| Criteria & Assumptions |
| ====================== |
| |
| Process Stack Diagram |
| --------------------- |
| |
| .. image:: ../_static/metal_stack.svg |
| :width: 100% |
| :alt: SkyWater SKY130 Process Stack |
| |
| Details about the layers can be found in :ref:`SkyWater GDS Layers Information` page. |
| |
| General |
| ------- |
| |
| .. csv-table:: Table 1 - General |
| :file: assumptions/01-general.csv |
| :header-rows: 1 |
| :stub-columns: 1 |
| |
| Minimum Critical Dimensions |
| --------------------------- |
| |
| .. csv-table:: Table 2 - Minimum CDs in Design or on Wafer, required by Technology (Core or Periphery) |
| :file: assumptions/02-mins.csv |
| :header-rows: 1 |
| :widths: 20, 20, 10, 10, 10, 10 |
| |
| Semiconductor Criteria |
| ---------------------- |
| |
| Basic Parameters |
| ~~~~~~~~~~~~~~~~ |
| |
| .. csv-table:: Table 3a - Semiconductor Criteria - Basic Parameters |
| :header-rows: 1 |
| :width: 100% |
| :widths: 30, 10, 20, 10 |
| |
| ,Units,Value,Variable name |
| n-well peak concentration,cm-3,6.00E+017,NWPCONC |
| background concentration,cm-3,8.00E+14,NWBCONC |
| y.char,um,0.43,NWYCHAR |
| desired Nmin/Ns ratio,,0.9,NMINNSRATIO |
| min n-well width to guarantee 90 % peak concentr.,um,0.55,MINNWWID |
| p-well peak concentration,cm-3,4E+017,PWPCONC |
| p-well peak coordinate,um,0.42,PWPCOORD |
| y.char,um,0.13,PWYCHAR |
| min. p-well width to guarantee 90 % peak concentr.,um,0.33,MINPWWID |
| |
| Junction Depths |
| ~~~~~~~~~~~~~~~ |
| |
| .. csv-table:: Table 3b - Semiconductor Criteria - Junction Depths |
| :header-rows: 1 |
| :width: 100% |
| :widths: 30, 10, 10, 10, 10 |
| |
| ,Units,Vertical Feature,Vertical Space,Variable name |
| Baseline: N-Well,um,1.1, ,NWVDIM |
| P-Well,um,0.75,,PWVDIM |
| N-w/P-w junction (from drawn edge),um,*,0.034,WELLJCT |
| N+ or P+ S/D (XJ),um,0.1,0.06,JCTD / LD |
| Max (N+ or P+ S/D outdiff.) next to isol. edge,um,,0.007,LDST |
| Max (N+ or P+ S/D outdiff.) next to isol. edge for 6 V reg. devices,,,0.05,LDST5 |
| N Tip (As),um, ,0.01,LDNTIP |
| |
| Other Width Criteria |
| ~~~~~~~~~~~~~~~~~~~~ |
| |
| .. csv-table:: Table 3c - Semiconductor Criteria - Other Width Criteria |
| :header-rows: 1 |
| :width: 100% |
| :widths: 30, 10, 20, 10 |
| |
| ,Units,Value,Variable name |
| Min. diff/tap width for reproducible resistivity,um,0.12,MINFWR |
| Min. width to open a strip of tap between two diffs,um,0.34,SDM3 |
| "Max s/d diff width without contact, consistent w/Ram4,5,6",um,5.7,XMAXCON |
| |
| Punchthrough Criteria |
| ~~~~~~~~~~~~~~~~~~~~~ |
| |
| .. csv-table:: Table 3d - Semiconductor Criteria - Minimum Spacing for 3.3V Punchthrough (1.8V devices) |
| :header-rows: 1 |
| :width: 100% |
| :widths: 30, 10, 20, 10 |
| |
| ,Units,Value,Variable name |
| n-well - n-well ,um,0.835,NWPTS |
| n+ - n+ or p+-p+,um,0.23,DPTS |
| p+ in nwell to pwell,um,0.05,PPTS |
| n+ in pwell to nwell,um,0.15,PNPTS |
| |
| Latch-up/ESD Criteria |
| ~~~~~~~~~~~~~~~~~~~~~ |
| |
| .. csv-table:: Table 3e - Semiconductor Criteria - Latch-up/ESD Criteria |
| :header-rows: 1 |
| :width: 100% |
| :widths: 30, 10, 20, 10 |
| |
| Minimum n+ or p+ - nwell spacing to prevent latch-up,um,0.23,NPNWLU |
| Min n-well enclos. of tap to ensure bkdwn N-w/P-w before N+/P-w (ESD),um,0.04,XNWESD |
| Max. overlap of n-well by p+ tap,um,0.06,XNWPTS |
| |
| Implant angles |
| ~~~~~~~~~~~~~~ |
| |
| .. csv-table:: Table 3f - Semiconductor Criteria - Implant angles |
| :header-rows: 1 |
| :width: 100% |
| :widths: 30, 10, 10, 10, 10 |
| |
| ,Units,Angle,,Variable name |
| High current,deg,0,0,HCIMPA |
| Angle for tip implant ,deg,7,,TipAng |
| Angle for HV tip implant ,deg,40,,HvTipAngle |
| Twist angle for HV Tip ,deg,23,,HvTipTwist |
| |
| Physical Criteria |
| ----------------- |
| |
| .. csv-table:: Table 4 - Physical Criteria |
| :file: assumptions/04-physical.csv |
| :header-rows: 1 |
| :widths: 60, 10, 1, 10, 10, 10 |
| |
| Laser Fuse Criteria |
| ------------------- |
| |
| .. csv-table:: Table 5 - Laser Fuse Criteria |
| :file: assumptions/05-laser-fuse.csv |
| :header-rows: 1 |
| :widths: 60, 10, 1, 10, 10, 10 |
| |
| .. What happened to 6!? |
| |
| Other criteria and parameters |
| ----------------------------- |
| |
| .. csv-table:: Table 7 - Other criteria and parameters |
| :file: assumptions/07-other.csv |
| :header-rows: 1 |
| :widths: 60, 10, 1, 10, 10, 10 |
| |
| Criteria for High Voltage FET |
| ----------------------------- |
| |
| .. csv-table:: Table 8 - Criteria for High Voltage FET |
| :file: assumptions/08-hv.csv |
| :header-rows: 1 |
| :widths: 60, 10, 1, 10, 10, 10 |
| |
| Criteria for polyimide manufacturability |
| ---------------------------------------- |
| |
| .. csv-table:: Table 9 - Criteria for polyimide manufacturability |
| :file: assumptions/09-polyimide.csv |
| :header-rows: 1 |
| :widths: 60, 10, 1, 10, 10, 10 |
| |
| Criteria for VPP capacitor |
| -------------------------- |
| |
| .. csv-table:: Table 10 - Criteria for VPP capacitor |
| :file: assumptions/10-vpp-capacitor.csv |
| :header-rows: 1 |
| :widths: 60, 10, 1, 10, 10, 10 |