| MiM Capacitor |
| ------------- |
| |
| Spice Model Information |
| ~~~~~~~~~~~~~~~~~~~~~~~ |
| |
| - Cell Name: :cell:`sky130_fd_pr_base__mimcap34`, :cell:`sky130_fd_pr_base__mimcap45` |
| - Model Names: :model:`sky130_fd_pr_base__xcmimc`, :model:`sky130_fd_pr_base__xcmim2c` |
| |
| Operating Voltages where SPICE models are valid |
| |
| - \|V\ :sub:`c0` – V\ :sub:`c1`\ \| = 0 to 5.0V |
| |
| Details |
| ~~~~~~~ |
| |
| The MiM capacitor is constructed using a thin dielectric over metal, followed by a thin conductor layer on top of the dielectric. There are two possible constructions: |
| |
| - CAPM over Metal-3 |
| - CAP2M over Metal-4 |
| |
| The constructions are identical, and the capacitors may be stacked to maximize total capacitance. |
| |
| Electrical specs are listed below: |
| |
| |
| .. include:: capacitors-mim-table0.rst |
| |
| |
| |
| The symbol for the MiM capacitor is shown below. Note that the cap model is a sub-circuit which accounts for the parasitic contact resistance and the parasitic capacitance from the bottom plate to substrate. |
| |
| |symbol-capacitor-mim| |
| |
| Cell name |
| |
| M \* W \* L |
| |
| Calc capacitance |
| |
| The cross-section of the “stacked” MiM capacitor is shown below: |
| |
| |cross-section-capacitor-mim| |
| |
| .. |symbol-capacitor-mim| image:: symbol-capacitor-mim.svg |
| .. |cross-section-capacitor-mim| image:: cross-section-capacitor-mim.svg |
| |
