| <!DOCTYPE html> |
| |
| <html> |
| <head> |
| <meta charset="utf-8" /> |
| <meta name="viewport" content="width=device-width, initial-scale=1.0"> |
| <meta charset="utf-8"> |
| <meta name="viewport" content="width=device-width, initial-scale=1, shrink-to-fit=no"> |
| <meta http-equiv="x-ua-compatible" content="ie=edge"> |
| |
| <title>Periphery Rules — SkyWater SKY130 PDK 0.0-115-gf086f9e documentation</title> |
| |
| <link rel="stylesheet" href="../_static/material-icons.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/pygments.css" type="text/css" /> |
| <link rel="stylesheet" type="text/css" href="../_static/extra.css" /> |
| <link rel="stylesheet" href="../_static/notosanscjkjp.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/roboto.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/material-design-lite-1.3.0/material.light_green-teal.min.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/sphinx_symbiflow_theme.css" type="text/css" /> |
| <script id="documentation_options" data-url_root="../" src="../_static/documentation_options.js"></script> |
| <script src="../_static/jquery.js"></script> |
| <script src="../_static/underscore.js"></script> |
| <script src="../_static/doctools.js"></script> |
| <script src="../_static/language_data.js"></script> |
| <script src="../_static/sphinx_symbiflow_theme.js"></script> |
| <link rel="index" title="Index" href="../genindex.html" /> |
| <link rel="search" title="Search" href="../search.html" /> |
| <link rel="next" title="TODO: rules/dummy" href="dummy.html" /> |
| <link rel="prev" title="TODO: rules/core" href="core.html" /> |
| </head> |
| <body> |
| <div class="mdl-layout mdl-js-layout mdl-layout--fixed-header mdl-layout--fixed-drawer"><header class="mdl-layout__header mdl-layout__header--waterfall "> |
| <div class="mdl-layout__header-row"> |
| |
| <nav class="mdl-navigation breadcrumb"> |
| <a class="mdl-navigation__link" href="../rules.html">SkyWater SKY130 Process Design Rules</a><i class="material-icons">navigate_next</i> |
| <a class="mdl-navigation__link is-active">Periphery Rules</a> |
| </nav> |
| <div class="mdl-layout-spacer"></div> |
| <nav class="mdl-navigation"> |
| |
| <form class="form-inline pull-sm-right" action="../search.html" method="get"> |
| <div class="mdl-textfield mdl-js-textfield mdl-textfield--expandable mdl-textfield--floating-label mdl-textfield--align-right"> |
| <label id="quick-search-icon" class="mdl-button mdl-js-button mdl-button--icon" for="waterfall-exp"> |
| <i class="material-icons">search</i> |
| </label> |
| <div class="mdl-textfield__expandable-holder"> |
| <input class="mdl-textfield__input" type="text" name="q" id="waterfall-exp" placeholder="Search" /> |
| <input type="hidden" name="check_keywords" value="yes" /> |
| <input type="hidden" name="area" value="default" /> |
| </div> |
| </div> |
| <div class="mdl-tooltip" data-mdl-for="quick-search-icon"> |
| Quick search |
| </div> |
| </form> |
| |
| <a id="button-show-source" |
| class="mdl-button mdl-js-button mdl-button--icon" |
| href="../_sources/rules/periphery.rst.txt" rel="nofollow"> |
| <i class="material-icons">code</i> |
| </a> |
| <div class="mdl-tooltip" data-mdl-for="button-show-source"> |
| Show Source |
| </div> |
| </nav> |
| </div> |
| <div class="mdl-layout__header-row header-links"> |
| <div class="mdl-layout-spacer"></div> |
| <nav class="mdl-navigation"> |
| <a class="mdl-navigation__link" href="../index.html"> |
| <i class="material-icons navigation-link-icon">home</i> |
| Home |
| </a> |
| |
| <a class="mdl-navigation__link" href="https://github.com/google/skywater-pdk"> |
| <i class="material-icons navigation-link-icon">code</i> |
| GitHub |
| </a> |
| |
| <a class="mdl-navigation__link" href="https://www.skywatertechnology.com/"> |
| <i class="material-icons navigation-link-icon">link</i> |
| SkyWater |
| </a> |
| </nav> |
| </div> |
| </header><header class="mdl-layout__drawer"> |
| |
| <!-- Title --> |
| <span class="mdl-layout-title"> |
| <a class="title" href="../index.html"> |
| <span class="title-text"> |
| SkyWater SKY130 PDK |
| </span> |
| </a> |
| </span> |
| |
| <div class="globaltoc"> |
| <span class="mdl-layout-title toc">Table Of Contents</span> |
| |
| |
| |
| <nav class="mdl-navigation"> |
| <ul class="current"> |
| <li class="toctree-l1 current"><a class="reference internal" href="../rules.html">Process Design Rules</a><ul class="current"> |
| <li class="toctree-l2"><a class="reference internal" href="background.html">Introduction</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="assumptions.html">Design Rule Criteria & Assumptions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="define.html">Device, LVS and other CAD definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity.html">Device and Connectivity Information</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/lvs.html">TODO: rules/connectivity/lvs</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/impant.html">TODO: rules/connectivity/impant</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/table.html">TODO: rules/connectivity/table</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="core.html">Core Rules</a></li> |
| <li class="toctree-l2 current"><a class="current reference internal" href="#">Periphery Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="dummy.html">Dummy Poly Generation to reduce Litr-Poly shorts</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="areaid.html">TODO: rules/areaid</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="antenna.html">Antenna Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="opc.html">OPC sizing/verification procedure</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="cad.html">CAD switches, created layer algorithms</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="waffles.html">Created Layer dummy structures ("waffles")</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html">Purpose/Scope</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#critical-requirements-summary">Critical Requirements Summary</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#operating-procedures-and-responsibilities">Operating Procedures and Responsibilities</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#quality-requirements">Quality Requirements</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#mtdr-cad-definitions">MTDR & CAD Definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="latchup.html">Latch-up Design Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="misc.html">Misc Design Rules</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../contents.html">PDK Contents</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/libraries.html">Libraries</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span> (version 0.0.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-26">V0.1.0 Updates and Known Limitations (2018/04/26)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span> (version 0.0.1) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-figures">List of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-tables">List of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#previous-releases">Previous Releases</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-25">V0.1.0 Updates and Known Limitations (2018/04/25)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-1-updates-and-known-limitations-2019-03-28">V0.0.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-0-updates-and-known-limitations-2018-03-30">V0.0.0 Updates and Known Limitations (2018/03/30)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_osu_sc/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">osu</span><span>_</span><span class="lib-type">sc</span> Oklahoma State University Standard Cells</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">fmlt</span> - SKY130 Flash Build Space</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#v0-1-1-updates-and-known-limitations">V0.1.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_sram/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">sram</span> - SKY130 SRAM Build Space</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> - SkyWater Foundry provided IO cells</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_io/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> (version 0.2.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_ef_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">ef</span><span>_</span><span class="lib-type">io</span> - Efabless created IO cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/file_types.html">File Types</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../verification.html">Physical & Design Verification</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">Automated Design Rule (DRC) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">Layout Versus Schematic (LVS) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">Parasitic Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">SkyWater SKY130 Design Rule Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">SkyWater SKY130 Layout verse Schematic (LVS) Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">SkyWater SKY130 Parasitics Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../analog.html">Analog Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/virtuoso.html">With Cadence Virtuoso</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/magic.html">With MAGIC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/klayout.html">With Klayout</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/bag.html">With Berkeley Analog Generator (BAG)</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/fasoc.html">With FASoC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../digital.html">Digital Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/innovus.html">With Cadence Innovus</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/openroad.html">With OpenROAD</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../sim.html">Simulation</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/spectre.html">With Cadence Spectre</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/ngspice.html">With ngspice</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../glossary.html">Glossary</a></li> |
| <li class="toctree-l1"><a class="reference internal" href="../previous.html">Previous Nomenclature</a></li> |
| </ul> |
| |
| </nav> |
| |
| </div> |
| |
| </header> |
| <main class="mdl-layout__content" tabIndex="0"> |
| <header class="mdl-layout__drawer"> |
| |
| <!-- Title --> |
| <span class="mdl-layout-title"> |
| <a class="title" href="../index.html"> |
| <span class="title-text"> |
| SkyWater SKY130 PDK |
| </span> |
| </a> |
| </span> |
| |
| <div class="globaltoc"> |
| <span class="mdl-layout-title toc">Table Of Contents</span> |
| |
| |
| |
| <nav class="mdl-navigation"> |
| <ul class="current"> |
| <li class="toctree-l1 current"><a class="reference internal" href="../rules.html">Process Design Rules</a><ul class="current"> |
| <li class="toctree-l2"><a class="reference internal" href="background.html">Introduction</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="assumptions.html">Design Rule Criteria & Assumptions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="define.html">Device, LVS and other CAD definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity.html">Device and Connectivity Information</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/lvs.html">TODO: rules/connectivity/lvs</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/impant.html">TODO: rules/connectivity/impant</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/table.html">TODO: rules/connectivity/table</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="core.html">Core Rules</a></li> |
| <li class="toctree-l2 current"><a class="current reference internal" href="#">Periphery Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="dummy.html">Dummy Poly Generation to reduce Litr-Poly shorts</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="areaid.html">TODO: rules/areaid</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="antenna.html">Antenna Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="opc.html">OPC sizing/verification procedure</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="cad.html">CAD switches, created layer algorithms</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="waffles.html">Created Layer dummy structures ("waffles")</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html">Purpose/Scope</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#critical-requirements-summary">Critical Requirements Summary</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#operating-procedures-and-responsibilities">Operating Procedures and Responsibilities</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#quality-requirements">Quality Requirements</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#mtdr-cad-definitions">MTDR & CAD Definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="latchup.html">Latch-up Design Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="misc.html">Misc Design Rules</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../contents.html">PDK Contents</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/libraries.html">Libraries</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span> (version 0.0.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-26">V0.1.0 Updates and Known Limitations (2018/04/26)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span> (version 0.0.1) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-figures">List of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-tables">List of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#previous-releases">Previous Releases</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-25">V0.1.0 Updates and Known Limitations (2018/04/25)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-1-updates-and-known-limitations-2019-03-28">V0.0.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-0-updates-and-known-limitations-2018-03-30">V0.0.0 Updates and Known Limitations (2018/03/30)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_osu_sc/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">osu</span><span>_</span><span class="lib-type">sc</span> Oklahoma State University Standard Cells</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">fmlt</span> - SKY130 Flash Build Space</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#v0-1-1-updates-and-known-limitations">V0.1.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_sram/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">sram</span> - SKY130 SRAM Build Space</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> - SkyWater Foundry provided IO cells</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_io/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> (version 0.2.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_ef_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">ef</span><span>_</span><span class="lib-type">io</span> - Efabless created IO cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/file_types.html">File Types</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../verification.html">Physical & Design Verification</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">Automated Design Rule (DRC) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">Layout Versus Schematic (LVS) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">Parasitic Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">SkyWater SKY130 Design Rule Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">SkyWater SKY130 Layout verse Schematic (LVS) Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">SkyWater SKY130 Parasitics Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../analog.html">Analog Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/virtuoso.html">With Cadence Virtuoso</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/magic.html">With MAGIC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/klayout.html">With Klayout</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/bag.html">With Berkeley Analog Generator (BAG)</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/fasoc.html">With FASoC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../digital.html">Digital Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/innovus.html">With Cadence Innovus</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/openroad.html">With OpenROAD</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../sim.html">Simulation</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/spectre.html">With Cadence Spectre</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/ngspice.html">With ngspice</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../glossary.html">Glossary</a></li> |
| <li class="toctree-l1"><a class="reference internal" href="../previous.html">Previous Nomenclature</a></li> |
| </ul> |
| |
| </nav> |
| |
| </div> |
| |
| </header> |
| |
| <div class="document"> |
| <div class="page-content"> |
| |
| <div class="section" id="periphery-rules"> |
| <h1>Periphery Rules<a class="headerlink" href="#periphery-rules" title="Permalink to this headline">¶</a></h1> |
| <table class="colwidths-given docutils align-default" style="width: 100%"> |
| <colgroup> |
| <col style="width: 12%" /> |
| <col style="width: 88%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p>Use</p></th> |
| <th class="head"><p>Explanation</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p id="p"><span class="drc-flag">P</span></p> |
| </th> |
| <td><p>Rule applies to periphery only (outside <span class="drc-tag">areaid.ce</span>). A corresponding core rule may or may not exist.</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="ne"><span class="drc-flag">NE</span></p> |
| </th> |
| <td><p>Rule not checked for esd_nwell_tap. There are no corresponding rule for esd_nwell_tap.</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="nc"><span class="drc-flag">NC</span></p> |
| </th> |
| <td><p>Rule not checked by DRC. It should be used as a guideline only.</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="tc"><span class="drc-flag">TC</span></p> |
| </th> |
| <td><p>Rule not checked for cell name “<em>_tech_CD_top</em>”</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="a"><span class="drc-flag">A</span></p> |
| </th> |
| <td><p>Rule documents a functionality implemented in CL algorithms and may not be checked by DRC.</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="ad"><span class="drc-flag">AD</span></p> |
| </th> |
| <td><p>Rule documents a functionality implemented in CL algorithms and checked by DRC.</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="de"><span class="drc-flag">DE</span></p> |
| </th> |
| <td><p>Rule not checked for source of Drain Extended device</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="lvs"><span class="drc-flag">LVS</span></p> |
| </th> |
| <td><p>Rule handled by LVS</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="f"><span class="drc-flag">F</span></p> |
| </th> |
| <td><p>Rule intended for Frame only, not checked inside Die</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="dnf"><span class="drc-flag">DNF</span></p> |
| </th> |
| <td><p>Drawn Not equal Final. The drawn rule does not reflect the final dimension on silicon. See table J for details.</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="rc"><span class="drc-flag">RC</span></p> |
| </th> |
| <td><p>Recommended rule at the chip level, required rule at the IP level.</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="rr"><span class="drc-flag">RR</span></p> |
| </th> |
| <td><p>Recommended rule at any IP level</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="al"><span class="drc-flag">AL</span></p> |
| </th> |
| <td><p>Rules applicable only to Al BE flows</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="cu"><span class="drc-flag">CU</span></p> |
| </th> |
| <td><p>Rules applicable only to Cu BE flows</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p id="ir"><span class="drc-flag">IR</span></p> |
| </th> |
| <td><p>IR drop check compering Al database and slotted Cu database for the same product (2 gds files) must be clean</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p id="exempt"><span class="drc-flag">EXEMPT</span></p> |
| </th> |
| <td><p>Rule is an exception?</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="section" id="x"> |
| <h2><span class="drc-rule">(x.-)</span><a class="headerlink" href="#x" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id5" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines General (FIXME)</span><a class="headerlink" href="#id5" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.1a)</span></p></th> |
| <td><p>p1m.md (OPC), DECA and AMKOR layers (pi1.dg, pmm.dg, rdl.dg, pi2.dg, ubm.dg, bump.dg) and mask data for p1m, met1, via, met2 must be on a grid of [mm]</p></td> |
| <td></td> |
| <td><p>0.001</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.1b)</span></p></th> |
| <td><p>Data for SKY130 layout and mask on all layers except those mentioned in 1a must be on a grid of [mm] (except inside Seal ring)</p></td> |
| <td></td> |
| <td><p>0.005</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.2)</span></p></th> |
| <td><p>Angles permitted on: diff</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.2)</span></p></th> |
| <td><p>Angles permitted on: diff except for:n- diff inside “advSeal_6um* OR cuPillarAdvSeal_6um*” pcell, n- diff rings around the die at min total L>1000 um and W=0.3 um</p></td> |
| <td></td> |
| <td><p>n x 90</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.2)</span></p></th> |
| <td><p>Angles permitted on: tap (except inside <span class="drc-tag">areaid.en</span>), poly (except for ESD flare gates or gated_npn), li1(periphery), licon1, capm, mcon, via, via2. Anchors are exempted.</p></td> |
| <td></td> |
| <td><p>n x 90</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.2)</span></p></th> |
| <td><p>Angles permitted on: via3 and via4. Anchors are exempted.</p></td> |
| <td></td> |
| <td><p>n x 90</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.2a)</span></p></th> |
| <td><p>Analog circuits identified by <span class="drc-tag">areaid.analog</span> to use rectangular diff and tap geometries only; that are not to be merged into more complex shapes (T’s or L’s)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.2c)</span></p></th> |
| <td><p>45 degree angles allowed on diff, tap inside UHVI</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.3)</span></p></th> |
| <td><p>Angles permitted on all other layers and in the seal ring for all the layers</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.3a)</span></p></th> |
| <td><p>Angles permitted on all other layers except WLCSP layers (pmm, rdl, pmm2, ubm and bump)</p></td> |
| <td></td> |
| <td><p>n x 45</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.4)</span></p></th> |
| <td><p>Electrical DR cover layout guidelines for electromigration</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.5)</span></p></th> |
| <td><p>All “pin”polygons must be within the “drawing” polygons of the layer</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.6)</span></p></th> |
| <td><p>All intra-layer separation checks will include a notch check</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.7)</span></p></th> |
| <td><p>Mask layer line and space checks must be done on all layers (checked with s.x rules)</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.8)</span></p></th> |
| <td><p>Use of areaid “core” layer (“coreid”) must be approved by technology</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.9)</span></p></th> |
| <td><p>Shapes on maskAdd or maskDrop layers (“serifs”) are allowed in core only. Exempted are: n- cfom md/mp inside “advSeal_6um* OR cuPillarAdvSeal_6um*” pcell n- diff rings around the die at min total L>1000 um and W=0.3 um, and PMM/PDMM inside areaid:sl</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.9)</span></p></th> |
| <td><p>Shapes on maskAdd or maskDrop layers (“serifs”) are allowed in core only. PMM/PDMM inside areaid:sl are excluded.</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.10)</span></p></th> |
| <td><p>Res purpose layer for (diff, poly) cannot overlap licon1</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.11)</span></p></th> |
| <td><p>Metal fuses are drawn in met2</p></td> |
| <td><p><span class="drc-flag">LVS</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.11)</span></p></th> |
| <td><p>Metal fuses are drawn in met3</p></td> |
| <td><p><span class="drc-flag">LVS</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.11)</span></p></th> |
| <td><p>Metal fuses are drawn in met4</p></td> |
| <td><p><span class="drc-flag">LVS</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.n12an12bn12c)</span></p></th> |
| <td><p>To comply with the minimum spacing requirement for layer X in the frame:n- Spacing of <span class="drc-tag">areaid.mt</span> to any non-ID layern- Enclosure of any non-ID layer by <span class="drc-tag">areaid.mt</span>n- Rules exempted for cells with name “<a href="#id1"><span class="problematic" id="id2">*</span></a>_buildspace”</p></td> |
| <td><p><span class="drc-flag">F</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.12d)</span></p></th> |
| <td><ul class="simple"> |
| <li><p>Spacing of <span class="drc-tag">areaid.mt</span> to huge_metX (Exempt met3.dg)</p></li> |
| </ul> |
| </td> |
| <td><p><span class="drc-flag">F</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.12d)</span></p></th> |
| <td><ul class="simple"> |
| <li><p>Spacing of <span class="drc-tag">areaid.mt</span> to huge_metX (Exempt met5.dg)</p></li> |
| </ul> |
| </td> |
| <td><p><span class="drc-flag">F</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.12e)</span></p></th> |
| <td><ul class="simple"> |
| <li><p>Enclosure of huge_metX by <span class="drc-tag">areaid.mt</span> (Exempt met3.dg)</p></li> |
| </ul> |
| </td> |
| <td><p><span class="drc-flag">F</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.12e)</span></p></th> |
| <td><ul class="simple"> |
| <li><p>Enclosure of huge_metX by <span class="drc-tag">areaid.mt</span> (Exempt met5.dg)</p></li> |
| </ul> |
| </td> |
| <td><p><span class="drc-flag">F</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.13)</span></p></th> |
| <td><p>Spacing between features located across areaid:ce is checked by …</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.14)</span></p></th> |
| <td><p>Width of features straddling areaid:ce is checked by …</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.15a)</span></p></th> |
| <td><p>Drawn compatible, mask, and waffle-drop layers are allowed only inside areaid:mt (i.e., etest modules), or inside areaid:sl (i.e., between the outer and inner areaid:sl edges, but not in the die) or inside areaid:ft (i.e., frame, blankings). Exception: FOM/P1M/Metal waffle drop are allowed inside the die</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.15b)</span></p></th> |
| <td><p>Rule X.15a exempted for cpmm.dg inside cellnames “PadPLfp”, “padPLhp”, “padPLstg” and “padPLwlbi” (for the SKY130di-5r-gsmc flow)</p></td> |
| <td><p><span class="drc-flag">EXEMPT</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.16)</span></p></th> |
| <td><p>Die must not overlap <span class="drc-tag">areaid.mt</span> (rule waived for test chips and exempted for cellnames “<em>tech_CD_</em>”, “<em>_techCD_</em>”, “lazX_*” or “lazY_*” )</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.17)</span></p></th> |
| <td><p>All labels must be within the “drawing” polygons of the layer; This check is enabled by using switch “floating_labels”; Identifies floating labels which appear as warnings in LVS. Using this check would enable cleaner LVS run; Not a gate for tapeout</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.18)</span></p></th> |
| <td><p>Use redundant mcon, via, via2, via3 and via4 (Locations where additional vias/contacts can be added to existing single vias/contacts will be identified by this rule).nSingle via under <span class="drc-tag">areaid.core</span> and <span class="drc-tag">areaid.standarc</span> are excluded from the single via check</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.19)</span></p></th> |
| <td><p>Lower left corner of the seal ring should be at origin i.e (0,0)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.20)</span></p></th> |
| <td><p>Min spacing between pins on the same layer (center to center); Check enabled by switch “IP_block”</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.21)</span></p></th> |
| <td><p>prunde.dg is allowed only inside <span class="drc-tag">areaid.mt</span> or <span class="drc-tag">areaid.sc</span></p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.22)</span></p></th> |
| <td><dl class="simple"> |
| <dt>No floating interconnects (poly, li1, met1-met5) or capm allowed; Rule flags interconnects with no path to poly, difftap or metal pins. Exempt floating layers can be excluded using poly_float, li1_float, m1_float, m2_float, m3_float, m4_float and m5_float text labels. Also flags an error if these text labels are placed on connected layers (not floating) and if the labels are not over the appropriate metal layer. nIf floating interconnects need to be connected at a higher level (Parent IP or Full chip), such floating interconnects can be exempted using poly_tie, li1_tie, m1_tie, m2_tie, m3_tie, m4_tie and m5_tie text labels.nIt is the responsibility of the IP owner and chip/product owner to communicate and agree to the node each of these texted lines is connected to, if there is any risk to how a line is tied, and to what node.nOnly metals outside <span class="drc-tag">areaid.stdcell</span> are checked.n</dt><dd><p>The following are exempt from x.22 violations: _techCD_ , inductor.dg, modulecut, capacitors and s8blerf |
| The ‘notPublicCell’ switch will deactivate this rule</p> |
| </dd> |
| </dl> |
| </td> |
| <td><p><span class="drc-flag">RC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.23a)</span></p></th> |
| <td><p><span class="drc-tag">areaid.sl</span> must not overlap diff</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.23b)</span></p></th> |
| <td><p>diff cannot straddle <span class="drc-tag">areaid.sl</span></p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.23c)</span></p></th> |
| <td><p><span class="drc-tag">areaid.sl</span> must not overlap tap, poly, li1 and metX</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.23d)</span></p></th> |
| <td><p><span class="drc-tag">areaid.sl</span> must not overlap tap, poly</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.23e)</span></p></th> |
| <td><p>areaid:sl must not overlap li1 and metX for pcell “advSeal_6um”</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.23f)</span></p></th> |
| <td><p>areaid:SubstrateCut (<span class="drc-tag">areaid.st</span>, local_sub) must not straddle p+ tap</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.24)</span></p></th> |
| <td><p>condiode label must be in iso_pwell</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.25)</span></p></th> |
| <td><p>pnp.dg must be only within cell name “s8rf_pnp”, “s8rf_pnp5x” or “s8tesd_iref_pnp”, “stk14ecx_*”</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.26)</span></p></th> |
| <td><p>“advSeal_6um” pcell must overlap diff</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.27)</span></p></th> |
| <td><p>If the sealring is present, then partnum is required. To exempt the requirement, place text.dg saying “partnum_not_necessary”.n”partnum*block” pcell should be used instead of “partnum*” pcells</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(x.28)</span></p></th> |
| <td><p>Min width of <span class="drc-tag">areaid.sl</span></p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(x.29)</span></p></th> |
| <td><p>nfet must be enclosed by dnwell. Rule is checked when switch nfet_in_dnwell is turned on.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p018-x_dotdash.svg"><img alt="../_images/p018-x_dotdash.svg" src="../_images/p018-x_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="dnwell"> |
| <h2><span class="drc-rule">(dnwell.-)</span><a class="headerlink" href="#dnwell" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id6" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define deep nwell for isolating pwell and noise immunity</span><a class="headerlink" href="#id6" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(dnwell.2)</span></p></th> |
| <td><p>Min width of deep nwell</p></td> |
| <td></td> |
| <td><p>3.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(dnwell.3)</span></p></th> |
| <td><p>Min spacing between deep nwells. Rule exempt inside UHVI.</p></td> |
| <td></td> |
| <td><p>6.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(dnwell.3a)</span></p></th> |
| <td><p>Min spacing between deep nwells on same net inside UHVI.</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(dnwell.3b)</span></p></th> |
| <td><p>Min spacing between deep-nwells inside UHVI and deep-nwell outside UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(dnwell.3c)</span></p></th> |
| <td><p>Min spacing between deep-nwells inside UHVI and nwell outsideUHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(dnwell.3d)</span></p></th> |
| <td><p>Min spacing between deep-nwells inside UHVI on different nets</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(dnwell.4)</span></p></th> |
| <td><p>Dnwell can not overlap pnp:dg</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(dnwell.5)</span></p></th> |
| <td><p>P+_diff can not straddle Dnwell</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(dnwell.6)</span></p></th> |
| <td><p>RF NMOS must be enclosed by deep nwell (RF FETs are listed in $DESIGN/config/tech/model_set/calibre/fixed_layout_model_map of corresponding techs)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p020-dnwell_dotdash.svg"><img alt="../_images/p020-dnwell_dotdash.svg" src="../_images/p020-dnwell_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="nwell"> |
| <h2><span class="drc-rule">(nwell.-)</span><a class="headerlink" href="#nwell" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id7" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define nwell implant regions</span><a class="headerlink" href="#id7" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nwell.1)</span></p></th> |
| <td><p>Width of nwell</p></td> |
| <td></td> |
| <td><p>0.840</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(nwell.2a)</span></p></th> |
| <td><p>Spacing between two n-wells</p></td> |
| <td></td> |
| <td><p>1.270</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nwell.2b)</span></p></th> |
| <td><p>Manual merge wells if less than minimum</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(nwell.4)</span></p></th> |
| <td><p>All n-wells will contain metal-contacted tap (rule checks only for licon on tap) . Rule exempted from high voltage cells inside UHVI</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nwell.5)</span></p></th> |
| <td><dl class="simple"> |
| <dt>Deep nwell must be enclosed by nwell by atleast… Exempted inside UHVI or <span class="drc-tag">areaid.lw</span></dt><dd><p>Nwells can merge over deep nwell if spacing too small (as in rule nwell.2)</p> |
| </dd> |
| </dl> |
| </td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td><p>0.400</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(nwell.5a)</span></p></th> |
| <td><p>min enclosure of nwell by dnwell inside UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nwell.5b)</span></p></th> |
| <td><p>nwell inside UHVI must not be on the same net as nwell outside UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(nwell.6)</span></p></th> |
| <td><p>Min enclosure of nwell hole by deep nwell outside UHVI</p></td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td><p>1.030</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nwell.7)</span></p></th> |
| <td><dl class="simple"> |
| <dt>Min spacing between nwell and deep nwell on separate nets</dt><dd><p>Spacing between nwell and deep nwell on the same net is set by the sum of the rules nwell.2 and nwell.5. By default, DRC run on a cell checks for the separate-net spacing, when nwell and deep nwell nets are separate within the cell hierarchy and are joined in the upper hierarchy. To allow net names to be joined and make the same-net rule applicable in this case, the “joinNets” switch should be turned on.</p> |
| </dd> |
| </dl> |
| </td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td><p>4.500</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p021-nwell_dotdash.svg"><img alt="../_images/p021-nwell_dotdash.svg" src="../_images/p021-nwell_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="pwbm"> |
| <h2><span class="drc-rule">(pwbm.-)</span><a class="headerlink" href="#pwbm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id8" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define p-well block</span><a class="headerlink" href="#id8" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwbm.1)</span></p></th> |
| <td><p>Min width of pwbm.dg</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwbm.2)</span></p></th> |
| <td><p>Min spacing between two pwbm.dg inside UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwbm.3)</span></p></th> |
| <td><p>Min enclosure of dnwell:dg by pwbm.dg inside UHVI (exempt pwbm hole inside dnwell)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwbm.4)</span></p></th> |
| <td><p>dnwell inside UHVI must be enclosed by pwbm (exempt pwbm hole inside dnwell)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p022-pwbm_dotdash.svg"><img alt="../_images/p022-pwbm_dotdash.svg" src="../_images/p022-pwbm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="pwdem"> |
| <h2><span class="drc-rule">(pwdem.-)</span><a class="headerlink" href="#pwdem" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id9" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines Pwdem (FIXME)</span><a class="headerlink" href="#id9" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwdem.1)</span></p></th> |
| <td><p>Min width of pwdem.dg</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwdem.2)</span></p></th> |
| <td><p>Min spacing between two pwdem.dg inside UHVI on same net</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwdem.3)</span></p></th> |
| <td><p>Min enclosure of pwdem:dg by pwbm.dg inside UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwdem.4)</span></p></th> |
| <td><p>pwdem.dg must be enclosed by UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwdem.5)</span></p></th> |
| <td><p>pwdem.dg inside UHVI must be enclosed by deep nwell</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p022-pwdem_dotdash.svg"><img alt="../_images/p022-pwdem_dotdash.svg" src="../_images/p022-pwdem_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvtp"> |
| <h2><span class="drc-rule">(hvtp.-)</span><a class="headerlink" href="#hvtp" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id10" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define Vt adjust implant region for high Vt LV PMOS;</span><a class="headerlink" href="#id10" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvtp.1)</span></p></th> |
| <td><p>Min width of hvtp</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvtp.2)</span></p></th> |
| <td><p>Min spacing between hvtp to hvtp</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvtp.3)</span></p></th> |
| <td><p>Min enclosure of pfet by hvtp</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvtp.4)</span></p></th> |
| <td><p>Min spacing between pfet and hvtp</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvtp.5)</span></p></th> |
| <td><p>Min area of hvtp (um^2)</p></td> |
| <td></td> |
| <td><p>0.265</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p023-hvtp_dotdash.svg"><img alt="../_images/p023-hvtp_dotdash.svg" src="../_images/p023-hvtp_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvtr"> |
| <h2><span class="drc-rule">(hvtr.-)</span><a class="headerlink" href="#hvtr" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id11" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define low VT adjust implant region for pmedlvtrf;</span><a class="headerlink" href="#id11" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvtr.1)</span></p></th> |
| <td><p>Min width of hvtr</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvtr.2)</span></p></th> |
| <td><p>Min spacing between hvtp to hvtr</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="lvtn"> |
| <h2><span class="drc-rule">(lvtn.-)</span><a class="headerlink" href="#lvtn" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id12" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define regions to block Vt adjust implant for low Vt LV PMOS/NMOS, SONOS FETs and Native NMOS</span><a class="headerlink" href="#id12" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(lvtn.1a)</span></p></th> |
| <td><p>Min width of lvtn</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(lvtn.2)</span></p></th> |
| <td><p>Min space lvtn to lvtn</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(lvtn.3a)</span></p></th> |
| <td><p>Min spacing of lvtn to gate. Rule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(lvtn.3b)</span></p></th> |
| <td><p>Min spacing of lvtn to pfet along the S/D direction</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.235</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(lvtn.4b)</span></p></th> |
| <td><p>Min enclosure of gate by lvtn. Rule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(lvtn.9)</span></p></th> |
| <td><p>Min spacing, no overlap, between lvtn and hvtp</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(lvtn.10)</span></p></th> |
| <td><p>Min enclosure of lvtn by (nwell not overlapping Var_channel) (exclude coincident edges)</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(lvtn.12)</span></p></th> |
| <td><p>Min spacing between lvtn and (nwell inside <span class="drc-tag">areaid.ce</span>)</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(lvtn.13)</span></p></th> |
| <td><p>Min area of lvtn (um^2)</p></td> |
| <td></td> |
| <td><p>0.265</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p024-lvtn_dotdash.svg"><img alt="../_images/p024-lvtn_dotdash.svg" src="../_images/p024-lvtn_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="ncm"> |
| <h2><span class="drc-rule">(ncm.-)</span><a class="headerlink" href="#ncm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id13" style="width: 100%"> |
| <caption><span class="caption-text">Function: Define Vt adjust implant region for LV NMOS in the core of NVSRAM</span><a class="headerlink" href="#id13" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ncm.X.2)</span></p></th> |
| <td><p>Ncm overlapping areaid:ce is checked for core rules only</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ncm.X.3)</span></p></th> |
| <td><p>Ncm overlapping core cannot overlap N+diff in periphery</p></td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ncm.1)</span></p></th> |
| <td><p>Width of ncm</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ncm.2a)</span></p></th> |
| <td><p>Spacing of ncm to ncm</p></td> |
| <td></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ncm.2b)</span></p></th> |
| <td><p>Manual merge ncm if space is below minimum</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ncm.3)</span></p></th> |
| <td><p>Min enclosure of P+diff by Ncm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ncm.4)</span></p></th> |
| <td><p>Min enclosure of P+diff within (areaid:ed AndNot areaid:de) by Ncm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ncm.5)</span></p></th> |
| <td><p>Min space, no overlap, between ncm and (LVTN_gate) OR (diff containing lvtn)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.230</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ncm.6)</span></p></th> |
| <td><p>Min space, no overlap, between ncm and nfet</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ncm.7)</span></p></th> |
| <td><p>Min area of ncm (um^2)</p></td> |
| <td></td> |
| <td><p>0.265</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p025-ncm_dotdash.svg"><img alt="../_images/p025-ncm_dotdash.svg" src="../_images/p025-ncm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="difftap"> |
| <h2><span class="drc-rule">(difftap.-)</span><a class="headerlink" href="#difftap" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id14" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines active regions and contacts to substrate</span><a class="headerlink" href="#id14" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.1)</span></p></th> |
| <td><p>Width of diff or tap</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.150</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.2)</span></p></th> |
| <td><p>Minimum channel width (Diff And Poly) except for FETs inside <span class="drc-tag">areaid.sc</span>: Rule exempted in the SP8* flows only, for the cells listed in rule difftap.2a</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.420</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.2a)</span></p></th> |
| <td><p>Minimum channel width (Diff And Poly) for cell names “s8cell_ee_plus_sseln_a”, “s8cell_ee_plus_sseln_b”, “s8cell_ee_plus_sselp_a”, “s8cell_ee_plus_sselp_b” , “s8fpls_pl8”, “s8fpls_rdrv4” , “s8fpls_rdrv4f” and “s8fpls_rdrv8”</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>NA</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.2b)</span></p></th> |
| <td><p>Minimum channel width (Diff And Poly) for FETs inside <span class="drc-tag">areaid.sc</span></p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.360</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.3)</span></p></th> |
| <td><p>Spacing of diff to diff, tap to tap, or non-abutting diff to tap</p></td> |
| <td></td> |
| <td><p>0.270</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.4)</span></p></th> |
| <td><p>Min tap bound by one diffusion</p></td> |
| <td></td> |
| <td><p>0.290</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.5)</span></p></th> |
| <td><p>Min tap bound by two diffusions</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.400</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.6)</span></p></th> |
| <td><p>Diff and tap are not allowed to extend beyond their abutting edge</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.7)</span></p></th> |
| <td><p>Spacing of diff/tap abutting edge to a non-conciding diff or tap edge</p></td> |
| <td><p><span class="drc-flag">NE</span></p></td> |
| <td><p>0.130</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.8)</span></p></th> |
| <td><p>Enclosure of (p+) diffusion by N-well. Rule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">DE</span> <span class="drc-flag">NE</span> <span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.9)</span></p></th> |
| <td><p>Spacing of (n+) diffusion to N-well outside UHVI</p></td> |
| <td><p><span class="drc-flag">DE</span> <span class="drc-flag">NE</span> <span class="drc-flag">P</span></p></td> |
| <td><p>0.340</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.10)</span></p></th> |
| <td><p>Enclosure of (n+) tap by N-well. Rule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">NE</span> <span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(difftap.11)</span></p></th> |
| <td><p>Spacing of (p+) tap to N-well. Rule exempted inside UHVI.</p></td> |
| <td></td> |
| <td><p>0.130</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(difftap.12)</span></p></th> |
| <td><p>ESD_nwell_tap is considered shorted to the abutting diff</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p026-difftap_dotdash.svg"><img alt="../_images/p026-difftap_dotdash.svg" src="../_images/p026-difftap_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="tunm"> |
| <h2><span class="drc-rule">(tunm.-)</span><a class="headerlink" href="#tunm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id15" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines SONOS FETs</span><a class="headerlink" href="#id15" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(tunm.1)</span></p></th> |
| <td><p>Min width of tunm</p></td> |
| <td></td> |
| <td><p>0.410</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(tunm.2)</span></p></th> |
| <td><p>Min spacing of tunm to tunm</p></td> |
| <td></td> |
| <td><p>0.500</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(tunm.3)</span></p></th> |
| <td><p>Extension of tunm beyond (poly and diff)</p></td> |
| <td></td> |
| <td><p>0.095</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(tunm.4)</span></p></th> |
| <td><p>Min spacing of tunm to (poly and diff) outside tunm</p></td> |
| <td></td> |
| <td><p>0.095</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(tunm.5)</span></p></th> |
| <td><p>(poly and diff) may not straddle tunm</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(tunm.6a)</span></p></th> |
| <td><p>Tunm outside deep n-well is not allowed</p></td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(tunm.7)</span></p></th> |
| <td><p>Min tunm area</p></td> |
| <td></td> |
| <td><p>0.672</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p027-tunm_dotdash.svg"><img alt="../_images/p027-tunm_dotdash.svg" src="../_images/p027-tunm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="poly"> |
| <h2><span class="drc-rule">(poly.-)</span><a class="headerlink" href="#poly" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id16" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines FET gates, interconnects and resistors</span><a class="headerlink" href="#id16" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.X.1)</span></p></th> |
| <td><p>All FETs would be checked for W/Ls as documented in spec 001-02735 (Exempt FETs that are pruned; exempt for W/L’s inside <span class="drc-tag">areaid.sc</span> and inside cell name scs8*decap* and listed in the MRGA as a decap only W/L)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.X.1a)</span></p></th> |
| <td><p>Min & max dummy_poly L is equal to min L allowed for corresponding device type (exempt rule for dummy_poly in cells listed on Table H3)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.1a)</span></p></th> |
| <td><p>Width of poly</p></td> |
| <td></td> |
| <td><p>0.150</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.1b)</span></p></th> |
| <td><p>Min channel length (poly width) for pfet overlapping lvtn (exempt rule for dummy_poly in cells listed on Table H3)</p></td> |
| <td></td> |
| <td><p>0.350</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.2)</span></p></th> |
| <td><p>Spacing of poly to poly except for poly.c2 and poly.c3; Exempt cell: sr_bltd_eq where it is same as poly.c2</p></td> |
| <td></td> |
| <td><p>0.210</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.3)</span></p></th> |
| <td><p>Min poly resistor width</p></td> |
| <td></td> |
| <td><p>0.330</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.4)</span></p></th> |
| <td><p>Spacing of poly on field to diff (parallel edges only)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.075</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.5)</span></p></th> |
| <td><p>Spacing of poly on field to tap</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.055</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.6)</span></p></th> |
| <td><p>Spacing of poly on diff to abutting tap (min source)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.7)</span></p></th> |
| <td><p>Extension of diff beyond poly (min drain)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.250</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.8)</span></p></th> |
| <td><p>Extension of poly beyond diffusion (endcap)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.130</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.9)</span></p></th> |
| <td><p>Poly resistor spacing to poly or spacing (no overlap) to diff/tap</p></td> |
| <td></td> |
| <td><p>0.480</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.10)</span></p></th> |
| <td><p>Poly can’t overlap inner corners of diff</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.11)</span></p></th> |
| <td><p>No 90 deg turns of poly on diff</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(poly.12)</span></p></th> |
| <td><p>(Poly NOT (nwell NOT hvi)) may not overlap tap; Rule exempted for cell name “s8fgvr_n_fg2” and gated_npn and inside UHVI.</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(poly.15)</span></p></th> |
| <td><p>Poly must not overlap diff:rs</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p028-poly_dotdash.svg"><img alt="../_images/p028-poly_dotdash.svg" src="../_images/p028-poly_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="rpm"> |
| <h2><span class="drc-rule">(rpm.-)</span><a class="headerlink" href="#rpm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id17" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines p+ poly resistors</span><a class="headerlink" href="#id17" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.1a)</span></p></th> |
| <td><p>Min width of rpm</p></td> |
| <td></td> |
| <td><p>1.270</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.1b)</span></p></th> |
| <td><p>Min/Max prec_resistor width xhrpoly_0p35</p></td> |
| <td></td> |
| <td><p>0.350</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.1c)</span></p></th> |
| <td><p>Min/Max prec_resistor width xhrpoly_0p69</p></td> |
| <td></td> |
| <td><p>0.690</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.1d)</span></p></th> |
| <td><p>Min/Max prec_resistor width xhrpoly_1p41</p></td> |
| <td></td> |
| <td><p>1.410</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.1e)</span></p></th> |
| <td><p>Min/Max prec_resistor width xhrpoly_2p85</p></td> |
| <td></td> |
| <td><p>2.850</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.1f)</span></p></th> |
| <td><p>Min/Max prec_resistor width xhrpoly_5p73</p></td> |
| <td></td> |
| <td><p>5.730</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.1g)</span></p></th> |
| <td><p>Only 1 licon is allowed in xhrpoly_0p35 prec_resistor_terminal</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.1h)</span></p></th> |
| <td><p>Only 1 licon is allowed in xhrpoly_0p69 prec_resistor_terminal</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.1i)</span></p></th> |
| <td><p>Only 2 licons are allowed in xhrpoly_1p41 prec_resistor_terminal</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.1j)</span></p></th> |
| <td><p>Only 4 licons are allowed in xhrpoly_2p85 prec_resistor_terminal</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.1k)</span></p></th> |
| <td><p>Only 8 licons are allowed in xhrpoly_5p73 prec_resistor_terminal</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.2)</span></p></th> |
| <td><p>Min spacing of rpm to rpm</p></td> |
| <td></td> |
| <td><p>0.840</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.3)</span></p></th> |
| <td><p>rpm must enclose prec_resistor by atleast</p></td> |
| <td></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.4)</span></p></th> |
| <td><p>prec_resistor must be enclosed by psdm by atleast</p></td> |
| <td></td> |
| <td><p>0.110</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.5)</span></p></th> |
| <td><p>prec_resistor must be enclosed by npc by atleast</p></td> |
| <td></td> |
| <td><p>0.095</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.6)</span></p></th> |
| <td><p>Min spacing, no overlap, of rpm and nsdm</p></td> |
| <td></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.7)</span></p></th> |
| <td><p>Min spacing between rpm and poly</p></td> |
| <td></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.8)</span></p></th> |
| <td><p>poly must not straddle rpm</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rpm.9)</span></p></th> |
| <td><p>Min space, no overlap, between prec_resistor and hvntm</p></td> |
| <td></td> |
| <td><p>0.185</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rpm.10)</span></p></th> |
| <td><p>Min spacing of rpm to pwbm</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p029-rpm_dotdash.svg"><img alt="../_images/p029-rpm_dotdash.svg" src="../_images/p029-rpm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="varac"> |
| <h2><span class="drc-rule">(varac.-)</span><a class="headerlink" href="#varac" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id18" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines varactors</span><a class="headerlink" href="#id18" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(varac.1)</span></p></th> |
| <td><p>Min channel length (poly width) of Var_channel</p></td> |
| <td></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(varac.2)</span></p></th> |
| <td><p>Min channel width (tap width) of Var_channel</p></td> |
| <td></td> |
| <td><p>1.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(varac.3)</span></p></th> |
| <td><p>Min spacing between hvtp to Var_channel</p></td> |
| <td></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(varac.4)</span></p></th> |
| <td><p>Min spacing of licon on tap to Var_channel</p></td> |
| <td></td> |
| <td><p>0.250</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(varac.5)</span></p></th> |
| <td><p>Min enclosure of poly overlapping Var_channel by nwell</p></td> |
| <td></td> |
| <td><p>0.150</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(varac.6)</span></p></th> |
| <td><p>Min spacing between VaracTap and difftap</p></td> |
| <td></td> |
| <td><p>0.270</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(varac.7)</span></p></th> |
| <td><p>Nwell overlapping Var_channel must not overlap P+ diff</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p030-varac_dotdash.svg"><img alt="../_images/p030-varac_dotdash.svg" src="../_images/p030-varac_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="photo"> |
| <h2><span class="drc-rule">(photo.-)</span><a class="headerlink" href="#photo" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id19" style="width: 100%"> |
| <caption><span class="caption-text">Function: Photo diode for sensing light</span><a class="headerlink" href="#id19" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(photo.1)</span></p></th> |
| <td><p>Rules dnwell.3 and nwell.5 are exempted for photoDiode</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(photo.2)</span></p></th> |
| <td><p>Min/Max width of photoDiode</p></td> |
| <td></td> |
| <td><p>3.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(photo.3)</span></p></th> |
| <td><p>Min spacing between photoDiode</p></td> |
| <td></td> |
| <td><p>5.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(photo.4)</span></p></th> |
| <td><p>Min spacing between photoDiode and deep nwell</p></td> |
| <td></td> |
| <td><p>5.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(photo.5)</span></p></th> |
| <td><p>photoDiode edges must be coincident with <span class="drc-tag">areaid.po</span></p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(photo.6)</span></p></th> |
| <td><p>photoDiode must be enclosed by dnwell ring</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(photo.7)</span></p></th> |
| <td><p>photoDiode must be enclosed by p+ tap ring</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(photo.8)</span></p></th> |
| <td><p>Min/Max width of nwell inside photoDiode</p></td> |
| <td></td> |
| <td><p>0.840</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(photo.9)</span></p></th> |
| <td><p>Min/Max enclosure of nwell by photoDiode</p></td> |
| <td></td> |
| <td><p>1.080</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(photo.10)</span></p></th> |
| <td><p>Min/Max width of tap inside photoDiode</p></td> |
| <td></td> |
| <td><p>0.410</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p031-photo_dotdash.svg"><img alt="../_images/p031-photo_dotdash.svg" src="../_images/p031-photo_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="npc"> |
| <h2><span class="drc-rule">(npc.-)</span><a class="headerlink" href="#npc" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id20" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines nitride openings to contact poly and Li1</span><a class="headerlink" href="#id20" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(npc.1)</span></p></th> |
| <td><p>Min width of NPC</p></td> |
| <td></td> |
| <td><p>0.270</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(npc.2)</span></p></th> |
| <td><p>Min spacing of NPC to NPC</p></td> |
| <td></td> |
| <td><p>0.270</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(npc.3)</span></p></th> |
| <td><p>Manual merge if less than minimum</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(npc.4)</span></p></th> |
| <td><p>Spacing (no overlap) of NPC to Gate</p></td> |
| <td></td> |
| <td><p>0.090</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p032-npc_dotdash.svg"><img alt="../_images/p032-npc_dotdash.svg" src="../_images/p032-npc_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="n-psd"> |
| <h2><span class="drc-rule">(n/ psd.-)</span><a class="headerlink" href="#n-psd" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id21" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines opening for N+/P+ implants</span><a class="headerlink" href="#id21" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(n/ psd.1)</span></p></th> |
| <td><p>Width of nsdm(psdm)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(n/ psd.2)</span></p></th> |
| <td><p>Spacing of nsdm(psdm) to nsdm(psdm)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.380</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(n/ psd.3)</span></p></th> |
| <td><p>Manual merge if less than minimum</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(n/ psd.5a)</span></p></th> |
| <td><p>Enclosure of diff by nsdm(psdm), except for butting edge</p></td> |
| <td></td> |
| <td><p>0.125</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(n/ psd.5b)</span></p></th> |
| <td><p>Enclosure of tap by nsdm(psdm), except for butting edge</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.125</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(n/ psd.6)</span></p></th> |
| <td><p>Enclosure of diff/tap butting edge by nsdm (psdm)</p></td> |
| <td></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(n/ psd.7)</span></p></th> |
| <td><p>Spacing of NSDM/PSDM to opposite implant diff or tap (for non-abutting diff/tap edges)</p></td> |
| <td></td> |
| <td><p>0.130</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(n/ psd.8)</span></p></th> |
| <td><p>Nsdm and psdm cannot overlap diff/tap regions of opposite doping</p></td> |
| <td><p><span class="drc-flag">DE</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(n/ psd.9)</span></p></th> |
| <td><p>Diff and tap must be enclosed by their corresponding implant layers. Rule exempted forn- diff inside “advSeal_6um* OR cuPillarAdvSeal_6um*” pcell for SKY130P*/SP8P*/SKY130DI-5R-CSMC flowsn- diff rings around the die at min total L>1000 um and W=0.3 umn- gated_npn n- <span class="drc-tag">areaid.zer</span>.</p></td> |
| <td><p><span class="drc-flag">DE</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(n/ psd.10a)</span></p></th> |
| <td><p>Min area of Nsdm (um^2)</p></td> |
| <td></td> |
| <td><p>0.265</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(n/ psd.10b)</span></p></th> |
| <td><p>Min area of Psdm (um^2)</p></td> |
| <td></td> |
| <td><p>0.255</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p032-n_psd_dotdash.svg"><img alt="../_images/p032-n_psd_dotdash.svg" src="../_images/p032-n_psd_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="licon"> |
| <h2><span class="drc-rule">(licon.-)</span><a class="headerlink" href="#licon" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id22" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines contacts between poly/diff/tap and Li1</span><a class="headerlink" href="#id22" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.1)</span></p></th> |
| <td><p>Min and max L and W of licon (exempt licons inside prec_resistor)</p></td> |
| <td></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.1b)</span></p></th> |
| <td><p>Min and max width of licon inside prec_resistor</p></td> |
| <td></td> |
| <td><p>0.190</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.1c)</span></p></th> |
| <td><p>Min and max length of licon inside prec_resistor</p></td> |
| <td></td> |
| <td><p>2.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.2)</span></p></th> |
| <td><p>Spacing of licon to licon</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.2b)</span></p></th> |
| <td><p>Min spacing between two slotted_licon (when the both the edges are 0.19um in length)</p></td> |
| <td></td> |
| <td><p>0.350</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.2c)</span></p></th> |
| <td><p>Min spacing between two slotted_licon (except for rule licon.2b)</p></td> |
| <td></td> |
| <td><p>0.510</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.2d)</span></p></th> |
| <td><p>Min spacing between a slotted_licon and 0.17um square licon</p></td> |
| <td></td> |
| <td><p>0.510</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.3)</span></p></th> |
| <td><p>Only min. square licons are allowed except die seal ring where licons are (licon CD)*L</p></td> |
| <td></td> |
| <td><p>0.170 <a href="#id3"><span class="problematic" id="id4">*</span></a>L</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.4)</span></p></th> |
| <td><p>Licon1 must overlap li1 and (poly or diff or tap)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.5a)</span></p></th> |
| <td><p>Enclosure of licon by diff</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.040</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.5b)</span></p></th> |
| <td><p>Min space between tap_licon and diff-abutting tap edge</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.060</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.5c)</span></p></th> |
| <td><p>Enclosure of licon by diff on one of two adjacent sides</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.060</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.6)</span></p></th> |
| <td><p>Licon cannot straddle tap</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.7)</span></p></th> |
| <td><p>Enclosure of licon by one of two adjacent edges of isolated tap</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.120</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.8)</span></p></th> |
| <td><p>Enclosure of poly_licon by poly</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.050</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.8a)</span></p></th> |
| <td><p>Enclosure of poly_licon by poly on one of two adjacent sides</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.080</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.9)</span></p></th> |
| <td><p>Spacing, no overlap, between poly_licon and psdm; In SKY130DIA/SKY130TMA/SKY130PIR-10 flows, the rule is checked only between (poly_licon outside rpm) and psdm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.110</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.10)</span></p></th> |
| <td><p>Spacing of licon on (tap AND (nwell NOT hvi)) to Var_channel</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.250</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.11)</span></p></th> |
| <td><p>Spacing of licon on diff or tap to poly on diff (except for all FETs inside <span class="drc-tag">areaid.sc</span> and except s8spf-10r flow for 0.5um phv inside cell names “s8fs_gwdlvx4”, “s8fs_gwdlvx8”, “s8fs_hvrsw_x4”, “s8fs_hvrsw8”, “s8fs_hvrsw264”, and “s8fs_hvrsw520” and for 0.15um nshort inside cell names “s8fs_rdecdrv”, “s8fs_rdec8”, “s8fs_rdec32”, “s8fs_rdec264”, “s8fs_rdec520”)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.055</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.11a)</span></p></th> |
| <td><p>Spacing of licon on diff or tap to poly on diff (for all FETs inside <span class="drc-tag">areaid.sc</span> except 0.15um phighvt)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.050</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.11b)</span></p></th> |
| <td><p>Spacing of licon on diff or tap to poly on diff (for 0.15um phighvt inside <span class="drc-tag">areaid.sc</span>)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.050</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.11c)</span></p></th> |
| <td><p>Spacing of licon on diff or tap to poly on diff (for 0.5um phv inside cell names “s8fs_gwdlvx4”, “s8fs_gwdlvx8”, “s8fs_hvrsw_x4”, “s8fs_hvrsw8”, “s8fs_hvrsw264”, and “s8fs_hvrsw520”)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.040</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.11d)</span></p></th> |
| <td><p>Spacing of licon on diff or tap to poly on diff (for 0.15um nshort inside cell names “s8fs_rdecdrv”, “s8fs_rdec8”, “s8fs_rdec32”, “s8fs_rdec264”, “s8fs_rdec520”)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.045</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.12)</span></p></th> |
| <td><p>Max SD width without licon</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td><p>5.700</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.13)</span></p></th> |
| <td><p>Spacing (no overlap) of NPC to licon on diff or tap</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.090</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.14)</span></p></th> |
| <td><p>Spacing of poly_licon to diff or tap</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.190</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.15)</span></p></th> |
| <td><p>poly_licon must be enclosed by npc by…</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.100</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.16)</span></p></th> |
| <td><p>Every source_diff and every tap must enclose at least one licon1, including the diff/tap straddling areaid:ce. nRule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(licon.17)</span></p></th> |
| <td><p>Licons may not overlap both poly and (diff or tap)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(licon.18)</span></p></th> |
| <td><p>Npc must enclose poly_licon</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p034-licon_dotdash.svg"><img alt="../_images/p034-licon_dotdash.svg" src="../_images/p034-licon_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="li"> |
| <h2><span class="drc-rule">(li.-.-)</span><a class="headerlink" href="#li" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id23" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines local interconnect to diff/tap and poly</span><a class="headerlink" href="#id23" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(li.1.-)</span></p></th> |
| <td><p>Width of LI (except for li.1a)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(li.1a.-)</span></p></th> |
| <td><p>Width of LI inside of cells with name s8rf2_xcmvpp_hd5_*</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(li.2.-)</span></p></th> |
| <td><p>Max ratio of length to width of LI without licon or mcon</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td><p>10.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(li.3.-)</span></p></th> |
| <td><p>Spacing of LI to LI (except for li.3a)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(li.3a.-)</span></p></th> |
| <td><p>Spacing of LI to LI inside cells with names s8rf2_xcmvpp_hd5_*</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(li.5.-)</span></p></th> |
| <td><p>Enclosure of licon by one of two adjacent LI sides</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.080</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(li.6.-)</span></p></th> |
| <td><p>Min area of LI</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.0561</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p035-li_dotdash_dotdash.svg"><img alt="../_images/p035-li_dotdash_dotdash.svg" src="../_images/p035-li_dotdash_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="ct"> |
| <h2><span class="drc-rule">(ct.-)</span><a class="headerlink" href="#ct" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id24" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines contact between Li1 and met1</span><a class="headerlink" href="#id24" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ct.1)</span></p></th> |
| <td><p>Min and max L and W of mcon</p></td> |
| <td><p><span class="drc-flag">DNF</span></p></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ct.2)</span></p></th> |
| <td><p>Spacing of mcon to mcon</p></td> |
| <td><p><span class="drc-flag">DNF</span></p></td> |
| <td><p>0.190</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ct.3)</span></p></th> |
| <td><p>Only min. square mcons are allowed except die seal ring where mcons are…</p></td> |
| <td></td> |
| <td><p>0.170*L</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ct.4)</span></p></th> |
| <td><p>Mcon must be enclosed by LI by at least …</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ct.irdrop.1)</span></p></th> |
| <td><p>For 1 <= n <= 10 contacts on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.2</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ct.irdrop.2)</span></p></th> |
| <td><p>For 11 <= n <= 100 contacts on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.3</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p035-ct_dotdash.svg"><img alt="../_images/p035-ct_dotdash.svg" src="../_images/p035-ct_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="capm"> |
| <h2><span class="drc-rule">(capm.-)</span><a class="headerlink" href="#capm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id25" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines MIM capacitor</span><a class="headerlink" href="#id25" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(capm.1)</span></p></th> |
| <td><p>Min width of capm</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(capm.2a)</span></p></th> |
| <td><p>Min spacing of capm to capm</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(capm.2b)</span></p></th> |
| <td><p>Minimum spacing of capacitor bottom_plate to bottom plate</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(capm.3)</span></p></th> |
| <td><p>Minimum enclosure of capm (top_plate) by met2</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(capm.4)</span></p></th> |
| <td><p>Min enclosure of via2 by capm</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(capm.5)</span></p></th> |
| <td><p>Min spacing between capm and via2</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(capm.6)</span></p></th> |
| <td><p>Maximum Aspect Ratio (Length/Width)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(capm.7)</span></p></th> |
| <td><p>Only rectangular capacitors are allowed</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(capm.8)</span></p></th> |
| <td><p>Min space, no overlap, between via and capm</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(capm.10)</span></p></th> |
| <td><p>capm must not straddle nwell, diff, tap, poly, li1 and met1 (Rule exempted for capm overlapping capm_2t.dg)</p></td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(capm.11)</span></p></th> |
| <td><p>Min spacing between capm to (met2 not overlapping capm)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p036-capm_dotdash.svg"><img alt="../_images/p036-capm_dotdash.svg" src="../_images/p036-capm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="vpp"> |
| <h2><span class="drc-rule">(vpp.-)</span><a class="headerlink" href="#vpp" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id26" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines VPP capacitor</span><a class="headerlink" href="#id26" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.1)</span></p></th> |
| <td><p>Min width of capacitor:dg</p></td> |
| <td></td> |
| <td><p>1.430</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.1b)</span></p></th> |
| <td><p>Max width of capacitor:dg; Rule not applicable for vpp_with_Met3Shield and vpp_with_LiShield and vpp_over_MOSCAP and vpp_with_Met5 and vpp_with_noLi</p></td> |
| <td></td> |
| <td><p>11.350</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.1c)</span></p></th> |
| <td><p>Min/Max width of cell name “s8rf_xcmvpp1p8x1p8_m3shield “</p></td> |
| <td></td> |
| <td><p>3.880</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.3)</span></p></th> |
| <td><p>capacitor:dg must not overlap (tap or diff or poly); (one exception: Poly is allowed to overlap vpp_with_Met3Shield and vpp_with_Met5PolyShield); (not applicable for vpp_over_Moscap or “s8rf2_xcmvppx4_2xnhvnative10x4” or vpp_with_LiShield)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.4)</span></p></th> |
| <td><p>capacitor:dg must not straddle (nwell or dnwell)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.5)</span></p></th> |
| <td><p>Min spacing between (capacitor:dg edge and (poly or li1 or met1 or met2)) to (poly or li1 or met1 or met2) on separate nets (Exempt area of the error shape less than 2.25 (um^2) and run length less than 2.0um); Rule not applicable for vpp_with_Met3Shield and vpp_with_LiShield and vpp_over_MOSCAP and vpp_with_Met5 and vpp_with_noLi</p></td> |
| <td></td> |
| <td><p>1.500</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.5a)</span></p></th> |
| <td><p>Max pattern density of met3.dg over capacitor.dg (not applicable for vpp_with_Met3Shield and vpp_with_LiShield and vpp_over_MOSCAP and vpp_with_Met5)</p></td> |
| <td></td> |
| <td><p>0.25</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.5b)</span></p></th> |
| <td><p>Max pattern density of met4.dg over capacitor.dg (not applicable for vpp_with_Met3Shield and vpp_with_Met5 and vpp_over_MOSCAP)</p></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.5c)</span></p></th> |
| <td><p>Max pattern density of met5.dg over capacitor.dg (not applicable for vpp_with_Met3Shield and vpp_with_Met5 and vpp_over_MOSCAP and vpp_with_noLi); (one exception: rules does apply to cell “s8rf2_xcmvpp11p5x11p7_m1m4” and “s8rf2_xcmvpp_hd5_atlas*”)</p></td> |
| <td></td> |
| <td><p>0.4</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.8)</span></p></th> |
| <td><p>Min enclosure of capacitor:dg by nwell</p></td> |
| <td></td> |
| <td><p>1.500</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.9)</span></p></th> |
| <td><p>Min spacing of capacitor:dg to nwell (not applicable for vpp_over_MOSCAP)</p></td> |
| <td></td> |
| <td><p>1.500</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.10)</span></p></th> |
| <td><p>vpp capacitors must not overlap; Rule checks for capacitor.dg overlapping more than one pwell pin</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.11)</span></p></th> |
| <td><p>Min pattern density of (poly and diff) over capacitor.dg; (vpp_over_Moscap only)</p></td> |
| <td></td> |
| <td><p>0.87</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.12a)</span></p></th> |
| <td><p>Number of met4 shapes inside capacitor.dg of cell “s8rf2_xcmvpp8p6x7p9_m3_lim5shield” must overlap with size 2.01 x 2.01 (no other met4 shapes allowed)</p></td> |
| <td></td> |
| <td><p>9.00</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.12b)</span></p></th> |
| <td><p>Number of met4 shapes inside capacitor.dg of cell “s8rf2_xcmvpp11p5x11p7_m3_lim5shield” must overlap with size 2.01 x 2.01 (no other met4 shapes allowed)</p></td> |
| <td></td> |
| <td><p>16.00</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vpp.12c)</span></p></th> |
| <td><p>Number of met4 shapes inside capacitor.dg of cell “s8rf2_xcmvpp4p4x4p6_m3_lim5shield” must overlap with size 1.5 x 1.5 (no other met4 shapes allowed)</p></td> |
| <td></td> |
| <td><p>4.00</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vpp.13)</span></p></th> |
| <td><p>Min space of met1 to met1inside VPP capacitor</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.160</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p037-vpp_dotdash.svg"><img alt="../_images/p037-vpp_dotdash.svg" src="../_images/p037-vpp_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="m1"> |
| <h2><span class="drc-rule">(m1.-)</span><a class="headerlink" href="#m1" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id27" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines first level of metal interconnects, buses etc;</span><a class="headerlink" href="#id27" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.-)</span></p></th> |
| <td><p>Algorithm should flag errors, for met1, if ANY of the following is true:nAn entire 700x700 window is covered by cmm1 waffleDrop, and metX PD < 70% for same window.n80-100% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 65% for same window.n60-80% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 60% for same window.n50-60% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 50% for same window.n40-50% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 40% for same window.n30-40% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 30% for same window.nExclude cells whose area is below 40Kum2. NOTE: Required for IP, Recommended for Chip-level.</p></td> |
| <td><p><span class="drc-flag">RC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.1)</span></p></th> |
| <td><p>Width of metal1</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.2)</span></p></th> |
| <td><p>Spacing of metal1 to metal1</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.3a)</span></p></th> |
| <td><p>Min. spacing of features attached to or extending from huge_met1 for a distance of up to 0.280 um to metal1 (rule not checked over non-huge met1 features)</p></td> |
| <td></td> |
| <td><p>0.280</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.3b)</span></p></th> |
| <td><p>Min. spacing of huge_met1 to metal1 excluding features checked by m1.3a</p></td> |
| <td></td> |
| <td><p>0.280</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.4)</span></p></th> |
| <td><p>Mcon must be enclosed by Met1 by at least …(Rule exempted for cell names documented in rule m1.4a)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.030</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.4a)</span></p></th> |
| <td><p>Mcon must be enclosed by Met1 by at least (for cell names “s8cell_ee_plus_sseln_a”, “s8cell_ee_plus_sseln_b”, “s8cell_ee_plus_sselp_a”, “s8cell_ee_plus_sselp_b”, “s8fpls_pl8”, and “s8fs_cmux4_fm”)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.005</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.5)</span></p></th> |
| <td><p>Mcon must be enclosed by Met1 on one of two adjacent sides by at least …</p></td> |
| <td><p><span class="drc-flag">P</span> <span class="drc-flag">AL</span></p></td> |
| <td><p>0.060</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.6)</span></p></th> |
| <td><p>Min metal 1 area [um2]</p></td> |
| <td></td> |
| <td><p>0.083</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.7)</span></p></th> |
| <td><p>Min area of metal1 holes [um2]</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.pd.1)</span></p></th> |
| <td><p>Min MM1_oxide_Pattern_density</p></td> |
| <td><p><span class="drc-flag">RR</span> <span class="drc-flag">AL</span></p></td> |
| <td><p>0.7</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.pd.2a)</span></p></th> |
| <td><p>Rule m1.pd.1 has to be checked by dividing the chip into square regions of width and length equal to …</p></td> |
| <td><p><span class="drc-flag">A</span> <span class="drc-flag">AL</span></p></td> |
| <td><p>700</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.pd.2b)</span></p></th> |
| <td><p>Rule m1.pd.1 has to be checked by dividing the chip into steps of …</p></td> |
| <td><p><span class="drc-flag">A</span> <span class="drc-flag">AL</span></p></td> |
| <td><p>70</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.11)</span></p></th> |
| <td><p>Max width of metal1after slotting</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">NC</span></p></td> |
| <td><p>4.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.12)</span></p></th> |
| <td><p>Add slots and remove vias and contacts if met1 wider than…..</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>3.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.13)</span></p></th> |
| <td><p>Max pattern density (PD) of met1</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.77</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m1.14)</span></p></th> |
| <td><p>Met1 PD window size</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>50.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m1.14a)</span></p></th> |
| <td><p>Met1 PD window step</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>25.000</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p038-m1_dotdash.svg"><img alt="../_images/p038-m1_dotdash.svg" src="../_images/p038-m1_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="via"> |
| <h2><span class="drc-rule">(via.-)</span><a class="headerlink" href="#via" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id28" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines contact between met1 and met2</span><a class="headerlink" href="#id28" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.1a)</span></p></th> |
| <td><p>Min and max L and W of via outside <span class="drc-tag">areaid.mt</span></p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.150</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.1b)</span></p></th> |
| <td><p>Three sizes of square Vias allowed inside areaid:mt: 0.150um, 0.230um and 0.280um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.2)</span></p></th> |
| <td><p>Spacing of via to via</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.3)</span></p></th> |
| <td><p>Only min. square vias are allowed except die seal ring where vias are (Via CD)*L</p></td> |
| <td></td> |
| <td><p>0.2*L</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.4a)</span></p></th> |
| <td><p>0.150 um Via must be enclosed by Met1 by at least …</p></td> |
| <td></td> |
| <td><p>0.055</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.4b)</span></p></th> |
| <td><p>Inside <span class="drc-tag">areaid.mt</span>, 0.230 um Via must be enclosed by met1 by atleast</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.030</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.4c)</span></p></th> |
| <td><p>Inside <span class="drc-tag">areaid.mt</span>, 0.280 um Via must be enclosed by met1 by atleast</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.5a)</span></p></th> |
| <td><p>0.150 um Via must be enclosed by Met1 on one of two adjacent sides by at least …</p></td> |
| <td></td> |
| <td><p>0.085</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.5b)</span></p></th> |
| <td><p>Inside <span class="drc-tag">areaid.mt</span>, 0.230 um Via must be enclosed by met1 on one of two adjacent sides by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.060</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.5c)</span></p></th> |
| <td><p>Inside <span class="drc-tag">areaid.mt</span>, 0.280 um Via must be enclosed by met1 on one of two adjacent sides by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.11)</span></p></th> |
| <td><p>Min and max L and W of via outside <span class="drc-tag">areaid.mt</span></p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.12)</span></p></th> |
| <td><p>Min spacing between vias</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.130</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.13)</span></p></th> |
| <td><p>Max of 5 vias within …</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.350</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.14)</span></p></th> |
| <td><p>0.180 um Via must be enclosed by parallel edges of Met1 by at least …</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.040</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.irdrop.1)</span></p></th> |
| <td><p>For 1 <= n <= 2 vias on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.0</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.irdrop.2)</span></p></th> |
| <td><p>For 3 <= n <= 15 vias on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.6</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via.irdrop.3)</span></p></th> |
| <td><p>For 16 <= n <= 30 vias on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.8</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via.irdrop.4)</span></p></th> |
| <td><p>For n > 30 vias on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.9</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p039-via_dotdash.svg"><img alt="../_images/p039-via_dotdash.svg" src="../_images/p039-via_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="m2"> |
| <h2><span class="drc-rule">(m2.-)</span><a class="headerlink" href="#m2" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id29" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines second level of metal interconnects, buses etc</span><a class="headerlink" href="#id29" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.-)</span></p></th> |
| <td><p>Algorithm should flag errors, for met2, if ANY of the following is true:nAn entire 700x700 window is covered by cmm2 waffleDrop, and metX PD < 70% for same window.n80-100% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 65% for same window.n60-80% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 60% for same window.n50-60% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 50% for same window.n40-50% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 40% for same window.n30-40% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 30% for same window.nExclude cells whose area is below 40Kum2. Required for IP, Recommended for Chip-level.</p></td> |
| <td><p><span class="drc-flag">RC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.1)</span></p></th> |
| <td><p>Width of metal 2</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.2)</span></p></th> |
| <td><p>Spacing of metal 2 to metal 2</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.3a)</span></p></th> |
| <td><p>Min. spacing of features attached to or extending from huge_met2 for a distance of up to 0.280 um to metal2 (rule not checked over non-huge met2 features)</p></td> |
| <td></td> |
| <td><p>0.280</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.3b)</span></p></th> |
| <td><p>Min. spacing of huge_met2 to metal2 excluding features checked by m2.3a</p></td> |
| <td></td> |
| <td><p>0.280</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.3c)</span></p></th> |
| <td><p>Min spacing between floating_met2 with AR_met2_A >= 0.05 and AR_met2_B =< 0.032, outside areaid:sc must be greater than</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td><p>0.145</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.4)</span></p></th> |
| <td><p>Via must be enclosed by Met2 by at least …</p></td> |
| <td><p><span class="drc-flag">P</span> <span class="drc-flag">AL</span></p></td> |
| <td><p>0.055</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.5)</span></p></th> |
| <td><p>Via must be enclosed by Met2 on one of two adjacent sides by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.085</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.6)</span></p></th> |
| <td><p>Min metal2 area [um2]</p></td> |
| <td></td> |
| <td><p>0.0676</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.7)</span></p></th> |
| <td><p>Min area of metal2 holes [um2]</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.pd.1)</span></p></th> |
| <td><p>Min MM2_oxide_Pattern_density</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td><p>0.7</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.pd.2a)</span></p></th> |
| <td><p>Rule m2.pd.1 has to be checked by dividing the chip into square regions of width and length equal to …</p></td> |
| <td><p><span class="drc-flag">A</span></p></td> |
| <td><p>700</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.pd.2b)</span></p></th> |
| <td><p>Rule m2.pd.1 has to be checked by dividing the chip into steps of …</p></td> |
| <td><p><span class="drc-flag">A</span></p></td> |
| <td><p>70</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.11)</span></p></th> |
| <td><p>Max width of metal2</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>4.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.12)</span></p></th> |
| <td><p>Add slots and remove vias and contacts if met2 wider than…..</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>3.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.13)</span></p></th> |
| <td><p>Max pattern density (PD) of metal2</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.77</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m2.14)</span></p></th> |
| <td><p>Met2 PD window size</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>50.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m2.14a)</span></p></th> |
| <td><p>Met2 PD window step</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>25.000</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p040-m2_dotdash.svg"><img alt="../_images/p040-m2_dotdash.svg" src="../_images/p040-m2_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="via2"> |
| <h2><span class="drc-rule">(via2.-)</span><a class="headerlink" href="#via2" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id30" style="width: 100%"> |
| <caption><span class="caption-text">Function: Via2 connects met2 to met3 in the SKY130T*/SKY130P*/SP8Q/SP8P* flows and met2/capm to met3 in the SKY130DI* flow.</span><a class="headerlink" href="#id30" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.X.1)</span></p></th> |
| <td><p>Via2 connects met2 to met3 in the SKY130T*/SKY130P*/SP8Q/SP8P* flow and met2/capm to met3 in the SKY130DI* flow.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.1a)</span></p></th> |
| <td><p>Min and max L and W of via2 (except for rule via2.1b/1c/1d/1e/1f)</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.1b)</span></p></th> |
| <td><p>Three sizes of square Vias allowed inside areaid:mt: 0.280um, 1.2 um and 1.5 um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.1c)</span></p></th> |
| <td><p>Two sizes of square Vias allowed inside areaid:mt: 1.2 um and 1.5 um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.1d)</span></p></th> |
| <td><p>Four sizes of square Vias allowed inside areaid:mt: 0.2um, 0.280um, 1.2 um and 1.5 um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.1e)</span></p></th> |
| <td><p>Three sizes of square Vias allowed inside areaid:mt: 0.8um, 1.2 um and 1.5 um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.1f)</span></p></th> |
| <td><p>Two sizes of square Vias allowed outside areaid:mt: 0.8um and 1.2 um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.2)</span></p></th> |
| <td><p>Spacing of via2 to via2</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.3)</span></p></th> |
| <td><p>Only min. square via2s are allowed except die seal ring where via2s are (Via2 CD)*L</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.2*L</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.4)</span></p></th> |
| <td><p>Via2 must be enclosed by Met2 by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.040</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.4a)</span></p></th> |
| <td><p>Inside <span class="drc-tag">areaid.mt</span>, 1.5 um Via2 must be enclosed by met2 by atleast</p></td> |
| <td></td> |
| <td><p>0.140</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.5)</span></p></th> |
| <td><p>Via2 must be enclosed by Met2 on one of two adjacent sides by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.085</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.11)</span></p></th> |
| <td><p>Min and max L and W of via2</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.210</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.12)</span></p></th> |
| <td><p>Min spacing between via2’s</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.13)</span></p></th> |
| <td><p>Min spacing between via2 rows</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.14)</span></p></th> |
| <td><p>Via2 must be enclosed by met2 by atleast</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.035</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.irdrop.1)</span></p></th> |
| <td><p>For 1 <= n <= 2 via2’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.0</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via2.irdrop.2)</span></p></th> |
| <td><p>For 3 <= n <= 4 via2’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.6</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via2.irdrop.3)</span></p></th> |
| <td><p>For 5 <= n <= 30 via2’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.79</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p041-via2_dotdash.svg"><img alt="../_images/p041-via2_dotdash.svg" src="../_images/p041-via2_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="m3"> |
| <h2><span class="drc-rule">(m3.-)</span><a class="headerlink" href="#m3" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id31" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines third level of metal interconnects, buses etc</span><a class="headerlink" href="#id31" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.-)</span></p></th> |
| <td><p>Algorithm should flag errors, for met3, if ANY of the following is true:nAn entire 700x700 window is covered by cmm3 waffleDrop, and metX PD < 70% for same window.n80-100% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 65% for same window.n60-80% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 60% for same window.n50-60% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 50% for same window.n40-50% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 40% for same window.n30-40% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 30% for same window.nExclude cells whose area is below 40Kum2. NOTE: Required for IP, Recommended for Chip-level.</p></td> |
| <td><p><span class="drc-flag">RC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.1)</span></p></th> |
| <td><p>Width of metal 3</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.2)</span></p></th> |
| <td><p>Spacing of metal 3 to metal 3</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.3a)</span></p></th> |
| <td><p>Min. spacing of features attached to or extending from huge_met3 for a distance of up to 0.480 um to metal3 (rule not checked over non-huge met3 features)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.3b)</span></p></th> |
| <td><p>Min. spacing of huge_met3 to metal3 excluding features checked by m3.3a</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.3c)</span></p></th> |
| <td><p>Min. spacing of features attached to or extending from huge_met3 for a distance of up to 0.400 um to metal3 (rule not checked over non-huge met3 features)</p></td> |
| <td></td> |
| <td><p>0.400</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.3d)</span></p></th> |
| <td><p>Min. spacing of huge_met3 to metal3 excluding features checked by m3.3a</p></td> |
| <td></td> |
| <td><p>0.400</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.4)</span></p></th> |
| <td><p>Via2 must be enclosed by Met3 by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.065</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.5)</span></p></th> |
| <td><p>Via2 must be enclosed by Met3 on one of two adjacent sides by at least …</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.5a)</span></p></th> |
| <td><p>Via2 must be enclosed by Met3 on all sides by at least …(Rule not checked on a layout when it satisfies both rules m3.4 and m3.5)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.6)</span></p></th> |
| <td><p>Min area of metal3</p></td> |
| <td></td> |
| <td><p>0.240</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.7)</span></p></th> |
| <td><p>Min area of metal3 holes [um2]</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.pd.1)</span></p></th> |
| <td><p>Min MM3_oxide_Pattern_density</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td><p>0.7</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.pd.2a)</span></p></th> |
| <td><p>Rule m3.pd.1 has to be checked by dividing the chip into square regions of width and length equal to …</p></td> |
| <td><p><span class="drc-flag">A</span></p></td> |
| <td><p>700</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.pd.2b)</span></p></th> |
| <td><p>Rule m3.pd.1 has to be checked by dividing the chip into steps of …</p></td> |
| <td><p><span class="drc-flag">A</span></p></td> |
| <td><p>70</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.11)</span></p></th> |
| <td><p>Max width of metal3</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>4.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.12)</span></p></th> |
| <td><p>Add slots and remove vias and contacts if wider than…..</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>3.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.13)</span></p></th> |
| <td><p>Max pattern density (PD) of metal3</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.77</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m3.14)</span></p></th> |
| <td><p>Met3 PD window size</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>50.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m3.14a)</span></p></th> |
| <td><p>Met3 PD window step</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>25.000</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p042-m3_dotdash.svg"><img alt="../_images/p042-m3_dotdash.svg" src="../_images/p042-m3_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="via3"> |
| <h2><span class="drc-rule">(via3.-)</span><a class="headerlink" href="#via3" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id32" style="width: 100%"> |
| <caption><span class="caption-text">Function: Via3 connects met3 to met4 in the SKY130Q*/SKY130P*/SP8Q/SP8P* flow</span><a class="headerlink" href="#id32" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.1)</span></p></th> |
| <td><p>Min and max L and W of via3 (except for rule via3.1a)</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via3.1a)</span></p></th> |
| <td><p>Two sizes of square via3 allowed inside <span class="drc-tag">areaid.mt</span>: 0.200um and 0.800um</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.2)</span></p></th> |
| <td><p>Spacing of via3 to via3</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via3.3)</span></p></th> |
| <td><p>Only min. square via3s are allowed except die seal ring where via3s are (Via3 CD)*L</p></td> |
| <td></td> |
| <td><p>0.2*L</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.4)</span></p></th> |
| <td><p>Via3 must be enclosed by Met3 by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.060</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via3.5)</span></p></th> |
| <td><p>Via3 must be enclosed by Met3 on one of two adjacent sides by at least …</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.090</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.11)</span></p></th> |
| <td><p>Min and max L and W of via3</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.210</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via3.12)</span></p></th> |
| <td><p>Min spacing between via2’s</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.13)</span></p></th> |
| <td><p>Via3 must be enclosed by Met3 by at least …</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.055</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via3.14)</span></p></th> |
| <td><p>Min spacing between via3 rows</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.350</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.irdrop.1)</span></p></th> |
| <td><p>For 1 <= n <= 2 via3’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.0</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via3.irdrop.2)</span></p></th> |
| <td><p>For 3 <= n <= 15 via3’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.6</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via3.irdrop.3)</span></p></th> |
| <td><p>For 16 <= n <= 30 via3’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.8</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="nsm"> |
| <h2><span class="drc-rule">(nsm.-)</span><a class="headerlink" href="#nsm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id33" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines Nitride Seal Mask (FIXME)</span><a class="headerlink" href="#id33" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nsm.1)</span></p></th> |
| <td><p>Min. width of nsm</p></td> |
| <td></td> |
| <td><p>3.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(nsm.2)</span></p></th> |
| <td><p>Min. spacing of nsm to nsm</p></td> |
| <td></td> |
| <td><p>4.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(nsm.3)</span></p></th> |
| <td><p>Min spacing, no overlap, between NSM_keepout to diff.dg, tap.dg, fom.dy, cfom.dg, cfom.mk, poly.dg, p1m.mk, li1.dg, cli1m.mk, metX.dg (X=1 to 5) and cmmX.mk (X=1 to 5). Exempt the following from the check: (a) cell name “nikon*” and (b) diff ring inside <span class="drc-tag">areaid.sl</span></p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>1.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(nsm.3a)</span></p></th> |
| <td><p>Min enclosure of diff.dg, tap.dg, fom.dy, cfom.dg, cfom.mk, poly.dg, p1m.mk, li1.dg, cli1m.mk, metX.dg (X=1 to 5) and cmmX.mk (X=1 to 5) by <span class="drc-tag">areaid.ft</span>. Exempt the following from the check: (a) cell name “s8Fab_crntic*” (b) blankings in the frame (rule uses <span class="drc-tag">areaid.dt</span> for exemption)</p></td> |
| <td></td> |
| <td><p>3.000</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="indm"> |
| <h2><span class="drc-rule">(indm.-)</span><a class="headerlink" href="#indm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id34" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines third level of metal interconnects, buses and inductor; top_indmMetal is met3 for SKY130D* flows; Similarly top_padVia is Via2 for SKY130D*</span><a class="headerlink" href="#id34" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(indm.1)</span></p></th> |
| <td><p>Min width of top_indmMetal</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(indm.2)</span></p></th> |
| <td><p>Min spacing between two top_indmMetal</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(indm.3)</span></p></th> |
| <td><p>top_padVia must be enclosed by top_indmMetal by atleast</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p043-indm_dotdash.svg"><img alt="../_images/p043-indm_dotdash.svg" src="../_images/p043-indm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="m4"> |
| <h2><span class="drc-rule">(m4.-)</span><a class="headerlink" href="#m4" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id35" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines Fourth level of metal interconnects;</span><a class="headerlink" href="#id35" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.-)</span></p></th> |
| <td><p>Algorithm should flag errors, for met4, if ANY of the following is true:nAn entire 700x700 window is covered by cmm4 waffleDrop, and metX PD < 70% for same window.n80-100% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 65% for same window.n60-80% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 60% for same window.n50-60% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 50% for same window.n40-50% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 40% for same window.n30-40% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 30% for same window.nExclude cells whose area is below 40Kum2. Required for IP, Recommended for Chip-level.</p></td> |
| <td><p><span class="drc-flag">RC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.1)</span></p></th> |
| <td><p>Min width of met4</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.2)</span></p></th> |
| <td><p>Min spacing between two met4</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.3)</span></p></th> |
| <td><p>via3 must be enclosed by met4 by atleast</p></td> |
| <td><p><span class="drc-flag">AL</span></p></td> |
| <td><p>0.065</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.4)</span></p></th> |
| <td><p>Min area of met4 (rule exempted for probe pads which are exactly 1.42um by 1.42um)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.4a)</span></p></th> |
| <td><p>Min area of met4</p></td> |
| <td></td> |
| <td><p>0.240</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.5a)</span></p></th> |
| <td><p>Min. spacing of features attached to or extending from huge_met4 for a distance of up to 0.400 um to metal4 (rule not checked over non-huge met4 features)</p></td> |
| <td></td> |
| <td><p>0.400</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.5b)</span></p></th> |
| <td><p>Min. spacing of huge_met4 to metal4 excluding features checked by m4.5a</p></td> |
| <td></td> |
| <td><p>0.400</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.7)</span></p></th> |
| <td><p>Min area of meta4 holes [um2]</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.pd.1)</span></p></th> |
| <td><p>Min MM4_oxide_Pattern_density</p></td> |
| <td><p><span class="drc-flag">RR</span></p></td> |
| <td><p>0.7</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.pd.2a)</span></p></th> |
| <td><p>Rule m4.pd.1 has to be checked by dividing the chip into square regions of width and length equal to …</p></td> |
| <td><p><span class="drc-flag">A</span></p></td> |
| <td><p>700</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.pd.2b)</span></p></th> |
| <td><p>Rule m4.pd.1 has to be checked by dividing the chip into steps of …</p></td> |
| <td><p><span class="drc-flag">A</span></p></td> |
| <td><p>70</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.11)</span></p></th> |
| <td><p>Max width of metal4</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>10.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.12)</span></p></th> |
| <td><p>Add slots and remove vias and contacts if wider than…..</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>10.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.13)</span></p></th> |
| <td><p>Max pattern density (PD) of metal4; met4 overlapping pdm areas are excluded from the check</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.77</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.14)</span></p></th> |
| <td><p>Met4 PD window size</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>50.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m4.14a)</span></p></th> |
| <td><p>Met4 PD window step</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>25.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m4.15)</span></p></th> |
| <td><p>Via3 must be enclosed by met4 by at least…</p></td> |
| <td><p><span class="drc-flag">CU</span></p></td> |
| <td><p>0.060</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p044-m4_dotdash.svg"><img alt="../_images/p044-m4_dotdash.svg" src="../_images/p044-m4_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="via4"> |
| <h2><span class="drc-rule">(via4.-)</span><a class="headerlink" href="#via4" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id36" style="width: 100%"> |
| <caption><span class="caption-text">Function: Via4 connects met4 to met5 in the SKY130P*/SP8P* flow</span><a class="headerlink" href="#id36" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via4.1)</span></p></th> |
| <td><p>Min and max L and W of via4</p></td> |
| <td></td> |
| <td><p>0.800</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via4.2)</span></p></th> |
| <td><p>Spacing of via4 to via4</p></td> |
| <td></td> |
| <td><p>0.800</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via4.3)</span></p></th> |
| <td><p>Only min. square via4s are allowed except die seal ring where via4s are (Via4 CD)*L</p></td> |
| <td></td> |
| <td><p>0.8*L</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via4.4)</span></p></th> |
| <td><p>Via4 must be enclosed by Met4 by at least …</p></td> |
| <td></td> |
| <td><p>0.190</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via4.irdrop.1)</span></p></th> |
| <td><p>For 1 <= n <= 4 via4’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.0</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(via4.irdrop.2)</span></p></th> |
| <td><p>For 5 <= n <= 10 via4’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.2</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(via4.irdrop.3)</span></p></th> |
| <td><p>For 11 <= n <= 100 via4’s on the same connector, mcon area pre- and post- Cu conversion must differ by no more than…</p></td> |
| <td><p><span class="drc-flag">CU</span> <span class="drc-flag">IR</span></p></td> |
| <td><p>0.5</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="m5"> |
| <h2><span class="drc-rule">(m5.-)</span><a class="headerlink" href="#m5" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id37" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines Fifth level of metal interconnects;</span><a class="headerlink" href="#id37" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m5.1)</span></p></th> |
| <td><p>Min width of met5</p></td> |
| <td></td> |
| <td><p>1.600</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(m5.2)</span></p></th> |
| <td><p>Min spacing between two met5</p></td> |
| <td></td> |
| <td><p>1.600</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(m5.3)</span></p></th> |
| <td><p>via4 must be enclosed by met5 by atleast</p></td> |
| <td></td> |
| <td><p>0.310</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="pad"> |
| <h2><span class="drc-rule">(pad.-)</span><a class="headerlink" href="#pad" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id38" style="width: 100%"> |
| <caption><span class="caption-text">Function: Opens the passivation</span><a class="headerlink" href="#id38" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pad.2)</span></p></th> |
| <td><p>Min spacing of pad:dg to pad:dg</p></td> |
| <td></td> |
| <td><p>1.270</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="rdl"> |
| <h2><span class="drc-rule">(rdl.-)</span><a class="headerlink" href="#rdl" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id39" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines the Cu Inductor. Connects to met5 through the pad opening</span><a class="headerlink" href="#id39" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rdl.1)</span></p></th> |
| <td><p>Min width of rdl</p></td> |
| <td></td> |
| <td><p>10</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rdl.2)</span></p></th> |
| <td><p>Min spacing between two rdl</p></td> |
| <td></td> |
| <td><p>10</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rdl.3)</span></p></th> |
| <td><p>Min enclosure of pad by rdl, except rdl interacting with bump</p></td> |
| <td></td> |
| <td><p>10.750</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rdl.4)</span></p></th> |
| <td><p>Min spacing between rdl and outer edge of the seal ring</p></td> |
| <td></td> |
| <td><p>15.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rdl.5)</span></p></th> |
| <td><p>(rdl OR ccu1m.mk) must not overlap <span class="drc-tag">areaid.ft</span>. Exempt the following from the check: (a) blankings in the frame (rule uses <span class="drc-tag">areaid.dt</span> for exemption)</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="mf"> |
| <h2><span class="drc-rule">(mf.-)</span><a class="headerlink" href="#mf" title="Permalink to this headline">¶</a></h2> |
| <div class="admonition note"> |
| <p class="admonition-title">Note</p> |
| <p>For SKY130D* and SKY130TM* CADflow use MM2 for Metal Fuse</p> |
| <p>For SP8P*/SKY130P* (PLM) CADflow use MM4 for Metal Fuse</p> |
| </div> |
| <table class="colwidths-given docutils align-default" id="id40" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines metal fuses</span><a class="headerlink" href="#id40" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.1)</span></p></th> |
| <td><p>Min. and max width of fuse</p></td> |
| <td></td> |
| <td><p>0.800</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.2)</span></p></th> |
| <td><p>Length of fuse</p></td> |
| <td></td> |
| <td><p>7.200</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.3)</span></p></th> |
| <td><p>Spacing between centers of adjacent fuses</p></td> |
| <td></td> |
| <td><p>2.760</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.4)</span></p></th> |
| <td><p>Spacing between center of fuse and fuse_metal (fuse shields are exempted)</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.5)</span></p></th> |
| <td><p>Max. extension of fuse_metal beyond fuse boundary</p></td> |
| <td></td> |
| <td><p>0.830</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.6)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and Metal1</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.7)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and LI</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.8)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and poly</p></td> |
| <td></td> |
| <td><p>2.660</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.9)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and tap</p></td> |
| <td></td> |
| <td><p>2.640</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.10)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and diff</p></td> |
| <td></td> |
| <td><p>3.250</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.11)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and nwell</p></td> |
| <td></td> |
| <td><p>3.320</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.12)</span></p></th> |
| <td><p>Size of fuse_shield</p></td> |
| <td></td> |
| <td><p>0.5x2.4</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.13)</span></p></th> |
| <td><p>Min. spacing of center of fuse to fuse_shield</p></td> |
| <td></td> |
| <td><p>2.200</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.14)</span></p></th> |
| <td><p>Max. spacing of center of fuse to fuse_shield</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.15)</span></p></th> |
| <td><p>Fuse_shields are only placed between periphery metal (i.e., without fuse:dg) and non-isolated edges of fuse as defined by mf.16</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.16)</span></p></th> |
| <td><p>The edge of a fuse is considered non-isolated if wider than or equal to mf.2 and spaced to fuse_metal by less than …</p></td> |
| <td></td> |
| <td><p>4.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.17)</span></p></th> |
| <td><p>Offset between fuse_shields center and fuse center</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.18)</span></p></th> |
| <td><p>Min and max space between fuse_shield and fuse_metal (opposite edges). Rule checked within 1 gridpoint.</p></td> |
| <td></td> |
| <td><p>0.600</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.19)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and Metal2</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.20)</span></p></th> |
| <td><p>Only one fuse per metal line allowed</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.21)</span></p></th> |
| <td><p>Min spacing , no overlap, between metal3 and fuse center</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.22)</span></p></th> |
| <td><p>Min spacing between fuse_contact to fuse_contact</p></td> |
| <td></td> |
| <td><p>1.960</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(mf.23)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and Metal4</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(mf.24)</span></p></th> |
| <td><p>Spacing (no overlapping) between fuse center and Metal5</p></td> |
| <td></td> |
| <td><p>3.300</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p046-mf_dotdash.svg"><img alt="../_images/p046-mf_dotdash.svg" src="../_images/p046-mf_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvi"> |
| <h2><span class="drc-rule">(hvi.-)</span><a class="headerlink" href="#hvi" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id41" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines thick oxide for high voltage devices</span><a class="headerlink" href="#id41" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvi.1)</span></p></th> |
| <td><p>Min width of Hvi</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.600</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvi.2a)</span></p></th> |
| <td><p>Min spacing of Hvi to Hvi</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.700</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvi.2b)</span></p></th> |
| <td><p>Manual merge if space is below minimum</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvi.4)</span></p></th> |
| <td><p>Hvi must not overlap tunm</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p047-hvi_dotdash.svg"><img alt="../_images/p047-hvi_dotdash.svg" src="../_images/p047-hvi_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvnwell"> |
| <h2><span class="drc-rule">(hvnwell.-)</span><a class="headerlink" href="#hvnwell" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id42" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines rules for HV nwell; All nwell connected to voltages greater than 1.8V must be enclosed by hvi; Nets connected to LV nwell or nwell overlapping hvi but connected to LV voltages (i.e 1.8V) should be tagged “lv_net” using text.dg; This tag should be only on Li layer</span><a class="headerlink" href="#id42" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvnwell.8)</span></p></th> |
| <td><p>Min space between HV_nwell and any nwell on different nets</p></td> |
| <td></td> |
| <td><p>2.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvnwell.9)</span></p></th> |
| <td><p>(Nwell overlapping hvi) must be enclosed by hvi</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvnwell.10)</span></p></th> |
| <td><p>LVnwell and HnWell should not be on the same net (for the purposes of this check, short the connectivity through resistors); Exempt HnWell with li nets tagged “lv_net” using text.dg and Hnwell connected to nwell overlapping <span class="drc-tag">areaid.hl</span></p></td> |
| <td><p><span class="drc-flag">TC</span></p></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p047-hvnwell_dotdash.svg"><img alt="../_images/p047-hvnwell_dotdash.svg" src="../_images/p047-hvnwell_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvdifftap"> |
| <h2><span class="drc-rule">(hvdifftap.-)</span><a class="headerlink" href="#hvdifftap" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id43" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines rules for HV diff/tap</span><a class="headerlink" href="#id43" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.14)</span></p></th> |
| <td><p>Min width of diff inside Hvi, except HV Pdiff resistors (difftap.14a)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.290</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.14a)</span></p></th> |
| <td><p>Min width of diff inside Hvi, HV Pdiff resistors only</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.150</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.15a)</span></p></th> |
| <td><p>Min space of Hdiff to Hdiff</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.15b)</span></p></th> |
| <td><p>Min space of n+diff to non-abutting p+tap inside Hvi</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.370</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.16)</span></p></th> |
| <td><p>Min width tap butting diff on one or two sides inside Hvi (rule exempted inside UHVI)</p></td> |
| <td></td> |
| <td><p>0.700</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.17)</span></p></th> |
| <td><p>P+ Hdiff or Pdiff inside areaid:hvnwell must be enclosed by Hv_nwell by at least ….[Rule exempted inside UHVI]</p></td> |
| <td><p><span class="drc-flag">DE</span> <span class="drc-flag">NE</span></p></td> |
| <td><p>0.330</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.18)</span></p></th> |
| <td><p>Spacing of N+ diff to HV_nwell (rule exempted inside UHVI)</p></td> |
| <td><p><span class="drc-flag">DE</span> <span class="drc-flag">NE</span></p></td> |
| <td><p>0.430</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.19)</span></p></th> |
| <td><p>N+ Htap must be enclosed by Hv_nwell by at least …Rule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">NE</span></p></td> |
| <td><p>0.330</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.20)</span></p></th> |
| <td><p>Spacing of P+ tap to HV_nwell (Exempted for p+tap butting pwell.rs; rule exempted inside UHVI)</p></td> |
| <td></td> |
| <td><p>0.430</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.21)</span></p></th> |
| <td><p>Diff or tap cannot straddle Hvi</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.22)</span></p></th> |
| <td><p>Min enclosure of Hdiff or Htap by Hvi. Rule exempted inside UHVI.</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.23)</span></p></th> |
| <td><p>Space between diff or tap outside Hvi and Hvi</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.180</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvdifftap.24)</span></p></th> |
| <td><p>Spacing of nwell to N+ Hdiff (rule exempted inside UHVI)</p></td> |
| <td><p><span class="drc-flag">DE</span> <span class="drc-flag">NE</span></p></td> |
| <td><p>0.430</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvdifftap.25)</span></p></th> |
| <td><p>Min space of N+ Hdiff inside HVI across non-abutting P+_tap</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td><p>1.070</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p048-hvdifftap_dotdash.svg"><img alt="../_images/p048-hvdifftap_dotdash.svg" src="../_images/p048-hvdifftap_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvpoly"> |
| <h2><span class="drc-rule">(hvpoly.-)</span><a class="headerlink" href="#hvpoly" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id44" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines rules for HV poly</span><a class="headerlink" href="#id44" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvpoly.13)</span></p></th> |
| <td><p>Min width of poly over diff inside Hvi</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.500</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p049-hvpoly_dotdash.svg"><img alt="../_images/p049-hvpoly_dotdash.svg" src="../_images/p049-hvpoly_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hvntm"> |
| <h2><span class="drc-rule">(hvntm.-)</span><a class="headerlink" href="#hvntm" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id45" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines tip implants for the HV NMOS</span><a class="headerlink" href="#id45" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvntm.X.1 )</span></p></th> |
| <td><p>Hvntm can be drawn inside HVI. Drawn layer will be OR-ed with the CL and rechecked for CLDRC</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvntm.1)</span></p></th> |
| <td><p>Width of hvntm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.700</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvntm.2)</span></p></th> |
| <td><p>Spacing of hvntm to hvntm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.700</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvntm.3)</span></p></th> |
| <td><p>Min. enclosure of (n+_diff inside Hvi) but not overlapping <span class="drc-tag">areaid.ce</span> by hvntm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.185</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvntm.4)</span></p></th> |
| <td><p>Space, no overlap, between n+_diff outside Hvi and hvntm</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.185</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvntm.5)</span></p></th> |
| <td><p>Space, no overlap, between p+_diff and hvntm</p></td> |
| <td><p><span class="drc-flag">P</span> <span class="drc-flag">DE</span></p></td> |
| <td><p>0.185</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvntm.6a)</span></p></th> |
| <td><p>Space, no overlap, between p+_tap and hvntm (except along the diff-butting edge)</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.185</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvntm.6b)</span></p></th> |
| <td><p>Space, no overlap, between p+_tap and hvntm along the diff-butting edge</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hvntm.7)</span></p></th> |
| <td><p>hvntm must enclose ESD_nwell_tap inside hvi by atleast</p></td> |
| <td><p><span class="drc-flag">P</span></p></td> |
| <td><p>0.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hvntm.9)</span></p></th> |
| <td><p>Hvntm must not overlap <span class="drc-tag">areaid.ce</span></p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p049-hvntm_dotdash.svg"><img alt="../_images/p049-hvntm_dotdash.svg" src="../_images/p049-hvntm_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="denmos"> |
| <h2><span class="drc-rule">(denmos.-)</span><a class="headerlink" href="#denmos" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id46" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines rules for the 16V Drain extended NMOS devices</span><a class="headerlink" href="#id46" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.1)</span></p></th> |
| <td><p>Min width of de_nFet_gate</p></td> |
| <td></td> |
| <td><p>1.055</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.2)</span></p></th> |
| <td><p>Min width of de_nFet_source not overlapping poly</p></td> |
| <td></td> |
| <td><p>0.280</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.3)</span></p></th> |
| <td><p>Min width of de_nFet_source overlapping poly</p></td> |
| <td></td> |
| <td><p>0.925</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.4)</span></p></th> |
| <td><p>Min width of the de_nFet_drain</p></td> |
| <td></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.5)</span></p></th> |
| <td><p>Min/Max extension of de_nFet_source over nwell</p></td> |
| <td></td> |
| <td><p>0.225</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.6)</span></p></th> |
| <td><p>Min/Max spacing between de_nFet_drain and de_nFet_source</p></td> |
| <td></td> |
| <td><p>1.585</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.7)</span></p></th> |
| <td><p>Min channel width for de_nFet_gate</p></td> |
| <td></td> |
| <td><p>5.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.8)</span></p></th> |
| <td><p>90 degree angles are not permitted for nwell overlapping de_nFET_drain</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.9a)</span></p></th> |
| <td><p>All bevels on nwell are 45 degree, 0.43 um from corners</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.9b)</span></p></th> |
| <td><p>All bevels on de_nFet_drain are 45 degree, 0.05 um from corners</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.10)</span></p></th> |
| <td><p>Min enclosure of de_nFet_drain by nwell</p></td> |
| <td></td> |
| <td><p>0.660</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.11)</span></p></th> |
| <td><p>Min spacing between p+ tap and (nwell overlapping de_nFet_drain)</p></td> |
| <td></td> |
| <td><p>0.860</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(denmos.12)</span></p></th> |
| <td><p>Min spacing between nwells overlapping de_nFET_drain</p></td> |
| <td></td> |
| <td><p>2.400</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(denmos.13)</span></p></th> |
| <td><p>de_nFet_source must be enclosed by nsdm by</p></td> |
| <td></td> |
| <td><p>0.130</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p050-denmos_dotdash.svg"><img alt="../_images/p050-denmos_dotdash.svg" src="../_images/p050-denmos_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="depmos"> |
| <h2><span class="drc-rule">(depmos.-)</span><a class="headerlink" href="#depmos" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id47" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines rules for the 16V Drain extended NMOS devices</span><a class="headerlink" href="#id47" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.1)</span></p></th> |
| <td><p>Min width of de_pFet_gate</p></td> |
| <td></td> |
| <td><p>1.050</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(depmos.2)</span></p></th> |
| <td><p>Min width of de_pFet_source not overlapping poly</p></td> |
| <td></td> |
| <td><p>0.280</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.3)</span></p></th> |
| <td><p>Min width of de_pFet_source overlapping poly</p></td> |
| <td></td> |
| <td><p>0.920</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(depmos.4)</span></p></th> |
| <td><p>Min width of the de_pFet_drain</p></td> |
| <td></td> |
| <td><p>0.170</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.5)</span></p></th> |
| <td><p>Min/Max extension of de_pFet_source beyond nwell</p></td> |
| <td></td> |
| <td><p>0.260</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(depmos.6)</span></p></th> |
| <td><p>Min/Max spacing between de_pFet_drain and de_pFet_source</p></td> |
| <td></td> |
| <td><p>1.190</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.7)</span></p></th> |
| <td><p>Min channel width for de_pFet_gate</p></td> |
| <td></td> |
| <td><p>5.000</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(depmos.8)</span></p></th> |
| <td><p>90 degree angles are not permitted for nwell hole overlapping de_pFET_drain</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.9a)</span></p></th> |
| <td><p>All bevels on nwell hole are 45 degree, 0.43 um from corners</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(depmos.9b)</span></p></th> |
| <td><p>All bevels on de_pFet_drain are 45 degree, 0.05 um from corners</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.10)</span></p></th> |
| <td><p>Min enclosure of de_pFet_drain by nwell hole</p></td> |
| <td></td> |
| <td><p>0.860</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(depmos.11)</span></p></th> |
| <td><p>Min spacing between n+ tap and (nwell hole enclosing de_pFET_drain)</p></td> |
| <td></td> |
| <td><p>0.660</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(depmos.12)</span></p></th> |
| <td><p>de_pFet_source must be enclosed by psdm by</p></td> |
| <td></td> |
| <td><p>0.130</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p051-depmos_dotdash.svg"><img alt="../_images/p051-depmos_dotdash.svg" src="../_images/p051-depmos_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="extd"> |
| <h2><span class="drc-rule">(extd.-)</span><a class="headerlink" href="#extd" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id48" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines rules <span class="drc-tag">areaid.en</span></span><a class="headerlink" href="#id48" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(extd.1)</span></p></th> |
| <td><p>Difftap cannot straddle areaid:en</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(extd.2)</span></p></th> |
| <td><p>DiffTap must have 2 or 3 coincident edges with areaid:en if enclosed by areaid:en</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(extd.3)</span></p></th> |
| <td><p>Poly must not be entirely overlapping difftap in areaid:en</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(extd.4)</span></p></th> |
| <td><p>Only cell name “s8rf_n20vhv1*” is a valid cell name for n20vhv1 device (Check in LVS as invalid device)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(extd.5)</span></p></th> |
| <td><p>Only cell name “s8rf_n20vhviso1” is a valid cell name for n20vhviso1 device (Check in LVS as invalid device)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(extd.6)</span></p></th> |
| <td><p>Only cell name “s8rf_p20vhv1” is a valid cell name for p20vhv1 device (Check in LVS as invalid device)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(extd.7)</span></p></th> |
| <td><p>Only cell name “s8rf_n20nativevhv1*” is a valid cell name for n20nativevhv1 device (Check in LVS as invalid device)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p052-extd_dotdash.svg"><img alt="../_images/p052-extd_dotdash.svg" src="../_images/p052-extd_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="hv"> |
| <h2><span class="drc-rule">(hv.-.-)</span><a class="headerlink" href="#hv" title="Permalink to this headline">¶</a></h2> |
| <div class="admonition note"> |
| <p class="admonition-title">Note</p> |
| <p>High voltage rule apply for an operating voltage range of 5.5 - 12V; Nodes switching between 0 to 5.5V do not need to follow these rules</p> |
| </div> |
| <table class="colwidths-given docutils align-default" id="id49" style="width: 100%"> |
| <caption><span class="caption-text">Function: Defines High Voltage Rules (FIXME)</span><a class="headerlink" href="#id49" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.X.1)</span></p></th> |
| <td><p>High voltage source/drain regions must be tagged by diff:hv</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.X.3)</span></p></th> |
| <td><p>High voltage poly can be drawn over multiple diff regions that are ALL reverse-biased by at least 300 mV (existence of reverse-bias is not checked by the CAD flow). It can also be drawn over multiple diffs when all sources and all drain are shorted together. In these case, the high voltage poly can be tagged with the text:dg label with a value “hv_bb”. Exceptions to this use of the hv_bb label must be approved by technology. Under certain bias conditions, high voltage poly tagged with hv_bb can cross an nwell boundary. The poly of the drain extended device crosses nwell by construction and can be tagged with the “hv_bb” label. Use of the hv_bb label on high voltage poly crossing an nwell boundary must be approved by technology. All high voltage poly tagged with hv_bb will not be checked to hv.poly.1, hv.poly.2, hv.poly.3 and hv.poly.4.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.X.4)</span></p></th> |
| <td><p>Any piece of layout that is shorted to hv_source/drain becomes a high voltage feature.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.X.5)</span></p></th> |
| <td><p>In cases where an hv poly gate abuts only low voltage source and drain, the poly gate can be tagged with the text:dg label with a value “hv_lv”. In this case, the “hv_lv” tagged poly gate and its extensions will not be checked to hv.poly.6, but is checked by rules in the poly.-.- section. The use of the hv_lv label must be approved by technology.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.X.6)</span></p></th> |
| <td><p>Nwell biased at voltages >= 7.2V must be tagged with text “shv_nwell”</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.nwell.1)</span></p></th> |
| <td><p>Min spacing of nwell tagged with text “shv_nwell” to any nwell on different nets</p></td> |
| <td></td> |
| <td><p>2.500</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.diff.1a)</span></p></th> |
| <td><p>Minimum hv_source/drain spacing to diff for edges of hv_source/drain and diff not butting tap</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.diff.1b)</span></p></th> |
| <td><p>Minimum spacing of (n+/p+ diff resistors and diodes) connected to hv_source/drain to diff</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.diff.2)</span></p></th> |
| <td><p>Minimum spacing of nwell connected to hv_source/drain to n+ diff</p></td> |
| <td><p><span class="drc-flag">DE</span></p></td> |
| <td><p>0.430</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.diff.3a)</span></p></th> |
| <td><p>Minimum n+ hv_source/drain spacing to nwell</p></td> |
| <td></td> |
| <td><p>0.550</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.diff.3b)</span></p></th> |
| <td><p>Minimum spacing of (n+ diff resistors and diodes) connected to hv_source/drain to nwell</p></td> |
| <td></td> |
| <td><p>0.550</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.poly.1)</span></p></th> |
| <td><p>Hv poly feature hvPoly (including hv poly resistors) can be drawn over only one diff region and is not allowed to cross nwell boundary except (1) as allowed in rule .X.3 and (2) nwell hole boundary in depmos</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.poly.2)</span></p></th> |
| <td><p>Min spacing of hvPoly (including hv poly resistor) on field to diff (diff butting hvPoly are excluded)</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.poly.3)</span></p></th> |
| <td><p>Min spacing of hvPoly (including hv poly resistor) on field to n-well (exempt poly stradding nwell in a denmos/depmos)</p></td> |
| <td></td> |
| <td><p>0.550</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.poly.4)</span></p></th> |
| <td><p>Enclosure of hvPoly (including hv poly resistor) on field by n-well (exempt poly stradding nwell in a denmos/depmos)</p></td> |
| <td></td> |
| <td><p>0.300</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.poly.6a)</span></p></th> |
| <td><p>Min extension of poly beyond hvFET_gate (exempt poly extending beyond diff along the S/D direction in a denmos/depmos)</p></td> |
| <td></td> |
| <td><p>0.160</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(hv.poly.6b)</span></p></th> |
| <td><p>Extension of hv poly beyond FET_gate (including hvFET_gate; exempt poly extending beyond diff along the S/D direction in a denmos/depmos)</p></td> |
| <td></td> |
| <td><p>0.160</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(hv.poly.7)</span></p></th> |
| <td><p>Minimum overlap of hv poly ring_FET and diff</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p054-hv_dotdash_dotdash.svg"><img alt="../_images/p054-hv_dotdash_dotdash.svg" src="../_images/p054-hv_dotdash_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="vhvi"> |
| <h2><span class="drc-rule">(vhvi.-.-)</span><a class="headerlink" href="#vhvi" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id50" style="width: 100%"> |
| <caption><span class="caption-text">Function: Identify nets working between 12-16V</span><a class="headerlink" href="#id50" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.vhv.1)</span></p></th> |
| <td><p>Terminals operating at nominal 12V (maximum 16V) bias must be tagged as Very-High-Voltage (VHV) using vhvi:dg layer</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vhvi.vhv.2)</span></p></th> |
| <td><p>A source or drain of a drain-extended device can be tagged by vhvi:dg. A device with either source or drain (not both) tagged with vhvi:dg serves as a VHV propagation stopper</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.vhv.3)</span></p></th> |
| <td><p>Any feature connected to VHVSourceDrain becomes a very-high-voltage feature</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vhvi.vhv.4)</span></p></th> |
| <td><p>Any feature connected to VHVPoly becomes a very-high-voltage feature</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.vhv.5)</span></p></th> |
| <td><p>Diffusion that is not a part of a drain-extended device (i.e., diff not areaid:en) must not be on the same net as VHVSourceDrain. Only diffusion inside <span class="drc-tag">areaid.ed</span> and LV diffusion tagged with vhvi:dg are exempted.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vhvi.vhv.6)</span></p></th> |
| <td><p>Poly resistor can act as a VHV propagation stopper. For this, it should be tagged with text “vhv_block”</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.1.-)</span></p></th> |
| <td><p>Min width of vhvi:dg</p></td> |
| <td></td> |
| <td><p>0.020</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vhvi.2.-)</span></p></th> |
| <td><p>Vhvi:dg cannot overlap areaid:ce</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.3.-)</span></p></th> |
| <td><p>VHVGate must overlap hvi:dg</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vhvi.4.-)</span></p></th> |
| <td><p>Poly connected to the same net as a VHVSourceDrain must be tagged with vhvi:dg layer</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.5.-)</span></p></th> |
| <td><p>Vhvi:dg cannot straddle VHVSourceDrain</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(vhvi.6.-)</span></p></th> |
| <td><p>Vhvi:dg overlapping VHVSourceDrain must not overlap poly</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(vhvi.7.-)</span></p></th> |
| <td><p>Vhvi:dg cannot straddle VHVPoly</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="uhvi"> |
| <h2><span class="drc-rule">(uhvi.-.-)</span><a class="headerlink" href="#uhvi" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id51" style="width: 100%"> |
| <caption><span class="caption-text">Function: Identify nets working between 20V</span><a class="headerlink" href="#id51" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(uhvi.1.-)</span></p></th> |
| <td><p>diff/tap can not straddle UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(uhvi.2.-)</span></p></th> |
| <td><p>poly can not straddle UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(uhvi.3.-)</span></p></th> |
| <td><p>pwbm.dg must be enclosed by UHVI (exempt inside <span class="drc-tag">areaid.lw</span>)</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(uhvi.4.-)</span></p></th> |
| <td><p>dnw.dg can not straddle UHVI</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(uhvi.5.-)</span></p></th> |
| <td><p>UHVI must enclose <span class="drc-tag">areaid.ext</span></p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(uhvi.6.-)</span></p></th> |
| <td><p>UHVI must enclose dnwell</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(uhvi.7.-)</span></p></th> |
| <td><p>natfet.dg must be enclosed by UHVI layer by at least</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(uhvi.8.-)</span></p></th> |
| <td><p>Minimum width of natfet.dg</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(uhvi.9.-)</span></p></th> |
| <td><p>Minimum Space spacing of natfet.dg</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="ulvt"> |
| <h2><span class="drc-rule">(ulvt-.-)</span><a class="headerlink" href="#ulvt" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id52" style="width: 100%"> |
| <caption><span class="caption-text">Function: Identify dnwdiodehv_Psub(BV~60V)</span><a class="headerlink" href="#id52" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(ulvt-.1)</span></p></th> |
| <td><p><span class="drc-tag">areaid.low_vt</span> must enclose dnw for the UHV dnw-psub diode texted “condiodeHvPsub”</p></td> |
| <td></td> |
| <td><p>NA</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(ulvt-.2)</span></p></th> |
| <td><p><span class="drc-tag">areaid.low_vt</span> must enclose pwbm.dg for the UHV dnw-psub diode texted “condiodeHvPsub”</p></td> |
| <td></td> |
| <td><p>NA</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| <div class="section" id="pwres"> |
| <h2><span class="drc-rule">(pwres.-.-)</span><a class="headerlink" href="#pwres" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id53" style="width: 100%"> |
| <caption><span class="caption-text">Function: Identify pwell resistors</span><a class="headerlink" href="#id53" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwres.1.-)</span></p></th> |
| <td><p>Pwell resistor has to be enclosed by the res layer</p></td> |
| <td><p><span class="drc-flag">NC</span></p></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwres.2.-)</span></p></th> |
| <td><p>Min/Max width of pwell resistor</p></td> |
| <td></td> |
| <td><p>2.650</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwres.3.-)</span></p></th> |
| <td><p>Min length of pwell resistor</p></td> |
| <td></td> |
| <td><p>26.500</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwres.4.-)</span></p></th> |
| <td><p>Max length of pwell resistor</p></td> |
| <td></td> |
| <td><p>265.00</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwres.5.-)</span></p></th> |
| <td><p>Min/Max spacing of tap inside the pwell resistor to nwell</p></td> |
| <td></td> |
| <td><p>0.220</p></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwres.6.-)</span></p></th> |
| <td><p>Min/Max width of tap inside the pwell resistor</p></td> |
| <td></td> |
| <td><p>0.530</p></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwres.7a.-)</span></p></th> |
| <td><p>Every pwres_terminal must enclose 12 licon1</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwres.7b.-)</span></p></th> |
| <td><p>Every pwres_terminal must enclose 12 mcons if routed through metal1</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwres.8.-)</span></p></th> |
| <td><p>Diff or poly is not allowed in the pwell resistor.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(pwres.9.-)</span></p></th> |
| <td><p>Nwell surrounding the pwell resistor must have a full ring of contacted tap strapped with metal.</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(pwres.10.-)</span></p></th> |
| <td><p>The res layer must abut pwres_terminal on opposite and parallel edges</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p056-pwres_dotdash_dotdash.svg"><img alt="../_images/p056-pwres_dotdash_dotdash.svg" src="../_images/p056-pwres_dotdash_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| <div class="section" id="rfdiode"> |
| <h2><span class="drc-rule">(rfdiode.-.-)</span><a class="headerlink" href="#rfdiode" title="Permalink to this headline">¶</a></h2> |
| <table class="colwidths-given docutils align-default" id="id54" style="width: 100%"> |
| <caption><span class="caption-text">Function: Identify RF diodes; Used for RCX</span><a class="headerlink" href="#id54" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 10%" /> |
| <col style="width: 75%" /> |
| <col style="width: 5%" /> |
| <col style="width: 10%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head stub"><p><span class="drc-rule">Name</span></p></th> |
| <th class="head"><p>Description</p></th> |
| <th class="head"><p><span class="drc-flag">Flags</span></p></th> |
| <th class="head"><p>Value</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rfdiode.1.-)</span></p></th> |
| <td><p>Only 90 degrees allowed for <span class="drc-tag">areaid.re</span></p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><th class="stub"><p><span class="drc-rule">(rfdiode.2.-)</span></p></th> |
| <td><p><span class="drc-tag">areaid.re</span> must be coincident with nwell for the rf nwell diode</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><th class="stub"><p><span class="drc-rule">(rfdiode.3.-)</span></p></th> |
| <td><dl class="simple"> |
| <dt><span class="drc-tag">areaid.re</span> must be coincident with innwer edge of the nwell ring for the rf pwell-deep nwell diode</dt><dd><p>Allowed PNP layout |
| Layout: pnppar |
| Allowed NPN layout</p> |
| </dd> |
| </dl> |
| </td> |
| <td></td> |
| <td></td> |
| </tr> |
| </tbody> |
| </table> |
| <div class="figure align-center"> |
| <a class="reference internal image-reference" href="../_images/p057-rfdiode_dotdash_dotdash.svg"><img alt="../_images/p057-rfdiode_dotdash_dotdash.svg" src="../_images/p057-rfdiode_dotdash_dotdash.svg" width="100%" /></a> |
| </div> |
| </div> |
| </div> |
| |
| |
| </div> |
| <div class="side-doc-outline"> |
| <div class="side-doc-outline--content"> |
| <div class="localtoc"> |
| <p class="caption"> |
| <span class="caption-text">Table Of Contents</span> |
| </p> |
| <ul> |
| <li><a class="reference internal" href="#">Periphery Rules</a><ul> |
| <li><a class="reference internal" href="#x"><span class="drc-rule">(x.-)</span></a></li> |
| <li><a class="reference internal" href="#dnwell"><span class="drc-rule">(dnwell.-)</span></a></li> |
| <li><a class="reference internal" href="#nwell"><span class="drc-rule">(nwell.-)</span></a></li> |
| <li><a class="reference internal" href="#pwbm"><span class="drc-rule">(pwbm.-)</span></a></li> |
| <li><a class="reference internal" href="#pwdem"><span class="drc-rule">(pwdem.-)</span></a></li> |
| <li><a class="reference internal" href="#hvtp"><span class="drc-rule">(hvtp.-)</span></a></li> |
| <li><a class="reference internal" href="#hvtr"><span class="drc-rule">(hvtr.-)</span></a></li> |
| <li><a class="reference internal" href="#lvtn"><span class="drc-rule">(lvtn.-)</span></a></li> |
| <li><a class="reference internal" href="#ncm"><span class="drc-rule">(ncm.-)</span></a></li> |
| <li><a class="reference internal" href="#difftap"><span class="drc-rule">(difftap.-)</span></a></li> |
| <li><a class="reference internal" href="#tunm"><span class="drc-rule">(tunm.-)</span></a></li> |
| <li><a class="reference internal" href="#poly"><span class="drc-rule">(poly.-)</span></a></li> |
| <li><a class="reference internal" href="#rpm"><span class="drc-rule">(rpm.-)</span></a></li> |
| <li><a class="reference internal" href="#varac"><span class="drc-rule">(varac.-)</span></a></li> |
| <li><a class="reference internal" href="#photo"><span class="drc-rule">(photo.-)</span></a></li> |
| <li><a class="reference internal" href="#npc"><span class="drc-rule">(npc.-)</span></a></li> |
| <li><a class="reference internal" href="#n-psd"><span class="drc-rule">(n/ psd.-)</span></a></li> |
| <li><a class="reference internal" href="#licon"><span class="drc-rule">(licon.-)</span></a></li> |
| <li><a class="reference internal" href="#li"><span class="drc-rule">(li.-.-)</span></a></li> |
| <li><a class="reference internal" href="#ct"><span class="drc-rule">(ct.-)</span></a></li> |
| <li><a class="reference internal" href="#capm"><span class="drc-rule">(capm.-)</span></a></li> |
| <li><a class="reference internal" href="#vpp"><span class="drc-rule">(vpp.-)</span></a></li> |
| <li><a class="reference internal" href="#m1"><span class="drc-rule">(m1.-)</span></a></li> |
| <li><a class="reference internal" href="#via"><span class="drc-rule">(via.-)</span></a></li> |
| <li><a class="reference internal" href="#m2"><span class="drc-rule">(m2.-)</span></a></li> |
| <li><a class="reference internal" href="#via2"><span class="drc-rule">(via2.-)</span></a></li> |
| <li><a class="reference internal" href="#m3"><span class="drc-rule">(m3.-)</span></a></li> |
| <li><a class="reference internal" href="#via3"><span class="drc-rule">(via3.-)</span></a></li> |
| <li><a class="reference internal" href="#nsm"><span class="drc-rule">(nsm.-)</span></a></li> |
| <li><a class="reference internal" href="#indm"><span class="drc-rule">(indm.-)</span></a></li> |
| <li><a class="reference internal" href="#m4"><span class="drc-rule">(m4.-)</span></a></li> |
| <li><a class="reference internal" href="#via4"><span class="drc-rule">(via4.-)</span></a></li> |
| <li><a class="reference internal" href="#m5"><span class="drc-rule">(m5.-)</span></a></li> |
| <li><a class="reference internal" href="#pad"><span class="drc-rule">(pad.-)</span></a></li> |
| <li><a class="reference internal" href="#rdl"><span class="drc-rule">(rdl.-)</span></a></li> |
| <li><a class="reference internal" href="#mf"><span class="drc-rule">(mf.-)</span></a></li> |
| <li><a class="reference internal" href="#hvi"><span class="drc-rule">(hvi.-)</span></a></li> |
| <li><a class="reference internal" href="#hvnwell"><span class="drc-rule">(hvnwell.-)</span></a></li> |
| <li><a class="reference internal" href="#hvdifftap"><span class="drc-rule">(hvdifftap.-)</span></a></li> |
| <li><a class="reference internal" href="#hvpoly"><span class="drc-rule">(hvpoly.-)</span></a></li> |
| <li><a class="reference internal" href="#hvntm"><span class="drc-rule">(hvntm.-)</span></a></li> |
| <li><a class="reference internal" href="#denmos"><span class="drc-rule">(denmos.-)</span></a></li> |
| <li><a class="reference internal" href="#depmos"><span class="drc-rule">(depmos.-)</span></a></li> |
| <li><a class="reference internal" href="#extd"><span class="drc-rule">(extd.-)</span></a></li> |
| <li><a class="reference internal" href="#hv"><span class="drc-rule">(hv.-.-)</span></a></li> |
| <li><a class="reference internal" href="#vhvi"><span class="drc-rule">(vhvi.-.-)</span></a></li> |
| <li><a class="reference internal" href="#uhvi"><span class="drc-rule">(uhvi.-.-)</span></a></li> |
| <li><a class="reference internal" href="#ulvt"><span class="drc-rule">(ulvt-.-)</span></a></li> |
| <li><a class="reference internal" href="#pwres"><span class="drc-rule">(pwres.-.-)</span></a></li> |
| <li><a class="reference internal" href="#rfdiode"><span class="drc-rule">(rfdiode.-.-)</span></a></li> |
| </ul> |
| </li> |
| </ul> |
| |
| </div> |
| </div> |
| </div> |
| |
| <div class="clearer"></div> |
| </div><div class="pagenation"> |
| <a id="button-prev" href="core.html" class="mdl-button mdl-js-button mdl-js-ripple-effect mdl-button--colored" role="botton" accesskey="P"> |
| <i class="pagenation-arrow-L material-icons">arrow_back</i> |
| <div class="pagenation-text"> |
| <span class="pagenation-direction">Previous</span> |
| <div>TODO: rules/core</div> |
| </div> |
| </a> |
| <a id="button-next" href="dummy.html" class="mdl-button mdl-js-button mdl-js-ripple-effect mdl-button--colored" role="botton" accesskey="N"> |
| <i class="pagenation-arrow-R material-icons">arrow_forward</i> |
| <div class="pagenation-text"> |
| <span class="pagenation-direction">Next</span> |
| <div>TODO: rules/dummy</div> |
| </div> |
| </a> |
| </div> |
| <footer class="mdl-mini-footer"> |
| <div class="mdl-mini-footer__left-section"> |
| <div class="mdl-logo">SkyWater SKY130 PDK</div> |
| <div> |
| |
| <ul class="current"> |
| <li class="toctree-l1 current"><a class="reference internal" href="../rules.html">Process Design Rules</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../contents.html">PDK Contents</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../verification.html">Physical & Design Verification</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../analog.html">Analog Design</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../digital.html">Digital Design</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../sim.html">Simulation</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../glossary.html">Glossary</a></li> |
| <li class="toctree-l1"><a class="reference internal" href="../previous.html">Previous Nomenclature</a></li> |
| </ul> |
| |
| </div> |
| </div> |
| |
| <div class="mdl-mini-footer__right-section"> |
| <div>© Copyright 2020, SkyWater PDK Authors.</div> |
| <div>Generated by <a href="http://sphinx.pocoo.org/">Sphinx</a> 3.1.1 using <a href="https://github.com/SymbiFlow/sphinx_symbiflow_theme">sphinx_symbiflow_theme</a>.</div> |
| </div> |
| </footer> |
| </main> |
| </div> |
| </body> |
| </html> |