| Symbol,Explanation,Unit | |
| PI,Perimeter of Interconnect,um | |
| FLT,Final Layer thickness,um | |
| W,Width of MOS Transistor,um | |
| L,Length of MOS Transistor,um | |
| A,Area of MOS Transistor gate (= W x L),um2 | |
| CA,Area of contact or via,um2 | |
| SW,Sidewall area (= PI x FLT),um2 | |
| EA,"Etched area (= CA for horizontal, = SW for vertical areas)",um2 |