| <!DOCTYPE html> |
| |
| <html> |
| <head> |
| <meta charset="utf-8" /> |
| <meta charset="utf-8"> |
| <meta name="viewport" content="width=device-width, initial-scale=1, shrink-to-fit=no"> |
| <meta http-equiv="x-ua-compatible" content="ie=edge"> |
| |
| <title>Section B: Design Rule Criteria & Assumptions — Skywater SKY130 PDK 0.0-114-g3190b82 documentation</title> |
| |
| <link rel="stylesheet" href="../_static/material-icons.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/pygments.css" type="text/css" /> |
| <link rel="stylesheet" type="text/css" href="../_static/extra.css" /> |
| <link rel="stylesheet" href="../_static/notosanscjkjp.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/roboto.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/material-design-lite-1.3.0/material.light_green-teal.min.css" type="text/css" /> |
| <link rel="stylesheet" href="../_static/sphinx_symbiflow_theme.css" type="text/css" /> |
| <script id="documentation_options" data-url_root="../" src="../_static/documentation_options.js"></script> |
| <script src="../_static/jquery.js"></script> |
| <script src="../_static/underscore.js"></script> |
| <script src="../_static/doctools.js"></script> |
| <script src="../_static/language_data.js"></script> |
| <script src="../_static/sphinx_symbiflow_theme.js"></script> |
| <link rel="index" title="Index" href="../genindex.html" /> |
| <link rel="search" title="Search" href="../search.html" /> |
| <link rel="next" title="TODO: rules/define" href="define.html" /> |
| <link rel="prev" title="Background" href="background.html" /> |
| </head> |
| <body> |
| <div class="mdl-layout mdl-js-layout mdl-layout--fixed-header mdl-layout--fixed-drawer"><header class="mdl-layout__header mdl-layout__header--waterfall "> |
| <div class="mdl-layout__header-row"> |
| |
| <nav class="mdl-navigation breadcrumb"> |
| <a class="mdl-navigation__link" href="../rules.html">SkyWater SKY130 Process Design Rules</a><i class="material-icons">navigate_next</i> |
| <a class="mdl-navigation__link is-active">Section B: Design Rule Criteria & Assumptions</a> |
| </nav> |
| <div class="mdl-layout-spacer"></div> |
| <nav class="mdl-navigation"> |
| |
| <form class="form-inline pull-sm-right" action="../search.html" method="get"> |
| <div class="mdl-textfield mdl-js-textfield mdl-textfield--expandable mdl-textfield--floating-label mdl-textfield--align-right"> |
| <label id="quick-search-icon" class="mdl-button mdl-js-button mdl-button--icon" for="waterfall-exp"> |
| <i class="material-icons">search</i> |
| </label> |
| <div class="mdl-textfield__expandable-holder"> |
| <input class="mdl-textfield__input" type="text" name="q" id="waterfall-exp" placeholder="Search" /> |
| <input type="hidden" name="check_keywords" value="yes" /> |
| <input type="hidden" name="area" value="default" /> |
| </div> |
| </div> |
| <div class="mdl-tooltip" data-mdl-for="quick-search-icon"> |
| Quick search |
| </div> |
| </form> |
| |
| <a id="button-show-source" |
| class="mdl-button mdl-js-button mdl-button--icon" |
| href="../_sources/rules/assumptions.rst.txt" rel="nofollow"> |
| <i class="material-icons">code</i> |
| </a> |
| <div class="mdl-tooltip" data-mdl-for="button-show-source"> |
| Show Source |
| </div> |
| </nav> |
| </div> |
| <div class="mdl-layout__header-row header-links"> |
| <div class="mdl-layout-spacer"></div> |
| <nav class="mdl-navigation"> |
| <a class="mdl-navigation__link" href="../index.html"> |
| <i class="material-icons navigation-link-icon">home</i> |
| Home |
| </a> |
| |
| <a class="mdl-navigation__link" href="https://github.com/google/skywater-pdk"> |
| <i class="material-icons navigation-link-icon">link</i> |
| GitHub |
| </a> |
| |
| <a class="mdl-navigation__link" href="https://www.skywatertechnology.com/"> |
| <i class="material-icons navigation-link-icon">link</i> |
| SkyWater |
| </a> |
| </nav> |
| </div> |
| </header><header class="mdl-layout__drawer"> |
| |
| <!-- Title --> |
| <span class="mdl-layout-title"> |
| <a class="title" href="../index.html"> |
| <span class="title-text"> |
| Skywater SKY130 PDK |
| </span> |
| </a> |
| </span> |
| |
| <div class="globaltoc"> |
| <span class="mdl-layout-title toc">Table Of Contents</span> |
| |
| |
| |
| <nav class="mdl-navigation"> |
| <ul class="current"> |
| <li class="toctree-l1 current"><a class="reference internal" href="../rules.html">Process Design Rules</a><ul class="current"> |
| <li class="toctree-l2"><a class="reference internal" href="background.html">Introduction</a></li> |
| <li class="toctree-l2 current"><a class="current reference internal" href="#">Design Rule Criteria & Assumptions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="define.html">Device, LVS and other CAD definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity.html">Device and Connectivity Information</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/lvs.html">TODO: rules/connectivity/lvs</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/impant.html">TODO: rules/connectivity/impant</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/table.html">TODO: rules/connectivity/table</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="core.html">Core Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="periphery.html">Periphery Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="dummy.html">Dummy Poly Generation to reduce Litr-Poly shorts</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="areaid.html">TODO: rules/areaid</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="antenna.html">Antenna Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="opc.html">OPC sizing/verification procedure</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="cad.html">CAD switches, created layer algorithms</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="waffles.html">Created Layer dummy structures ("waffles")</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html">Purpose/Scope</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#critical-requirements-summary">Critical Requirements Summary</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#operating-procedures-and-responsibilities">Operating Procedures and Responsibilities</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#quality-requirements">Quality Requirements</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#mtdr-cad-definitions">MTDR & CAD Definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="latchup.html">Latch-up Design Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="misc.html">Misc Design Rules</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../contents.html">PDK Contents</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/libraries.html">Libraries</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span> (version 0.0.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-26">V0.1.0 Updates and Known Limitations (2018/04/26)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span> (version 0.0.1) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-figures">List of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-tables">List of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#previous-releases">Previous Releases</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-25">V0.1.0 Updates and Known Limitations (2018/04/25)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-1-updates-and-known-limitations-2019-03-28">V0.0.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-0-updates-and-known-limitations-2018-03-30">V0.0.0 Updates and Known Limitations (2018/03/30)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_osu_sc/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">osu</span><span>_</span><span class="lib-type">sc</span> Oklahoma State University Standard Cells</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">fmlt</span> - SKY130 Flash Build Space</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#v0-1-1-updates-and-known-limitations">V0.1.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_sram/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">sram</span> - SKY130 SRAM Build Space</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> - SkyWater Foundry provided IO cells</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_io/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> (version 0.2.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_ef_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">ef</span><span>_</span><span class="lib-type">io</span> - Efabless created IO cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/file_types.html">File Types</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../verification.html">Physical & Design Verification</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">Automated Design Rule (DRC) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">Layout Versus Schematic (LVS) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">Parasitic Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">SkyWater SKY130 Design Rule Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">SkyWater SKY130 Layout verse Schematic (LVS) Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">SkyWater SKY130 Parasitics Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../analog.html">Analog Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/virtuoso.html">With Cadence Virtuoso</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/magic.html">With MAGIC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/klayout.html">With Klayout</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/bag.html">With Berkeley Analog Generator (BAG)</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/fasoc.html">With FASoC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../digital.html">Digital Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/innovus.html">With Cadence Innovus</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/openroad.html">With OpenROAD</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../sim.html">Simulation</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/spectre.html">With Cadence Spectre</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/ngspice.html">With ngspice</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../glossary.html">Glossary</a></li> |
| <li class="toctree-l1"><a class="reference internal" href="../previous.html">Previous Nomenclature</a></li> |
| </ul> |
| |
| </nav> |
| |
| </div> |
| |
| </header> |
| <main class="mdl-layout__content" tabIndex="0"> |
| <header class="mdl-layout__drawer"> |
| |
| <!-- Title --> |
| <span class="mdl-layout-title"> |
| <a class="title" href="../index.html"> |
| <span class="title-text"> |
| Skywater SKY130 PDK |
| </span> |
| </a> |
| </span> |
| |
| <div class="globaltoc"> |
| <span class="mdl-layout-title toc">Table Of Contents</span> |
| |
| |
| |
| <nav class="mdl-navigation"> |
| <ul class="current"> |
| <li class="toctree-l1 current"><a class="reference internal" href="../rules.html">Process Design Rules</a><ul class="current"> |
| <li class="toctree-l2"><a class="reference internal" href="background.html">Introduction</a></li> |
| <li class="toctree-l2 current"><a class="current reference internal" href="#">Design Rule Criteria & Assumptions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="define.html">Device, LVS and other CAD definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity.html">Device and Connectivity Information</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/lvs.html">TODO: rules/connectivity/lvs</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/impant.html">TODO: rules/connectivity/impant</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="connectivity/table.html">TODO: rules/connectivity/table</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="core.html">Core Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="periphery.html">Periphery Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="dummy.html">Dummy Poly Generation to reduce Litr-Poly shorts</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="areaid.html">TODO: rules/areaid</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="antenna.html">Antenna Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="opc.html">OPC sizing/verification procedure</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="cad.html">CAD switches, created layer algorithms</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="waffles.html">Created Layer dummy structures ("waffles")</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html">Purpose/Scope</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#critical-requirements-summary">Critical Requirements Summary</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#operating-procedures-and-responsibilities">Operating Procedures and Responsibilities</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#quality-requirements">Quality Requirements</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="esd.html#mtdr-cad-definitions">MTDR & CAD Definitions</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="latchup.html">Latch-up Design Rules</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="misc.html">Misc Design Rules</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../contents.html">PDK Contents</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/libraries.html">Libraries</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_base/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">base</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_pr_rf2/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">pr</span><span>_</span><span class="lib-name">rf2</span> (version 0.20.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hd/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hd</span> (version 0.0.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hdll</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-26">V0.1.0 Updates and Known Limitations (2018/04/26)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hdll/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hs</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hs/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">hvl</span> (version 0.0.1) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-figures">List of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#list-of-tables">List of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_hvl/release_notes.html#previous-releases">Previous Releases</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">lp</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-1-updates-and-known-limitations">V0.0.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#v0-0-0-updates-and-known-limitations">V0.0.0 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_lp/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ls</span> (version 0.1.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-1-updates-and-known-limitations-2019-03-28">V0.1.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#v0-1-0-updates-and-known-limitations-2018-04-25">V0.1.0 Updates and Known Limitations (2018/04/25)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ls/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span></a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sc</span><span>_</span><span class="lib-name">ms</span> (version 0.0.0) cells</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-figures">Table of Figures</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-1-updates-and-known-limitations-2019-03-28">V0.0.1 Updates and Known Limitations (2019/03/28)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#v0-0-0-updates-and-known-limitations-2018-03-30">V0.0.0 Updates and Known Limitations (2018/03/30)</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#ip-usage">IP Usage</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sc_ms/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_osu_sc/README.html"><span class="lib-process">sky130</span><span>_</span><span class="lib-src">osu</span><span>_</span><span class="lib-type">sc</span> Oklahoma State University Standard Cells</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">fmlt</span> - SKY130 Flash Build Space</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html">Table of Contents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#table-of-tables">Table of Tables</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#revision-history">Revision History</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#reference-documents">Reference Documents</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#v0-1-1-updates-and-known-limitations">V0.1.1 Updates and Known Limitations</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#overview">Overview</a></li> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_fmlt/release_notes.html#digital-pdk">Digital PDK</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_sp_sram/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">sp</span><span>_</span><span class="lib-name">sram</span> - SKY130 SRAM Build Space</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_fd_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> - SkyWater Foundry provided IO cells</a><ul> |
| <li class="toctree-l4"><a class="reference internal" href="../contents/libraries/sky130_fd_io/cells/README.html">Index of <span class="lib-process">sky130</span><span>_</span><span class="lib-src">fd</span><span>_</span><span class="lib-type">io</span> (version 0.2.1) cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l3"><a class="reference internal" href="../contents/libraries/sky130_ef_io/README.html">TODO: <span class="lib-process">sky130</span><span>_</span><span class="lib-src">ef</span><span>_</span><span class="lib-type">io</span> - Efabless created IO cells</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../contents/file_types.html">File Types</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../verification.html">Physical & Design Verification</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">Automated Design Rule (DRC) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">Layout Versus Schematic (LVS) Checking</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">Parasitic Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/drc.html">SkyWater SKY130 Design Rule Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/calibre.html">DRC</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/magic.html">TODO: verification/drc/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/drc/klayout.html">TODO: verification/drc/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/lvs.html">SkyWater SKY130 Layout verse Schematic (LVS) Verification</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/calibre.html">LVS</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/magic.html">TODO: verification/lvs/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/lvs/klayout.html">TODO: verification/lvs/klayout</a></li> |
| </ul> |
| </li> |
| <li class="toctree-l2"><a class="reference internal" href="../verification/pex.html">SkyWater SKY130 Parasitics Extraction (PEX)</a><ul> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/calibre.html">PEX</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/magic.html">TODO: verification/pex/magic</a></li> |
| <li class="toctree-l3"><a class="reference internal" href="../verification/pex/klayout.html">TODO: verification/pex/klayout</a></li> |
| </ul> |
| </li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../analog.html">Analog Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/virtuoso.html">With Cadence Virtuoso</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/magic.html">With MAGIC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/klayout.html">With Klayout</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/bag.html">With Berkeley Analog Generator (BAG)</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/fasoc.html">With FASoC</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../digital.html">Digital Design</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/innovus.html">With Cadence Innovus</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../digital/openroad.html">With OpenROAD</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../sim.html">Simulation</a><ul> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/spectre.html">With Cadence Spectre</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../sim/ngspice.html">With ngspice</a></li> |
| <li class="toctree-l2"><a class="reference internal" href="../analog/new.html">With your design flow?</a></li> |
| </ul> |
| </li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../glossary.html">Glossary</a></li> |
| <li class="toctree-l1"><a class="reference internal" href="../previous.html">Previous Nomenclature</a></li> |
| </ul> |
| |
| </nav> |
| |
| </div> |
| |
| </header> |
| |
| <div class="document"> |
| <div class="page-content"> |
| |
| <div class="section" id="section-b-design-rule-criteria-assumptions"> |
| <h1>Section B: Design Rule Criteria & Assumptions<a class="headerlink" href="#section-b-design-rule-criteria-assumptions" title="Permalink to this headline">¶</a></h1> |
| <table class="docutils align-default" id="id3"> |
| <caption><span class="caption-text">1. General</span><a class="headerlink" href="#id3" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Parameter</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Value</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Space to Draw</p></td> |
| <td></td> |
| <td></td> |
| <td><p>S8</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><td><p>Grid Size - Drawn</p></td> |
| <td></td> |
| <td><p>um</p></td> |
| <td><p>0.005</p></td> |
| <td></td> |
| <td><p>GSF</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Approximate Scale Factor for R32 data</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td></td> |
| <td><p>sfr32</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id4"> |
| <caption><span class="caption-text">2. Minimum CDs in Design or on Wafer, Required by Technology (Core or Periphery)</span><a class="headerlink" href="#id4" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Layer Name</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Feature Size</p></th> |
| <th class="head"><p>Space Size</p></th> |
| <th class="head"><p>Feature Name</p></th> |
| <th class="head"><p>Space Name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Field Oxide</p></td> |
| <td></td> |
| <td><p>0.14</p></td> |
| <td><p>0.27</p></td> |
| <td><p>FOMCD</p></td> |
| <td><p>FOMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Deep N-Well</p></td> |
| <td></td> |
| <td><p>3</p></td> |
| <td><p>6.3</p></td> |
| <td><p>DNMCD</p></td> |
| <td><p>DNMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>P-Well Block Mask</p></td> |
| <td></td> |
| <td><p>0.84</p></td> |
| <td><p>1.27</p></td> |
| <td><p>PWBMCD</p></td> |
| <td><p>PWBMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>P-Well Drain Extended</p></td> |
| <td></td> |
| <td><p>0.84</p></td> |
| <td><p>1.27</p></td> |
| <td><p>PWDEMCD</p></td> |
| <td><p>PWDEMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>N-Well</p></td> |
| <td></td> |
| <td><p>0.84</p></td> |
| <td><p>1.27</p></td> |
| <td><p>NWMCD</p></td> |
| <td><p>NWMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>High Vt PCh</p></td> |
| <td></td> |
| <td><p>0.38</p></td> |
| <td><p>0.38</p></td> |
| <td><p>HVTPMCD</p></td> |
| <td><p>HVTPMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Low Vt Nch</p></td> |
| <td></td> |
| <td><p>0.38</p></td> |
| <td><p>0.38</p></td> |
| <td><p>LVTNMCD</p></td> |
| <td><p>LVTNMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>HLow VT PCh Radio</p></td> |
| <td></td> |
| <td><p>0.38</p></td> |
| <td><p>0.38</p></td> |
| <td><p>HVTRMCD</p></td> |
| <td><p>HVTRMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>N-Core Implant</p></td> |
| <td></td> |
| <td><p>0.38</p></td> |
| <td><p>0.38</p></td> |
| <td><p>NCMCD</p></td> |
| <td><p>NCMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Tunnel Mask</p></td> |
| <td></td> |
| <td><p>0.41</p></td> |
| <td><p>0.5</p></td> |
| <td><p>TUNMCD</p></td> |
| <td><p>TUNMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>ONO Mask</p></td> |
| <td></td> |
| <td><p>0.41</p></td> |
| <td><p>0.5</p></td> |
| <td><p>ONOMCD</p></td> |
| <td><p>ONOMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Low Voltage Oxide</p></td> |
| <td></td> |
| <td><p>0.6</p></td> |
| <td><p>0.7</p></td> |
| <td><p>LVOMCD</p></td> |
| <td><p>LVOMCDSPCSMC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Resistor Protect</p></td> |
| <td></td> |
| <td><p>1.27</p></td> |
| <td><p>0.84</p></td> |
| <td><p>RPMCD</p></td> |
| <td><p>RPMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Poly 1</p></td> |
| <td><p>Endcap/Gap</p></td> |
| <td><p>0.15</p></td> |
| <td><p>0.21</p></td> |
| <td><p>P1G</p></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><td><p>Poly 1</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| <td><p>0.14</p></td> |
| <td><p>P1MCD</p></td> |
| <td><p>P1MCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>N-tip Implant</p></td> |
| <td></td> |
| <td><p>0.84</p></td> |
| <td><p>0.7</p></td> |
| <td><p>NTMCD</p></td> |
| <td><p>NTMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>High Volt. N-tip</p></td> |
| <td></td> |
| <td><p>0.7</p></td> |
| <td><p>0.7</p></td> |
| <td><p>HVNTMCD</p></td> |
| <td><p>HVNTMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Lightly Doped N-tip</p></td> |
| <td></td> |
| <td><p>0.7</p></td> |
| <td><p>0.7</p></td> |
| <td><p>LDNTMCD</p></td> |
| <td><p>LDNTMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Nitride Poly Cut</p></td> |
| <td></td> |
| <td><p>0.27</p></td> |
| <td><p>0.27</p></td> |
| <td><p>NPCMCD</p></td> |
| <td><p>NPCMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>P+ Implant</p></td> |
| <td></td> |
| <td><p>0.38</p></td> |
| <td><p>0.38</p></td> |
| <td><p>PSDMCD</p></td> |
| <td><p>PSDMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>N+ Implant</p></td> |
| <td></td> |
| <td><p>0.38</p></td> |
| <td><p>0.38</p></td> |
| <td><p>NSDMCD</p></td> |
| <td><p>NSDMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Local Intr Cont.1</p></td> |
| <td><p>Slotted</p></td> |
| <td><p>0.17</p></td> |
| <td><p>0.17</p></td> |
| <td><p>LICM1SLCD</p></td> |
| <td><p>LICM1SLCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Local Intr Cont.1</p></td> |
| <td><p>Core</p></td> |
| <td><p>0.19</p></td> |
| <td><p>0.35</p></td> |
| <td><p>LICM1CD</p></td> |
| <td><p>LICM1CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Local Intrcnct 1</p></td> |
| <td><p>Core</p></td> |
| <td><p>0.14</p></td> |
| <td><p>0.14</p></td> |
| <td><p>LI1MCD</p></td> |
| <td><p>LI1MCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Local Intrcnct 1</p></td> |
| <td></td> |
| <td><p>0.17</p></td> |
| <td><p>0.17</p></td> |
| <td><p>LI1MCD</p></td> |
| <td><p>LI1MCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Contact</p></td> |
| <td></td> |
| <td><p>0.17</p></td> |
| <td><p>0.19</p></td> |
| <td><p>CTM1CD</p></td> |
| <td><p>CTM1CDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Open Frame Mask</p></td> |
| <td></td> |
| <td><p>N/A</p></td> |
| <td><p>N/A</p></td> |
| <td><p>OFMCD</p></td> |
| <td><p>OFMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 1</p></td> |
| <td></td> |
| <td><p>0.14</p></td> |
| <td><p>0.14</p></td> |
| <td><p>MM1CD</p></td> |
| <td><p>MM1CDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 1 - Cu</p></td> |
| <td></td> |
| <td><p>0.14</p></td> |
| <td><p>0.14</p></td> |
| <td><p>MM1_CuCD</p></td> |
| <td><p>MM1_CuCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Via</p></td> |
| <td></td> |
| <td><p>0.15</p></td> |
| <td><p>0.17</p></td> |
| <td><p>VIMCD</p></td> |
| <td><p>VIMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Via - Cu</p></td> |
| <td></td> |
| <td><p>0.18</p></td> |
| <td><p>0.13</p></td> |
| <td><p>VIM_CuCD</p></td> |
| <td><p>VIM_CuCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Capacitor MiM</p></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td><p>0.84</p></td> |
| <td><p>CAPMCD</p></td> |
| <td><p>CAPMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 2</p></td> |
| <td></td> |
| <td><p>0.14</p></td> |
| <td><p>0.14</p></td> |
| <td><p>MM2CD</p></td> |
| <td><p>MM2CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 2 - Cu</p></td> |
| <td></td> |
| <td><p>0.14</p></td> |
| <td><p>0.14</p></td> |
| <td><p>MM2_CuCD</p></td> |
| <td><p>MM2_CuCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Via 2-TNV</p></td> |
| <td></td> |
| <td><p>0.28</p></td> |
| <td><p>0.28</p></td> |
| <td><p>VIM2CD</p></td> |
| <td><p>VIM2CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Via 2-S8TM</p></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td><p>0.8</p></td> |
| <td><p>VIM2CD</p></td> |
| <td><p>VIM2CDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Via 2-PLM</p></td> |
| <td></td> |
| <td><p>0.2</p></td> |
| <td><p>0.2</p></td> |
| <td><p>VIM2CD</p></td> |
| <td><p>VIM2CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Via 2-Cu</p></td> |
| <td></td> |
| <td><p>0.21</p></td> |
| <td><p>0.18</p></td> |
| <td><p>VIM2_CuCD</p></td> |
| <td><p>VIM2_CuCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 3-TLM</p></td> |
| <td></td> |
| <td><p>0.36</p></td> |
| <td><p>0.36</p></td> |
| <td><p>MM3CD</p></td> |
| <td><p>MM3CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 3-S8TM</p></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td><p>0.8</p></td> |
| <td><p>MM3CD</p></td> |
| <td><p>MM3CDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 3-PLM</p></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td><p>0.3</p></td> |
| <td><p>MM3CD</p></td> |
| <td><p>MM3CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 3-Cu</p></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td><p>0.3</p></td> |
| <td><p>MM3_CuCD</p></td> |
| <td><p>MM3_CuCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Pad Via</p></td> |
| <td></td> |
| <td><p>1.2</p></td> |
| <td><p>1.27</p></td> |
| <td><p>VIPDMCD</p></td> |
| <td><p>VIPDMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Via3-PLM</p></td> |
| <td></td> |
| <td><p>0.2</p></td> |
| <td><p>0.2</p></td> |
| <td><p>VIM3CD</p></td> |
| <td><p>VIM3CDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Via3-Cu</p></td> |
| <td></td> |
| <td><p>0.21</p></td> |
| <td><p>0.18</p></td> |
| <td><p>VIM3_CuCD</p></td> |
| <td><p>VIM3_CuCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Inductor-TLM</p></td> |
| <td></td> |
| <td><p>2.5</p></td> |
| <td><p>2.5</p></td> |
| <td><p>INDMCD</p></td> |
| <td><p>INDMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 4</p></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td><p>0.3</p></td> |
| <td><p>MM4CD</p></td> |
| <td><p>MM4CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 4-Cu</p></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td><p>0.3</p></td> |
| <td><p>MM4_CuCD</p></td> |
| <td><p>MM4_CuCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Via4</p></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td><p>0.8</p></td> |
| <td><p>VIM4CD</p></td> |
| <td><p>VIM4CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 5</p></td> |
| <td><p>All flows except S8PF*/S8PIR*</p></td> |
| <td><p>0.8</p></td> |
| <td><p>0.8</p></td> |
| <td><p>MM5CD</p></td> |
| <td><p>MM5CDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 5</p></td> |
| <td><p>S8PF*/S8PIR*</p></td> |
| <td><p>1.6</p></td> |
| <td><p>1.6</p></td> |
| <td><p>MM5CD</p></td> |
| <td><p>MM5CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Nitride Seal Mask</p></td> |
| <td></td> |
| <td><p>3</p></td> |
| <td><p>4</p></td> |
| <td><p>NSMCD</p></td> |
| <td><p>NSMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Pad (scribe protect)</p></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td><p>1.27</p></td> |
| <td><p>PDMCD</p></td> |
| <td><p>PDMCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Polyimide</p></td> |
| <td></td> |
| <td><p>5</p></td> |
| <td><p>15</p></td> |
| <td><p>PMMCD</p></td> |
| <td><p>PMMCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Polyimide_ExtFab</p></td> |
| <td></td> |
| <td><p>5</p></td> |
| <td><p>15</p></td> |
| <td><p>PMM[E]CD</p></td> |
| <td><p>PMM[E]CDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>DECA PBO</p></td> |
| <td></td> |
| <td><p>10</p></td> |
| <td><p>10</p></td> |
| <td><p>PBOCD</p></td> |
| <td><p>PBOCDSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Cu Inductor/Redist.</p></td> |
| <td></td> |
| <td><p>20</p></td> |
| <td><p>20</p></td> |
| <td><p>CU1MCD</p></td> |
| <td><p>CU1MCDSP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Serifs</p></td> |
| <td></td> |
| <td><p>0.1</p></td> |
| <td><p>0.1</p></td> |
| <td><p>SERCD</p></td> |
| <td><p>SERCDSP</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id5"> |
| <caption><span class="caption-text">3. Semiconductor Criteria - Basic Parameters</span><a class="headerlink" href="#id5" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Value</p></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>n-well peak concentration</p></td> |
| <td><p>cm-3</p></td> |
| <td><p>6.00E+017</p></td> |
| <td><p>NWPCONC</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>background concentration</p></td> |
| <td><p>cm-3</p></td> |
| <td><p>8.00E+14</p></td> |
| <td><p>NWBCONC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>y.char</p></td> |
| <td><p>um</p></td> |
| <td><p>0.43</p></td> |
| <td><p>NWYCHAR</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>desired Nmin/Ns ratio</p></td> |
| <td></td> |
| <td><p>0.9</p></td> |
| <td><p>NMINNSRATIO</p></td> |
| </tr> |
| <tr class="row-even"><td><p>min n-well width to guarantee 90 % peak concentr.</p></td> |
| <td><p>um</p></td> |
| <td><p>0.55</p></td> |
| <td><p>MINNWWID</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>p-well peak concentration</p></td> |
| <td><p>cm-3</p></td> |
| <td><p>4E+017</p></td> |
| <td><p>PWPCONC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>p-well peak coordinate</p></td> |
| <td><p>um</p></td> |
| <td><p>0.42</p></td> |
| <td><p>PWPCOORD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>y.char</p></td> |
| <td><p>um</p></td> |
| <td><p>0.13</p></td> |
| <td><p>PWYCHAR</p></td> |
| </tr> |
| <tr class="row-even"><td><p>min. p-well width to guarantee 90 % peak concentr.</p></td> |
| <td><p>um</p></td> |
| <td><p>0.33</p></td> |
| <td><p>MINPWWID</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id6"> |
| <caption><span class="caption-text">3. Semiconductor Criteria - Junction Depths</span><a class="headerlink" href="#id6" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Vertical Feature</p></th> |
| <th class="head"><p>Vertical Space</p></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Baseline: N-Well</p></td> |
| <td><p>um</p></td> |
| <td><p>1.1</p></td> |
| <td></td> |
| <td><p>NWVDIM</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>P-Well</p></td> |
| <td><p>um</p></td> |
| <td><p>0.75</p></td> |
| <td></td> |
| <td><p>PWVDIM</p></td> |
| </tr> |
| <tr class="row-even"><td><p>N-w/P-w junction (from drawn edge)</p></td> |
| <td><p>um</p></td> |
| <td><ul class="simple"> |
| <li></li> |
| </ul> |
| </td> |
| <td><p>0.034</p></td> |
| <td><p>WELLJCT</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>N+ or P+ S/D (XJ)</p></td> |
| <td><p>um</p></td> |
| <td><p>0.1</p></td> |
| <td><p>0.06</p></td> |
| <td><p>JCTD / LD</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Max (N+ or P+ S/D outdiff.) next to isol. edge</p></td> |
| <td><p>um</p></td> |
| <td></td> |
| <td><p>0.007</p></td> |
| <td><p>LDST</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Max (N+ or P+ S/D outdiff.) next to isol. edge for 6 V reg. devices</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.05</p></td> |
| <td><p>LDST5</p></td> |
| </tr> |
| <tr class="row-even"><td><p>N Tip (As)</p></td> |
| <td><p>um</p></td> |
| <td></td> |
| <td><p>0.01</p></td> |
| <td><p>LDNTIP</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id7"> |
| <caption><span class="caption-text">3. Semiconductor Criteria - Other Width Criteria</span><a class="headerlink" href="#id7" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Value</p></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Min. diff/tap width for reproducible resistivity</p></td> |
| <td><p>um</p></td> |
| <td><p>0.12</p></td> |
| <td><p>MINFWR</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min. width to open a strip of tap between two diffs</p></td> |
| <td><p>um</p></td> |
| <td><p>0.34</p></td> |
| <td><p>SDM3</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Max s/d diff width without contact, consistent w/Ram4,5,6</p></td> |
| <td><p>um</p></td> |
| <td><p>5.7</p></td> |
| <td><p>XMAXCON</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id8"> |
| <caption><span class="caption-text">3. Semiconductor Criteria - Minimum Spacing for 3.3 V Punchthrough (1.8V devices)</span><a class="headerlink" href="#id8" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Value</p></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>n-well - n-well</p></td> |
| <td><p>um</p></td> |
| <td><p>0.835</p></td> |
| <td><p>NWPTS</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>n+ - n+ or p+-p+</p></td> |
| <td><p>um</p></td> |
| <td><p>0.23</p></td> |
| <td><p>DPTS</p></td> |
| </tr> |
| <tr class="row-even"><td><p>p+ in nwell to pwell</p></td> |
| <td><p>um</p></td> |
| <td><p>0.05</p></td> |
| <td><p>PPTS</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>n+ in pwell to nwell</p></td> |
| <td><p>um</p></td> |
| <td><p>0.15</p></td> |
| <td><p>PNPTS</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id9"> |
| <caption><span class="caption-text">3. Semiconductor Criteria - Latch-up/ESD Criteria</span><a class="headerlink" href="#id9" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| <col style="width: 25%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Value</p></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Minimum n+ or p+ - nwell spacing to prevent latch-up</p></td> |
| <td><p>um</p></td> |
| <td><p>0.23</p></td> |
| <td><p>NPNWLU</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min n-well enclos. of tap to ensure bkdwn N-w/P-w before N+/P-w (ESD)</p></td> |
| <td><p>um</p></td> |
| <td><p>0.04</p></td> |
| <td><p>XNWESD</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Max. overlap of n-well by p+ tap</p></td> |
| <td><p>um</p></td> |
| <td><p>0.06</p></td> |
| <td><p>XNWPTS</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id10"> |
| <caption><span class="caption-text">3. Semiconductor Criteria - Implant angles</span><a class="headerlink" href="#id10" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| <col style="width: 20%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"></th> |
| <th class="head"><p>Units</p></th> |
| <th class="head"><p>Angle</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>High current</p></td> |
| <td><p>deg</p></td> |
| <td><p>0</p></td> |
| <td><p>0</p></td> |
| <td><p>HCIMPA</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Angle for tip implant</p></td> |
| <td><p>deg</p></td> |
| <td><p>7</p></td> |
| <td></td> |
| <td><p>TipAng</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Angle for HV tip implant</p></td> |
| <td><p>deg</p></td> |
| <td><p>40</p></td> |
| <td></td> |
| <td><p>HvTipAngle</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Twist angle for HV Tip</p></td> |
| <td><p>deg</p></td> |
| <td><p>23</p></td> |
| <td></td> |
| <td><p>HvTipTwist</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id11"> |
| <caption><span class="caption-text">4. Physical Criteria</span><a class="headerlink" href="#id11" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Material Thicknesses</p></th> |
| <th class="head"></th> |
| <th class="head"></th> |
| <th class="head"><p>Value (um)</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Variable name</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>field oxide (above silicon surface) … underneath poly</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.07</p></td> |
| <td></td> |
| <td><p>FOXSTEP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>min. etch and fill capability for isolation, licon, and met1</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.15</p></td> |
| <td></td> |
| <td><p>DEFC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>min. etch and fill capability for mcon</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.14</p></td> |
| <td></td> |
| <td><p>CEFC</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>min. etch and fill capability for via</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.18</p></td> |
| <td></td> |
| <td><p>VEFC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>poly cap after SPE</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.2</p></td> |
| <td></td> |
| <td><p>OVGTTH</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>poly thickness</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.18</p></td> |
| <td></td> |
| <td><p>POLYTH</p></td> |
| </tr> |
| <tr class="row-even"><td><p>oxide spacer</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.05</p></td> |
| <td></td> |
| <td><p>SpThickn</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Pre-LI ILD thickness</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td><p>ILDTHICKN</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Licon1 etch angle (deg)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>10</p></td> |
| <td></td> |
| <td><p>LICETANG</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Standard Licon bottom CD</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.08</p></td> |
| <td></td> |
| <td><p>LBCD</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Mcon enclosure by Li</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0</p></td> |
| <td></td> |
| <td><p>mconLiEnclosure</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Via1 slope</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.02</p></td> |
| <td></td> |
| <td><p>Via1Slope</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Oxide Bias for MM1</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.6</p></td> |
| <td></td> |
| <td><p>BiasMM1</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Oxide Bias for MM2</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.6</p></td> |
| <td></td> |
| <td><p>BiasMM2</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Oxide Bias for MM3</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.15</p></td> |
| <td></td> |
| <td><p>BiasMM3</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Oxide Bias for MM4</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.15</p></td> |
| <td></td> |
| <td><p>BiasMM4</p></td> |
| </tr> |
| <tr class="row-even"><td><p>LI1 thickness for antenna ratio calculations</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.1</p></td> |
| <td></td> |
| <td><p>LiThick</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 1 thickness for antenna ratio calculations (S8D*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.35</p></td> |
| <td></td> |
| <td><p>Met1Thick</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 2 thickness for antenna ratio calculations (S8D*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.35</p></td> |
| <td></td> |
| <td><p>Met2Thick</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Inductor thickness for antenna ratio calculation (S8D*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>4</p></td> |
| <td></td> |
| <td><p>IndmThick</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 3 thickness for antenna ratio calculation (S8Q/SP8Q)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td></td> |
| <td><p>Met3thick_q</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal4 thickness for antenna ratio calculation (S8Q*/SP8Q)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td></td> |
| <td><p>Met4Thick_q</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 3 thickness for antenna ratio calculation (S8P*/SP8P*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td></td> |
| <td><p>Met3thick_p</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal4 thickness for antenna ratio calculation (S8P*/SP8P*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td></td> |
| <td><p>Met4Thick_p</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal5 thickness for antenna ratio calculation (S8P*/SP8P* with 2um thick metal)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td></td> |
| <td><p>Met5Thick_p</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal5 thickness for antenna ratio calculation (S8P*/SP8P* with 1.2um thick metal)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.2</p></td> |
| <td></td> |
| <td><p>Met5Thickp_12</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 2 thickness for antenna ratio calculations (SP8T/S8T*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.35</p></td> |
| <td></td> |
| <td><p>Met2_Qthick</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 3 thickness for antenna ratio calculations (S8T* other than S8TM*)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.85</p></td> |
| <td></td> |
| <td><p>Met3_Qthick</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Metal 3 thickness for antenna ratio calculations (S8TM* flow)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td></td> |
| <td><p>Met3_TMthick</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Metal 3 thickness for antenna ratio calculations (SP8T flow)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td></td> |
| <td><p>Met3_SP8Tthick</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Photoresist thickness</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.14</p></td> |
| <td></td> |
| <td><p>PRTHICKN</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Photoresist thickness for HV Tip Implants</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td></td> |
| <td><p>PrThickImplant</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min width of tip implant opening</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.1</p></td> |
| <td></td> |
| <td><p>minTip_impW</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>NTM shadowing</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.16</p></td> |
| <td></td> |
| <td><p>ntmShadowing</p></td> |
| </tr> |
| <tr class="row-even"><td><p>HVNTM shadowing</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.232</p></td> |
| <td></td> |
| <td><p>hvntmShadowing</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>HVPTM shadowing</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.089</p></td> |
| <td></td> |
| <td><p>hvptmShadowing</p></td> |
| </tr> |
| <tr class="row-even"><td><p>pseudo-shadowing</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.045</p></td> |
| <td></td> |
| <td><p>pseudoShadowing</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Channel length for low Vt PMOS</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.35</p></td> |
| <td></td> |
| <td><p>lvtpmos_poly</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Width of the Low Leakage gate on each side of LowVt Pmos connected to power rails (requirement based on exp data)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.28</p></td> |
| <td></td> |
| <td><p>LvtEnc_forPowerRail</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>CD tolerance for PDM (3s)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1</p></td> |
| <td></td> |
| <td><p>PdmCD_tol</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min process bias 3s tolerance</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.032</p></td> |
| <td></td> |
| <td><p>PHTOL</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min process bias 3s tolerance for poly</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.02</p></td> |
| <td></td> |
| <td><p>PHP1TOL</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Minimum Space and Overlap</p></td> |
| <td></td> |
| <td></td> |
| <td><p>Value (um)</p></td> |
| <td></td> |
| <td><p>Variable name</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Minimum mcon overlap onto LI for reproducible contact resistance</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.12</p></td> |
| <td></td> |
| <td><p>TCONOVLP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Dogbone PR decay length (SRS 8/4/99)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.2</p></td> |
| <td></td> |
| <td><p>DBPRDEC</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Bowing of rectangular contact (per edge) – seal ring sizing</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.015</p></td> |
| <td></td> |
| <td><p>TBOWINGSEAL</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Waffling / Pattern Density</p></td> |
| <td></td> |
| <td></td> |
| <td><p>Value</p></td> |
| <td></td> |
| <td><p>Variable name</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>S8 average FOM PD (extractions from logic device)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.45</p></td> |
| <td></td> |
| <td><p>FOMPDAVG</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Size of small PD extraction box for rough tolerance (um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>700</p></td> |
| <td></td> |
| <td><p>SMALLPDBOX</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Size of large PD extraction box for rough tolerance (um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2000</p></td> |
| <td></td> |
| <td><p>LARGEPDBOX</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min pattern density for oxide</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.75</p></td> |
| <td></td> |
| <td><p>OxideMinPD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min MM* PD range</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td></td> |
| <td><p>MMPDrange</p></td> |
| </tr> |
| <tr class="row-even"><td><p>FOM 700um box PD tolerance for CMP (SOI8 PCR2) for all technologies</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.15</p></td> |
| <td></td> |
| <td><p>FOM700TOL</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Stepping box shift as a percent of box size</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td><p>BOXSHIFT</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Maximum metal waffle drop pattern density in the frame</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.55</p></td> |
| <td></td> |
| <td><p>PD_FrameWP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Window size for frame waffle drop PD check</p></td> |
| <td></td> |
| <td></td> |
| <td><p>100</p></td> |
| <td></td> |
| <td><p>WP_PDWINDOW</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Step size for frame waffle drop PD check</p></td> |
| <td></td> |
| <td></td> |
| <td><p>10</p></td> |
| <td></td> |
| <td><p>WP_PDSTEP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Other</p></td> |
| <td></td> |
| <td></td> |
| <td><p>Value</p></td> |
| <td></td> |
| <td><p>Variable name</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Poly resistor width and spacing to reduce CD variation (um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.33</p></td> |
| <td></td> |
| <td><p>POLYRCD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Poly resistor width and spacing to reduce CD variation (um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.48</p></td> |
| <td></td> |
| <td><p>POLYRSPC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Spacing between slotted_licons (Not applicable when the two edges L= 0.19um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.51</p></td> |
| <td></td> |
| <td><p>LICM1SLSP1</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Precision resistor width to accommodate 6 contacts across</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2.03</p></td> |
| <td></td> |
| <td><p>PRECRESW</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Li resistor width (to drop one Licon w/o dogbones)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.29</p></td> |
| <td></td> |
| <td><p>LIRESCD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Correction factor for spacing to a wide metal line</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td></td> |
| <td><p>BIGMF</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min spacing for created dnwell to pnp.dg (more restrictive than dnwell.4 rule)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>5</p></td> |
| <td></td> |
| <td><p>cdnwPnpSpc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min spacing between nwell and deep nwell on separate nets (Taken from dnwell.3 from S4* TDR <a href="#id1"><span class="problematic" id="id2">*</span></a>N plus rounded up, IGK request.)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>6</p></td> |
| <td></td> |
| <td><p>nwellDnwellSpc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min space between deep nwells used as photo diode (um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>5</p></td> |
| <td></td> |
| <td><p>PDDnwSpc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min space between dnwell (used for photo diode and other deep nwell (um)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>5.3</p></td> |
| <td></td> |
| <td><p>PDDnwSpc1</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min/Max width of nwell inside deep nwell (for photo diodes)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.84</p></td> |
| <td></td> |
| <td><p>PDNwmCD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min/Max enclosure of nwell by deep nwell (for photo diode)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.08</p></td> |
| <td></td> |
| <td><p>PDNwmDnwEnc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min/Max width of tap inside deep nwell (for photo diode)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.41</p></td> |
| <td></td> |
| <td><p>PDTapCD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min/Max enclosure of tap by nwell inside deep nwell (for photo diode)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.215</p></td> |
| <td></td> |
| <td><p>PDTapNwmEnc</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id12"> |
| <caption><span class="caption-text">5. Laser Fuse Criteria</span><a class="headerlink" href="#id12" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Min. spac. of laser spot to diffused junction to ensure jct integrity</p></th> |
| <th class="head"></th> |
| <th class="head"></th> |
| <th class="head"><p>0.6</p></th> |
| <th class="head"></th> |
| <th class="head"><p>XLASJUN</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Max. width of a metal fuse line that can be removed reliably</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.8</p></td> |
| <td></td> |
| <td><p>FSW</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min. L of met. fuse at which damage doesn’t extend beyond ends</p></td> |
| <td></td> |
| <td></td> |
| <td><p>6.605</p></td> |
| <td></td> |
| <td><p>FSLE</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Max. extension of met2 beyond fuse boundary</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.005</p></td> |
| <td></td> |
| <td><p>FEXT</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min. distance between laser spot and active junction</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.545</p></td> |
| <td></td> |
| <td><p>LASJCT</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Standard contact bottom CD</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.09</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-odd"><td><p>Positioning tolerance of laser spot (3 s)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td></td> |
| <td><p>LASMA</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Nominal effective laser spot diameter</p></td> |
| <td></td> |
| <td></td> |
| <td><p>3.5</p></td> |
| <td></td> |
| <td><p>LASSPT</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Max. increase in spot diameter at max. distance from focus (3 s)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.9</p></td> |
| <td></td> |
| <td><p>LASCDTOL</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Fuse melting radius</p></td> |
| <td></td> |
| <td></td> |
| <td><p>3.6</p></td> |
| <td></td> |
| <td><p>MELTRAD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Melting related crack size in ILD</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.36</p></td> |
| <td></td> |
| <td><p>FUSECRACK</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min space between fuse and any feature not connected to it</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.2</p></td> |
| <td></td> |
| <td><p>MinFuseSpace</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Space between fuse and any unrelated layer</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td><p>SP_fuse_to_unrelated</p></td> |
| </tr> |
| <tr class="row-even"><td><p>DC offset in some fuse rules</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.87</p></td> |
| <td></td> |
| <td><p>LASDC1</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id13"> |
| <caption><span class="caption-text">7. Other criteria and parameters</span><a class="headerlink" href="#id13" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Layer / Design rule</p></th> |
| <th class="head"><p>CD</p></th> |
| <th class="head"></th> |
| <th class="head"><p>space</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Comment</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>MOSFET width</p></td> |
| <td><p>0.135</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>FOMSE</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>MOSFET width in standard cells</p></td> |
| <td><p>0.075</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>FOMSESC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Spacing of poly on field to diff</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.065</p></td> |
| <td></td> |
| <td><p>PFDSE</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Spacing of poly on field to tap</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.005</p></td> |
| <td></td> |
| <td><p>PFTSE</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Enclosure of tap by nwell for pwell res</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.22</p></td> |
| <td></td> |
| <td><p>PTAP_NWL_SP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Grid conversion rounding factor</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.005</p></td> |
| <td></td> |
| <td><p>GRCF</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Licon enclosure rounding</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.02</p></td> |
| <td></td> |
| <td><p>LICENCLR</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>LI1CD add/drop</p></td> |
| <td><p>0.01</p></td> |
| <td></td> |
| <td><p>0.04</p></td> |
| <td></td> |
| <td></td> |
| </tr> |
| <tr class="row-even"><td><p>Huge metal X min. W and L</p></td> |
| <td><p>3</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HugeM</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min Nsdm area</p></td> |
| <td><p>0.265</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>MinNsdmArea</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min Psdm area</p></td> |
| <td><p>0.255</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>MinPsdmArea</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min N/Psdm hole area</p></td> |
| <td><p>0.265</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>MinNPsdmHole</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Large waffle size must be divisible by 4</p></td> |
| <td><p>7.2</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>waffle_large</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>P1M additional CD control</p></td> |
| <td><p>0.011</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>P1MCDcontrol</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Li1 proximity correction</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.25</p></td> |
| <td></td> |
| <td><p>LI1PROXSpace</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Serif added to nwell convex corner (SXX-572, 573)</p></td> |
| <td><p>0.22</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>NwellCvxSerif</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Serif added to nwell concave corner (SXX-572, 573)</p></td> |
| <td><p>0.12</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>NwellCveSerif</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>NWM extension beyond nwell edge straddling de_nFet_source (for GSMC; QZM-133)</p></td> |
| <td><p>0.075</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>NvhvNwellExt</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min enclosure of pad by pmm for Cu inductor (JNET-80)</p></td> |
| <td><p>0</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>padPMMEncInd</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min enclosure of pmm by cu1m for Cu inductor (JNET-80)</p></td> |
| <td><p>10.75</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>pmmCu1mEncInd</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min enclosure of pbo by cu1m per DECA 000348 Rev S</p></td> |
| <td><p>10</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>pboCu1mEnc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min enclosure of pmm by pmm2 for radio flow in the die (JNET-80)</p></td> |
| <td><p>13</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>pmmPmm2EncInd</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min enclosure of pmm by pmm2 inside frame</p></td> |
| <td><p>7.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>pmmPmm2EncIndFrame</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min space between pmm2 and Inductor.dg</p></td> |
| <td></td> |
| <td></td> |
| <td><p>7.5</p></td> |
| <td></td> |
| <td><p>pmm2IndSpc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min cu1m PD across full chip</p></td> |
| <td><p>0.35</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>MinCU1Mpd</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Max cu1m PD across full chip</p></td> |
| <td><p>0.45</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>MaxCU1Mpd</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Spacing between RDL and outer edge of seal ring</p></td> |
| <td><p>15</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>RdlSealSpc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Spacing between RDL and pmm2</p></td> |
| <td><p>6.16</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>RdlPmm2Spc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Enclosure of etest module in die by cpmm2</p></td> |
| <td><p>0</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>EtestCpmm2Enc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Keepout of active, poly, li and metal to NSM (TCS-2253)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1</p></td> |
| <td></td> |
| <td><p>NSMKeepout</p></td> |
| </tr> |
| <tr class="row-even"><td><p>3 um keepout of active, poly, li and metal to areaid.dt/areaid.ft (TCS-2253)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>3</p></td> |
| <td></td> |
| <td><p>NSMKeepout_3um</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>pnp_emitter sizing (S8P GSMC flow)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.05</p></td> |
| <td></td> |
| <td><p>PnpEmitterSzGSMC</p></td> |
| </tr> |
| <tr class="row-even"><td><p>pnp_emitter sizing (other flows)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.03</p></td> |
| <td></td> |
| <td><p>PnpEmitterSz</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>MiM Capacitor aspect ration</p></td> |
| <td><p>20</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>MiM_AR</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min NCM space to be used to preserve NCM CL algorithm (avoid LVL error)</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.27</p></td> |
| <td></td> |
| <td><p>NCM_0LVL</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min space of NCM between core and periphery due to existing layout restriction</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.96</p></td> |
| <td></td> |
| <td><p>NcmCorePeriSP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Multiplication factor</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.01</p></td> |
| <td></td> |
| <td><p>S8LVconv</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Minimum scribe width</p></td> |
| <td><p>50</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>scribew</p></td> |
| </tr> |
| <tr class="row-even"><td><p>spacing of p-well outside deep n-well to deep n-well mask edge</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.12</p></td> |
| <td></td> |
| <td><p>NWDNWENCL</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>p-well in deep n-well to p-sub</p></td> |
| <td></td> |
| <td></td> |
| <td><p>1.2</p></td> |
| <td></td> |
| <td><p>NWDNWOL</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Field oxide etchback after P1ME before implants</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.04</p></td> |
| <td></td> |
| <td><p>WFDEL</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id14"> |
| <caption><span class="caption-text">8. Criteria for High Voltage FET</span><a class="headerlink" href="#id14" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Layer / Design rule</p></th> |
| <th class="head"><p>CD</p></th> |
| <th class="head"></th> |
| <th class="head"><p>space</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Comment</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Min HVNwell to any nwell space</p></td> |
| <td></td> |
| <td></td> |
| <td><p>2</p></td> |
| <td></td> |
| <td><p>HVNwell_Nwell_SP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min HVDiff width</p></td> |
| <td><p>0.29</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVDiff_CD</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min HVDiff space</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td></td> |
| <td><p>HVDiff_SP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min HV Pmos gate width</p></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVP_gate_CD</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min space between HV poly</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.28</p></td> |
| <td></td> |
| <td><p>HVPoly_SP</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min HV Nmos gate width</p></td> |
| <td><p>0.37</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVPoly_CD</p></td> |
| </tr> |
| <tr class="row-even"><td><p>HV P+ Diff enclosure by Nwell</p></td> |
| <td><p>0.33</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVPdiff_nwell_enc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>HV N+ diff space to Nwell</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.43</p></td> |
| <td></td> |
| <td><p>HVNdiff_nwell_SP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>HV N+ tap enclosure by Nwell</p></td> |
| <td><p>0.33</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVNtap_nwell_enc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>HV P+tap space to Nwell</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.43</p></td> |
| <td></td> |
| <td><p>HVPtap_nwell_SP</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Photoresist tilted implant penetration</p></td> |
| <td><p>0.02</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVPrPenetration</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Photoresist tilted implant blocking distance</p></td> |
| <td><p>0.013</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVPrBlocking</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min size of HVTip</p></td> |
| <td><p>0.1</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVTipMinSize</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Extra CD tol for HVNTM to match Ram7 process</p></td> |
| <td><p>0.015</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVNTMExtraCdTol</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min HVDiff resistor width</p></td> |
| <td><p>0.29</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVDiff_Res_CD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>High voltage n+-n+ or p+-p+</p></td> |
| <td></td> |
| <td></td> |
| <td><p>0.3</p></td> |
| <td></td> |
| <td><p>HVDPTS15</p></td> |
| </tr> |
| <tr class="row-even"><td><p>HV MOSFET channel length</p></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>HVPCD</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id15"> |
| <caption><span class="caption-text">9. Criteria for polyimide manufacturability</span><a class="headerlink" href="#id15" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Layer / Design rule</p></th> |
| <th class="head"><p>CD</p></th> |
| <th class="head"></th> |
| <th class="head"><p>space</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Comment</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Enclosure of fuses by polyimide</p></td> |
| <td><p>12</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PimFuseEnc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Enclosure of bondpad by polyimide (YUY-165)</p></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PimPadEnc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Enclosure of pad:dg by PBO inside inductor capture pad, with DECA online monitoring</p></td> |
| <td><p>4.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PBOPadEnc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Enclosure of pad:dg by PBO per standard DECA rules</p></td> |
| <td><p>7.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PBOPadEncDECA</p></td> |
| </tr> |
| <tr class="row-even"><td><p>DECA PBO drawn-to-final process bias per side</p></td> |
| <td><p>0.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PBOProcBiasPerSide</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Polyimide CD tolerance</p></td> |
| <td><p>1</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PimCD_tol</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min Pim width over pad openings</p></td> |
| <td><p>87</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PimOverPad_CD</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Polyimide slope (001-87400)</p></td> |
| <td></td> |
| <td><p>5.3</p></td> |
| <td></td> |
| <td></td> |
| <td><p>I_polyimide_slope</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Enclosure of polyimide by polymer tolerance</p></td> |
| <td></td> |
| <td><p>7.7</p></td> |
| <td></td> |
| <td></td> |
| <td><p>Po_po_tol</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min/Max enclosure of pad.dg inside M5RDL by pmm</p></td> |
| <td><p>0</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>pmmM5RDLpadEnc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min spacing of pmm to (rdl NOT (pad.dg sized by 0.5))</p></td> |
| <td></td> |
| <td></td> |
| <td><p>19.16</p></td> |
| <td></td> |
| <td><p>pmmRDLspc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Enclosure of laser targets in the die by polyimide</p></td> |
| <td><p>30</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>PimLaserEnc</p></td> |
| </tr> |
| </tbody> |
| </table> |
| <table class="docutils align-default" id="id16"> |
| <caption><span class="caption-text">10. Criteria for VPP capacitor</span><a class="headerlink" href="#id16" title="Permalink to this table">¶</a></caption> |
| <colgroup> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| <col style="width: 17%" /> |
| </colgroup> |
| <thead> |
| <tr class="row-odd"><th class="head"><p>Layer / Design rule</p></th> |
| <th class="head"><p>CD</p></th> |
| <th class="head"></th> |
| <th class="head"><p>space</p></th> |
| <th class="head"></th> |
| <th class="head"><p>Comment</p></th> |
| </tr> |
| </thead> |
| <tbody> |
| <tr class="row-even"><td><p>Min width of capacitor:dg</p></td> |
| <td><p>4.38</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>VppWidth</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Max width of unit capacitor:dg</p></td> |
| <td><p>8.58</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>VppMaxWidth</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min spacing between two capacitor:dg</p></td> |
| <td><p>1.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>VppSpc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min spacing of capacitor:dg to li1 or met1 or met2 or nwell</p></td> |
| <td><p>1.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>VppOtherSPc</p></td> |
| </tr> |
| <tr class="row-even"><td><p>Min enclosure of capacitor by nwell</p></td> |
| <td><p>1.5</p></td> |
| <td></td> |
| <td></td> |
| <td></td> |
| <td><p>VppNwmEnc</p></td> |
| </tr> |
| <tr class="row-odd"><td><p>Min spacing of pmm to (rdl NOT (pad.dg sized by 0.5))</p></td> |
| <td></td> |
| <td></td> |
| <td><p>19.16</p></td> |
| <td></td> |
| <td><p>pmmRDLspc</p></td> |
| </tr> |
| </tbody> |
| </table> |
| </div> |
| |
| |
| </div> |
| <div class="side-doc-outline"> |
| <div class="side-doc-outline--content"> |
| </div> |
| </div> |
| |
| <div class="clearer"></div> |
| </div><div class="pagenation"> |
| <a id="button-prev" href="background.html" class="mdl-button mdl-js-button mdl-js-ripple-effect mdl-button--colored" role="botton" accesskey="P"> |
| <i class="pagenation-arrow-L material-icons">arrow_back</i> |
| <div class="pagenation-text"> |
| <span class="pagenation-direction">Previous</span> |
| <div>Background</div> |
| </div> |
| </a> |
| <a id="button-next" href="define.html" class="mdl-button mdl-js-button mdl-js-ripple-effect mdl-button--colored" role="botton" accesskey="N"> |
| <i class="pagenation-arrow-R material-icons">arrow_forward</i> |
| <div class="pagenation-text"> |
| <span class="pagenation-direction">Next</span> |
| <div>TODO: rules/define</div> |
| </div> |
| </a> |
| </div> |
| <footer class="mdl-mini-footer"> |
| <div class="mdl-mini-footer__left-section"> |
| <div class="mdl-logo">Skywater SKY130 PDK</div> |
| <div> |
| |
| <ul class="current"> |
| <li class="toctree-l1 current"><a class="reference internal" href="../rules.html">Process Design Rules</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../contents.html">PDK Contents</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../verification.html">Physical & Design Verification</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../analog.html">Analog Design</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../digital.html">Digital Design</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../sim.html">Simulation</a></li> |
| </ul> |
| <ul> |
| <li class="toctree-l1"><a class="reference internal" href="../glossary.html">Glossary</a></li> |
| <li class="toctree-l1"><a class="reference internal" href="../previous.html">Previous Nomenclature</a></li> |
| </ul> |
| |
| </div> |
| </div> |
| |
| <div class="mdl-mini-footer__right-section"> |
| <div>© Copyright 2020, Skywater PDK Authors.</div> |
| <div>Generated by <a href="http://sphinx.pocoo.org/">Sphinx</a> 3.0.3 using <a href="https://github.com/myyasuda/sphinx_materialdesign_theme">sphinx_materialdesign_theme</a>.</div> |
| </div> |
| </footer> |
| </main> |
| </div> |
| </body> |
| </html> |
