
1006(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1007(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -192 label
1008(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -256 label
1009(1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1010(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 -320 label
1011(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1012(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 -368 label
1013(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1014(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -416 label
1015(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1016(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -464 label
1017(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1018(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -512 label
1019(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1020(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -560 label
1021(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1022(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -992 -608 label
1023(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -736 label
1024(1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1025(4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 -800 label
1026(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1027(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 -848 label
1028(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1029(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -896 label
1030(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1031(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -944 label
1032(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1033(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -992 label
1034(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1035(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -1040 label
1036(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1037(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -992 -1088 label
1038(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 784 label
1039(0.39) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1040(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 720 label
1041(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 608 label
1042(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1043(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 544 label
1044(0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1045(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 496 label
1046(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 384 label
1047(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1048(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 320 label
1049(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1050(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 272 label
1051(0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1052(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 224 label
1053(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 112 label
1054(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1055(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 48 label
1056(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1057(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 0 label
1058(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1059(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -48 label
1060(0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1061(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -96 label
1062(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1063(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -144 label
1064(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -256 label
1065(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1066(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 -320 label
1067(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1068(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 -368 label
1069(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1070(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -416 label
1071(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1072(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -464 label
1073(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1074(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -512 label
1075(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -736 label
1076(1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1077(4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 -800 label
1078(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1079(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 -848 label
1080(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1081(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -896 label
1082(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1083(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -944 label
1084(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1085(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -992 label
1086(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1087(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -1040 label
1088(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 608 label
1089(0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1090(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 544 label
1091(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 384 label
1092(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1093(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 320 label
1094(0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1095(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 272 label
1096(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 112 label
1097(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1098(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 48 label
1099(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1100(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 0 label
1101(0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1102(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -48 label
1103(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1104(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -96 label
1105(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -256 label
1106(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1107(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 -320 label
1108(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1109(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -368 label
1110(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1111(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -416 label
1112(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1113(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -464 label
1114(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -736 label
1115(0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1116(4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 -800 label
1117(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1118(4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -848 label
1119(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1120(4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -896 label
1121(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1122(7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -944 label
1123(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1124(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -992 label
1125(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 240 384 label
1126(0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1127(4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 320 label
1128(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 240 112 label
1129(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1130(4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 48 label
1131(0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1132(4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 0 label
1133(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1134(7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -48 label
1135(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 256 -256 label
1136(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1137(4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -320 label
1138(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1139(4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -368 label
1140(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1141(7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -416 label
1142(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 256 -736 label
1143(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1144(4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -800 label
1145(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1146(4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -848 label
1147(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1148(7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -896 label
1149(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1150(3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -944 label
1151(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 672 112 label
1152(0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1153(4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 48 label
1154(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1155(7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 0 label
1156(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 688 -256 label
1157(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1158(4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -320 label
1159(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1160(7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -368 label
1161(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 688 -736 label
1162(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1163(4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -800 label
1164(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1165(7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -848 label
1166(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1167(3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -896 label
1168(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -256 label
1169(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -736 label
1170(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1171(3.9) {/Times-Roman cf} 13 16 0.000 1.000 1168 -800 label
1172(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1456 -736 label
1173(0.3262) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1174(3.9) {/Times-Roman cf} 13 16 0.000 1.000 1520 -800 label
1175(\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464
11761024 label
11770.647 0.165 0.165 scb
1178(SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1072
11791080 label
1180sce
11811 1.000 -1080 1064 1784 1064 2 polygon
1182( \(used in magic tech file extract section\)) {ns} (2) {Ss} (\265m)
1183{/Times-RomanISO cf} (8.854 to get result in aF/) {/Times-Roman cf} ( = ) {ns}
1184(0) {ss} (e) {/Symbol cf} (Use ) {/Times-Roman cf} 16 16 0.000 1.000 -1024
1185-1192 label
1186(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1187(7.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -656 label
1188(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1189(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -560 label
1190(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1191(7.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -608 label
1192(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1193(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -512 label
1194(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1195(7.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -560 label
1196(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1197(3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -464 label
1198(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1199(7.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -512 label
1200(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1201(3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -416 label
1202(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1203(7.5) {/Times-Roman cf} 13 16 0.000 1.000 752 -464 label
1204(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1205(3.9) {/Times-Roman cf} 13 16 0.000 1.000 1104 -320 label
1206(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
1207(7.5) {/Times-Roman cf} 13 16 0.000 1.000 1104 -368 label
1208pgsave restore showpage
1209
1210%%Page: worksheet2 4
1211%%PageOrientation: Portrait
1212%%PageBoundingBox: 0 0 612 792
1213/pgsave save def bop
1214% 32.00 8.00 gridspace
12150.6922 inchscale
12162.6000 setlinewidth 814 1600 translate
1217
12180.180 0.545 0.341 scb
1219(Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072
1220992 label
1221sce
1222(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 880 label
1223(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 752 label
1224(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 576 label
1225(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 352 label
1226(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -992 144 label
1227(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 80 label
1228(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -288 label
1229(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -768 label
1230(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 752 label
1231(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 576 label
1232(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 352 label
1233(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 80 label
1234(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -288 label
1235(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -768 label
1236(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 576 label
1237(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 352 label
1238(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 80 label
1239(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -288 label
1240(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -768 label
1241(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 256 352 label
1242(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 256 80 label
1243(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 272 -288 label
1244(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 272 -768 label
1245(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 688 80 label
1246(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 704 -288 label
1247(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 704 -768 label
1248(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -288 label
1249(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -768 label
1250(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1464 -768 label
1251(\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464
1252992 label
1253(70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -992 816 label
1254(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 688 label
1255(93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -992 640 label
1256(93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -544 688 label
1257(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 512 label
1258(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 464 label
1259(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 512 label
1260(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -992 416 label
1261(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -544 464 label
1262(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -96 512 label
1263(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 288 label
1264(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 16 label
1265(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -352 label
1266(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -832 label
1267(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 240 label
1268(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -32 label
1269(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -400 label
1270(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -880 label
1271(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -832 label
1272(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -352 label
1273(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 16 label
1274(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 288 label
1275(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 192 label
1276(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 240 label
1277(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 288 label
1278(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -80 label
1279(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -32 label
1280(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 16 label
1281(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -448 label
1282(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -400 label
1283(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -352 label
1284(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -928 label
1285(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -880 label
1286(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -832 label
1287(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -544 192 label
1288(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -96 240 label
1289(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 336 288 label
1290(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -128 label
1291(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -80 label
1292(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -32 label
1293(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 16 label
1294(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -496 label
1295(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -448 label
1296(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -400 label
1297(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -352 label
1298(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -976 label
1299(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -928 label
1300(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -880 label
1301(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -832 label
1302(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -224 label
1303(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -176 label
1304(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -128 label
1305(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -80 label
1306(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -32 label
1307(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -592 label
1308(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -544 label
1309(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -496 label
1310(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -448 label
1311(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -400 label
1312(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1072 label
1313(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1024 label
1314(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -976 label
1315(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -928 label
1316(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -880 label
1317(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1120 label
1318(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1072 label
1319(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -96 -1024 label
1320(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 336 -976 label
1321(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 768 -928 label
1322(\) to get final interlayer capacitor value.) {ns} (N) {ss} ( + ... + 1/C) {ns}
1323(1) {ss} ( + 1/C) {ns} (0) {ss} ( = 1/C) {ns} (tot) {ss}
1324(Add these in parallel combination \(1/C) {/Times-Roman cf} 18 16 0.000 1.000
1325-992 -1216 label
1326(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 1184 -832 label
1327(105.8571) {/Times-Roman cf} 2 16 0.000 1.000 1520 -832 label
13281 1.000 -1072 1032 1792 1032 2 polygon
13290.647 0.165 0.165 scb
1330(SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1064
13311048 label
1332sce
1333(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -992 -640 label
1334(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -992 -688 label
1335(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -544 -592 label
1336(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -544 -640 label
1337(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -96 -544 label
1338(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -96 -592 label
1339(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 336 -496 label
1340(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 336 -544 label
1341(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 768 -448 label
1342(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 768 -496 label
1343(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 1184 -352 label
1344(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 1184 -400 label
1345(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1024 label
1346(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -976 label
1347(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -928 label
1348(98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -880 label
1349(98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -832 label
1350(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -544 label
1351(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -496 label
1352(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -448 label
1353(98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -400 label
1354(98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -352 label
1355(135.320) {/Times-Roman cf} 2 16 0.000 1.000 -992 -176 label
1356(135.320) {/Times-Roman cf} 2 16 0.000 1.000 -544 -128 label
1357(135.320) {/Times-Roman cf} 2 16 0.000 1.000 -96 -80 label
1358(135.320) {/Times-Roman cf} 2 16 0.000 1.000 336 -32 label
1359(135.320) {/Times-Roman cf} 2 16 0.000 1.000 768 16 label
1360pgsave restore showpage
1361
1362%%Page: worksheet3 5
1363%%PageOrientation: Portrait
1364%%PageBoundingBox: 0 0 612 792
1365/pgsave save def bop
1366% 32.00 8.00 gridspace
13670.6922 inchscale
13682.6000 setlinewidth 1277 1656 translate
1369
13700.647 0.165 0.165 scb
1371(Interlayer \(fringe\) capacitance worksheet:) {/Times-Roman cf} 2 16 0.000
13721.000 -1280 896 label
1373sce
1374( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C)
1375{/Times-Roman cf} 6 16 0.000 1.000 -1280 800 label
13761 1.000 -456 808 -344 808 2 polygon
1377(K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -408
1378824 label
1379(log\(h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -392 792 label
1380(where h is the distance between layers and t is the sidewall thickness.)
1381{/Times-Roman cf} 2 16 0.000 1.000 -224 800 label
1382(Use geometric mean for K \(instead of doing series capacitor additions\).)
1383{/Times-Roman cf} 2 16 0.000 1.000 -1288 680 label
1384( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2)
1385{/Times-Roman cf} 8 16 0.000 1.000 -216 744 label
1386( \(5-3\) = \(1.35/1.74\) * 4.0 + \(0.39/1.74\) * 4.1 = 4.0224) {ns} (eff) {ss}
1387(K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 560 label
1388
1389( \(5-2\) = \(1.35/3.005\) * 4.0 + \(1.235/3.005\) * 4.1 + \(0.42/3.005\) * 4.2 = 4.0691)
1390{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 512 label
1391
1392( \(5-1\) = \(1.35/3.635\) * 4.0 + \(1.235/3.635\) * 4.1 + \(0.78/3.635\) * 4.2 + \(0.27/3.635\) * 4.5 = 4.114)
1393{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 464 label
1394
1395( \(5-li\) = \(1.35/4.335\) * 4.0 + \(1.235/4.335\) * 4.1 + \(0.78/4.335\) * 4.2 + \(0.63/4.335\) * 4.5 + \(0.265/4.335\) * 4.05 + \(0.075/4.335\) * 7.3 = 4.1973)
1396{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 416 label
1397
1398(+ \(0.075/4.8649\) * 7.3 + \(0.3089/4.8649\) * 3.9 + \(0.121/4.8649\) * 7.5 = 4.2575)
1399{CR}
1400( \(5-poly\) = \(1.35/4.8649\) * 4.0 + \(1.235/4.8649\) * 4.1 + \(0.78/4.8649\) * 4.2 + \(0.63/4.8649\) * 4.5 + \(0.365/4.8649\) * 4.05)
1401{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 320 label
1402(+ \(0.075/5.3711\) * 7.3 + \(0.9361/5.3711\) * 3.9 = 4.1427) {CR}
1403( \(5-sub\) = \(1.35/5.3711\) * 4.0 + \(1.235/5.3711\) * 4.1 + \(0.78/5.3711\) * 4.2 + \(0.63/5.3711\) * 4.5 + \(0.365/5.3711\) * 4.05)
1404{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 224 label
1405( \(4-3\) = 4.1 ) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
1406128 label
1407( \(4-2\) = \(1.235/1.655\) * 4.1 + \(0.42/1.655\) * 4.2 = 4.1254) {ns} (eff)
1408{ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 80 label
1409
1410( \(4-1\) = \(1.235/2.285\) * 4.1 + \(0.78/2.285\) * 4.2 + \(0.27/2.285\) * 4.5 = 4.1814)
1411{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 32 label
1412
1413( \(4-li\) = \(1.235/2.985\) * 4.1 + \(0.78/2.985\) * 4.2 + \(0.63/2.985\) * 4.5 + \(0.265/2.985\) * 4.05 + \(0.075/2.985\) * 7.3 = 4.2865)
1414{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -16 label
1415
1416(+ \(0.075/3.5149\) * 7.3 + \(0.3089/3.5149\) * 3.9 + \(0.121/3.5149\) * 7.5 = 4.3564)
1417{CR}
1418( \(4-poly\) = \(1.235/3.5149\) + \(0.78/3.5149\) * 4.2 + \(0.63/3.5149\) * 4.5 + \(0.365/3.5149\) * 4.05)
1419{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -112 label
1420(+ \(0.075/4.0211\) * 7.3 + \(0.9361/4.0211\) * 3.9 = 4.1907) {CR}
1421( \(4-sub\) = \(1.235/4.0211\) * 4.1 + \(0.78/4.0211\) * 4.2 + \(0.63/4.0211\) * 4.5 + \(0.365/4.0211\) * 4.05)
1422{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -208 label
1423( \(5-4\) = 4.0) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
1424608 label
1425( \(3-2\) = 4.2) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
1426-288 label
1427( \(3-1\) = \(0.78/1.05\) * 4.2 + \(0.27/1.05\) * 4.5 = 4.2771 ) {ns} (eff)
1428{ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -336 label
1429
1430( \(3-li\) = \(0.78/1.75\) * 4.2 + \(0.63/1.75\) * 4.5 + \(0.265/1.75\) * 4.05 + \(0.075/1.75\) * 7.3 = 4.4181)
1431{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -384 label
1432
1433(+ \(0.075/2.2799\) * 7.3 + \(0.3089/2.2799\) * 3.9 + \(0.121/2.2799\) * 7.5 = 4.4954)
1434{CR}
1435( \(3-poly\) = \(0.78/2.2799\) * 4.2 + \(0.63/2.2799\) * 4.5 + \(0.365/2.2799\) * 4.05)
1436{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -480 label
1437
1438( \(3-sub\) = \(0.78/2.7861\) * 4.2 + \(0.63/2.7861\) * 4.5 + \(0.365/2.7861\) * 4.05 + \(0.075/2.7861\) * 7.3 + \(0.9361/2.7861\) * 3.9 = 4.2308)
1439{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -528 label
1440( \(2-1\) = 4.5) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
1441-608 label
1442
1443( \(2-li\) = \(0.63/0.97\) * 4.5 + \(0.265/0.97\) * 4.05 + \(0.075/0.97\) * 7.3 = 4.5936)
1444{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -656 label
1445
1446( \(2-poly\) = \(0.63/1.4999\) * 4.5 + \(0.365/1.4999\) * 4.05 + \(0.075/1.4999\) * 7.3 + \(0.3089/1.4999\) * 3.9 + \(0.121/1.4999\) * 7.5 = 4.6489)
1447{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -704 label
1448
1449( \(2-sub\) = \(0.63/2.0061\) * 4.5 + \(0.365/2.0061\) * 4.05 + \(0.075/2.0061\) * 7.3 + \(0.9361/2.0061\) * 3.9 = 4.2428)
1450{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -752 label
1451( \(1-li\) = \(0.265/0.34\) * 4.05 + \(0.075/0.34\) * 7.3 = 4.7669) {ns} (eff)
1452{ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -832 label
1453
1454( \(1-poly\) = \(0.265/0.7699\) + \(0.075/0.7699\) * 7.3 + \(0.3089/0.7699\) * 3.9 + \(0.121/0.7699\) * 7.5 = 4.8486)
1455{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -880 label
1456
1457( \(1-sub\) = \(0.365/1.3761\) * 4.05 + \(0.075/1.3761\) * 7.3 + \(0.9361/1.3761\) * 3.9 = 4.1251)
1458{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -928 label
1459( \(li-poly\) = \(0.3089/0.4299\) * 3.9 + \(0.121/0.4299\) * 7.5 = 4.9133) {ns}
1460(eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -1024 label
1461( \(li-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000
1462-1280 -1072 label
1463( \(poly-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000
1464-1280 -1152 label
14651 1.000 -1280 192 1008 192 2 polygon
14661 1.000 -1280 -240 1008 -240 2 polygon
14671 1.000 -1280 -560 1008 -560 2 polygon
14681 1.000 -1280 -784 1008 -784 2 polygon
14691 1.000 -1280 -960 1008 -960 2 polygon
14701 1.000 -1280 -1104 1008 -1104 2 polygon
14711 1.000 -1280 -1184 1008 -1184 2 polygon
14721 1.000 -1280 656 1008 656 2 polygon
1473pgsave restore showpage
1474
1475%%Page: worksheet4 6
1476%%PageOrientation: Portrait
1477%%PageBoundingBox: 0 0 612 792
1478/pgsave save def bop
1479% 32.00 8.00 gridspace
14800.6922 inchscale
14812.6000 setlinewidth 939 1793 translate
1482
14830.000 0.000 1.000 scb
1484(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896 label
1485(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 720 label
1486(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -832 720 label
1487(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 544 label
1488(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -832 544 label
1489(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -384 544 label
1490(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label
1491(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -832 352 label
1492(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -384 352 label
1493(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 48 352 label
1494(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label
1495(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -832 160 label
1496(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -384 160 label
1497(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 48 160 label
1498(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 480 160 label
1499(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -64 label
1500(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -64 label
1501(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -64 label
1502(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 48 -64 label
1503(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 480 -64 label
1504(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 896 -64 label
1505(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -272 label
1506(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -272 label
1507(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -272 label
1508(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 48 -272 label
1509(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 480 -272 label
1510(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 896 -272 label
1511(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1248 -272 label
1512sce
1513
1514(\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\))
1515{/Times-Roman cf} 2 16 0.000 1.000 -864 896 label
1516(55.631 * 4.0) {/Times-Roman cf} 2 16 0.000 1.000 -1248 848 label
15171 1.000 -1264 832 -1024 832 2 polygon
1518(log\(1 + 2\2640.505/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1152 800 label
1519(55.631 * 4.0224) {/Times-Roman cf} 2 16 0.000 1.000 -1264 672 label
15201 1.000 -1264 656 -1024 656 2 polygon
1521(log\(1 + 2\2641.74/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 624 label
1522(55.631 * 4.0691) {/Times-Roman cf} 2 16 0.000 1.000 -1264 496 label
15231 1.000 -1264 480 -1024 480 2 polygon
1524(log\(1 + 2\2643.005/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 448 label
1525(55.631 * 4.114) {/Times-Roman cf} 2 16 0.000 1.000 -1264 304 label
15261 1.000 -1264 288 -1024 288 2 polygon
1527(log\(1 + 2\2643.635/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 256 label
1528(55.631 * 4.1973) {/Times-Roman cf} 2 16 0.000 1.000 -1264 112 label
15291 1.000 -1264 96 -1024 96 2 polygon
1530(log\(1 + 2\2644.335/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 64 label
1531(55.631 * 4.2575) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -112 label
15321 1.000 -1264 -128 -1024 -128 2 polygon
1533(log\(1 + 2\2644.8649/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 -160
1534label
1535(55.631 * 4.1427) {/Times-Roman cf} 2 16 0.000 1.000 -1248 -320 label
15361 1.000 -1248 -336 -1008 -336 2 polygon
1537(log\(1 + 2\2645.3711/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1120 -368
1538label
1539(55.631 * 4.1) {/Times-Roman cf} 2 16 0.000 1.000 -832 672 label
15401 1.000 -832 656 -592 656 2 polygon
1541(log\(1 + 2\2640.39/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 624 label
15421 1.000 -832 480 -592 480 2 polygon
1543(log\(1 + 2\2641.655/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 448 label
1544(55.631 * 4.1254) {/Times-Roman cf} 2 16 0.000 1.000 -832 496 label
15451 1.000 -832 288 -592 288 2 polygon
1546(log\(1 + 2\2642.285/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 256 label
1547(55.631 * 4.2865) {/Times-Roman cf} 2 16 0.000 1.000 -832 112 label
15481 1.000 -832 96 -592 96 2 polygon
1549(log\(1 + 2\2642.985/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 64 label
1550(55.631 * 4.3564) {/Times-Roman cf} 2 16 0.000 1.000 -832 -112 label
15511 1.000 -832 -128 -592 -128 2 polygon
1552(log\(1 + 2\2643.5149/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 -160
1553label
1554(55.631 * 4.1907) {/Times-Roman cf} 2 16 0.000 1.000 -816 -320 label
15551 1.000 -816 -336 -576 -336 2 polygon
1556(log\(1 + 2\2644.0211/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -688 -368
1557label
1558(55.631 * 4.1814) {/Times-Roman cf} 2 16 0.000 1.000 -832 304 label
1559(55.631 * 4.2308) {/Times-Roman cf} 2 16 0.000 1.000 -352 -320 label
15601 1.000 -352 -336 -112 -336 2 polygon
1561(log\(1 + 2\2642.7861/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -224 -368
1562label
1563(55.631 * 4.4954) {/Times-Roman cf} 2 16 0.000 1.000 -368 -112 label
15641 1.000 -368 -128 -128 -128 2 polygon
1565(log\(1 + 2\2642.2799/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 -160
1566label
15671 1.000 -368 96 -128 96 2 polygon
1568(log\(1 + 2\2641.75/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 64 label
1569(55.631 * 4.4181) {/Times-Roman cf} 2 16 0.000 1.000 -368 112 label
15701 1.000 -368 288 -128 288 2 polygon
1571(log\(1 + 2\2641.05/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 256 label
1572(55.631 * 4.2771) {/Times-Roman cf} 2 16 0.000 1.000 -368 304 label
15731 1.000 -368 480 -128 480 2 polygon
1574(log\(1 + 2\2640.42/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 448 label
1575(55.631 * 4.2) {/Times-Roman cf} 2 16 0.000 1.000 -368 496 label
15761 1.000 48 288 288 288 2 polygon
1577(log\(1 + 2\2640.27/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 256 label
1578(55.631 * 4.5) {/Times-Roman cf} 2 16 0.000 1.000 48 304 label
15791 1.000 48 96 288 96 2 polygon
1580(log\(1 + 2\2640.97/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 176 64 label
1581(55.631 * 4.5936) {/Times-Roman cf} 2 16 0.000 1.000 48 112 label
1582(55.631 * 4.6489) {/Times-Roman cf} 2 16 0.000 1.000 48 -112 label
15831 1.000 48 -128 288 -128 2 polygon
1584(log\(1 + 2\2641.4999/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 -160 label
1585(55.631 * 4.2428) {/Times-Roman cf} 2 16 0.000 1.000 64 -320 label
15861 1.000 64 -336 304 -336 2 polygon
1587(log\(1 + 2\2642.0061/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 192 -368 label
1588(55.631 * 4.1251) {/Times-Roman cf} 2 16 0.000 1.000 512 -320 label
15891 1.000 512 -336 752 -336 2 polygon
1590(log\(1 + 2\2641.3761/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 640 -368 label
1591(55.631 * 4.8486) {/Times-Roman cf} 2 16 0.000 1.000 496 -112 label
15921 1.000 496 -128 736 -128 2 polygon
1593(log\(1 + 2\2640.8699/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 624 -160 label
1594(log\(1 + 2\2640.34/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 624 64 label
1595(55.631 * 4.7669) {/Times-Roman cf} 2 16 0.000 1.000 496 112 label
15961 1.000 496 96 736 96 2 polygon
1597(55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 896 -320 label
15981 1.000 896 -336 1136 -336 2 polygon
1599(log\(1 + 2\2640.9361/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1024 -368 label
1600(55.631 * 4.9133) {/Times-Roman cf} 2 16 0.000 1.000 880 -112 label
16011 1.000 880 -128 1120 -128 2 polygon
1602(log\(1 + 2\2640.4299/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1008 -160 label
1603(55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 1280 -320 label
16041 1.000 1280 -336 1520 -336 2 polygon
1605(log\(1 + 2\2640.3262/0.18\)) {/Times-Roman cf} 2 21 0.000 1.000 1408 -368
1606label
16071 1.000 -1344 -496 1760 -496 2 polygon
16080.000 0.000 1.000 scb
1609(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -592 label
1610(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -768 label
1611(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -768 label
1612(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -944 label
1613(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -944 label
1614(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -944 label
1615(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1136 label
1616(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1136 label
1617(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1136 label
1618(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1136 label
1619(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1328 label
1620(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1328 label
1621(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1328 label
1622(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1328 label
1623(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1328 label
1624(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1536 label
1625(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1536 label
1626(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1536 label
1627(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1536 label
1628(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1536 label
1629(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1536 label
1630(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1744 label
1631(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1744 label
1632(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1744 label
1633(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1744 label
1634(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1744 label
1635(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1744 label
1636(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1264 -1744 label
1637sce
1638
1639(\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\))
1640{/Times-Roman cf} 2 16 0.000 1.000 -848 -592 label
16410.647 0.165 0.165 scb
1642(Interlayer \(fringe\) capacitance worksheet \(continued from last page\):)
1643{/Times-Roman cf} 2 16 0.000 1.000 -1280 1280 label
1644sce
1645( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C)
1646{/Times-Roman cf} 6 16 0.000 1.000 -1280 1184 label
16471 1.000 -448 1184 -272 1184 2 polygon
1648(K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -368
16491200 label
1650(log\(1 + 2h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -352 1168 label
1651(where h is the distance between layers and t is the sidewall thickness.)
1652{/Times-Roman cf} 2 16 0.000 1.000 -192 1184 label
1653( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2)
1654{/Times-Roman cf} 8 16 0.000 1.000 -176 1120 label
16551 1.000 -1296 960 1824 960 2 polygon
1656
1657(match, although there are also more complicated expressions \(all are ultimately approximations to the exact field equation solutions\).)
1658{CR}
1659(Note that all \(?\) texts seem to use "log\(h/t\)" which is entirely nonsensical as it implies negative fringe capacitance for h < t. The above expression is a better)
1660{/Times-Roman cf} 4 16 0.000 1.000 -1280 1008 label
1661(378.01) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -688 label
1662(168.89) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -864 label
1663(129.16) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -1056 label
1664(119.67) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1232 label
1665(109.36) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1648 label
1666(102.25) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1840 label
1667(113.11) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1440 label
1668(351.52) {/Times-Roman cf} 2 16 0.000 1.000 -720 -864 label
1669(144.86) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1056 label
1670(125.83) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1232 label
1671(109.04) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1632 label
1672(114.74) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1440 label
1673(341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1040 label
1674(191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1232 label
1675(150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1440 label
1676(273.21) {/Times-Roman cf} 2 16 0.000 1.000 128 -1248 label
1677(99.483) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1840 label
1678(135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1632 label
1679(116.62) {/Times-Roman cf} 2 16 0.000 1.000 -272 -1824 label
1680(137.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1440 label
1681(115.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1632 label
1682(94.529) {/Times-Roman cf} 2 16 0.000 1.000 144 -1824 label
1683(249.97) {/Times-Roman cf} 2 16 0.000 1.000 544 -1440 label
1684(152.95) {/Times-Roman cf} 2 16 0.000 1.000 560 -1632 label
1685(106.39) {/Times-Roman cf} 2 16 0.000 1.000 576 -1824 label
1686(120.86) {/Times-Roman cf} 2 16 0.000 1.000 960 -1632 label
1687(72.763) {/Times-Roman cf} 2 16 0.000 1.000 976 -1824 label
1688(141.68) {/Times-Roman cf} 2 16 0.000 1.000 1312 -1824 label
1689pgsave restore showpage
1690
1691%%Page: worksheet5 7
1692%%PageOrientation: Portrait
1693%%PageBoundingBox: 0 0 612 792
1694/pgsave save def bop
1695% 32.00 8.00 gridspace
16960.6922 inchscale
16972.6000 setlinewidth 1412 988 translate
1698
1699(Sidewall capacitance worksheet:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896
1700label
1701
1702(\265m separation. For an answer in units per micron, assume 1\265m length as well.)
1703{/Times-RomanISO cf} (Capacitance \(in magic\251s tech file\) is measured at 1)
1704{/Times-Roman cf} 4 16 0.000 1.000 -1280 832 label
1705{ns} (0) {ss} (e) {/Symbol cf} ( = K ) {ns} (ox) {ss}
1706(Capacitance is then just the usual equation, C) {/Times-Roman cf} 11 16 0.000
17071.000 -1280 768 label
1708( = 8.854) {ns} (0) {ss} (e) {/Symbol cf} (with ) {/Times-Roman cf} 8 16 0.000
17091.000 -192 768 label
1710(metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 400 label
1711(4.0 * 8.854 * 0.845 = 29.9265) {/Times-Roman cf} 2 16 360.000 1.000 -1088
1712400 label
1713( h) {/Times-Roman cf} 2 16 0.000 1.000 -416 768 label
1714(and where h is the layer thickness.) {/Times-Roman cf} 2 16 0.000 1.000 128
1715768 label
1716(h) {/Times-Roman cf} 2 16 0.000 1.000 -848 528 label
1717(0) {ss} (e) {/Symbol cf} 4 16 0.000 1.000 -976 528 label
1718(K) {/Times-Roman cf} 2 17 0.000 1.000 -1072 528 label
1719(sidewall) {ss} (C) {/Times-Roman cf} 4 16 0.000 1.000 -704 528 label
1720(metal5:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 448 label
1721(metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label
1722(metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 304 label
1723(metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 256 label
1724(li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 208 label
1725(poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label
17261 1.000 -1280 496 -320 496 2 polygon
1727
1728(For side-extending dielectric, use a pro-rated K \(values for horizontal thickness of these dielectrics not shown on the first page\).)
1729{/Times-Roman cf} 2 16 0.000 1.000 -1280 640 label
1730(\265m\)) {/Times-RomanISO cf} (\(aF/) {/Times-Roman cf} 4 16 0.000 1.000 -560
1731528 label
1732(4.1 * 8.854 * 0.845 = 30.675) {/Times-Roman cf} 2 16 360.000 1.000 -1088 352
1733label
1734(4.2 * 8.854 * 0.36 = 13.387) {/Times-Roman cf} 2 16 360.000 1.000 -1088 304
1735label
1736(4.5 * 8.854 * 0.36 = 14.343) {/Times-Roman cf} 2 16 360.000 1.000 -1088 256
1737label
1738(6.926 * 8.854 * 1.26 = 77.267) {/Times-Roman cf} 2 16 360.000 1.000 -1088
1739448 label
1740(2.94\) = 6.926) {hS} (\264) {hS} (\(0.07 + 0.4223\)\)) {hS}
1741(7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.4223) {hS} (\264) {hS} (3.9\) + \(2)
1742{hS} (\264) {hS} (0.07) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K)
1743{/Times-Roman cf} 28 16 0.000 1.000 -448 448 label
1744(4.05\) = 4.447) {hS} (\264) {hS} (\(0.061\)\)) {hS} (7.3\) + \(\(1 - 2) {hS}
1745(\264) {hS} (0.061) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K)
1746{/Times-Roman cf} 20 16 0.000 1.000 -448 208 label
1747(4.447 * 8.854 * 0.1 = 3.937) {/Times-Roman cf} 2 16 360.000 1.000 -1088 208
1748label
1749(3.9\) = 4.210) {hS} (\264) {hS} (\(0.006 + 0.0431\)\)) {hS}
1750(7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.0431) {hS} (\264) {hS} (3.9\) + \(2)
1751{hS} (\264) {hS} (0.006) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K)
1752{/Times-Roman cf} 28 16 0.000 1.000 -448 160 label
1753(4.21 * 8.854 * 0.18 = 6.710) {/Times-Roman cf} 2 16 360.000 1.000 -1088 160
1754label
1755pgsave restore showpage
1756
1757%%Trailer
1758XCIRCsave restore
1759%%EOF