rules/klayout/drc/rule_decks/mim_capacitor_option_a_.drc

#=============================================================================================================================================================
#--------------------------------------------------- GF 0.18um MCU DRC RULE DECK (MIM CAPACITOR OPTION A ) ---------------------------------------------------
#=============================================================================================================================================================

require 'time'
require "logger"

exec_start_time = Time.now

logger = Logger.new(STDOUT)

logger.formatter = proc do |severity, datetime, progname, msg|
  "#{datetime}: Memory Usage (" + `pmap #{Process.pid} | tail -1`[10,40].strip + ") : #{msg}
"
end

#================================================
#----------------- FILE SETUP -------------------
#================================================

# optional for a batch launch :   klayout -b -r gf180mcu.drc -rd input=design.gds -rd report=gf180mcu_main.lyrdb

logger.info("Starting running GF180MCU Klayout DRC runset on %s" % [$input])

if $input
    if $topcell
        source($input, $topcell)
    else
        source($input)
    end
end

logger.info("Loading database to memory is complete.")

if $report
    logger.info("GF180MCU Klayout DRC runset output at: %s" % [$report])
    report("DRC Run Report at", $report)
else
    logger.info("GF180MCU Klayout DRC runset output at default location." % [File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb").path])
    report("DRC Run Report at", File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb"))
end

if $thr
    logger.info("Number of threads to use %s" % [$thr])
    threads($thr)
else
    logger.info("Number of threads to use 16")
    threads(16)
end

# === TILING MODE ===
if $run_mode == "tiling"
  # use a tile size of 1mm - not used in deep mode-
  # tiles(500.um)
  # use a tile border of 10 micron:
  # tile_borders(10.um)
  tiles(1000)
  logger.info("Tiling  mode is enabled.")

elsif $run_mode == "deep"
  #=== HIER MODE ===
  deep
  logger.info("deep  mode is enabled.")

elsif $run_mode == "flat"
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

else
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

end # run_mode

#================================================
#------------- LAYERS DEFINITIONS ---------------
#================================================

v5_xtor        = polygons(112, 1 )
dualgate       = polygons(55 , 0 )
poly2          = polygons(30 , 0 )
nplus          = polygons(32 , 0 )
pplus          = polygons(31 , 0 )
comp           = polygons(22 , 0 )
via1           = polygons(35 , 0 )
metal2         = polygons(36 , 0 )
via2           = polygons(38 , 0 )
fusetop        = polygons(75 , 0 )
cap_mk         = polygons(117, 5 )

logger.info("Starting deriving base layers.")
#================================================
#------------- LAYERS DERIVATIONS ---------------
#================================================

ncomp      =  comp      & nplus
pcomp      =  comp      & pplus
tgate      =  poly2     & comp
ngate      =  nplus     & tgate
pgate      =  pplus     & tgate

#================================================
#------------------ SWITCHES --------------------
#================================================
logger.info("Evaluate switches.")

# FEOL
if $feol == "false"
  FEOL = $feol
  logger.info("FEOL is disabled.")
else
  FEOL = "true"
  logger.info("FEOL is enabled.")
end # FEOL

# BEOL
if $beol == "false"
  BEOL = $beol
  logger.info("BEOL is disabled.")
else
  BEOL = "true"
  logger.info("BEOL is enabled.")
end # BEOL

# connectivity rules
if $conn_drc == "true"
  CONNECTIVITY_RULES = $conn_drc
  logger.info("connectivity rules are enabled.")
else
  CONNECTIVITY_RULES = false
  logger.info("connectivity rules are disabled.")
end # connectivity rules

# METAL_TOP
if $metal_top
  METAL_TOP = $metal_top
else
  METAL_TOP = "9K"
end # METAL_TOP

logger.info("METAL_TOP Selected is %s" % [METAL_TOP])

# METAL_LEVEL
if $metal_level
  METAL_LEVEL = $metal_level
else
  METAL_LEVEL = "6LM"
end # METAL_LEVEL

logger.info("METAL_STACK Selected is %s" % [METAL_LEVEL])

# WEDGE
if $wedge == "false"
  WEDGE = $wedge
else
  WEDGE = "true"
end # WEDGE

logger.info("Wedge enabled  %s" % [WEDGE])

# BALL
if $ball == "false"
  BALL = $ball
else
  BALL = "true"
end # BALL

logger.info("Ball enabled  %s" % [BALL])

# GOLD
if $gold == "false"
  GOLD = $gold
else
  GOLD = "true"
end # GOLD

logger.info("Gold enabled  %s" % [GOLD])

if $mim_option
  MIM_OPTION = $mim_option
else
  MIM_OPTION = "Nan"
end

logger.info("MIM Option selected %s" % [MIM_OPTION])

# OFFGRID
if $offgrid == "false"
  OFFGRID = false
else
  OFFGRID = true
end # OFFGRID

logger.info("Offgrid enabled  %s" % [OFFGRID])

#================================================
#------------MIM CAPACITOR OPTION A -------------
#================================================

if MIM_OPTION == "A"
logger.info("MIM Capacitor Option A section")

mim_virtual = fusetop.sized(1.06.um).and(metal2.interacting(fusetop))
# Rule MIM.1: Minimum MiM bottom plate spacing to the bottom plate metal (whether adjacent MiM or routing metal). is 1.2µm
logger.info("Executing rule MIM.1")
mim1_l1 = metal2.separation(mim_virtual ,transparent, 1.2.um).polygons(0.001)
mim1_l1.output("MIM.1", "MIM.1 : Minimum MiM bottom plate spacing to the bottom plate metal (whether adjacent MiM or routing metal). : 1.2µm")
mim1_l1.forget

# Rule MIM.2: Minimum MiM bottom plate overlap of Via2 layer. [This is applicable for via2 within 1.06um oversize of FuseTop layer (referenced to virtual bottom plate)]. is 0.4µm
logger.info("Executing rule MIM.2")
mim2_l1 = metal2.enclosing(via2.overlapping(mim_virtual), 0.4.um, euclidian).polygons(0.001)
mim2_l2 = via2.overlapping(mim_virtual).not_outside(metal2).not(metal2)
mim2_l  = mim2_l1.or(mim2_l2)
mim2_l.output("MIM.2", "MIM.2 : Minimum MiM bottom plate overlap of Via2 layer. [This is applicable for via2 within 1.06um oversize of FuseTop layer (referenced to virtual bottom plate)]. : 0.4µm")
mim2_l1.forget
mim2_l2.forget
mim2_l.forget

# Rule MIM.3: Minimum MiM bottom plate overlap of Top plate.
logger.info("Executing rule MIM.3")
mim3_l1 = mim_virtual.enclosing(fusetop,0.6.um).polygons(0.001).or(fusetop.not_inside(mim_virtual))
mim3_l1.output("MIM.3", "MIM.3 : Minimum MiM bottom plate overlap of Top plate.")
mim3_l1.forget

mim_virtual.forget
# Rule MIM.4: Minimum MiM top plate (FuseTop) overlap of Via2. is 0.4µm
logger.info("Executing rule MIM.4")
mim4_l1 = fusetop.enclosing(via2, 0.4.um, euclidian).polygons(0.001)
mim4_l2 = via2.not_outside(fusetop).not(fusetop)
mim4_l  = mim4_l1.or(mim4_l2)
mim4_l.output("MIM.4", "MIM.4 : Minimum MiM top plate (FuseTop) overlap of Via2. : 0.4µm")
mim4_l1.forget
mim4_l2.forget
mim4_l.forget

# Rule MIM.5: Minimum spacing between top plate and the Via2 connecting to the bottom plate. is 0.4µm
logger.info("Executing rule MIM.5")
mim5_l1  = fusetop.separation(via2.interacting(metal2), 0.4.um, euclidian).polygons(0.001)
mim5_l1.output("MIM.5", "MIM.5 : Minimum spacing between top plate and the Via2 connecting to the bottom plate. : 0.4µm")
mim5_l1.forget

# Rule MIM.6: Minimum spacing between unrelated top plates. is 0.6µm
logger.info("Executing rule MIM.6")
mim6_l1  = fusetop.space(0.6.um, euclidian).polygons(0.001)
mim6_l1.output("MIM.6", "MIM.6 : Minimum spacing between unrelated top plates. : 0.6µm")
mim6_l1.forget

# Rule MIM.7: Min FuseTop enclosure by CAP_MK.
logger.info("Executing rule MIM.7")
mim7_l1 = fusetop.not_inside(cap_mk)
mim7_l1.output("MIM.7", "MIM.7 : Min FuseTop enclosure by CAP_MK.")
mim7_l1.forget

# Rule MIM.8a: Minimum MIM cap area (defined by FuseTop area) (um2). is 25µm²
logger.info("Executing rule MIM.8a")
mim8a_l1  = fusetop.with_area(nil, 25.um)
mim8a_l1.output("MIM.8a", "MIM.8a : Minimum MIM cap area (defined by FuseTop area) (um2). : 25µm²")
mim8a_l1.forget
# Rule MIM.8b: Maximum single MIM Cap area (Use multiple MIM caps in parallel connection if bigger capacitors are required) (um2). is 10000µm
logger.info("Executing rule MIM.8b")
mim8b_l1 = fusetop.with_area(10000.um,nil).not_in(fusetop.with_area(10000.um))
mim8b_l1.output("MIM.8b", "MIM.8b : Maximum single MIM Cap area (Use multiple MIM caps in parallel connection if bigger capacitors are required) (um2). : 10000µm")
mim8b_l1.forget

# Rule MIM.9: Min. via spacing for sea of via on MIM top plate. is 0.5µm
logger.info("Executing rule MIM.9")
mim9_l1  = via2.inside(fusetop).space(0.5.um, euclidian).polygons(0.001)
mim9_l1.output("MIM.9", "MIM.9 : Min. via spacing for sea of via on MIM top plate. : 0.5µm")
mim9_l1.forget

# Rule MIM.10: (a) There cannot be any Via1 touching MIM bottom plate Metal2. (b) MIM bottom plate Metal2 can only be connected through the higher Via (Via2).
logger.info("Executing rule MIM.10")
mim10_l1 = via1.interacting(metal2.interacting(fusetop))
mim10_l1.output("MIM.10", "MIM.10 : (a) There cannot be any Via1 touching MIM bottom plate Metal2. (b) MIM bottom plate Metal2 can only be connected through the higher Via (Via2).")
mim10_l1.forget

mim11_large_metal2 = metal2.interacting(fusetop).with_area(10000, nil)
mim11_large_metal2_violation = polygon_layer
mim11_large_metal2.data.each do |p|
  mim11_metal2_polygon_layer = polygon_layer
  mim11_metal2_polygon_layer.data.insert(p)
  fuse_in_polygon = fusetop.and(mim11_metal2_polygon_layer)
  if(fuse_in_polygon.area > 10000)
    mim11_bad_metal2_polygon = mim11_metal2_polygon_layer.interacting(fuse_in_polygon)
    mim11_bad_metal2_polygon.data.each do |b|
      b.num_points > 0 && mim11_large_metal2_violation.data.insert(b)
    end
  end
end
# Rule MIM.11: Bottom plate of multiple MIM caps can be shared (for common nodes) as long as total MIM area with that single common plate does not exceed MIM.8b rule. is -µm
logger.info("Executing rule MIM.11")
mim11_l1  = mim11_large_metal2_violation
mim11_l1.output("MIM.11", "MIM.11 : Bottom plate of multiple MIM caps can be shared (for common nodes) as long as total MIM area with that single common plate does not exceed MIM.8b rule. : -µm")
mim11_l1.forget

mim11_large_metal2.forget
mim11_large_metal2_violation.forget
# rule MIM.12 is not a DRC check


else
logger.info("MIM Capacitor Option A not Selected")

end #MIM_OPTION


exec_end_time = Time.now
run_time = exec_end_time - exec_start_time
logger.info("DRC Run time %f seconds" % [run_time])