| .. list-table:: | |
| :header-rows: 1 | |
| :stub-columns: 1 | |
| * - Parameter | |
| - NOM | |
| - LSL | |
| - USL | |
| - Units | |
| - Description | |
| * - RSN | |
| - 120 | |
| - 108 | |
| - 132 | |
| - Ω/□ | |
| - N+ diffusion sheet resistance | |
| * - RSNH | |
| - 114 | |
| - 102 | |
| - 126 | |
| - Ω/□ | |
| - HV N+ diffusion sheet resistance | |
| * - RSNW | |
| - 950 | |
| - 550 | |
| - 1350 | |
| - Ω/□ | |
| - N-Well sheet resistance | |
| * - RSP | |
| - 197 | |
| - 166 | |
| - 228 | |
| - Ω/□ | |
| - P+ diffusion sheet resistance | |
| * - RSPH | |
| - 191 | |
| - 160 | |
| - 228 | |
| - Ω/□ | |
| - HV P+ diffusion sheet resistance | |
| * - RSPW | |
| - 3050 | |
| - 2565 | |
| - 3535 | |
| - Ω/□ | |
| - P-Well sheet resistance | |
| * - RSDNW | |
| - 2200 | |
| - 1825 | |
| - 2575 | |
| - Ω/□ | |
| - Deep N-Well sheet resistance | |
| * - WN | |
| - 0.157 | |
| - 0.088 | |
| - 0.226 | |
| - µm | |
| - Electrical N+ linewidth (drawn 0.14) | |
| * - WP | |
| - 0.144 | |
| - 0.084 | |
| - 0.204 | |
| - µm | |
| - Electrical P+ linewidth (drawn 0.14) | |
| * - RSGPVDP | |
| - 48.2 | |
| - 42.2 | |
| - 55.8 | |
| - Ω/□ | |
| - poly sheet resistance, with NGNIT | |
| * - WGPUC15 | |
| - 0.094 | |
| - 0.053 | |
| - 0.135 | |
| - µm | |
| - Electrical poly linewidth (drawn 0.15) | |
| * - RSLI | |
| - 12.8 | |
| - 9.2 | |
| - 17.0 | |
| - Ω/□ | |
| - Local interconnect sheet resistance | |
| * - RSM1 | |
| - 0.125 | |
| - 0.105 | |
| - 0.145 | |
| - Ω/□ | |
| - Metal-1 sheet resistance | |
| * - RSM2 | |
| - 0.125 | |
| - 0.105 | |
| - 0.145 | |
| - Ω/□ | |
| - Metal-2 sheet resistance | |
| * - RSM3 | |
| - 0.047 | |
| - 0.038 | |
| - 0.056 | |
| - Ω/□ | |
| - Metal-3 sheet resistance | |
| * - RSM4 | |
| - 0.047 | |
| - 0.038 | |
| - 0.056 | |
| - Ω/□ | |
| - Metal-4 sheet resistance | |
| * - RSM5 | |
| - 0.0285 | |
| - 0.0212 | |
| - 0.0358 | |
| - Ω/□ | |
| - Metal-5 sheet resistance | |