blob: 4f03a9adf06dbb94c672d1dca153629b5e44075b [file] [log] [blame]
Tim 'mithro' Ansell2c2b2272020-06-21 16:33:08 -07001Layer / Design rule,CD,,space,,Comment
2Enclosure of fuses by polyimide,12,,,,PimFuseEnc
3Enclosure of bondpad by polyimide (YUY-165),0.5,,,,PimPadEnc
4"Enclosure of pad:dg by PBO inside inductor capture pad, with DECA online monitoring",4.5,,,,PBOPadEnc
5Enclosure of pad:dg by PBO per standard DECA rules,7.5,,,,PBOPadEncDECA
6DECA PBO drawn-to-final process bias per side,0.5,,,,PBOProcBiasPerSide
7Polyimide CD tolerance,1,,,,PimCD_tol
8Min Pim width over pad openings,87,,,,PimOverPad_CD
9Polyimide slope (001-87400),,5.3,,,I_polyimide_slope
10Enclosure of polyimide by polymer tolerance,,7.7,,,Po_po_tol
11Min/Max enclosure of pad.dg inside M5RDL by pmm,0,,,,pmmM5RDLpadEnc
12Min spacing of pmm to (rdl NOT (pad.dg sized by 0.5)),,,19.16,,pmmRDLspc
13Enclosure of laser targets in the die by polyimide,30,,,,PimLaserEnc