| Name,Description,Flags,Value,Unit |
| (m2.-),"| Algorithm should flag errors, for met2, if ANY of the following is true: |
| | An entire 700x700 window is covered by cmm2 waffleDrop, and metX PD < 70% for same window. |
| | 80-100% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 65% for same window. |
| | 60-80% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 60% for same window. |
| | 50-60% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 50% for same window. |
| | 40-50% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 40% for same window. |
| | 30-40% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 30% for same window. |
| | Exclude cells whose area is below 40Kum2. Required for IP, Recommended for Chip-level.",RC,, |
| (m2.1),Width of metal 2,,0.140,µm |
| (m2.2),Spacing of metal 2 to metal 2,,0.140,µm |
| (m2.3a),Min. spacing of features attached to or extending from huge_met2 for a distance of up to 0.280 µm to metal2 (rule not checked over non-huge met2 features),,0.280,µm |
| (m2.3b),Min. spacing of huge_met2 to metal2 excluding features checked by m2.3a,,0.280,µm |
| (m2.3c),"Min spacing between floating_met2 with AR_met2_A >= 0.05 and AR_met2_B =< 0.032, outside areaid:sc must be greater than",RR,0.145,µm |
| (m2.4),Via must be enclosed by Met2 by at least …,P AL,0.055,µm |
| (m2.5),Via must be enclosed by Met2 on one of two adjacent sides by at least …,AL,0.085,µm |
| (m2.6),Min metal2 area,,0.0676,µm² |
| (m2.7),Min area of metal2 holes,,0.140,µm² |
| (m2.pd.1),Min MM2_oxide_Pattern_density,RR,0.7,\- |
| (m2.pd.2a),Rule m2.pd.1 has to be checked by dividing the chip into square regions of width and length equal to …,A,700,µm |
| (m2.pd.2b),Rule m2.pd.1 has to be checked by dividing the chip into steps of …,A,70, |
| (m2.11),Max width of metal2,CU,4.000,µm |
| (m2.12),Add slots and remove vias and contacts if met2 wider than…..,CU,3.200, |
| (m2.13),Max pattern density (PD) of metal2,CU,0.77,\- |
| (m2.14),Met2 PD window size,CU,50.000,µm |
| (m2.14a),Met2 PD window step,CU,25.000,µm |
| (m2.15),Via must be enclosed by met2 by at least…,CU,0.040,µm |
