| %!PS-Adobe-3.0 |
| %%Title: metal_stack.ps |
| %%Creator: XCircuit v0.0 rev-145403803 |
| %%CreationDate: Wed Jun 17 12:42:51 2020 |
| %%Pages: 7 |
| %%BoundingBox: 0 0 612 792 |
| %%DocumentNeededResources: font Times-Roman Times-RomanISO Symbol |
| %%EndComments |
| %%BeginProlog |
| % |
| % PostScript prolog for output from xcircuit |
| % Version: 3.9 |
| % |
| % Electrical circuit (and otherwise general) drawing program |
| % |
| % Written by Tim Edwards 8/5/93--4/12/16 (tim@opencircuitdesign.com) |
| % The Johns Hopkins University (1993-2004) |
| % MultiGiG, Inc. (2004-2012) |
| % Open Circuit Design (2012-2016) |
| % |
| %%BeginResource: procset XCIRCproc 3.9 1 |
| % |
| % supporting definitions --- these are the primary xcircuit types. |
| |
| /XCIRCsave save def |
| /topmat matrix currentmatrix def |
| |
| /fontslant { /slant exch def [1 0 slant 1 0 0] |
| exch findfont exch makefont dup length dict /ndict exch def |
| { 1 index /FID ne { ndict 3 1 roll put } { pop pop } ifelse } forall |
| ndict definefont pop} def |
| /ul { count 0 gt { dup type /stringtype eq showflag 1 eq and { gsave |
| currentpoint topmat setmatrix 0 0 moveto 2 index stringwidth pop (_) |
| false charpath flattenpath pathbbox grestore exch pop 1 index |
| sub setlinewidth exch pop currentpoint 3 -1 roll add moveto 0 |
| rlineto stroke moveto } if } if } def |
| /ol { count 0 gt { dup type /stringtype eq showflag 1 eq and { gsave gsave |
| currentpoint topmat setmatrix 2 index stringwidth pop 3 index |
| true charpath flattenpath pathbbox grestore exch pop |
| exch pop topmat setmatrix (_) true charpath pathbbox grestore |
| exch pop 1 index sub setlinewidth exch pop currentpoint |
| exch 4 1 roll exch sub add moveto pop 0 rlineto stroke |
| moveto } if } if } def |
| /stW { gsave currentpoint newpath moveto true charpath flattenpath |
| pathbbox pop exch pop sub grestore } def |
| /Ts {mark Tabs aload pop counttomark 1 add array astore /Tabs exch def Tabs |
| 0 currentpoint pop put} def |
| /Tbn {mark Tabs aload pop counttomark dup 2 add 1 roll cleartomark 1 sub} def |
| /Tb { 0 1 Tbn {Tabs exch get dup currentpoint pop lt |
| {currentpoint exch pop moveto exit} {pop} ifelse } for } def |
| /Tf { Tbn -1 0 {Tabs exch get dup currentpoint pop gt |
| {currentpoint exch pop moveto exit} {pop} ifelse } for } def |
| /qS { (aa) stW (a a) stW sub 4 div 0 Kn } def |
| /hS { qS qS } def |
| /pspc 0 def |
| /cf0 { scalefont setfont } bind def |
| /Kn { dup kY add /kY exch def rmoveto } bind def |
| /ss { /fscale fscale 0.67 mul def currentfont 0.67 cf0 0 fscale0 fscale mul |
| 0.33 mul neg Kn} def |
| /Ss { /fscale fscale 0.67 mul def currentfont 0.67 cf0 0 fscale0 fscale mul |
| 0.67 mul Kn } def |
| /ns { 0 kY neg Kn /kY 0 def /fscale 1.0 def xfont0 1.0 cf0 } def |
| /MR { /twidth exch def } def |
| /CRx { } def |
| /CR { ns 0 /Bline Bline fscale0 neg add def Bline moveto CRx } def |
| /cf { dup type /realtype ne {1.0} if exch findfont exch kY 0 eq |
| { 40 mul dup /fscale0 exch def cf0 /xfont0 currentfont def} |
| {fscale0 mul fscale mul cf0} ifelse } def |
| /ctmk { counttomark dup 2 add -1 roll pop } bind def |
| /label { gsave translate 0 0 moveto dup scale neg |
| /rotval exch def /twidth 100000 def /just exch def just 128 and |
| 0 gt {/mshow {pop} def} {/mshow {show} def} ifelse just 16 and 0 |
| gt {gsave rotval rotate 0 1 dtransform gsave pagemat setmatrix |
| idtransform exch grestore 1 0 dtransform gsave pagemat setmatrix |
| idtransform exch grestore dup abs 1e-9 lt {pop mul 0 gt} {3 1 roll |
| pop pop 0 lt} ifelse grestore {-1 /rotval rotval neg def /just just |
| dup 3 and 1 ne {3 xor} if def} {1} ifelse exch -1e-9 lt {-1 /rotval |
| rotval neg def /just just dup 12 and 4 ne {12 xor} if def} {1} |
| ifelse scale } if /showflag 0 def /fspc pspc def /Bline 0 def |
| /numlines 0 def /padding 0 array def /Tabs 0 array def |
| /fscale 1.0 def /kY 0 def gsave /CRx { linewid padding |
| aload pop numlines 1 add dup /numlines exch def array astore |
| /padding exch def /linewid 0 def } def dup 1 add copy dup 1 0 |
| dtransform exch atan rotate {exch dup type /stringtype eq {gsave dup |
| gsave newpath 0 0 moveto true charpath flattenpath pathbbox pop exch |
| pop exch pop grestore currentpoint pop add dup /linewid exch def twidth |
| ge {grestore CR exch 1 add dup 2 add {CR} exch 1 roll exch} {grestore} |
| ifelse true charpath flattenpath} {dup type /arraytype eq {exec} {12 |
| string cvs true charpath flattenpath} ifelse} ifelse} repeat |
| CRx /CRx {padding aload pop just 1280 and 0 gt {blockwid exch sub just |
| 1024 and 0 gt {0.5 mul} if} {pop 0} ifelse 0 rmoveto numlines 1 sub |
| dup /numlines exch def array astore /padding exch def} def exch pop |
| pathbbox grestore 4 copy pop exch pop exch sub /blockwid exch def |
| 3 -1 roll pop 3 1 roll just 1 and 0 gt {just 2 and |
| 0 gt {exch pop neg fspc sub} {exch sub 0.5 mul neg} ifelse} {pop neg |
| fspc add} ifelse exch Bline exch just 4 and 0 gt {just 8 and 0 gt |
| {exch pop neg fspc sub} {add 0.5 mul neg} ifelse} {pop neg fspc add} |
| ifelse rotval rotate Kn currentpoint translate /showflag 1 def /Bline |
| 0 def /Tabs 0 array def /fscale 1.0 def /kY 0 def CRx {dup type |
| /stringtype eq {mshow} {dup type /arraytype eq {exec} {12 string cvs |
| mshow} ifelse} ifelse} repeat grestore endclip} def |
| /pinlabel { 4 index 32 and 0 ne hlevel 0 eq or { /pspc 10 def label |
| /pspc 0 def } { pop pop pop pop pop {pop} repeat } ifelse } def |
| /pinglobal { pinlabel } def |
| /infolabel { pinlabel } def |
| /graphic { gsave 4 index cvx exec /DataSource get resetfile translate 0 0 |
| moveto neg rotate dup scale cvx exec image grestore endclip} def |
| |
| /scb { setrgbcolor } bind def /sce { defColor aload pop scb } bind def |
| /cRedef {/defColor currentcolor 3 array astore def} def |
| /begingate {dup type /dicttype ne {1 dict} if begin % default params |
| dup type /dicttype ne {1 dict} if begin % instanced params |
| /hlevel hlevel 1 add def /defColor currentcolor sce 3 array astore |
| def gsave sce dup type /nametype eq { pop } if translate 0 0 moveto |
| neg rotate dup type /nametype eq not { dup abs currentlinewidth exch |
| div setlinewidth } { pop } ifelse dup abs scale clipped 1 and 1 eq |
| {/clipped clipped 1 add def} if} bind def |
| /endgate { /hlevel hlevel 1 sub def grestore defColor aload pop cRedef |
| scb end end endclip} bind def |
| |
| /hlevel 0 def |
| /endclip {clipped 1 and 1 eq {grestore /clipped clipped 1 sub def} if} def |
| /tmpa [1 0 0 1 0 0] def |
| /gar {8 8 true tmpa {<c0 c0 00 00 0c 0c 00 00>} imagemask} bind |
| {8 8 true tmpa {<30 70 60 02 03 07 06 20>} imagemask} bind |
| {8 8 true tmpa {<0c 1e 1e 0c c0 e1 e1 c0>} imagemask} bind |
| {8 8 true tmpa {<0f 0f 0f 0f f0 f0 f0 f0>} imagemask} bind |
| {8 8 true tmpa {<3f f3 e1 e1 f3 3f 1e 1e>} imagemask} bind |
| {8 8 true tmpa {<df cf 8f 9f fd fc f8 f9>} imagemask} bind |
| {8 8 true tmpa {<ff 3f 3f ff ff f3 f3 ff>} imagemask} bind 7 array astore def |
| /ppaint { gsave clip tmpa dup setmatrix pathbbox neg exch neg 4 2 roll |
| neg 4 -1 roll 2 copy gt {exch} if 8 div ceiling 8 mul 4 2 roll neg 2 copy |
| gt {exch} if 8 div ceiling 8 mul 3 -1 roll -8 5 -1 roll |
| { 3 index exch 5 exch put dup -8 3 index { 3 index |
| exch 4 exch put 3 index exec } for } for pop pop pop pop grestore } bind def |
| /setstyles { |
| currentlinewidth mul setlinewidth /style exch def style 2048 and 0 gt |
| clipped 1 and 0 eq and {clip newpath /clipped clipped 1 add def} { |
| style 1 and 0 gt not {closepath} if |
| style 1024 and 0 gt {2 setlinecap 0 setlinejoin} if |
| style 2 and 0 gt {currentlinewidth 4 mul dup 2 array astore 0 setdash} if |
| style 4 and 0 gt {0.5 currentlinewidth 4 mul 2 array astore 0 setdash} if |
| gsave style 16 and 0 gt { style 224 and -5 bitshift style 256 and 0 gt { |
| 7 exch sub 8 div dup 1 exch sub currentrgbcolor 3 array astore |
| {3 copy mul add 4 1 roll pop} forall pop pop setrgbcolor eofill} |
| {dup 7 lt {gar exch get ppaint} {pop eofill} ifelse} ifelse} |
| {style 256 and 0 gt {1 setgray eofill} if} ifelse grestore style 8 and 0 gt |
| style 512 eq or {newpath} {stroke} ifelse grestore endclip} ifelse} def |
| |
| /addtoy {exch dup dup 2 mul 3 add 1 roll -1 1 { 4 1 roll dup 4 1 roll add |
| 4 -1 roll 2 mul 1 add index 2 mul 2 add 2 roll} for pop} def |
| /addtoy1 {1 exch addtoy pop} def |
| /addtoy3 {3 exch addtoy pop} def |
| /addtoy4 {4 exch addtoy pop} def |
| /addtox {exch dup dup 2 mul 3 add 1 roll -1 1 { 4 1 roll dup 4 1 roll 3 -1 roll |
| add exch 4 -1 roll 2 mul 1 add index 2 mul 2 add 2 roll} for pop} def |
| /addtox1 {1 exch addtox pop} def |
| /addtox3 {3 exch addtox pop} def |
| /addtox4 {4 exch addtox pop} def |
| /polygon { gsave /num exch def moveto num 1 sub {lineto} repeat setstyles } def |
| /xcarc { gsave newpath arc setstyles } def |
| /elb { matrix currentmatrix 7 -1 roll 7 -1 roll translate 5 1 roll 4 -1 roll |
| 3 index div 1 scale } def |
| /ele { 0 4 1 roll 0 4 1 roll } bind def |
| /ellipse { gsave elb newpath ele arc setmatrix setstyles } def |
| /pellip { elb ele arc setmatrix } def |
| /nellip { elb ele arcn setmatrix } def |
| /spline { gsave moveto curveto setstyles } def |
| /polyc { {lineto} repeat } bind def |
| /beginpath { gsave moveto } bind def |
| /endpath { setstyles } bind def |
| /bop { 1 setlinecap 2 setlinejoin 6 setmiterlimit 0 0 0 scb cRedef |
| /clipped 0 def} def |
| /psinsertion {/PSobj save def /showpage {} def /setpagedevice {pop} def bop |
| rotate translate dup scale} def |
| /end_insert {PSobj restore} def |
| /setpagemat {/pagemat matrix currentmatrix def} def |
| /inchscale {setpagemat 0.375 mul dup scale} def |
| /cmscale {setpagemat 0.35433071 mul dup scale} def |
| |
| %%EndResource |
| %%EndProlog |
| /Times-Roman findfont dup length dict begin |
| {1 index /FID ne {def} {pop pop} ifelse} forall |
| /Encoding ISOLatin1Encoding def currentdict end |
| /Times-RomanISO exch definefont pop |
| |
| % XCircuit output starts here. |
| |
| %%BeginSetup |
| |
| /generic::arrowhead { |
| % nonetwork |
| begingate |
| 8 -28 beginpath |
| 3 -18 3 -15 0 0 curveto |
| -3 -15 -3 -18 -8 -28 curveto |
| -2 -26 2 -26 8 -28 curveto |
| 249 |
| 1.000 endpath |
| endgate |
| } def |
| |
| |
| %%EndSetup |
| |
| %%Page: metal_stack 1 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 0.6922 inchscale |
| 2.6000 setlinewidth 1376 1320 translate |
| |
| 0.796 0.953 0.953 scb |
| 496 1.000 -304 480 -304 496 -168 496 -168 480 4 polygon |
| 0.800 0.800 0.800 scb |
| 496 1.000 -296 288 -296 320 -200 320 -200 288 4 polygon |
| 496 1.000 -288 496 -288 544 -192 544 -192 496 4 polygon |
| 496 1.000 -368 -336 -368 -288 -272 -288 -272 -336 4 polygon |
| 496 1.000 -48 -256 -48 -176 48 -176 48 -256 4 polygon |
| 496 1.000 -48 -96 -48 -32 48 -32 48 -96 4 polygon |
| 496 1.000 -48 48 -48 112 48 112 48 48 4 polygon |
| 496 1.000 -48 256 -48 320 48 320 48 256 4 polygon |
| 496 1.000 -48 464 -48 544 112 544 112 464 4 polygon |
| 496 1.000 -48 -448 -48 -288 48 -288 48 -448 4 polygon |
| 0.984 0.996 0.765 scb |
| -640 -448 beginpath |
| -640 -512 1 polyc |
| -640 -530 -626 -544 -608 -544 curveto |
| 368 -544 1 |
| polyc |
| 386 -544 400 -530 400 -512 curveto |
| 400 -448 1 polyc |
| 497 1.000 endpath |
| 0.980 0.792 0.541 scb |
| -192 -448 beginpath |
| -192 -464 1 polyc |
| -192 -482 -178 -496 -160 -496 curveto |
| 320 -496 1 |
| polyc |
| 338 -496 352 -482 352 -464 curveto |
| 352 -448 1 polyc |
| 497 1.000 endpath |
| 1.000 0.753 0.796 scb |
| 496 1.000 -400 -400 -400 -336 -240 -336 -240 -400 4 polygon |
| 496 1.000 112 -432 112 -368 320 -368 320 -432 4 polygon |
| 0.812 0.996 0.812 scb |
| 496 1.000 -480 -288 -480 -256 432 -256 432 -288 4 polygon |
| 0.796 0.953 0.953 scb |
| 496 1.000 -480 -176 -480 -96 464 -96 464 -176 4 polygon |
| 496 1.000 -480 -32 -480 48 464 48 464 -32 4 polygon |
| 496 1.000 -480 112 -480 256 496 256 496 112 4 polygon |
| 496 1.000 -480 320 -480 464 496 464 496 320 4 polygon |
| 496 1.000 -464 544 -464 752 448 752 448 544 4 polygon |
| sce |
| (SkyWater Sky130A metal stack \(not to scale!\):) {/Times-Roman cf} 2 16 0.000 |
| 1.000 -544 1008 label |
| 1 1.000 -680 -448 496 -448 2 polygon |
| 1 1.000 -192 -448 -192 -464 2 polygon |
| 1 1.000 352 -448 352 -464 2 polygon |
| 1 1.000 -160 -464 32 180.000 270.000 xcarc |
| 1 1.000 -160 -496 320 -496 2 polygon |
| 1 1.000 320 -464 32 -90.000 0.000 xcarc |
| 1 1.000 -640 -448 -640 -512 2 polygon |
| 1 1.000 400 -448 400 -512 2 polygon |
| 1 1.000 -608 -544 368 -544 2 polygon |
| 1 1.000 -608 -512 32 180.000 270.000 xcarc |
| 1 1.000 368 -512 32 -90.000 0.000 xcarc |
| (diffusion) {/Times-Roman cf} 2 16 0.000 0.700 -48 -480 label |
| (nwell) {/Times-Roman cf} 2 16 0.000 0.700 -304 -496 label |
| 0 1.000 112 -432 112 -368 320 -368 320 -432 4 polygon |
| (gate) {CR} (polysilicon) {/Times-Roman cf} 4 1045 0.000 0.700 224 -400 label |
| 0 1.000 -48 -448 -48 -288 48 -288 48 -448 4 polygon |
| (licon) {/Times-Roman cf} 2 21 0.000 0.700 0 -376 label |
| 0 1.000 -480 -288 -480 -256 432 -256 432 -288 4 polygon |
| (li) {/Times-Roman cf} 2 21 0.000 0.700 0 -272 label |
| 0 1.000 -480 -176 -480 -96 464 -96 464 -176 4 polygon |
| (metal1) {/Times-Roman cf} 2 17 0.000 0.700 0 -144 label |
| 0 1.000 -480 -32 -480 48 464 48 464 -32 4 polygon |
| (metal2) {/Times-Roman cf} 2 17 0.000 0.700 0 0 label |
| 0 1.000 -480 112 -480 256 496 256 496 112 4 polygon |
| (metal3) {/Times-Roman cf} 2 17 0.000 0.700 0 176 label |
| 0 1.000 -480 320 -480 464 496 464 496 320 4 polygon |
| (metal4) {/Times-Roman cf} 2 17 0.000 0.700 0 384 label |
| 0 1.000 -464 544 -464 752 448 752 448 544 4 polygon |
| (metal5) {/Times-Roman cf} 2 17 0.000 0.700 0 640 label |
| 0 1.000 -48 -256 -48 -176 48 -176 48 -256 4 polygon |
| (mcon) {/Times-Roman cf} 2 21 0.000 0.700 0 -224 label |
| (licon) {/Times-Roman cf} 2 17 0.000 0.700 -320 -320 label |
| 0 1.000 -48 -96 -48 -32 48 -32 48 -96 4 polygon |
| 0 1.000 -48 48 -48 112 48 112 48 48 4 polygon |
| 0 1.000 -48 256 -48 320 48 320 48 256 4 polygon |
| 0 1.000 -48 464 -48 544 112 544 112 464 4 polygon |
| (via1) {/Times-Roman cf} 2 21 0.000 0.700 0 -64 label |
| (via2) {/Times-Roman cf} 2 21 0.000 0.700 0 80 label |
| (via3) {/Times-Roman cf} 2 21 0.000 0.700 0 288 label |
| (via4) {/Times-Roman cf} 2 21 0.000 0.700 32 496 label |
| 1 1.000 -384 848 -384 896 2 polygon |
| 1 1.000 400 848 400 896 2 polygon |
| 1 1.000 432 928 672 928 2 polygon |
| 1 1.000 -416 928 -896 928 2 polygon |
| 1 1.000 -416 896 32 0.000 90.000 xcarc |
| 1 1.000 432 896 32 90.000 180.000 xcarc |
| (glass cut) {/Times-Roman cf} 2 17 0.000 0.700 32 880 label |
| 0.000 0.000 1.000 scb |
| (PI1 K=2.94) {/Times-Roman cf} 2 17 0.000 0.700 -648 696 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 592 -448 704 -448 2 polygon |
| 1 1.000 416 -496 704 -496 2 polygon |
| sce |
| 1.000 0.000 672 -496 generic::arrowhead |
| -1.000 180.000 672 -448 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (0.12) {/Times-Roman cf} 5 17 0.000 0.700 672 |
| -480 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 384 -432 624 -432 2 polygon |
| 1 1.000 384 -368 624 -368 2 polygon |
| sce |
| 1 1.000 560 -368 560 -320 2 polygon |
| 1 1.000 560 -432 560 -480 2 polygon |
| 1.000 0.000 560 -432 generic::arrowhead |
| -1.000 180.000 560 -368 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (0.18) {/Times-Roman cf} 5 21 0.000 0.700 592 |
| -400 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 -288 608 -288 2 polygon |
| 1 1.000 440 -256 608 -256 2 polygon |
| sce |
| 1 1.000 592 -256 592 -208 2 polygon |
| 1 1.000 592 -288 592 -336 2 polygon |
| 1.000 0.000 592 -288 generic::arrowhead |
| -1.000 180.000 592 -256 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (0.1) {/Times-Roman cf} 5 20 0.000 0.700 624 |
| -272 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 -176 608 -176 2 polygon |
| 1 1.000 512 -96 608 -96 2 polygon |
| sce |
| 1.000 0.000 592 -96 generic::arrowhead |
| -1.000 180.000 592 -176 generic::arrowhead |
| 1 1.000 592 -176 592 -96 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.36) {/Times-Roman cf} 5 16 0.000 0.700 624 |
| -144 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 -32 608 -32 2 polygon |
| 1 1.000 512 48 608 48 2 polygon |
| sce |
| 1.000 0.000 592 48 generic::arrowhead |
| -1.000 180.000 592 -32 generic::arrowhead |
| 1 1.000 592 -32 592 48 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.36) {/Times-Roman cf} 5 16 0.000 0.700 624 |
| 0 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 112 608 112 2 polygon |
| 1 1.000 512 256 608 256 2 polygon |
| sce |
| 1.000 0.000 592 256 generic::arrowhead |
| -1.000 180.000 592 112 generic::arrowhead |
| 1 1.000 592 112 592 256 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.845) {/Times-Roman cf} 5 16 0.000 0.700 |
| 624 176 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 320 608 320 2 polygon |
| 1 1.000 512 464 608 464 2 polygon |
| sce |
| 1.000 0.000 592 464 generic::arrowhead |
| -1.000 180.000 592 320 generic::arrowhead |
| 1 1.000 592 320 592 464 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.845) {/Times-Roman cf} 5 16 0.000 0.700 |
| 624 384 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 544 608 544 2 polygon |
| 1 1.000 512 752 624 752 2 polygon |
| sce |
| 1.000 0.000 560 752 generic::arrowhead |
| -1.000 180.000 560 544 generic::arrowhead |
| 1 1.000 560 544 560 752 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (1.26) {/Times-Roman cf} 5 16 0.000 0.700 592 |
| 640 label |
| 1 1.000 672 -448 672 -384 2 polygon |
| 1 1.000 672 -496 672 -560 2 polygon |
| 0 1.000 -400 -400 -400 -336 -240 -336 -240 -400 4 polygon |
| (field poly) {/Times-Roman cf} 2 21 0.000 0.700 -320 -368 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -696 -448 -1072 -448 2 polygon |
| 1 1.000 -736 -400 -824 -400 2 polygon |
| sce |
| 1 1.000 -752 -448 -752 -512 2 polygon |
| 1.000 0.000 -752 -448 generic::arrowhead |
| 1 1.000 -752 -400 -752 -352 2 polygon |
| -1.000 180.000 -752 -400 generic::arrowhead |
| 0.600 0.600 0.600 scb |
| 1 1.000 -768 -288 -872 -288 2 polygon |
| sce |
| 1 1.000 -848 -448 -848 -384 2 polygon |
| 1.000 0.000 -848 -288 generic::arrowhead |
| -1.000 180.000 -848 -448 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (0.3262) {/Times-Roman cf} 5 17 0.000 0.700 |
| -760 -432 label |
| (\265m) {/Times-RomanISO cf} {hS} (0.9361) {/Times-Roman cf} 5 23 0.000 0.700 |
| -776 -368 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -768 -176 -984 -176 2 polygon |
| sce |
| 1 1.000 -848 -352 -848 -288 2 polygon |
| 1 1.000 -976 -448 -976 -256 2 polygon |
| 1 1.000 -976 -216 -976 -176 2 polygon |
| -1.000 180.000 -976 -448 generic::arrowhead |
| 1.000 0.000 -976 -176 generic::arrowhead |
| (\265m) {hS} {/Times-RomanISO cf} (1.3761) {/Times-Roman cf} 5 17 0.000 0.700 |
| -928 -248 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -768 -32 -1000 -32 2 polygon |
| sce |
| 1 1.000 -992 -80 -992 -32 2 polygon |
| 1.000 0.000 -992 -32 generic::arrowhead |
| (\265m) {hS} {/Times-RomanISO cf} (2.0061) {/Times-Roman cf} 5 17 0.000 0.700 |
| -936 -112 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -768 112 -1016 112 2 polygon |
| sce |
| 1 1.000 -1008 64 -1008 112 2 polygon |
| 1.000 0.000 -1008 112 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (2.7861) {/Times-Roman cf} 5 17 0.000 0.700 |
| -952 32 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -768 320 -1032 320 2 polygon |
| sce |
| 1 1.000 -1024 256 -1024 320 2 polygon |
| 1.000 0.000 -1024 320 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (4.0211) {/Times-Roman cf} 5 17 0.000 0.700 |
| -968 224 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -824 544 -1048 544 2 polygon |
| sce |
| 1 1.000 -1040 464 -1040 544 2 polygon |
| 1.000 0.000 -1040 544 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (5.3711) {/Times-Roman cf} 5 17 0.000 0.700 |
| -984 432 label |
| 0.800 0.800 0.800 scb |
| 1 1.000 -912 928 -1088 928 2 polygon |
| sce |
| 1 1.000 -1056 816 -1056 928 2 polygon |
| 1.000 0.000 -1056 928 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (11.8834) {/Times-Roman cf} 5 17 0.000 0.700 |
| -1016 784 label |
| 0.600 0.600 0.600 scb |
| 3 1.000 -720 -400 -448 -400 2 polygon |
| 0.000 0.000 1.000 scb |
| (FOX K=3.9) {/Times-Roman cf} 2 19 0.000 0.700 -536 -432 label |
| sce |
| (p-substrate) {/Times-Roman cf} 2 16 0.000 0.700 448 -528 label |
| 0.000 0.000 1.000 scb |
| (PSG K=3.9) {/Times-Roman cf} 2 23 0.000 0.700 -600 -344 label |
| (LINT K=7.3) {/Times-Roman cf} 2 23 0.000 0.700 408 -240 label |
| 0.600 0.600 0.600 scb |
| 3 1.000 -480 -288 -760 -288 2 polygon |
| 0.000 0.000 1.000 scb |
| (NILD2 K=4.05) {/Times-Roman cf} 2 23 0.000 0.700 -576 -216 label |
| 0.600 0.600 0.600 scb |
| 3 1.000 -752 -176 -480 -176 2 polygon |
| 3 1.000 -752 -32 -480 -32 2 polygon |
| 3 1.000 -752 112 -480 112 2 polygon |
| 3 1.000 -752 320 -480 320 2 polygon |
| 3 1.000 -808 544 -488 544 2 polygon |
| 0.000 0.000 1.000 scb |
| (NILD3_C K=3.5) {/Times-Roman cf} 2 19 0.000 0.700 440 -80 label |
| (NILD4 K=4.2) {/Times-Roman cf} 2 19 0.000 0.700 -576 24 label |
| (NILD5 K=4.1) {/Times-Roman cf} 2 19 0.000 0.700 -576 200 label |
| (NILD6 K=4.0) {/Times-Roman cf} 2 19 0.000 0.700 -576 408 label |
| (NILD3 K=4.5) {/Times-Roman cf} 2 19 0.000 0.700 -576 -120 label |
| (NILD4_C K=3.5) {/Times-Roman cf} 2 19 0.000 0.700 440 64 label |
| (TOPOX K=3.9) {/Times-Roman cf} 2 19 0.000 0.700 304 784 label |
| sce |
| (0.0) {/Times-Roman cf} 2 23 0.000 0.700 -1088 -448 label |
| 1 1.000 -432 -224 -432 -272 2 polygon |
| 1.000 0.000 -432 -224 generic::arrowhead |
| -1.000 180.000 -432 -176 generic::arrowhead |
| 1.000 0.000 -448 -32 generic::arrowhead |
| -1.000 180.000 -448 -96 generic::arrowhead |
| 1 1.000 -448 -32 -448 -96 2 polygon |
| 1.000 0.000 -448 112 generic::arrowhead |
| -1.000 180.000 -448 48 generic::arrowhead |
| 1 1.000 -448 112 -448 48 2 polygon |
| 1.000 0.000 -448 320 generic::arrowhead |
| -1.000 180.000 -448 256 generic::arrowhead |
| 1 1.000 -448 320 -448 256 2 polygon |
| 1.000 0.000 -448 544 generic::arrowhead |
| -1.000 180.000 -448 464 generic::arrowhead |
| 1 1.000 -448 544 -448 464 2 polygon |
| 1.000 0.000 -192 928 generic::arrowhead |
| -1.000 180.000 -192 752 generic::arrowhead |
| 1 1.000 -192 928 -192 752 2 polygon |
| 0.600 0.600 0.600 scb |
| 1 1.000 -384 928 -160 928 2 polygon |
| sce |
| (\265m) {hS} {/Times-RomanISO cf} (0.265) {/Times-Roman cf} 5 20 0.000 0.700 |
| -472 -200 label |
| 0 1.000 -368 -336 -368 -288 -272 -288 -272 -336 4 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.27) {/Times-Roman cf} 5 20 0.000 0.700 |
| -432 -64 label |
| (\265m) {hS} {/Times-RomanISO cf} (0.42) {/Times-Roman cf} 5 20 0.000 0.700 |
| -432 80 label |
| (\265m) {hS} {/Times-RomanISO cf} (0.39) {/Times-Roman cf} 5 20 0.000 0.700 |
| -432 288 label |
| (\265m) {hS} {/Times-RomanISO cf} (0.505) {/Times-Roman cf} 5 20 0.000 0.700 |
| -432 504 label |
| (\265m) {hS} {/Times-RomanISO cf} (5.2523) {/Times-Roman cf} 5 20 0.000 0.700 |
| -176 824 label |
| 0.000 0.000 1.000 scb |
| (IOX K=3.9) {/Times-Roman cf} 2 23 0.000 0.700 272 -312 label |
| (SPNIT K=7.5) {/Times-Roman cf} 2 23 0.000 0.700 304 -352 label |
| sce |
| 0 1.000 320 -432 320 -368 336 -368 336 -432 4 polygon |
| 1 1.000 336 -432 368 -432 368 -336 64 -336 64 -432 5 polygon |
| 0 1.000 464 -176 464 -96 496 -96 496 -176 4 polygon |
| 0 1.000 464 -32 464 48 496 48 496 -32 4 polygon |
| 0 1.000 -240 -400 -240 -336 -224 -336 -224 -400 4 polygon |
| 1 1.000 -224 -400 -192 -400 -192 -304 3 polygon |
| 1 1.000 -400 -400 -416 -400 -416 -336 -400 -336 4 polygon |
| 1 1.000 -416 -400 -448 -400 -448 -304 3 polygon |
| 1 1.000 -448 -304 -368 -304 2 polygon |
| 1 1.000 -192 -304 -272 -304 2 polygon |
| 1 1.000 64 -432 96 -432 2 polygon |
| 0 1.000 96 -432 96 -368 112 -368 112 -432 4 polygon |
| 0.600 0.600 0.600 scb |
| 1 1.000 384 -336 512 -336 2 polygon |
| sce |
| (\265m) {/Times-RomanISO cf} {hS} (0.121) {/Times-Roman cf} 5 20 0.000 0.700 |
| 400 -352 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 448 80 464 80 480 32 3 polygon |
| 1 1.000 448 -72 464 -72 480 -120 3 polygon |
| 1 1.000 328 -376 312 -312 280 -312 3 polygon |
| sce |
| 1.000 0.000 416 -368 generic::arrowhead |
| 1 1.000 416 -368 416 -408 2 polygon |
| -1.000 180.000 416 -336 generic::arrowhead |
| 1 1.000 416 -336 416 -296 2 polygon |
| 0.600 0.600 0.600 scb |
| 3 1.000 -192 -400 -48 -400 2 polygon |
| sce |
| (\265m) {/Times-RomanISO cf} {hS} (0.6099) {/Times-Roman cf} 5 23 0.000 0.700 |
| -64 -352 label |
| 1 1.000 -128 -336 -128 -288 2 polygon |
| 1 1.000 -128 -368 -128 -400 2 polygon |
| -1.000 180.000 -128 -400 generic::arrowhead |
| 1.000 0.000 -128 -288 generic::arrowhead |
| 1 1.000 464 -264 464 -224 48 -224 3 polygon |
| 0.600 0.600 0.600 scb |
| 1 1.000 -144 -224 -208 -224 2 polygon |
| sce |
| -1.000 180.000 -176 -224 generic::arrowhead |
| 1.000 0.000 -176 -256 generic::arrowhead |
| 1 1.000 -176 -256 -176 -304 2 polygon |
| 1 1.000 -176 -224 -176 -184 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.075) {/Times-Roman cf} 5 21 0.000 0.700 |
| -176 -240 label |
| 1 1.000 464 -264 496 -264 2 polygon |
| 1 1.000 496 -288 432 -288 2 polygon |
| 1 1.000 -544 -256 -512 -256 -512 -224 -48 -224 4 polygon |
| 0.600 0.600 0.600 scb |
| 3 1.000 -552 -256 -760 -256 2 polygon |
| 0.000 0.000 1.000 scb |
| (LINT K=7.3) {/Times-Roman cf} 2 23 0.000 0.700 -600 -272 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -768 -256 -920 -256 2 polygon |
| sce |
| 1 1.000 -904 -304 -904 -256 2 polygon |
| 1.000 0.000 -904 -256 generic::arrowhead |
| -1.000 180.000 -904 -448 generic::arrowhead |
| 1 1.000 -904 -448 -904 -344 2 polygon |
| (\265m) {/Times-RomanISO cf} {hS} (1.0111) {/Times-Roman cf} 5 23 0.000 0.700 |
| -856 -320 label |
| 1 1.000 -432 -176 -432 -128 2 polygon |
| 1 1.000 -368 752 -368 776 -480 776 -480 544 4 polygon |
| 1 1.000 352 752 352 776 464 776 3 polygon |
| 1 1.000 464 776 464 544 448 544 3 polygon |
| 0.600 0.600 0.600 scb |
| 1 1.000 512 776 624 776 2 polygon |
| sce |
| 1 1.000 616 712 616 752 2 polygon |
| 1 1.000 616 776 616 856 2 polygon |
| 1.000 0.000 616 752 generic::arrowhead |
| -1.000 180.000 616 776 generic::arrowhead |
| (\265m) {hS} {/Times-RomanISO cf} (0.09) {/Times-Roman cf} 5 16 0.000 0.700 640 |
| 752 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 312 792 344 792 368 760 3 polygon |
| 0.000 0.000 1.000 scb |
| (TOPNIT K=7.5) {/Times-Roman cf} 2 19 0.000 0.700 -544 560 label |
| sce |
| 1 1.000 -552 592 -512 592 -512 848 -368 848 -368 776 5 polygon |
| 1 1.000 352 776 352 848 488 848 488 600 496 600 5 polygon |
| 1 1.000 464 544 496 544 2 polygon |
| 0.600 0.600 0.600 scb |
| 3 1.000 -552 592 -832 592 2 polygon |
| sce |
| 1 1.000 -824 544 -824 472 2 polygon |
| 1 1.000 -824 592 -824 656 2 polygon |
| -1.000 180.000 -824 592 generic::arrowhead |
| 1.000 0.000 -824 544 generic::arrowhead |
| 1 1.000 -480 544 -464 544 2 polygon |
| 0.600 0.600 0.600 scb |
| 1 1.000 -352 848 -264 848 2 polygon |
| 1 1.000 -360 776 -264 776 2 polygon |
| sce |
| 1 1.000 -328 776 -328 848 2 polygon |
| 1.000 0.000 -328 848 generic::arrowhead |
| -1.000 180.000 -328 776 generic::arrowhead |
| (\265m) {hS} {/Times-RomanISO cf} (0.54) {/Times-Roman cf} 5 20 0.000 0.700 |
| -312 808 label |
| (\265m) {/Times-RomanISO cf} {hS} (0.3777) {/Times-Roman cf} 5 17 0.000 0.700 |
| -824 560 label |
| 1 1.000 -784 784 -784 928 2 polygon |
| -1.000 180.000 -784 592 generic::arrowhead |
| 1.000 0.000 -784 928 generic::arrowhead |
| 1 1.000 -784 592 -784 736 2 polygon |
| (\265m) {/Times-RomanISO cf} {hS} (6.1346) {/Times-Roman cf} 5 17 0.000 0.700 |
| -760 752 label |
| -1.000 180.000 -992 -448 generic::arrowhead |
| 1 1.000 -992 -448 -992 -120 2 polygon |
| -1.000 180.000 -1008 -448 generic::arrowhead |
| 1 1.000 -1008 -448 -1008 24 2 polygon |
| -1.000 180.000 -1024 -448 generic::arrowhead |
| 1 1.000 -1024 -448 -1024 216 2 polygon |
| -1.000 180.000 -1040 -448 generic::arrowhead |
| 1 1.000 -1040 -448 -1040 416 2 polygon |
| 1 1.000 -1056 -448 -1056 776 2 polygon |
| -1.000 180.000 -1056 -448 generic::arrowhead |
| 0 1.000 -304 480 -304 496 -168 496 -168 480 4 polygon |
| 0 1.000 -288 496 -288 544 -192 544 -192 496 4 polygon |
| 0 1.000 -296 288 -296 320 -200 320 -200 288 4 polygon |
| 0.796 0.953 0.953 scb |
| 496 1.000 -312 272 -312 288 -176 288 -176 272 4 polygon |
| sce |
| 0 1.000 -312 272 -312 288 -176 288 -176 272 4 polygon |
| (cap2m) {/Times-Roman cf} 2 16 0.000 0.700 -152 480 label |
| (via4) {/Times-Roman cf} 2 21 0.000 0.700 -240 520 label |
| (via3) {/Times-Roman cf} 2 21 0.000 0.700 -248 304 label |
| (capm) {/Times-Roman cf} 2 16 0.000 0.700 -160 272 label |
| 0.600 0.600 0.600 scb |
| 1 1.000 -432 -336 -520 -336 2 polygon |
| sce |
| -1.000 180.000 -496 -288 generic::arrowhead |
| 1 1.000 -496 -240 -496 -288 2 polygon |
| 1.000 0.000 -496 -336 generic::arrowhead |
| 1 1.000 -496 -336 -496 -384 2 polygon |
| (\265m) {hS} {/Times-RomanISO cf} (0.4299) {/Times-Roman cf} 5 21 0.000 0.700 |
| -520 -312 label |
| 0.400 0.400 0.400 scb |
| 1 1.000 -448 -416 -448 -592 2 polygon |
| 1 1.000 -416 -416 -416 -624 2 polygon |
| 1 1.000 -400 -416 -400 -624 2 polygon |
| sce |
| 1 1.000 -560 672 -512 672 2 polygon |
| 1 1.000 -480 672 -384 672 2 polygon |
| 1 1.000 -528 624 -480 624 2 polygon |
| 1 1.000 -464 624 -384 624 2 polygon |
| 1.000 90.000 -512 672 generic::arrowhead |
| 1.000 90.000 -480 624 generic::arrowhead |
| -1.000 270.000 -464 624 generic::arrowhead |
| -1.000 270.000 -480 672 generic::arrowhead |
| -1.000 270.000 -416 -576 generic::arrowhead |
| 1.000 90.000 -448 -576 generic::arrowhead |
| 1.000 90.000 -416 -608 generic::arrowhead |
| -1.000 270.000 -400 -608 generic::arrowhead |
| 1 1.000 -480 -608 -416 -608 2 polygon |
| 1 1.000 -400 -608 -320 -608 2 polygon |
| 1 1.000 -416 -576 -320 -576 2 polygon |
| 1 1.000 -448 -576 -512 -576 2 polygon |
| 1 1.000 544 0 496 0 2 polygon |
| 1 1.000 464 0 384 0 2 polygon |
| 1.000 90.000 464 0 generic::arrowhead |
| -1.000 270.000 496 0 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (0.006) {/Times-Roman cf} 5 20 0.000 0.700 |
| -296 -608 label |
| (\265m) {/Times-RomanISO cf} {hS} (0.0431) {/Times-Roman cf} 5 20 0.000 0.700 |
| -296 -576 label |
| (\265m) {/Times-RomanISO cf} {hS} (0.4223) {/Times-Roman cf} 5 20 0.000 0.700 |
| -376 672 label |
| (\265m) {/Times-RomanISO cf} {hS} (0.070) {/Times-Roman cf} 5 20 0.000 0.700 |
| -376 624 label |
| (\265m) {/Times-RomanISO cf} {hS} (0.030) {/Times-Roman cf} 5 23 0.000 0.700 |
| 376 0 label |
| 1 1.000 464 -144 384 -144 2 polygon |
| 1.000 90.000 464 -144 generic::arrowhead |
| (\265m) {/Times-RomanISO cf} {hS} (0.030) {/Times-Roman cf} 5 23 360.000 0.700 |
| 376 -144 label |
| 1 1.000 544 -144 496 -144 2 polygon |
| -1.000 270.000 496 -144 generic::arrowhead |
| 0.600 0.600 0.600 scb |
| 1 1.000 432 -248 432 -192 2 polygon |
| 1 1.000 464 -216 464 -192 2 polygon |
| sce |
| 1.000 90.000 432 -200 generic::arrowhead |
| -1.000 270.000 464 -200 generic::arrowhead |
| 1 1.000 544 -200 464 -200 2 polygon |
| 1 1.000 432 -200 384 -200 2 polygon |
| (\265m) {/Times-RomanISO cf} {hS} (0.075) {/Times-Roman cf} 5 23 0.000 0.700 |
| 368 -200 label |
| pgsave restore showpage |
| |
| %%Page: captables 2 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 1.0000 inchscale |
| 2.6000 setlinewidth 861 1371 translate |
| |
| 0.647 0.165 0.165 scb |
| (SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1056 |
| 1280 label |
| sce |
| 1 1.000 -1056 1264 768 1264 2 polygon |
| 0.000 0.000 1.000 scb |
| (n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1056 436 label |
| (substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1056 388 label |
| (diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1056 484 label |
| (poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1054 580 label |
| (li) {/Times-Roman cf} 2 28 0.000 1.000 -1056 676 label |
| (metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1056 772 label |
| (metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1056 868 label |
| (metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1056 964 label |
| (metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1056 1060 label |
| (poly) {/Times-Roman cf} 2 19 0.000 1.000 224 1136 label |
| (li) {/Times-Roman cf} 2 19 0.000 1.000 32 1136 label |
| (metal1) {/Times-Roman cf} 2 19 0.000 1.000 -80 1136 label |
| (metal2) {/Times-Roman cf} 2 19 0.000 1.000 -240 1136 label |
| (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -400 1136 label |
| (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -560 1136 label |
| (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -720 1136 label |
| sce |
| 1 1.000 304 432 -864 432 2 polygon |
| 1 1.000 304 528 -864 528 2 polygon |
| 1 1.000 128 624 -864 624 2 polygon |
| 1 1.000 -48 720 -864 720 2 polygon |
| 1 1.000 -208 816 -864 816 2 polygon |
| 1 1.000 -368 912 -864 912 2 polygon |
| 1 1.000 -528 1008 -864 1008 2 polygon |
| 1 1.000 -688 1104 -864 1104 2 polygon |
| 0.180 0.545 0.341 scb |
| (Inter-layer distances \(microns\)) {/Times-Roman cf} 2 16 0.000 1.000 -1056 |
| 1216 label |
| sce |
| (0.3262) {/Times-Roman cf} 2 21 0.000 1.000 224 480 label |
| (0.9361) {/Times-Roman cf} 2 21 0.000 1.000 48 480 label |
| (1.3761) {/Times-Roman cf} 2 21 0.000 1.000 -128 480 label |
| (2.0061) {/Times-Roman cf} 2 21 0.000 1.000 -288 480 label |
| (4.0211) {/Times-Roman cf} 2 21 0.000 1.000 -608 480 label |
| (2.7861) {/Times-Roman cf} 2 21 0.000 1.000 -448 480 label |
| (5.3711) {/Times-Roman cf} 2 21 0.000 1.000 -768 480 label |
| (0.4299) {/Times-Roman cf} 2 21 0.000 1.000 48 576 label |
| (0.27) {/Times-Roman cf} 2 21 0.000 1.000 -288 768 label |
| (0.42) {/Times-Roman cf} 2 21 0.000 1.000 -448 864 label |
| (0.39) {/Times-Roman cf} 2 21 0.000 1.000 -608 960 label |
| (0.505) {/Times-Roman cf} 2 21 0.000 1.000 -768 1056 label |
| 1 1.000 -864 1104 -864 432 2 polygon |
| 1 1.000 304 528 304 432 2 polygon |
| 1 1.000 128 624 128 432 2 polygon |
| 1 1.000 -48 720 -48 432 2 polygon |
| 1 1.000 -208 816 -208 432 2 polygon |
| 1 1.000 -368 912 -368 432 2 polygon |
| 1 1.000 -528 1008 -528 432 2 polygon |
| 1 1.000 -688 1104 -688 432 2 polygon |
| (1.74) {/Times-Roman cf} 2 21 0.000 1.000 -768 960 label |
| (3.005) {/Times-Roman cf} 2 21 0.000 1.000 -768 864 label |
| (3.635) {/Times-Roman cf} 2 21 0.000 1.000 -768 768 label |
| (4.335) {/Times-Roman cf} 2 21 0.000 1.000 -768 672 label |
| (4.8649) {/Times-Roman cf} 2 21 0.000 1.000 -768 576 label |
| (1.655) {/Times-Roman cf} 2 21 0.000 1.000 -608 864 label |
| (2.285) {/Times-Roman cf} 2 21 0.000 1.000 -608 768 label |
| (2.985) {/Times-Roman cf} 2 21 0.000 1.000 -608 672 label |
| (3.5149) {/Times-Roman cf} 2 21 0.000 1.000 -608 576 label |
| (1.05) {/Times-Roman cf} 2 21 0.000 1.000 -448 768 label |
| (1.75) {/Times-Roman cf} 2 21 0.000 1.000 -448 672 label |
| (2.2799) {/Times-Roman cf} 2 21 0.000 1.000 -448 576 label |
| (0.97) {/Times-Roman cf} 2 21 0.000 1.000 -288 672 label |
| (1.4999) {/Times-Roman cf} 2 21 0.000 1.000 -288 576 label |
| (0.34) {/Times-Roman cf} 2 21 0.000 1.000 -128 672 label |
| (0.8699) {/Times-Roman cf} 2 21 0.000 1.000 -128 576 label |
| 0.180 0.545 0.341 scb |
| (Inter-layer capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1056 240 label |
| sce |
| (\)) {ns} (2) {Ss} (\265m) {/Times-RomanISO cf} (\(final values in aF/) |
| {/Times-Roman cf} 8 16 0.000 1.000 -640 240 label |
| (70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -784 48 label |
| (20.4659) {/Times-Roman cf} 2 16 0.000 1.000 -784 -48 label |
| (93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -528 -48 label |
| (22.0677) {/Times-Roman cf} 2 16 0.000 1.000 -544 -144 label |
| (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -304 -144 label |
| (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -80 -240 label |
| (92.872) {/Times-Roman cf} 2 16 0.000 1.000 432 -432 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 416 -528 label |
| (105.8571) {/Times-Roman cf} 2 16 0.000 1.000 672 -528 label |
| (11.9856) {/Times-Roman cf} 2 16 0.000 1.000 -784 -144 label |
| (10.0109) {/Times-Roman cf} 2 16 0.000 1.000 -784 -240 label |
| (16.1884) {/Times-Roman cf} 2 16 0.000 1.000 -544 -240 label |
| (36.0337) {/Times-Roman cf} 2 16 0.000 1.000 -304 -240 label |
| (8.5302) {/Times-Roman cf} 2 16 0.000 1.000 -768 -336 label |
| (12.640) {/Times-Roman cf} 2 16 0.000 1.000 -544 -336 label |
| (22.177) {/Times-Roman cf} 2 16 0.000 1.000 -304 -336 label |
| (7.6460) {/Times-Roman cf} 2 16 0.000 1.000 -768 -432 label |
| (10.791) {/Times-Roman cf} 2 16 0.000 1.000 -544 -432 label |
| (17.051) {/Times-Roman cf} 2 16 0.000 1.000 -304 -432 label |
| (6.7968) {/Times-Roman cf} 2 16 0.000 1.000 -768 -528 label |
| (9.1734) {/Times-Roman cf} 2 16 0.000 1.000 -528 -528 label |
| (13.335) {/Times-Roman cf} 2 16 0.000 1.000 -304 -528 label |
| (18.514) {/Times-Roman cf} 2 16 0.000 1.000 -64 -528 label |
| (26.009) {/Times-Roman cf} 2 16 0.000 1.000 176 -528 label |
| (45.235) {/Times-Roman cf} 2 16 0.000 1.000 176 -432 label |
| (26.544) {/Times-Roman cf} 2 16 0.000 1.000 -64 -432 label |
| (41.466) {/Times-Roman cf} 2 16 0.000 1.000 -64 -336 label |
| (116.96) {/Times-Roman cf} 2 16 0.000 1.000 176 -336 label |
| 0.000 0.000 1.000 scb |
| (n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -556 label |
| (substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -604 label |
| (diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -508 label |
| (poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1038 -412 label |
| (li) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -316 label |
| (metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -220 label |
| (metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -124 label |
| (metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -28 label |
| (metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1040 68 label |
| (poly) {/Times-Roman cf} 2 19 0.000 1.000 800 144 label |
| (li) {/Times-Roman cf} 2 19 0.000 1.000 496 144 label |
| (metal1) {/Times-Roman cf} 2 19 0.000 1.000 320 144 label |
| (metal2) {/Times-Roman cf} 2 19 0.000 1.000 80 144 label |
| (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -160 144 label |
| (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -416 144 label |
| (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -688 144 label |
| sce |
| 1 1.000 864 -560 -848 -560 2 polygon |
| 1 1.000 864 -464 -848 -464 2 polygon |
| 1 1.000 624 -368 -848 -368 2 polygon |
| 1 1.000 368 -272 -848 -272 2 polygon |
| 1 1.000 128 -176 -848 -176 2 polygon |
| 1 1.000 -112 -80 -848 -80 2 polygon |
| 1 1.000 -352 16 -848 16 2 polygon |
| 1 1.000 -592 112 -848 112 2 polygon |
| 1 1.000 -848 112 -848 -560 2 polygon |
| 1 1.000 864 -464 864 -560 2 polygon |
| 1 1.000 624 -368 624 -560 2 polygon |
| 1 1.000 368 -272 368 -560 2 polygon |
| 1 1.000 128 -176 128 -560 2 polygon |
| 1 1.000 -112 -80 -112 -560 2 polygon |
| 1 1.000 -352 16 -352 -560 2 polygon |
| 1 1.000 -592 112 -592 -560 2 polygon |
| {ns} (\2616) {/Times-Roman cf} {Ss} (, so divide by 1.0e) {ns} (2) {Ss} (\265m) |
| {/Times-RomanISO cf} (Note: LEF CPERSQDIST is in pF/) {/Times-Roman cf} 12 16 |
| 0.000 1.000 -128 240 label |
| 0.000 0.000 1.000 scb |
| (n-well) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1532 label |
| (substrate) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1580 label |
| (diffusion) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1484 label |
| (poly \(field\)) {/Times-Roman cf} 2 28 0.000 1.000 -1038 -1388 label |
| (li) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1292 label |
| (metal1) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1196 label |
| (metal2) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1100 label |
| (metal3) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -1004 label |
| (metal4) {/Times-Roman cf} 2 28 0.000 1.000 -1040 -908 label |
| (poly) {/Times-Roman cf} 2 19 0.000 1.000 800 -832 label |
| (li) {/Times-Roman cf} 2 19 0.000 1.000 496 -832 label |
| (metal1) {/Times-Roman cf} 2 19 0.000 1.000 320 -832 label |
| (metal2) {/Times-Roman cf} 2 19 0.000 1.000 80 -832 label |
| (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -160 -832 label |
| (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -416 -832 label |
| (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -688 -832 label |
| sce |
| 1 1.000 864 -1536 -848 -1536 2 polygon |
| 1 1.000 864 -1440 -848 -1440 2 polygon |
| 1 1.000 624 -1344 -848 -1344 2 polygon |
| 1 1.000 368 -1248 -848 -1248 2 polygon |
| 1 1.000 128 -1152 -848 -1152 2 polygon |
| 1 1.000 -112 -1056 -848 -1056 2 polygon |
| 1 1.000 -352 -960 -848 -960 2 polygon |
| 1 1.000 -592 -864 -848 -864 2 polygon |
| 1 1.000 -848 -864 -848 -1536 2 polygon |
| 1 1.000 864 -1440 864 -1536 2 polygon |
| 1 1.000 624 -1344 624 -1536 2 polygon |
| 1 1.000 368 -1248 368 -1536 2 polygon |
| 1 1.000 128 -1152 128 -1536 2 polygon |
| 1 1.000 -112 -1056 -112 -1536 2 polygon |
| 1 1.000 -352 -960 -352 -1536 2 polygon |
| 1 1.000 -592 -864 -592 -1536 2 polygon |
| 0.180 0.545 0.341 scb |
| (Fringe capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1040 -720 label |
| sce |
| (\265m\)) {/Times-RomanISO cf} (\(values in aF/) {/Times-Roman cf} 4 16 0.000 |
| 1.000 -624 -720 label |
| {ns} (\2616) {/Times-Roman cf} {Ss} (\265m, so divide by 1.0e) |
| {/Times-RomanISO cf} (Note: LEF EDGECAPACITANCE is in pF/) {/Times-Roman cf} 8 |
| 16 0.000 1.000 -112 -720 label |
| (102.25) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1504 label |
| (99.483) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1504 label |
| (116.62) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1504 label |
| (94.529) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1504 label |
| (106.39) {/Times-Roman cf} 2 16 0.000 1.000 192 -1504 label |
| (72.763) {/Times-Roman cf} 2 16 0.000 1.000 432 -1504 label |
| (141.68) {/Times-Roman cf} 2 16 0.000 1.000 688 -1504 label |
| (109.36) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1408 label |
| (109.04) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1408 label |
| (135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1408 label |
| (115.79) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1408 label |
| (152.95) {/Times-Roman cf} 2 16 0.000 1.000 192 -1408 label |
| (120.86) {/Times-Roman cf} 2 16 0.000 1.000 432 -1408 label |
| (113.11) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1312 label |
| (114.74) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1312 label |
| (150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1312 label |
| (137.79) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1312 label |
| (249.97) {/Times-Roman cf} 2 16 0.000 1.000 192 -1312 label |
| (119.67) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1216 label |
| (125.83) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1216 label |
| (191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1216 label |
| (273.21) {/Times-Roman cf} 2 16 0.000 1.000 -48 -1216 label |
| (129.16) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1120 label |
| (144.86) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1120 label |
| (341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1120 label |
| (168.89) {/Times-Roman cf} 2 16 0.000 1.000 -784 -1024 label |
| (351.52) {/Times-Roman cf} 2 16 0.000 1.000 -528 -1024 label |
| (378.01) {/Times-Roman cf} 2 16 0.000 1.000 -784 -928 label |
| 0.180 0.545 0.341 scb |
| (Sidewall capacitances) {/Times-Roman cf} 2 16 0.000 1.000 -1040 -1696 label |
| sce |
| (\265m\)) {/Times-RomanISO cf} (\(values in aF/) {/Times-Roman cf} 4 16 0.000 |
| 1.000 -624 -1696 label |
| 0.000 0.000 1.000 scb |
| (poly) {/Times-Roman cf} 2 19 0.000 1.000 784 -1776 label |
| (li) {/Times-Roman cf} 2 19 0.000 1.000 480 -1776 label |
| (metal1) {/Times-Roman cf} 2 19 0.000 1.000 304 -1776 label |
| (metal2) {/Times-Roman cf} 2 19 0.000 1.000 64 -1776 label |
| (metal3) {/Times-Roman cf} 2 19 0.000 1.000 -176 -1776 label |
| (metal4) {/Times-Roman cf} 2 19 0.000 1.000 -432 -1776 label |
| (metal5) {/Times-Roman cf} 2 19 0.000 1.000 -704 -1776 label |
| sce |
| 1 1.000 864 -1824 -848 -1824 2 polygon |
| 1 1.000 -848 -1920 -848 -1824 2 polygon |
| 1 1.000 864 -1920 864 -1824 2 polygon |
| 1 1.000 624 -1920 624 -1824 2 polygon |
| 1 1.000 368 -1920 368 -1824 2 polygon |
| 1 1.000 128 -1920 128 -1824 2 polygon |
| 1 1.000 -112 -1920 -112 -1824 2 polygon |
| 1 1.000 -352 -1920 -352 -1824 2 polygon |
| 1 1.000 -592 -1920 -592 -1824 2 polygon |
| 1 1.000 864 -1920 -848 -1920 2 polygon |
| (77.267) {/Times-Roman cf} 2 21 0.000 1.000 -736 -1872 label |
| (29.9265) {/Times-Roman cf} 2 21 0.000 1.000 -480 -1872 label |
| (30.675) {/Times-Roman cf} 2 21 0.000 1.000 -240 -1872 label |
| (13.387) {/Times-Roman cf} 2 21 0.000 1.000 0 -1872 label |
| (14.343) {/Times-Roman cf} 2 21 0.000 1.000 240 -1872 label |
| (3.937) {/Times-Roman cf} 2 21 0.000 1.000 496 -1872 label |
| (6.710) {/Times-Roman cf} 2 21 0.000 1.000 736 -1872 label |
| 0.820 0.039 0.859 scb |
| 0 1.000 112 -1936 112 -256 384 -256 384 -1936 4 polygon |
| pgsave restore showpage |
| |
| %%Page: worksheet1 3 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 0.6922 inchscale |
| 2.6000 setlinewidth 822 1572 translate |
| |
| 0.180 0.545 0.341 scb |
| (Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072 |
| 1024 label |
| sce |
| (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 912 label |
| (0.505) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 848 label |
| (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 784 label |
| (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 720 label |
| (0.39) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 672 label |
| (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 608 label |
| (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 544 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 496 label |
| (0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 448 label |
| (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 384 label |
| (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 320 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 272 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 224 label |
| (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 176 label |
| (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 112 label |
| (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 48 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 0 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -48 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -96 label |
| (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -144 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -192 label |
| (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -256 label |
| (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 -320 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 -368 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -416 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -464 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -512 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -560 label |
| (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -992 -608 label |
| (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -736 label |
| (1.35) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.0) {/Times-Roman cf} 13 16 0.000 1.000 -992 -800 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -992 -848 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -992 -896 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -944 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -992 -992 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -992 -1040 label |
| (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -992 -1088 label |
| (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 784 label |
| (0.39) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 720 label |
| (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 608 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 544 label |
| (0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 496 label |
| (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 384 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 320 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 272 label |
| (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 224 label |
| (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 112 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 48 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 0 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -48 label |
| (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -96 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -144 label |
| (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -256 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 -320 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 -368 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -416 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -464 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -512 label |
| (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -736 label |
| (1.235) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.1) {/Times-Roman cf} 13 16 0.000 1.000 -544 -800 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -544 -848 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -896 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -544 -944 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -544 -992 label |
| (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -1040 label |
| (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 608 label |
| (0.42) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 544 label |
| (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 384 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 320 label |
| (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 272 label |
| (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 112 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 48 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 0 label |
| (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -48 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -96 label |
| (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -256 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 -320 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -368 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -416 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -464 label |
| (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -736 label |
| (0.78) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.2) {/Times-Roman cf} 13 16 0.000 1.000 -96 -800 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -848 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 -96 -896 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 -96 -944 label |
| (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -992 label |
| (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 240 384 label |
| (0.27) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 320 label |
| (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 240 112 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 48 label |
| (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 0 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -48 label |
| (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 256 -256 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -320 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -368 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -416 label |
| (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 256 -736 label |
| (0.63) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -800 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 320 -848 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 320 -896 label |
| (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -944 label |
| (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 672 112 label |
| (0.265) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 48 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 0 label |
| (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 688 -256 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -320 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -368 label |
| (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 688 -736 label |
| (0.365) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (4.05) {/Times-Roman cf} 13 16 0.000 1.000 752 -800 label |
| (0.075) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.3) {/Times-Roman cf} 13 16 0.000 1.000 752 -848 label |
| (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -896 label |
| (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -256 label |
| (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1104 -736 label |
| (0.9361) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 1168 -800 label |
| (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1456 -736 label |
| (0.3262) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 1520 -800 label |
| (\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464 |
| 1024 label |
| 0.647 0.165 0.165 scb |
| (SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1072 |
| 1080 label |
| sce |
| 1 1.000 -1080 1064 1784 1064 2 polygon |
| ( \(used in magic tech file extract section\)) {ns} (2) {Ss} (\265m) |
| {/Times-RomanISO cf} (8.854 to get result in aF/) {/Times-Roman cf} ( = ) {ns} |
| (0) {ss} (e) {/Symbol cf} (Use ) {/Times-Roman cf} 16 16 0.000 1.000 -1024 |
| -1192 label |
| (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.5) {/Times-Roman cf} 13 16 0.000 1.000 -992 -656 label |
| (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -544 -560 label |
| (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.5) {/Times-Roman cf} 13 16 0.000 1.000 -544 -608 label |
| (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 -96 -512 label |
| (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.5) {/Times-Roman cf} 13 16 0.000 1.000 -96 -560 label |
| (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 320 -464 label |
| (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.5) {/Times-Roman cf} 13 16 0.000 1.000 320 -512 label |
| (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 752 -416 label |
| (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.5) {/Times-Roman cf} 13 16 0.000 1.000 752 -464 label |
| (0.3089) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (3.9) {/Times-Roman cf} 13 16 0.000 1.000 1104 -320 label |
| (0.1210) {hS} {hS} ( /) {ns} (0) {ss} {/Times-Roman cf} (e) {/Symbol cf} {hS} |
| (7.5) {/Times-Roman cf} 13 16 0.000 1.000 1104 -368 label |
| pgsave restore showpage |
| |
| %%Page: worksheet2 4 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 0.6922 inchscale |
| 2.6000 setlinewidth 814 1600 translate |
| |
| 0.180 0.545 0.341 scb |
| (Inter-layer capacitances worksheet) {/Times-Roman cf} 2 16 0.000 1.000 -1072 |
| 992 label |
| sce |
| (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 880 label |
| (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 752 label |
| (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 576 label |
| (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 352 label |
| (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -992 144 label |
| (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1072 80 label |
| (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -288 label |
| (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1056 -768 label |
| (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -624 752 label |
| (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -624 576 label |
| (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -624 352 label |
| (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -624 80 label |
| (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -288 label |
| (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -608 -768 label |
| (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -176 576 label |
| (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -176 352 label |
| (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -176 80 label |
| (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -288 label |
| (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -160 -768 label |
| (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 256 352 label |
| (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 256 80 label |
| (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 272 -288 label |
| (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 272 -768 label |
| (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 688 80 label |
| (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 704 -288 label |
| (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 704 -768 label |
| (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -288 label |
| (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1112 -768 label |
| (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1464 -768 label |
| (\(series capacitors, top to bottom\)) {/Times-Roman cf} 2 16 0.000 1.000 -464 |
| 992 label |
| (70.1307) {/Times-Roman cf} 2 16 0.000 1.000 -992 816 label |
| (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 688 label |
| (93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -992 640 label |
| (93.0805) {/Times-Roman cf} 2 16 0.000 1.000 -544 688 label |
| (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 512 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 464 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 512 label |
| (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -992 416 label |
| (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -544 464 label |
| (88.5400) {/Times-Roman cf} 2 16 0.000 1.000 -96 512 label |
| (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 288 label |
| (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 16 label |
| (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -352 label |
| (26.2341) {/Times-Roman cf} 2 16 0.000 1.000 -992 -832 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 240 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -32 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -400 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -992 -880 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -832 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 -352 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 16 label |
| (29.3938) {/Times-Roman cf} 2 16 0.000 1.000 -544 288 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 192 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 240 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 288 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -80 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -32 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 16 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -448 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -400 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -352 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -992 -928 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -544 -880 label |
| (47.6754) {/Times-Roman cf} 2 16 0.000 1.000 -96 -832 label |
| (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -544 192 label |
| (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 -96 240 label |
| (147.5667) {/Times-Roman cf} 2 16 0.000 1.000 336 288 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -128 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -80 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -32 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 16 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -496 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -448 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -400 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -352 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -992 -976 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -544 -928 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 -96 -880 label |
| (64.2429) {/Times-Roman cf} 2 16 0.000 1.000 336 -832 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -224 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -176 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -128 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -80 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -32 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -592 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -544 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -496 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -448 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -400 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1072 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1024 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 -96 -976 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 336 -928 label |
| (861.7893) {/Times-Roman cf} 2 16 0.000 1.000 768 -880 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1120 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -544 -1072 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 -96 -1024 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 336 -976 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 768 -928 label |
| (\) to get final interlayer capacitor value.) {ns} (N) {ss} ( + ... + 1/C) {ns} |
| (1) {ss} ( + 1/C) {ns} (0) {ss} ( = 1/C) {ns} (tot) {ss} |
| (Add these in parallel combination \(1/C) {/Times-Roman cf} 18 16 0.000 1.000 |
| -992 -1216 label |
| (36.8877) {/Times-Roman cf} 2 16 0.000 1.000 1184 -832 label |
| (105.8571) {/Times-Roman cf} 2 16 0.000 1.000 1520 -832 label |
| 1 1.000 -1072 1032 1792 1032 2 polygon |
| 0.647 0.165 0.165 scb |
| (SkyWater sky130A capacitance tables) {/Times-Roman cf} 2 16 0.000 1.000 -1064 |
| 1048 label |
| sce |
| (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -992 -640 label |
| (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -992 -688 label |
| (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -544 -592 label |
| (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -544 -640 label |
| (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 -96 -544 label |
| (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 -96 -592 label |
| (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 336 -496 label |
| (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 336 -544 label |
| (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 768 -448 label |
| (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 768 -496 label |
| (111.7900) {/Times-Roman cf} 2 16 0.000 1.000 1184 -352 label |
| (548.8000) {/Times-Roman cf} 2 16 0.000 1.000 1184 -400 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -1024 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -976 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -928 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -880 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -832 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -992 -544 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -544 -496 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 -96 -448 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 336 -400 label |
| (98.243) {/Times-Roman cf} 2 16 0.000 1.000 768 -352 label |
| (135.320) {/Times-Roman cf} 2 16 0.000 1.000 -992 -176 label |
| (135.320) {/Times-Roman cf} 2 16 0.000 1.000 -544 -128 label |
| (135.320) {/Times-Roman cf} 2 16 0.000 1.000 -96 -80 label |
| (135.320) {/Times-Roman cf} 2 16 0.000 1.000 336 -32 label |
| (135.320) {/Times-Roman cf} 2 16 0.000 1.000 768 16 label |
| pgsave restore showpage |
| |
| %%Page: worksheet3 5 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 0.6922 inchscale |
| 2.6000 setlinewidth 1277 1656 translate |
| |
| 0.647 0.165 0.165 scb |
| (Interlayer \(fringe\) capacitance worksheet:) {/Times-Roman cf} 2 16 0.000 |
| 1.000 -1280 896 label |
| sce |
| ( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C) |
| {/Times-Roman cf} 6 16 0.000 1.000 -1280 800 label |
| 1 1.000 -456 808 -344 808 2 polygon |
| (K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -408 |
| 824 label |
| (log\(h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -392 792 label |
| (where h is the distance between layers and t is the sidewall thickness.) |
| {/Times-Roman cf} 2 16 0.000 1.000 -224 800 label |
| (Use geometric mean for K \(instead of doing series capacitor additions\).) |
| {/Times-Roman cf} 2 16 0.000 1.000 -1288 680 label |
| ( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2) |
| {/Times-Roman cf} 8 16 0.000 1.000 -216 744 label |
| ( \(5-3\) = \(1.35/1.74\) * 4.0 + \(0.39/1.74\) * 4.1 = 4.0224) {ns} (eff) {ss} |
| (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 560 label |
| |
| ( \(5-2\) = \(1.35/3.005\) * 4.0 + \(1.235/3.005\) * 4.1 + \(0.42/3.005\) * 4.2 = 4.0691) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 512 label |
| |
| ( \(5-1\) = \(1.35/3.635\) * 4.0 + \(1.235/3.635\) * 4.1 + \(0.78/3.635\) * 4.2 + \(0.27/3.635\) * 4.5 = 4.114) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 464 label |
| |
| ( \(5-li\) = \(1.35/4.335\) * 4.0 + \(1.235/4.335\) * 4.1 + \(0.78/4.335\) * 4.2 + \(0.63/4.335\) * 4.5 + \(0.265/4.335\) * 4.05 + \(0.075/4.335\) * 7.3 = 4.1973) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 416 label |
| |
| (+ \(0.075/4.8649\) * 7.3 + \(0.3089/4.8649\) * 3.9 + \(0.121/4.8649\) * 7.5 = 4.2575) |
| {CR} |
| ( \(5-poly\) = \(1.35/4.8649\) * 4.0 + \(1.235/4.8649\) * 4.1 + \(0.78/4.8649\) * 4.2 + \(0.63/4.8649\) * 4.5 + \(0.365/4.8649\) * 4.05) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 320 label |
| (+ \(0.075/5.3711\) * 7.3 + \(0.9361/5.3711\) * 3.9 = 4.1427) {CR} |
| ( \(5-sub\) = \(1.35/5.3711\) * 4.0 + \(1.235/5.3711\) * 4.1 + \(0.78/5.3711\) * 4.2 + \(0.63/5.3711\) * 4.5 + \(0.365/5.3711\) * 4.05) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 224 label |
| ( \(4-3\) = 4.1 ) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| 128 label |
| ( \(4-2\) = \(1.235/1.655\) * 4.1 + \(0.42/1.655\) * 4.2 = 4.1254) {ns} (eff) |
| {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 80 label |
| |
| ( \(4-1\) = \(1.235/2.285\) * 4.1 + \(0.78/2.285\) * 4.2 + \(0.27/2.285\) * 4.5 = 4.1814) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 32 label |
| |
| ( \(4-li\) = \(1.235/2.985\) * 4.1 + \(0.78/2.985\) * 4.2 + \(0.63/2.985\) * 4.5 + \(0.265/2.985\) * 4.05 + \(0.075/2.985\) * 7.3 = 4.2865) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -16 label |
| |
| (+ \(0.075/3.5149\) * 7.3 + \(0.3089/3.5149\) * 3.9 + \(0.121/3.5149\) * 7.5 = 4.3564) |
| {CR} |
| ( \(4-poly\) = \(1.235/3.5149\) + \(0.78/3.5149\) * 4.2 + \(0.63/3.5149\) * 4.5 + \(0.365/3.5149\) * 4.05) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -112 label |
| (+ \(0.075/4.0211\) * 7.3 + \(0.9361/4.0211\) * 3.9 = 4.1907) {CR} |
| ( \(4-sub\) = \(1.235/4.0211\) * 4.1 + \(0.78/4.0211\) * 4.2 + \(0.63/4.0211\) * 4.5 + \(0.365/4.0211\) * 4.05) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -208 label |
| ( \(5-4\) = 4.0) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| 608 label |
| ( \(3-2\) = 4.2) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| -288 label |
| ( \(3-1\) = \(0.78/1.05\) * 4.2 + \(0.27/1.05\) * 4.5 = 4.2771 ) {ns} (eff) |
| {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -336 label |
| |
| ( \(3-li\) = \(0.78/1.75\) * 4.2 + \(0.63/1.75\) * 4.5 + \(0.265/1.75\) * 4.05 + \(0.075/1.75\) * 7.3 = 4.4181) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -384 label |
| |
| (+ \(0.075/2.2799\) * 7.3 + \(0.3089/2.2799\) * 3.9 + \(0.121/2.2799\) * 7.5 = 4.4954) |
| {CR} |
| ( \(3-poly\) = \(0.78/2.2799\) * 4.2 + \(0.63/2.2799\) * 4.5 + \(0.365/2.2799\) * 4.05) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 8 16 0.000 1.000 -1280 -480 label |
| |
| ( \(3-sub\) = \(0.78/2.7861\) * 4.2 + \(0.63/2.7861\) * 4.5 + \(0.365/2.7861\) * 4.05 + \(0.075/2.7861\) * 7.3 + \(0.9361/2.7861\) * 3.9 = 4.2308) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -528 label |
| ( \(2-1\) = 4.5) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 |
| -608 label |
| |
| ( \(2-li\) = \(0.63/0.97\) * 4.5 + \(0.265/0.97\) * 4.05 + \(0.075/0.97\) * 7.3 = 4.5936) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -656 label |
| |
| ( \(2-poly\) = \(0.63/1.4999\) * 4.5 + \(0.365/1.4999\) * 4.05 + \(0.075/1.4999\) * 7.3 + \(0.3089/1.4999\) * 3.9 + \(0.121/1.4999\) * 7.5 = 4.6489) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -704 label |
| |
| ( \(2-sub\) = \(0.63/2.0061\) * 4.5 + \(0.365/2.0061\) * 4.05 + \(0.075/2.0061\) * 7.3 + \(0.9361/2.0061\) * 3.9 = 4.2428) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -752 label |
| ( \(1-li\) = \(0.265/0.34\) * 4.05 + \(0.075/0.34\) * 7.3 = 4.7669) {ns} (eff) |
| {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -832 label |
| |
| ( \(1-poly\) = \(0.265/0.7699\) + \(0.075/0.7699\) * 7.3 + \(0.3089/0.7699\) * 3.9 + \(0.121/0.7699\) * 7.5 = 4.8486) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -880 label |
| |
| ( \(1-sub\) = \(0.365/1.3761\) * 4.05 + \(0.075/1.3761\) * 7.3 + \(0.9361/1.3761\) * 3.9 = 4.1251) |
| {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -928 label |
| ( \(li-poly\) = \(0.3089/0.4299\) * 3.9 + \(0.121/0.4299\) * 7.5 = 4.9133) {ns} |
| (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 -1280 -1024 label |
| ( \(li-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 |
| -1280 -1072 label |
| ( \(poly-sub\) = 3.9) {ns} (eff) {ss} (K) {/Times-Roman cf} 6 16 0.000 1.000 |
| -1280 -1152 label |
| 1 1.000 -1280 192 1008 192 2 polygon |
| 1 1.000 -1280 -240 1008 -240 2 polygon |
| 1 1.000 -1280 -560 1008 -560 2 polygon |
| 1 1.000 -1280 -784 1008 -784 2 polygon |
| 1 1.000 -1280 -960 1008 -960 2 polygon |
| 1 1.000 -1280 -1104 1008 -1104 2 polygon |
| 1 1.000 -1280 -1184 1008 -1184 2 polygon |
| 1 1.000 -1280 656 1008 656 2 polygon |
| pgsave restore showpage |
| |
| %%Page: worksheet4 6 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 0.6922 inchscale |
| 2.6000 setlinewidth 939 1793 translate |
| |
| 0.000 0.000 1.000 scb |
| (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896 label |
| (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 720 label |
| (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -832 720 label |
| (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 544 label |
| (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -832 544 label |
| (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -384 544 label |
| (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label |
| (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -832 352 label |
| (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -384 352 label |
| (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 48 352 label |
| (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label |
| (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -832 160 label |
| (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -384 160 label |
| (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 48 160 label |
| (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 480 160 label |
| (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -64 label |
| (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -64 label |
| (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -64 label |
| (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 48 -64 label |
| (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 480 -64 label |
| (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 896 -64 label |
| (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 -272 label |
| (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -832 -272 label |
| (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -384 -272 label |
| (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 48 -272 label |
| (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 480 -272 label |
| (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 896 -272 label |
| (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1248 -272 label |
| sce |
| |
| (\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\)) |
| {/Times-Roman cf} 2 16 0.000 1.000 -864 896 label |
| (55.631 * 4.0) {/Times-Roman cf} 2 16 0.000 1.000 -1248 848 label |
| 1 1.000 -1264 832 -1024 832 2 polygon |
| (log\(1 + 2\2640.505/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1152 800 label |
| (55.631 * 4.0224) {/Times-Roman cf} 2 16 0.000 1.000 -1264 672 label |
| 1 1.000 -1264 656 -1024 656 2 polygon |
| (log\(1 + 2\2641.74/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 624 label |
| (55.631 * 4.0691) {/Times-Roman cf} 2 16 0.000 1.000 -1264 496 label |
| 1 1.000 -1264 480 -1024 480 2 polygon |
| (log\(1 + 2\2643.005/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 448 label |
| (55.631 * 4.114) {/Times-Roman cf} 2 16 0.000 1.000 -1264 304 label |
| 1 1.000 -1264 288 -1024 288 2 polygon |
| (log\(1 + 2\2643.635/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 256 label |
| (55.631 * 4.1973) {/Times-Roman cf} 2 16 0.000 1.000 -1264 112 label |
| 1 1.000 -1264 96 -1024 96 2 polygon |
| (log\(1 + 2\2644.335/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 64 label |
| (55.631 * 4.2575) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -112 label |
| 1 1.000 -1264 -128 -1024 -128 2 polygon |
| (log\(1 + 2\2644.8649/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1136 -160 |
| label |
| (55.631 * 4.1427) {/Times-Roman cf} 2 16 0.000 1.000 -1248 -320 label |
| 1 1.000 -1248 -336 -1008 -336 2 polygon |
| (log\(1 + 2\2645.3711/1.26\)) {/Times-Roman cf} 2 21 0.000 1.000 -1120 -368 |
| label |
| (55.631 * 4.1) {/Times-Roman cf} 2 16 0.000 1.000 -832 672 label |
| 1 1.000 -832 656 -592 656 2 polygon |
| (log\(1 + 2\2640.39/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 624 label |
| 1 1.000 -832 480 -592 480 2 polygon |
| (log\(1 + 2\2641.655/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 448 label |
| (55.631 * 4.1254) {/Times-Roman cf} 2 16 0.000 1.000 -832 496 label |
| 1 1.000 -832 288 -592 288 2 polygon |
| (log\(1 + 2\2642.285/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 256 label |
| (55.631 * 4.2865) {/Times-Roman cf} 2 16 0.000 1.000 -832 112 label |
| 1 1.000 -832 96 -592 96 2 polygon |
| (log\(1 + 2\2642.985/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 64 label |
| (55.631 * 4.3564) {/Times-Roman cf} 2 16 0.000 1.000 -832 -112 label |
| 1 1.000 -832 -128 -592 -128 2 polygon |
| (log\(1 + 2\2643.5149/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -704 -160 |
| label |
| (55.631 * 4.1907) {/Times-Roman cf} 2 16 0.000 1.000 -816 -320 label |
| 1 1.000 -816 -336 -576 -336 2 polygon |
| (log\(1 + 2\2644.0211/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -688 -368 |
| label |
| (55.631 * 4.1814) {/Times-Roman cf} 2 16 0.000 1.000 -832 304 label |
| (55.631 * 4.2308) {/Times-Roman cf} 2 16 0.000 1.000 -352 -320 label |
| 1 1.000 -352 -336 -112 -336 2 polygon |
| (log\(1 + 2\2642.7861/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -224 -368 |
| label |
| (55.631 * 4.4954) {/Times-Roman cf} 2 16 0.000 1.000 -368 -112 label |
| 1 1.000 -368 -128 -128 -128 2 polygon |
| (log\(1 + 2\2642.2799/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 -160 |
| label |
| 1 1.000 -368 96 -128 96 2 polygon |
| (log\(1 + 2\2641.75/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 64 label |
| (55.631 * 4.4181) {/Times-Roman cf} 2 16 0.000 1.000 -368 112 label |
| 1 1.000 -368 288 -128 288 2 polygon |
| (log\(1 + 2\2641.05/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 256 label |
| (55.631 * 4.2771) {/Times-Roman cf} 2 16 0.000 1.000 -368 304 label |
| 1 1.000 -368 480 -128 480 2 polygon |
| (log\(1 + 2\2640.42/0.854\)) {/Times-Roman cf} 2 21 0.000 1.000 -240 448 label |
| (55.631 * 4.2) {/Times-Roman cf} 2 16 0.000 1.000 -368 496 label |
| 1 1.000 48 288 288 288 2 polygon |
| (log\(1 + 2\2640.27/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 256 label |
| (55.631 * 4.5) {/Times-Roman cf} 2 16 0.000 1.000 48 304 label |
| 1 1.000 48 96 288 96 2 polygon |
| (log\(1 + 2\2640.97/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 176 64 label |
| (55.631 * 4.5936) {/Times-Roman cf} 2 16 0.000 1.000 48 112 label |
| (55.631 * 4.6489) {/Times-Roman cf} 2 16 0.000 1.000 48 -112 label |
| 1 1.000 48 -128 288 -128 2 polygon |
| (log\(1 + 2\2641.4999/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 176 -160 label |
| (55.631 * 4.2428) {/Times-Roman cf} 2 16 0.000 1.000 64 -320 label |
| 1 1.000 64 -336 304 -336 2 polygon |
| (log\(1 + 2\2642.0061/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 192 -368 label |
| (55.631 * 4.1251) {/Times-Roman cf} 2 16 0.000 1.000 512 -320 label |
| 1 1.000 512 -336 752 -336 2 polygon |
| (log\(1 + 2\2641.3761/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 640 -368 label |
| (55.631 * 4.8486) {/Times-Roman cf} 2 16 0.000 1.000 496 -112 label |
| 1 1.000 496 -128 736 -128 2 polygon |
| (log\(1 + 2\2640.8699/0.36\)) {/Times-Roman cf} 2 21 0.000 1.000 624 -160 label |
| (log\(1 + 2\2640.34/0.36\)) {/Times-Roman cf} 2 21 360.000 1.000 624 64 label |
| (55.631 * 4.7669) {/Times-Roman cf} 2 16 0.000 1.000 496 112 label |
| 1 1.000 496 96 736 96 2 polygon |
| (55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 896 -320 label |
| 1 1.000 896 -336 1136 -336 2 polygon |
| (log\(1 + 2\2640.9361/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1024 -368 label |
| (55.631 * 4.9133) {/Times-Roman cf} 2 16 0.000 1.000 880 -112 label |
| 1 1.000 880 -128 1120 -128 2 polygon |
| (log\(1 + 2\2640.4299/0.1\)) {/Times-Roman cf} 2 21 0.000 1.000 1008 -160 label |
| (55.631 * 3.9) {/Times-Roman cf} 2 16 0.000 1.000 1280 -320 label |
| 1 1.000 1280 -336 1520 -336 2 polygon |
| (log\(1 + 2\2640.3262/0.18\)) {/Times-Roman cf} 2 21 0.000 1.000 1408 -368 |
| label |
| 1 1.000 -1344 -496 1760 -496 2 polygon |
| 0.000 0.000 1.000 scb |
| (metal5 to metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -592 label |
| (metal5 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -768 label |
| (metal4 to metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -768 label |
| (metal5 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -944 label |
| (metal4 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -944 label |
| (metal3 to metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -944 label |
| (metal5 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1136 label |
| (metal4 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1136 label |
| (metal3 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1136 label |
| (metal2 to metal1:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1136 label |
| (metal5 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1328 label |
| (metal4 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1328 label |
| (metal3 to li:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1328 label |
| (metal2 to li:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1328 label |
| (metal1 to li:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1328 label |
| (metal5 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1536 label |
| (metal4 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1536 label |
| (metal3 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1536 label |
| (metal2 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1536 label |
| (metal1 to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1536 label |
| (li to field poly:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1536 label |
| (metal5 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -1264 -1744 label |
| (metal4 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -816 -1744 label |
| (metal3 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 -368 -1744 label |
| (metal2 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 80 -1744 label |
| (metal1 to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 512 -1744 label |
| (li to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 912 -1744 label |
| (poly to diff/well/sub:) {/Times-Roman cf} 2 16 0.000 1.000 1264 -1744 label |
| sce |
| |
| (\(Note: K value of 4.0 is inaccurate due to TOPNIT and PI1 surrounding metal5\)) |
| {/Times-Roman cf} 2 16 0.000 1.000 -848 -592 label |
| 0.647 0.165 0.165 scb |
| (Interlayer \(fringe\) capacitance worksheet \(continued from last page\):) |
| {/Times-Roman cf} 2 16 0.000 1.000 -1280 1280 label |
| sce |
| ( = ) {ns} (fringe) {ss} (Simple fringe capacitance equation used: C) |
| {/Times-Roman cf} 6 16 0.000 1.000 -1280 1184 label |
| 1 1.000 -448 1184 -272 1184 2 polygon |
| (K) {ns} (0) {ss} (pe) {/Symbol cf} (2) {/Times-Roman cf} 8 17 0.000 1.000 -368 |
| 1200 label |
| (log\(1 + 2h/t\)) {/Times-Roman cf} 2 29 0.000 1.000 -352 1168 label |
| (where h is the distance between layers and t is the sidewall thickness.) |
| {/Times-Roman cf} 2 16 0.000 1.000 -192 1184 label |
| ( = 2\(3.14159\)\(8.854\) = 55.631) {ns} (0) {ss} (pe) {/Symbol cf} (2) |
| {/Times-Roman cf} 8 16 0.000 1.000 -176 1120 label |
| 1 1.000 -1296 960 1824 960 2 polygon |
| |
| (match, although there are also more complicated expressions \(all are ultimately approximations to the exact field equation solutions\).) |
| {CR} |
| (Note that all \(?\) texts seem to use "log\(h/t\)" which is entirely nonsensical as it implies negative fringe capacitance for h < t. The above expression is a better) |
| {/Times-Roman cf} 4 16 0.000 1.000 -1280 1008 label |
| (378.01) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -688 label |
| (168.89) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -864 label |
| (129.16) {/Times-Roman cf} 2 16 0.000 1.000 -1184 -1056 label |
| (119.67) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1232 label |
| (109.36) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1648 label |
| (102.25) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1840 label |
| (113.11) {/Times-Roman cf} 2 16 0.000 1.000 -1168 -1440 label |
| (351.52) {/Times-Roman cf} 2 16 0.000 1.000 -720 -864 label |
| (144.86) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1056 label |
| (125.83) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1232 label |
| (109.04) {/Times-Roman cf} 2 16 0.000 1.000 -720 -1632 label |
| (114.74) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1440 label |
| (341.14) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1040 label |
| (191.73) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1232 label |
| (150.89) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1440 label |
| (273.21) {/Times-Roman cf} 2 16 0.000 1.000 128 -1248 label |
| (99.483) {/Times-Roman cf} 2 16 0.000 1.000 -704 -1840 label |
| (135.42) {/Times-Roman cf} 2 16 0.000 1.000 -288 -1632 label |
| (116.62) {/Times-Roman cf} 2 16 0.000 1.000 -272 -1824 label |
| (137.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1440 label |
| (115.79) {/Times-Roman cf} 2 16 0.000 1.000 128 -1632 label |
| (94.529) {/Times-Roman cf} 2 16 0.000 1.000 144 -1824 label |
| (249.97) {/Times-Roman cf} 2 16 0.000 1.000 544 -1440 label |
| (152.95) {/Times-Roman cf} 2 16 0.000 1.000 560 -1632 label |
| (106.39) {/Times-Roman cf} 2 16 0.000 1.000 576 -1824 label |
| (120.86) {/Times-Roman cf} 2 16 0.000 1.000 960 -1632 label |
| (72.763) {/Times-Roman cf} 2 16 0.000 1.000 976 -1824 label |
| (141.68) {/Times-Roman cf} 2 16 0.000 1.000 1312 -1824 label |
| pgsave restore showpage |
| |
| %%Page: worksheet5 7 |
| %%PageOrientation: Portrait |
| %%PageBoundingBox: 0 0 612 792 |
| /pgsave save def bop |
| % 32.00 8.00 gridspace |
| 0.6922 inchscale |
| 2.6000 setlinewidth 1412 988 translate |
| |
| (Sidewall capacitance worksheet:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 896 |
| label |
| |
| (\265m separation. For an answer in units per micron, assume 1\265m length as well.) |
| {/Times-RomanISO cf} (Capacitance \(in magic\251s tech file\) is measured at 1) |
| {/Times-Roman cf} 4 16 0.000 1.000 -1280 832 label |
| {ns} (0) {ss} (e) {/Symbol cf} ( = K ) {ns} (ox) {ss} |
| (Capacitance is then just the usual equation, C) {/Times-Roman cf} 11 16 0.000 |
| 1.000 -1280 768 label |
| ( = 8.854) {ns} (0) {ss} (e) {/Symbol cf} (with ) {/Times-Roman cf} 8 16 0.000 |
| 1.000 -192 768 label |
| (metal4:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 400 label |
| (4.0 * 8.854 * 0.845 = 29.9265) {/Times-Roman cf} 2 16 360.000 1.000 -1088 |
| 400 label |
| ( h) {/Times-Roman cf} 2 16 0.000 1.000 -416 768 label |
| (and where h is the layer thickness.) {/Times-Roman cf} 2 16 0.000 1.000 128 |
| 768 label |
| (h) {/Times-Roman cf} 2 16 0.000 1.000 -848 528 label |
| (0) {ss} (e) {/Symbol cf} 4 16 0.000 1.000 -976 528 label |
| (K) {/Times-Roman cf} 2 17 0.000 1.000 -1072 528 label |
| (sidewall) {ss} (C) {/Times-Roman cf} 4 16 0.000 1.000 -704 528 label |
| (metal5:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 448 label |
| (metal3:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 352 label |
| (metal2:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 304 label |
| (metal1:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 256 label |
| (li:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 208 label |
| (poly:) {/Times-Roman cf} 2 16 0.000 1.000 -1280 160 label |
| 1 1.000 -1280 496 -320 496 2 polygon |
| |
| (For side-extending dielectric, use a pro-rated K \(values for horizontal thickness of these dielectrics not shown on the first page\).) |
| {/Times-Roman cf} 2 16 0.000 1.000 -1280 640 label |
| (\265m\)) {/Times-RomanISO cf} (\(aF/) {/Times-Roman cf} 4 16 0.000 1.000 -560 |
| 528 label |
| (4.1 * 8.854 * 0.845 = 30.675) {/Times-Roman cf} 2 16 360.000 1.000 -1088 352 |
| label |
| (4.2 * 8.854 * 0.36 = 13.387) {/Times-Roman cf} 2 16 360.000 1.000 -1088 304 |
| label |
| (4.5 * 8.854 * 0.36 = 14.343) {/Times-Roman cf} 2 16 360.000 1.000 -1088 256 |
| label |
| (6.926 * 8.854 * 1.26 = 77.267) {/Times-Roman cf} 2 16 360.000 1.000 -1088 |
| 448 label |
| (2.94\) = 6.926) {hS} (\264) {hS} (\(0.07 + 0.4223\)\)) {hS} |
| (7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.4223) {hS} (\264) {hS} (3.9\) + \(2) |
| {hS} (\264) {hS} (0.07) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K) |
| {/Times-Roman cf} 28 16 0.000 1.000 -448 448 label |
| (4.05\) = 4.447) {hS} (\264) {hS} (\(0.061\)\)) {hS} (7.3\) + \(\(1 - 2) {hS} |
| (\264) {hS} (0.061) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K) |
| {/Times-Roman cf} 20 16 0.000 1.000 -448 208 label |
| (4.447 * 8.854 * 0.1 = 3.937) {/Times-Roman cf} 2 16 360.000 1.000 -1088 208 |
| label |
| (3.9\) = 4.210) {hS} (\264) {hS} (\(0.006 + 0.0431\)\)) {hS} |
| (7.5\) + \(\(1 - 2) {hS} (\264) {hS} (0.0431) {hS} (\264) {hS} (3.9\) + \(2) |
| {hS} (\264) {hS} (0.006) {hS} (\264) {hS} ( = \(2) {ns} (eff) {ss} (K) |
| {/Times-Roman cf} 28 16 0.000 1.000 -448 160 label |
| (4.21 * 8.854 * 0.18 = 6.710) {/Times-Roman cf} 2 16 360.000 1.000 -1088 160 |
| label |
| pgsave restore showpage |
| |
| %%Trailer |
| XCIRCsave restore |
| %%EOF |
