| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the "License"); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # http://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an "AS IS" BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| |
| ################################################################################## |
| # |
| # GLOBALFOUNDRIES |
| # |
| ################################################################################## |
| # |
| # 180MCU Tech LEF File |
| # based on DRM DM-000013-01 Rev 13 |
| # TFG-Version: 2.1.9 |
| # Date: February 2018 |
| #------------------------------------------------------- |
| # metal stack option: 4LM_1TM_9K |
| # Preferred routing directions: |
| # vertical: Metal2 Metal4 |
| # horizontal: Metal1 Metal3 |
| #------------------------------------------------------ |
| # This Techfile contains not correct Parasitic Information. |
| # USE Appropriate parasitic files for Parasitic Extraction. |
| #------------------------------------------------------ |
| |
| VERSION 5.7 ; |
| BUSBITCHARS "[]" ; |
| DIVIDERCHAR "/" ; |
| |
| UNITS |
| DATABASE MICRONS 2000 ; |
| CAPACITANCE PICOFARADS 1 ; |
| CURRENT MILLIAMPS 1 ; |
| RESISTANCE OHMS 1 ; |
| END UNITS |
| |
| SITE GF018hv5v_mcu_sc7 |
| SYMMETRY X Y ; |
| CLASS core ; |
| SIZE 0.56 BY 3.92 ; |
| END GF018hv5v_mcu_sc7 |
| |
| PROPERTYDEFINITIONS |
| LAYER LEF58_EOLENCLOSURE STRING ; |
| LAYER LEF58_TYPE STRING ; |
| END PROPERTYDEFINITIONS |
| |
| MANUFACTURINGGRID 0.0050 ; |
| CLEARANCEMEASURE EUCLIDEAN ; |
| USEMINSPACING OBS ON ; |
| |
| LAYER Poly2 |
| TYPE MASTERSLICE ; |
| END Poly2 |
| |
| LAYER CON |
| TYPE CUT ; |
| END CON |
| |
| |
| |
| LAYER Metal1 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.56 ; |
| OFFSET 0.0 ; |
| |
| MINWIDTH 0.230 ; # Mn.1 (n=1) |
| WIDTH 0.230 ; # Mn.1 (n=1) |
| SPACING 0.230 ; # Mn.2a (n=1) |
| SPACING 0.300 RANGE 10.005 999.00 ; # Mn.2b |
| AREA 0.1444 ; # Mn.3 |
| |
| THICKNESS 0.54 ; |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNASIDEAREARATIO 400 ; |
| |
| DCCURRENTDENSITY AVERAGE 0.67 ; |
| ACCURRENTDENSITY AVERAGE 1.00 ; |
| |
| CAPACITANCE CPERSQDIST 0.0000394 ; |
| RESISTANCE RPERSQ 0.090000 ; |
| |
| MINIMUMDENSITY 30.0 ; |
| DENSITYCHECKWINDOW 200.0 200.0 ; |
| DENSITYCHECKSTEP 100.0 ; |
| |
| END Metal1 |
| |
| |
| LAYER Via1 |
| TYPE CUT ; |
| SPACING 0.26 ; |
| WIDTH 0.26 ; |
| |
| ENCLOSURE BELOW 0.00 0.06 ; |
| ENCLOSURE ABOVE 0.01 0.06 ; |
| PROPERTY LEF58_EOLENCLOSURE " |
| EOLENCLOSURE 0.34 0.06 ;" ; |
| |
| ARRAYSPACING CUTSPACING 0.36 ARRAYCUTS 4 SPACING 0.36 ; # Vn.2b |
| |
| ACCURRENTDENSITY AVERAGE 0.28 ; |
| DCCURRENTDENSITY AVERAGE 0.18 ; |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNAAREARATIO 20.0 ; |
| END Via1 |
| |
| |
| LAYER Metal2 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| |
| PITCH 0.56 ; |
| OFFSET 0.0 ; |
| |
| MINWIDTH 0.280 ; |
| WIDTH 0.280 ; # Mn.1 (n>1) |
| SPACING 0.280 ; # Mn.2a (n>1) |
| SPACING 0.300 RANGE 10.005 999.00 ; # Mn.2b |
| AREA 0.1444 ; # Mn.3 |
| |
| THICKNESS 0.54 ; |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNADIFFSIDEAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 2 ; |
| |
| DCCURRENTDENSITY AVERAGE 0.67 ; |
| ACCURRENTDENSITY AVERAGE 1.00 ; |
| |
| CAPACITANCE CPERSQDIST 0.0000394 ; |
| RESISTANCE RPERSQ 0.090000 ; |
| |
| MINIMUMDENSITY 30.0 ; |
| DENSITYCHECKWINDOW 200.0 200.0 ; |
| DENSITYCHECKSTEP 100.0 ; |
| |
| END Metal2 |
| |
| |
| LAYER Via2 |
| TYPE CUT ; |
| SPACING 0.26 ; |
| WIDTH 0.26 ; |
| |
| ENCLOSURE BELOW 0.01 0.06 ; |
| ENCLOSURE ABOVE 0.01 0.06 ; |
| |
| # a bit conservative for Vn.3/4a without considering the protrusion length of 0.28 |
| PROPERTY LEF58_EOLENCLOSURE " EOLENCLOSURE 0.34 0.06 ; " ; |
| |
| ARRAYSPACING CUTSPACING 0.36 ARRAYCUTS 4 SPACING 0.36 ; # Vn.2b |
| |
| ACCURRENTDENSITY AVERAGE 0.28 ; |
| DCCURRENTDENSITY AVERAGE 0.18 ; |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNAAREARATIO 20.0 ; |
| END Via2 |
| |
| |
| LAYER Metal3 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.56 ; |
| OFFSET 0.0 ; |
| |
| MINWIDTH 0.280 ; |
| WIDTH 0.280 ; # Mn.1 (n>1) |
| SPACING 0.280 ; # Mn.2a (n>1) |
| SPACING 0.300 RANGE 10.005 999.00 ; # Mn.2b |
| AREA 0.1444 ; # Mn.3 |
| |
| THICKNESS 0.54 ; |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNADIFFSIDEAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 2 ; |
| |
| DCCURRENTDENSITY AVERAGE 0.67 ; |
| ACCURRENTDENSITY AVERAGE 1.00 ; |
| |
| CAPACITANCE CPERSQDIST 0.0000394 ; |
| RESISTANCE RPERSQ 0.090000 ; |
| |
| MINIMUMDENSITY 30.0 ; |
| DENSITYCHECKWINDOW 200.0 200.0 ; |
| DENSITYCHECKSTEP 100.0 ; |
| |
| END Metal3 |
| |
| |
| LAYER Via3 |
| TYPE CUT ; |
| SPACING 0.26 ; |
| WIDTH 0.26 ; |
| |
| ENCLOSURE BELOW 0.01 0.06 ; |
| # ENCLOSURE ABOVE 0.01 0.09 ; |
| ENCLOSURE ABOVE 0.01 0.06 ; |
| |
| # a bit conservative for Vn.3/4a without considering the protrusion length of 0.28 |
| PROPERTY LEF58_EOLENCLOSURE " EOLENCLOSURE 0.34 0.06 ; " ; |
| |
| ARRAYSPACING CUTSPACING 0.36 ARRAYCUTS 4 SPACING 0.36 ; # Vn.2b |
| |
| ACCURRENTDENSITY AVERAGE 0.28 ; |
| DCCURRENTDENSITY AVERAGE 0.18 ; |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNAAREARATIO 20.0 ; |
| END Via3 |
| |
| |
| |
| LAYER Metal4 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| |
| OFFSET 0.0 ; |
| |
| |
| PITCH 0.9 ; |
| MINWIDTH 0.440 ; |
| WIDTH 0.440 ; # MT.1 |
| AREA 0.5625 ; # MT.4 |
| SPACING 0.460 ; # MT.2a |
| SPACING 0.600 RANGE 10.005 999.00 ; # MT.2b |
| |
| DCCURRENTDENSITY AVERAGE 1.21 ; |
| ACCURRENTDENSITY AVERAGE 1.82 ; |
| RESISTANCE RPERSQ 0.04000 ; |
| |
| THICKNESS 0.99 ; |
| |
| ANTENNAMODEL OXIDE1 ; |
| ANTENNADIFFSIDEAREARATIO 400 ; |
| ANTENNAGATEPLUSDIFF 2 ; |
| |
| CAPACITANCE CPERSQDIST 0.0000394 ; |
| |
| MINIMUMDENSITY 30.0 ; |
| DENSITYCHECKWINDOW 200.0 200.0 ; |
| DENSITYCHECKSTEP 100.0 ; |
| |
| END Metal4 |
| |
| |
| |
| LAYER OVERLAP |
| TYPE OVERLAP ; |
| END OVERLAP |
| |
| LAYER PR_bndry |
| TYPE MASTERSLICE ; |
| END PR_bndry |
| |
| |
| #------------------------------------------------------------ |
| # Via1 VIA SECTION |
| #------------------------------------------------------------ |
| VIA Via1_HH DEFAULT |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal1 ; |
| RECT -0.190 -0.130 0.190 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via1_HH |
| |
| VIA Via1_HV DEFAULT |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal1 ; |
| RECT -0.190 -0.130 0.190 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| RESISTANCE 4.500 ; |
| END Via1_HV |
| |
| VIA Via1_VH DEFAULT |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal1 ; |
| RECT -0.130 -0.190 0.130 0.190 ; |
| LAYER Metal2 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via1_VH |
| |
| VIA Via1_VV DEFAULT |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal1 ; |
| RECT -0.130 -0.190 0.130 0.190 ; |
| LAYER Metal2 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| RESISTANCE 4.500 ; |
| END Via1_VV |
| |
| VIA Via1_2CUT_H |
| LAYER Via1 ; |
| RECT -0.390 -0.130 -0.130 0.130 ; |
| RECT 0.130 -0.130 0.390 0.130 ; |
| LAYER Metal1 ; |
| RECT -0.450 -0.130 0.450 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.400 -0.190 0.400 0.190 ; |
| END Via1_2CUT_H |
| |
| VIA Via1_2CUT_V |
| LAYER Via1 ; |
| RECT -0.130 -0.390 0.130 -0.130 ; |
| RECT -0.130 0.130 0.130 0.390 ; |
| LAYER Metal1 ; |
| RECT -0.190 -0.390 0.190 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.140 -0.450 0.140 0.450 ; |
| END Via1_2CUT_V |
| |
| VIA Via1_2X2_0_60_10_60_H_H DEFAULT |
| LAYER Via1 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal1 ; |
| RECT -0.450 -0.390 0.450 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| END Via1_2X2_0_60_10_60_H_H |
| |
| VIA Via1_2X2_0_60_10_60_H_V DEFAULT |
| LAYER Via1 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal1 ; |
| RECT -0.450 -0.390 0.450 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| END Via1_2X2_0_60_10_60_H_V |
| |
| VIA Via1_2X2_0_60_10_60_V_H DEFAULT |
| LAYER Via1 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal1 ; |
| RECT -0.390 -0.450 0.390 0.450 ; |
| LAYER Metal2 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| END Via1_2X2_0_60_10_60_V_H |
| |
| VIA Via1_2X2_0_60_10_60_V_V DEFAULT |
| LAYER Via1 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal1 ; |
| RECT -0.390 -0.450 0.390 0.450 ; |
| LAYER Metal2 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| END Via1_2X2_0_60_10_60_V_V |
| |
| VIARULE Via1_GEN_HH GENERATE |
| LAYER Metal1 ; |
| ENCLOSURE 0.060 0.000 ; |
| LAYER Metal2 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via1_GEN_HH |
| |
| VIARULE Via1_GEN_HV GENERATE |
| LAYER Metal1 ; |
| ENCLOSURE 0.060 0.000 ; |
| LAYER Metal2 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via1_GEN_HV |
| |
| VIARULE Via1_GEN_VH GENERATE |
| LAYER Metal1 ; |
| ENCLOSURE 0.000 0.060 ; |
| LAYER Metal2 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via1_GEN_VH |
| |
| VIARULE Via1_GEN_VV GENERATE |
| LAYER Metal1 ; |
| ENCLOSURE 0.000 0.060 ; |
| LAYER Metal2 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Via1 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via1_GEN_VV |
| |
| VIA Via1_4X4H_HH_DEFAULT DEFAULT |
| LAYER Via1 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal1 ; |
| RECT -1.120 -1.060 1.120 1.060 ; |
| LAYER Metal2 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| END Via1_4X4H_HH_DEFAULT |
| |
| VIA Via1_4X4H_HV_DEFAULT DEFAULT |
| LAYER Via1 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal1 ; |
| RECT -1.120 -1.060 1.120 1.060 ; |
| LAYER Metal2 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| END Via1_4X4H_HV_DEFAULT |
| |
| VIA Via1_4X4H_VH_DEFAULT DEFAULT |
| LAYER Via1 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal1 ; |
| RECT -1.060 -1.120 1.060 1.120 ; |
| LAYER Metal2 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| END Via1_4X4H_VH_DEFAULT |
| |
| VIA Via1_4X4H_VV_DEFAULT DEFAULT |
| LAYER Via1 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal1 ; |
| RECT -1.060 -1.120 1.060 1.120 ; |
| LAYER Metal2 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| END Via1_4X4H_VV_DEFAULT |
| |
| #------------------------------------------------------------ |
| # Via2 VIA SECTION |
| #------------------------------------------------------------ |
| VIA Via2_HH DEFAULT |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via2_HH |
| |
| VIA Via2_HV DEFAULT |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| LAYER Metal3 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| RESISTANCE 4.500 ; |
| END Via2_HV |
| |
| VIA Via2_VH DEFAULT |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via2_VH |
| |
| VIA Via2_VV DEFAULT |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| LAYER Metal3 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| RESISTANCE 4.500 ; |
| END Via2_VV |
| |
| VIA Via2_2CUT_H |
| LAYER Via2 ; |
| RECT -0.390 -0.130 -0.130 0.130 ; |
| RECT 0.130 -0.130 0.390 0.130 ; |
| LAYER Metal2 ; |
| RECT -0.390 -0.190 0.390 0.190 ; |
| LAYER Metal3 ; |
| RECT -0.450 -0.140 0.450 0.140 ; |
| END Via2_2CUT_H |
| |
| VIA Via2_2CUT_V |
| LAYER Via2 ; |
| RECT -0.130 -0.390 0.130 -0.130 ; |
| RECT -0.130 0.130 0.130 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.130 -0.450 0.130 0.450 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.400 0.190 0.400 ; |
| END Via2_2CUT_V |
| |
| VIA Via2_2X2_0_60_10_60_H_H DEFAULT |
| LAYER Via2 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.450 -0.390 0.450 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| END Via2_2X2_0_60_10_60_H_H |
| |
| VIA Via2_2X2_0_60_10_60_H_V DEFAULT |
| LAYER Via2 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.450 -0.390 0.450 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| END Via2_2X2_0_60_10_60_H_V |
| |
| VIA Via2_2X2_0_60_10_60_V_H DEFAULT |
| LAYER Via2 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.390 -0.450 0.390 0.450 ; |
| LAYER Metal3 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| END Via2_2X2_0_60_10_60_V_H |
| |
| VIA Via2_2X2_0_60_10_60_V_V DEFAULT |
| LAYER Via2 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal2 ; |
| RECT -0.390 -0.450 0.390 0.450 ; |
| LAYER Metal3 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| END Via2_2X2_0_60_10_60_V_V |
| |
| VIARULE Via2_GEN_HH GENERATE |
| LAYER Metal2 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Metal3 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via2_GEN_HH |
| |
| VIARULE Via2_GEN_HV GENERATE |
| LAYER Metal2 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Metal3 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via2_GEN_HV |
| |
| VIARULE Via2_GEN_VH GENERATE |
| LAYER Metal2 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Metal3 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via2_GEN_VH |
| |
| VIARULE Via2_GEN_VV GENERATE |
| LAYER Metal2 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Metal3 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Via2 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via2_GEN_VV |
| |
| VIA Via2_4X4H_HH_DEFAULT DEFAULT |
| LAYER Via2 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal2 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| LAYER Metal3 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| END Via2_4X4H_HH_DEFAULT |
| |
| VIA Via2_4X4H_HV_DEFAULT DEFAULT |
| LAYER Via2 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal2 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| LAYER Metal3 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| END Via2_4X4H_HV_DEFAULT |
| |
| VIA Via2_4X4H_VH_DEFAULT DEFAULT |
| LAYER Via2 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal2 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| LAYER Metal3 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| END Via2_4X4H_VH_DEFAULT |
| |
| VIA Via2_4X4H_VV_DEFAULT DEFAULT |
| LAYER Via2 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal2 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| LAYER Metal3 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| END Via2_4X4H_VV_DEFAULT |
| |
| #------------------------------------------------------------ |
| # Via3 VIA SECTION |
| #------------------------------------------------------------ |
| VIA Via3_HH DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| LAYER Metal4 ; |
| RECT -0.220 -0.140 0.220 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via3_HH |
| |
| VIA Via3_HV DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| LAYER Metal4 ; |
| RECT -0.140 -0.220 0.140 0.220 ; |
| RESISTANCE 4.500 ; |
| END Via3_HV |
| |
| VIA Via3_VH DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| LAYER Metal4 ; |
| RECT -0.220 -0.140 0.220 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via3_VH |
| |
| VIA Via3_VV DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| LAYER Metal4 ; |
| RECT -0.140 -0.220 0.140 0.220 ; |
| RESISTANCE 4.500 ; |
| END Via3_VV |
| |
| VIA Via3_1_HH DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| LAYER Metal4 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via3_1_HH |
| |
| VIA Via3_1_HV DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| LAYER Metal4 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| RESISTANCE 4.500 ; |
| END Via3_1_HV |
| |
| VIA Via3_1_VH DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| LAYER Metal4 ; |
| RECT -0.190 -0.140 0.190 0.140 ; |
| RESISTANCE 4.500 ; |
| END Via3_1_VH |
| |
| VIA Via3_1_VV DEFAULT |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| LAYER Metal4 ; |
| RECT -0.140 -0.190 0.140 0.190 ; |
| RESISTANCE 4.500 ; |
| END Via3_1_VV |
| |
| VIA Via3_2CUT_H |
| LAYER Via3 ; |
| RECT -0.390 -0.130 -0.130 0.130 ; |
| RECT 0.130 -0.130 0.390 0.130 ; |
| LAYER Metal3 ; |
| RECT -0.450 -0.140 0.450 0.140 ; |
| LAYER Metal4 ; |
| RECT -0.400 -0.190 0.400 0.190 ; |
| END Via3_2CUT_H |
| |
| VIA Via3_2CUT_V |
| LAYER Via3 ; |
| RECT -0.130 -0.390 0.130 -0.130 ; |
| RECT -0.130 0.130 0.130 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.190 -0.400 0.190 0.400 ; |
| LAYER Metal4 ; |
| RECT -0.140 -0.450 0.140 0.450 ; |
| END Via3_2CUT_V |
| |
| VIA Via3_2X2_10_60_10_60_H_H DEFAULT |
| LAYER Via3 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| LAYER Metal4 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| END Via3_2X2_10_60_10_60_H_H |
| |
| VIA Via3_2X2_10_60_10_60_H_V DEFAULT |
| LAYER Via3 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| LAYER Metal4 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| END Via3_2X2_10_60_10_60_H_V |
| |
| VIA Via3_2X2_10_60_10_60_V_H DEFAULT |
| LAYER Via3 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| LAYER Metal4 ; |
| RECT -0.450 -0.400 0.450 0.400 ; |
| END Via3_2X2_10_60_10_60_V_H |
| |
| VIA Via3_2X2_10_60_10_60_V_V DEFAULT |
| LAYER Via3 ; |
| RECT -0.390 -0.390 -0.130 -0.130 ; |
| RECT 0.130 -0.390 0.390 -0.130 ; |
| RECT -0.390 0.130 -0.130 0.390 ; |
| RECT 0.130 0.130 0.390 0.390 ; |
| LAYER Metal3 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| LAYER Metal4 ; |
| RECT -0.400 -0.450 0.400 0.450 ; |
| END Via3_2X2_10_60_10_60_V_V |
| |
| VIARULE Via3_GEN_HH GENERATE |
| LAYER Metal3 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Metal4 ; |
| ENCLOSURE 0.090 0.010 ; |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via3_GEN_HH |
| |
| VIARULE Via3_GEN_HV GENERATE |
| LAYER Metal3 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Metal4 ; |
| ENCLOSURE 0.010 0.090 ; |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via3_GEN_HV |
| |
| VIARULE Via3_GEN_VH GENERATE |
| LAYER Metal3 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Metal4 ; |
| ENCLOSURE 0.090 0.010 ; |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via3_GEN_VH |
| |
| VIARULE Via3_GEN_VV GENERATE |
| LAYER Metal3 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Metal4 ; |
| ENCLOSURE 0.010 0.090 ; |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via3_GEN_VV |
| |
| VIARULE Via3_0_RULE GENERATE |
| LAYER Metal3 ; |
| ENCLOSURE 0.060 0.010 ; |
| LAYER Metal4 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via3_0_RULE |
| |
| VIARULE Via3_0 GENERATE |
| LAYER Metal3 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Metal4 ; |
| ENCLOSURE 0.010 0.060 ; |
| LAYER Via3 ; |
| RECT -0.130 -0.130 0.130 0.130 ; |
| SPACING 0.520 BY 0.520 ; |
| END Via3_0 |
| |
| VIA Via3_4X4H_HH_DEFAULT DEFAULT |
| LAYER Via3 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal3 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| LAYER Metal4 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| END Via3_4X4H_HH_DEFAULT |
| |
| VIA Via3_4X4H_HV_DEFAULT DEFAULT |
| LAYER Via3 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal3 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| LAYER Metal4 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| END Via3_4X4H_HV_DEFAULT |
| |
| VIA Via3_4X4H_VH_DEFAULT DEFAULT |
| LAYER Via3 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal3 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| LAYER Metal4 ; |
| RECT -1.120 -1.070 1.120 1.070 ; |
| END Via3_4X4H_VH_DEFAULT |
| |
| VIA Via3_4X4H_VV_DEFAULT DEFAULT |
| LAYER Via3 ; |
| RECT -1.060 -1.060 -0.800 -0.800 ; |
| RECT -0.440 -1.060 -0.180 -0.800 ; |
| RECT 0.180 -1.060 0.440 -0.800 ; |
| RECT 0.800 -1.060 1.060 -0.800 ; |
| RECT -1.060 -0.440 -0.800 -0.180 ; |
| RECT -0.440 -0.440 -0.180 -0.180 ; |
| RECT 0.180 -0.440 0.440 -0.180 ; |
| RECT 0.800 -0.440 1.060 -0.180 ; |
| RECT -1.060 0.180 -0.800 0.440 ; |
| RECT -0.440 0.180 -0.180 0.440 ; |
| RECT 0.180 0.180 0.440 0.440 ; |
| RECT 0.800 0.180 1.060 0.440 ; |
| RECT -1.060 0.800 -0.800 1.060 ; |
| RECT -0.440 0.800 -0.180 1.060 ; |
| RECT 0.180 0.800 0.440 1.060 ; |
| RECT 0.800 0.800 1.060 1.060 ; |
| LAYER Metal3 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| LAYER Metal4 ; |
| RECT -1.070 -1.120 1.070 1.120 ; |
| END Via3_4X4H_VV_DEFAULT |
| |
| |
| END LIBRARY |
