docs: Adding original source of the metal_stack diagram.
Source file can be used with
[xcircuit](https://github.com/RTimothyEdwards/xcircuit).
Export to SVG from xcircuit using menu item "File->Export->Export SVG"
(from the first page).
Signed-off-by: Tim 'mithro' Ansell <me@mith.ro>
diff --git a/docs/_static/metal_stack.ps b/docs/_static/metal_stack.ps
new file mode 100644
index 0000000..b532e17
--- /dev/null
+++ b/docs/_static/metal_stack.ps
@@ -0,0 +1,1759 @@
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+(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 256 -736 label
+(0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -800 label
+(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -848 label
+(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -896 label
+(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -944 label
+(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 672 112 label
+(0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 48 label
+(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 0 label
+(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 688 -256 label
+(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -320 label
+(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -368 label
+(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 688 -736 label
+(0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -800 label
+(0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -848 label
+(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -896 label
+(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -256 label
+(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -736 label
+(0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 1168 -800 label
+(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1456 -736 label
+(0.3262) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 1520 -800 label
+(\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464
+1024 label
+0.647 0.165 0.165 scb
+(SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1072
+1080 label
+sce
+1 1.000 -1080 1064 1784 1064 2 polygon
+( \(used in magic tech file extract section\)) {ns} (2) {Ss} (\265m)
+{/Times-RomanISO cf} (8.854 to get result in aF/) {/Times-Roman cf} ( = ) {ns}
+(0) {ss} (e) {/Symbol cf} (Use ) {/Times-Roman cf} 16 16 0.000 1.000 -1024
+-1192 label
+(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -656 label
+(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -560 label
+(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -608 label
+(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -512 label
+(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -560 label
+(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -464 label
+(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -512 label
+(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -416 label
+(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.5) {/Times-Roman cf} 13 16 0.000 1.000 752 -464 label
+(0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(3.9) {/Times-Roman cf} 13 16 0.000 1.000 1104 -320 label
+(0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS}
+(7.5) {/Times-Roman cf} 13 16 0.000 1.000 1104 -368 label
+pgsave restore showpage
+
+%%Page: worksheet2 4
+%%PageOrientation: Portrait
+%%PageBoundingBox: 0 0 612 792
+/pgsave save def bop
+% 32.00 8.00 gridspace
+0.6922 inchscale
+2.6000 setlinewidth 814 1600 translate
+
+0.180 0.545 0.341 scb
+(Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072
+992 label
+sce
+(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 880 label
+(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 752 label
+(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 576 label
+(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 352 label
+(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -992 144 label
+(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 80 label
+(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -288 label
+(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -768 label
+(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 752 label
+(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 576 label
+(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 352 label
+(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 80 label
+(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -288 label
+(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -768 label
+(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 576 label
+(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 352 label
+(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 80 label
+(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -288 label
+(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -768 label
+(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 256 352 label
+(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 256 80 label
+(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 272 -288 label
+(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 272 -768 label
+(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 688 80 label
+(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 704 -288 label
+(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 704 -768 label
+(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -288 label
+(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -768 label
+(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1464 -768 label
+(\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464
+992 label
+(70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -992 816 label
+(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 688 label
+(93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -992 640 label
+(93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -544 688 label
+(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 512 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 464 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 512 label
+(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -992 416 label
+(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -544 464 label
+(88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -96 512 label
+(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 288 label
+(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 16 label
+(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -352 label
+(26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -832 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 240 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -32 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -400 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -880 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -832 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -352 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 16 label
+(29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 288 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 192 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 240 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 288 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -80 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -32 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 16 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -448 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -400 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -352 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -928 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -880 label
+(47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -832 label
+(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -544 192 label
+(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -96 240 label
+(147.5667) {/Times-Roman cf} 2 16 0.000 1.000 336 288 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -128 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -80 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -32 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 16 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -496 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -448 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -400 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -352 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -976 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -928 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -880 label
+(64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -832 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -224 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -176 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -128 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -80 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -32 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -592 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -544 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -496 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -448 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -400 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1072 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1024 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -976 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -928 label
+(861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -880 label
+(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1120 label
+(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1072 label
+(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -96 -1024 label
+(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 336 -976 label
+(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 768 -928 label
+(\) to get final interlayer capacitor value.) {ns} (N) {ss} ( + ... + 1/C) {ns}
+(1) {ss} ( + 1/C) {ns} (0) {ss} ( = 1/C) {ns} (tot) {ss}
+(Add these in parallel combination \(1/C) {/Times-Roman cf} 18 16 0.000 1.000
+-992 -1216 label
+(36.8877) {/Times-Roman cf} 2 16 0.000 1.000 1184 -832 label
+(105.8571) {/Times-Roman cf} 2 16 0.000 1.000 1520 -832 label
+1 1.000 -1072 1032 1792 1032 2 polygon
+0.647 0.165 0.165 scb
+(SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1064
+1048 label
+sce
+(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -992 -640 label
+(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -992 -688 label
+(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -544 -592 label
+(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -544 -640 label
+(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -96 -544 label
+(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -96 -592 label
+(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 336 -496 label
+(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 336 -544 label
+(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 768 -448 label
+(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 768 -496 label
+(111.7900) {/Times-Roman cf} 2 16 0.000 1.000 1184 -352 label
+(548.8000) {/Times-Roman cf} 2 16 0.000 1.000 1184 -400 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1024 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -976 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -928 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -880 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -832 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -544 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -496 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -448 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -400 label
+(98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -352 label
+(135.320) {/Times-Roman cf} 2 16 0.000 1.000 -992 -176 label
+(135.320) {/Times-Roman cf} 2 16 0.000 1.000 -544 -128 label
+(135.320) {/Times-Roman cf} 2 16 0.000 1.000 -96 -80 label
+(135.320) {/Times-Roman cf} 2 16 0.000 1.000 336 -32 label
+(135.320) {/Times-Roman cf} 2 16 0.000 1.000 768 16 label
+pgsave restore showpage
+
+%%Page: worksheet3 5
+%%PageOrientation: Portrait
+%%PageBoundingBox: 0 0 612 792
+/pgsave save def bop
+% 32.00 8.00 gridspace
+0.6922 inchscale
+2.6000 setlinewidth 1277 1656 translate
+
+0.647 0.165 0.165 scb
+(Interlayer \(fringe\) capacitance worksheet:) {/Times-Roman cf} 2 16 0.000
+1.000 -1280 896 label
+sce
+( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C)
+{/Times-Roman cf} 6 16 0.000 1.000 -1280 800 label
+1 1.000 -456 808 -344 808 2 polygon
+(K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -408
+824 label
+(log\(h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -392 792 label
+(where h is the distance between layers and t is the sidewall thickness.)
+{/Times-Roman cf} 2 16 0.000 1.000 -224 800 label
+(Use geometric mean for K \(instead of doing series capacitor additions\).)
+{/Times-Roman cf} 2 16 0.000 1.000 -1288 680 label
+( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2)
+{/Times-Roman cf} 8 16 0.000 1.000 -216 744 label
+( \(5-3\) = \(1.35/1.74\) * 4.0 + \(0.39/1.74\) * 4.1 = 4.0224) {ns} (eff) {ss}
+(K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 560 label
+
+( \(5-2\) = \(1.35/3.005\) * 4.0 + \(1.235/3.005\) * 4.1 + \(0.42/3.005\) * 4.2 = 4.0691)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 512 label
+
+( \(5-1\) = \(1.35/3.635\) * 4.0 + \(1.235/3.635\) * 4.1 + \(0.78/3.635\) * 4.2 + \(0.27/3.635\) * 4.5 = 4.114)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 464 label
+
+( \(5-li\) = \(1.35/4.335\) * 4.0 + \(1.235/4.335\) * 4.1 + \(0.78/4.335\) * 4.2 + \(0.63/4.335\) * 4.5 + \(0.265/4.335\) * 4.05 + \(0.075/4.335\) * 7.3 = 4.1973)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 416 label
+
+(+ \(0.075/4.8649\) * 7.3 + \(0.3089/4.8649\) * 3.9 + \(0.121/4.8649\) * 7.5 = 4.2575)
+{CR}
+( \(5-poly\) = \(1.35/4.8649\) * 4.0 + \(1.235/4.8649\) * 4.1 + \(0.78/4.8649\) * 4.2 + \(0.63/4.8649\) * 4.5 + \(0.365/4.8649\) * 4.05)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 320 label
+(+ \(0.075/5.3711\) * 7.3 + \(0.9361/5.3711\) * 3.9 = 4.1427) {CR}
+( \(5-sub\) = \(1.35/5.3711\) * 4.0 + \(1.235/5.3711\) * 4.1 + \(0.78/5.3711\) * 4.2 + \(0.63/5.3711\) * 4.5 + \(0.365/5.3711\) * 4.05)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 224 label
+( \(4-3\) = 4.1 ) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
+128 label
+( \(4-2\) = \(1.235/1.655\) * 4.1 + \(0.42/1.655\) * 4.2 = 4.1254) {ns} (eff)
+{ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 80 label
+
+( \(4-1\) = \(1.235/2.285\) * 4.1 + \(0.78/2.285\) * 4.2 + \(0.27/2.285\) * 4.5 = 4.1814)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 32 label
+
+( \(4-li\) = \(1.235/2.985\) * 4.1 + \(0.78/2.985\) * 4.2 + \(0.63/2.985\) * 4.5 + \(0.265/2.985\) * 4.05 + \(0.075/2.985\) * 7.3 = 4.2865)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -16 label
+
+(+ \(0.075/3.5149\) * 7.3 + \(0.3089/3.5149\) * 3.9 + \(0.121/3.5149\) * 7.5 = 4.3564)
+{CR}
+( \(4-poly\) = \(1.235/3.5149\) + \(0.78/3.5149\) * 4.2 + \(0.63/3.5149\) * 4.5 + \(0.365/3.5149\) * 4.05)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -112 label
+(+ \(0.075/4.0211\) * 7.3 + \(0.9361/4.0211\) * 3.9 = 4.1907) {CR}
+( \(4-sub\) = \(1.235/4.0211\) * 4.1 + \(0.78/4.0211\) * 4.2 + \(0.63/4.0211\) * 4.5 + \(0.365/4.0211\) * 4.05)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -208 label
+( \(5-4\) = 4.0) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
+608 label
+( \(3-2\) = 4.2) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
+-288 label
+( \(3-1\) = \(0.78/1.05\) * 4.2 + \(0.27/1.05\) * 4.5 = 4.2771 ) {ns} (eff)
+{ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -336 label
+
+( \(3-li\) = \(0.78/1.75\) * 4.2 + \(0.63/1.75\) * 4.5 + \(0.265/1.75\) * 4.05 + \(0.075/1.75\) * 7.3 = 4.4181)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -384 label
+
+(+ \(0.075/2.2799\) * 7.3 + \(0.3089/2.2799\) * 3.9 + \(0.121/2.2799\) * 7.5 = 4.4954)
+{CR}
+( \(3-poly\) = \(0.78/2.2799\) * 4.2 + \(0.63/2.2799\) * 4.5 + \(0.365/2.2799\) * 4.05)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -480 label
+
+( \(3-sub\) = \(0.78/2.7861\) * 4.2 + \(0.63/2.7861\) * 4.5 + \(0.365/2.7861\) * 4.05 + \(0.075/2.7861\) * 7.3 + \(0.9361/2.7861\) * 3.9 = 4.2308)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -528 label
+( \(2-1\) = 4.5) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280
+-608 label
+
+( \(2-li\) = \(0.63/0.97\) * 4.5 + \(0.265/0.97\) * 4.05 + \(0.075/0.97\) * 7.3 = 4.5936)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -656 label
+
+( \(2-poly\) = \(0.63/1.4999\) * 4.5 + \(0.365/1.4999\) * 4.05 + \(0.075/1.4999\) * 7.3 + \(0.3089/1.4999\) * 3.9 + \(0.121/1.4999\) * 7.5 = 4.6489)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -704 label
+
+( \(2-sub\) = \(0.63/2.0061\) * 4.5 + \(0.365/2.0061\) * 4.05 + \(0.075/2.0061\) * 7.3 + \(0.9361/2.0061\) * 3.9 = 4.2428)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -752 label
+( \(1-li\) = \(0.265/0.34\) * 4.05 + \(0.075/0.34\) * 7.3 = 4.7669) {ns} (eff)
+{ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -832 label
+
+( \(1-poly\) = \(0.265/0.7699\) + \(0.075/0.7699\) * 7.3 + \(0.3089/0.7699\) * 3.9 + \(0.121/0.7699\) * 7.5 = 4.8486)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -880 label
+
+( \(1-sub\) = \(0.365/1.3761\) * 4.05 + \(0.075/1.3761\) * 7.3 + \(0.9361/1.3761\) * 3.9 = 4.1251)
+{ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -928 label
+( \(li-poly\) = \(0.3089/0.4299\) * 3.9 + \(0.121/0.4299\) * 7.5 = 4.9133) {ns}
+(eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -1024 label
+( \(li-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000
+-1280 -1072 label
+( \(poly-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000
+-1280 -1152 label
+1 1.000 -1280 192 1008 192 2 polygon
+1 1.000 -1280 -240 1008 -240 2 polygon
+1 1.000 -1280 -560 1008 -560 2 polygon
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+1 1.000 -1280 -960 1008 -960 2 polygon
+1 1.000 -1280 -1104 1008 -1104 2 polygon
+1 1.000 -1280 -1184 1008 -1184 2 polygon
+1 1.000 -1280 656 1008 656 2 polygon
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+2.6000 setlinewidth 939 1793 translate
+
+0.000 0.000 1.000 scb
+(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896 label
+(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 720 label
+(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -832 720 label
+(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 544 label
+(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -832 544 label
+(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -384 544 label
+(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label
+(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -832 352 label
+(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -384 352 label
+(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 48 352 label
+(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label
+(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -832 160 label
+(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -384 160 label
+(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 48 160 label
+(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 480 160 label
+(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -64 label
+(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -64 label
+(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -64 label
+(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 48 -64 label
+(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 480 -64 label
+(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 896 -64 label
+(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -272 label
+(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -272 label
+(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -272 label
+(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 48 -272 label
+(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 480 -272 label
+(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 896 -272 label
+(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1248 -272 label
+sce
+
+(\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\))
+{/Times-Roman cf} 2 16 0.000 1.000 -864 896 label
+(55.631 * 4.0) {/Times-Roman cf} 2 16 0.000 1.000 -1248 848 label
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+1 1.000 -1264 656 -1024 656 2 polygon
+(log\(1 + 2\2641.74/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 624 label
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+1 1.000 -1264 480 -1024 480 2 polygon
+(log\(1 + 2\2643.005/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 448 label
+(55.631 * 4.114) {/Times-Roman cf} 2 16 0.000 1.000 -1264 304 label
+1 1.000 -1264 288 -1024 288 2 polygon
+(log\(1 + 2\2643.635/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 256 label
+(55.631 * 4.1973) {/Times-Roman cf} 2 16 0.000 1.000 -1264 112 label
+1 1.000 -1264 96 -1024 96 2 polygon
+(log\(1 + 2\2644.335/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 64 label
+(55.631 * 4.2575) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -112 label
+1 1.000 -1264 -128 -1024 -128 2 polygon
+(log\(1 + 2\2644.8649/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 -160
+label
+(55.631 * 4.1427) {/Times-Roman cf} 2 16 0.000 1.000 -1248 -320 label
+1 1.000 -1248 -336 -1008 -336 2 polygon
+(log\(1 + 2\2645.3711/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1120 -368
+label
+(55.631 * 4.1) {/Times-Roman cf} 2 16 0.000 1.000 -832 672 label
+1 1.000 -832 656 -592 656 2 polygon
+(log\(1 + 2\2640.39/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 624 label
+1 1.000 -832 480 -592 480 2 polygon
+(log\(1 + 2\2641.655/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 448 label
+(55.631 * 4.1254) {/Times-Roman cf} 2 16 0.000 1.000 -832 496 label
+1 1.000 -832 288 -592 288 2 polygon
+(log\(1 + 2\2642.285/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 256 label
+(55.631 * 4.2865) {/Times-Roman cf} 2 16 0.000 1.000 -832 112 label
+1 1.000 -832 96 -592 96 2 polygon
+(log\(1 + 2\2642.985/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 64 label
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+1 1.000 -832 -128 -592 -128 2 polygon
+(log\(1 + 2\2643.5149/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 -160
+label
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+1 1.000 -816 -336 -576 -336 2 polygon
+(log\(1 + 2\2644.0211/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -688 -368
+label
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+(55.631 * 4.2308) {/Times-Roman cf} 2 16 0.000 1.000 -352 -320 label
+1 1.000 -352 -336 -112 -336 2 polygon
+(log\(1 + 2\2642.7861/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -224 -368
+label
+(55.631 * 4.4954) {/Times-Roman cf} 2 16 0.000 1.000 -368 -112 label
+1 1.000 -368 -128 -128 -128 2 polygon
+(log\(1 + 2\2642.2799/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 -160
+label
+1 1.000 -368 96 -128 96 2 polygon
+(log\(1 + 2\2641.75/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 64 label
+(55.631 * 4.4181) {/Times-Roman cf} 2 16 0.000 1.000 -368 112 label
+1 1.000 -368 288 -128 288 2 polygon
+(log\(1 + 2\2641.05/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 256 label
+(55.631 * 4.2771) {/Times-Roman cf} 2 16 0.000 1.000 -368 304 label
+1 1.000 -368 480 -128 480 2 polygon
+(log\(1 + 2\2640.42/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 448 label
+(55.631 * 4.2) {/Times-Roman cf} 2 16 0.000 1.000 -368 496 label
+1 1.000 48 288 288 288 2 polygon
+(log\(1 + 2\2640.27/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 256 label
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+1 1.000 48 96 288 96 2 polygon
+(log\(1 + 2\2640.97/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 176 64 label
+(55.631 * 4.5936) {/Times-Roman cf} 2 16 0.000 1.000 48 112 label
+(55.631 * 4.6489) {/Times-Roman cf} 2 16 0.000 1.000 48 -112 label
+1 1.000 48 -128 288 -128 2 polygon
+(log\(1 + 2\2641.4999/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 -160 label
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+1 1.000 64 -336 304 -336 2 polygon
+(log\(1 + 2\2642.0061/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 192 -368 label
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+1 1.000 512 -336 752 -336 2 polygon
+(log\(1 + 2\2641.3761/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 640 -368 label
+(55.631 * 4.8486) {/Times-Roman cf} 2 16 0.000 1.000 496 -112 label
+1 1.000 496 -128 736 -128 2 polygon
+(log\(1 + 2\2640.8699/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 624 -160 label
+(log\(1 + 2\2640.34/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 624 64 label
+(55.631 * 4.7669) {/Times-Roman cf} 2 16 0.000 1.000 496 112 label
+1 1.000 496 96 736 96 2 polygon
+(55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 896 -320 label
+1 1.000 896 -336 1136 -336 2 polygon
+(log\(1 + 2\2640.9361/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1024 -368 label
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+1 1.000 880 -128 1120 -128 2 polygon
+(log\(1 + 2\2640.4299/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1008 -160 label
+(55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 1280 -320 label
+1 1.000 1280 -336 1520 -336 2 polygon
+(log\(1 + 2\2640.3262/0.18\)) {/Times-Roman cf} 2 21 0.000 1.000 1408 -368
+label
+1 1.000 -1344 -496 1760 -496 2 polygon
+0.000 0.000 1.000 scb
+(metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -592 label
+(metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -768 label
+(metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -768 label
+(metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -944 label
+(metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -944 label
+(metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -944 label
+(metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1136 label
+(metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1136 label
+(metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1136 label
+(metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1136 label
+(metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1328 label
+(metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1328 label
+(metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1328 label
+(metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1328 label
+(metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1328 label
+(metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1536 label
+(metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1536 label
+(metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1536 label
+(metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1536 label
+(metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1536 label
+(li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1536 label
+(metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1744 label
+(metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1744 label
+(metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1744 label
+(metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1744 label
+(metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1744 label
+(li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1744 label
+(poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1264 -1744 label
+sce
+
+(\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\))
+{/Times-Roman cf} 2 16 0.000 1.000 -848 -592 label
+0.647 0.165 0.165 scb
+(Interlayer \(fringe\) capacitance worksheet \(continued from last page\):)
+{/Times-Roman cf} 2 16 0.000 1.000 -1280 1280 label
+sce
+( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C)
+{/Times-Roman cf} 6 16 0.000 1.000 -1280 1184 label
+1 1.000 -448 1184 -272 1184 2 polygon
+(K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -368
+1200 label
+(log\(1 + 2h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -352 1168 label
+(where h is the distance between layers and t is the sidewall thickness.)
+{/Times-Roman cf} 2 16 0.000 1.000 -192 1184 label
+( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2)
+{/Times-Roman cf} 8 16 0.000 1.000 -176 1120 label
+1 1.000 -1296 960 1824 960 2 polygon
+
+(match, although there are also more complicated expressions \(all are ultimately approximations to the exact field equation solutions\).)
+{CR}
+(Note that all \(?\) texts seem to use "log\(h/t\)" which is entirely nonsensical as it implies negative fringe capacitance for h < t. The above expression is a better)
+{/Times-Roman cf} 4 16 0.000 1.000 -1280 1008 label
+(378.01) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -688 label
+(168.89) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -864 label
+(129.16) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -1056 label
+(119.67) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1232 label
+(109.36) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1648 label
+(102.25) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1840 label
+(113.11) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1440 label
+(351.52) {/Times-Roman cf} 2 16 0.000 1.000 -720 -864 label
+(144.86) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1056 label
+(125.83) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1232 label
+(109.04) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1632 label
+(114.74) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1440 label
+(341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1040 label
+(191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1232 label
+(150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1440 label
+(273.21) {/Times-Roman cf} 2 16 0.000 1.000 128 -1248 label
+(99.483) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1840 label
+(135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1632 label
+(116.62) {/Times-Roman cf} 2 16 0.000 1.000 -272 -1824 label
+(137.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1440 label
+(115.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1632 label
+(94.529) {/Times-Roman cf} 2 16 0.000 1.000 144 -1824 label
+(249.97) {/Times-Roman cf} 2 16 0.000 1.000 544 -1440 label
+(152.95) {/Times-Roman cf} 2 16 0.000 1.000 560 -1632 label
+(106.39) {/Times-Roman cf} 2 16 0.000 1.000 576 -1824 label
+(120.86) {/Times-Roman cf} 2 16 0.000 1.000 960 -1632 label
+(72.763) {/Times-Roman cf} 2 16 0.000 1.000 976 -1824 label
+(141.68) {/Times-Roman cf} 2 16 0.000 1.000 1312 -1824 label
+pgsave restore showpage
+
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+2.6000 setlinewidth 1412 988 translate
+
+(Sidewall capacitance worksheet:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896
+label
+
+(\265m separation. For an answer in units per micron, assume 1\265m length as well.)
+{/Times-RomanISO cf} (Capacitance \(in magic\251s tech file\) is measured at 1)
+{/Times-Roman cf} 4 16 0.000 1.000 -1280 832 label
+{ns} (0) {ss} (e) {/Symbol cf} ( = K ) {ns} (ox) {ss}
+(Capacitance is then just the usual equation, C) {/Times-Roman cf} 11 16 0.000
+1.000 -1280 768 label
+( = 8.854) {ns} (0) {ss} (e) {/Symbol cf} (with ) {/Times-Roman cf} 8 16 0.000
+1.000 -192 768 label
+(metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 400 label
+(4.0 * 8.854 * 0.845 = 29.9265) {/Times-Roman cf} 2 16 360.000 1.000 -1088
+400 label
+( h) {/Times-Roman cf} 2 16 0.000 1.000 -416 768 label
+(and where h is the layer thickness.) {/Times-Roman cf} 2 16 0.000 1.000 128
+768 label
+(h) {/Times-Roman cf} 2 16 0.000 1.000 -848 528 label
+(0) {ss} (e) {/Symbol cf} 4 16 0.000 1.000 -976 528 label
+(K) {/Times-Roman cf} 2 17 0.000 1.000 -1072 528 label
+(sidewall) {ss} (C) {/Times-Roman cf} 4 16 0.000 1.000 -704 528 label
+(metal5:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 448 label
+(metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label
+(metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 304 label
+(metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 256 label
+(li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 208 label
+(poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label
+1 1.000 -1280 496 -320 496 2 polygon
+
+(For side-extending dielectric, use a pro-rated K \(values for horizontal thickness of these dielectrics not shown on the first page\).)
+{/Times-Roman cf} 2 16 0.000 1.000 -1280 640 label
+(\265m\)) {/Times-RomanISO cf} (\(aF/) {/Times-Roman cf} 4 16 0.000 1.000 -560
+528 label
+(4.1 * 8.854 * 0.845 = 30.675) {/Times-Roman cf} 2 16 360.000 1.000 -1088 352
+label
+(4.2 * 8.854 * 0.36 = 13.387) {/Times-Roman cf} 2 16 360.000 1.000 -1088 304
+label
+(4.5 * 8.854 * 0.36 = 14.343) {/Times-Roman cf} 2 16 360.000 1.000 -1088 256
+label
+(6.926 * 8.854 * 1.26 = 77.267) {/Times-Roman cf} 2 16 360.000 1.000 -1088
+448 label
+(2.94\) = 6.926) {hS} (\264) {hS} (\(0.07 + 0.4223\)\)) {hS}
+(7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.4223) {hS} (\264) {hS} (3.9\) + \(2)
+{hS} (\264) {hS} (0.07) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K)
+{/Times-Roman cf} 28 16 0.000 1.000 -448 448 label
+(4.05\) = 4.447) {hS} (\264) {hS} (\(0.061\)\)) {hS} (7.3\) + \(\(1 - 2) {hS}
+(\264) {hS} (0.061) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K)
+{/Times-Roman cf} 20 16 0.000 1.000 -448 208 label
+(4.447 * 8.854 * 0.1 = 3.937) {/Times-Roman cf} 2 16 360.000 1.000 -1088 208
+label
+(3.9\) = 4.210) {hS} (\264) {hS} (\(0.006 + 0.0431\)\)) {hS}
+(7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.0431) {hS} (\264) {hS} (3.9\) + \(2)
+{hS} (\264) {hS} (0.006) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K)
+{/Times-Roman cf} 28 16 0.000 1.000 -448 160 label
+(4.21 * 8.854 * 0.18 = 6.710) {/Times-Roman cf} 2 16 360.000 1.000 -1088 160
+label
+pgsave restore showpage
+
+%%Trailer
+XCIRCsave restore
+%%EOF
