| Interlayer fringe capacitance (upward direction) (aF/um) Local interconnect Metal1 Metal2 Metal3 Metal4 Metal5 | |
| Poly 25.138 16.691 11.166 9.18 6.3505 6.4903 | |
| Local interconnect 34.7 21.739 15.078 10.141 7.6366 | |
| Metal1 48.193 26.676 16.421 12.017 | |
| Metal2 44.432 22.332 15.693 | |
| Metal3 42.643 27.836 | |
| Metal4 46.976 |