rules/klayout/drc/rule_decks/metaltop.drc

#=============================================================================================================================================================
#---------------------------------------------------------- GF 0.18um MCU DRC RULE DECK (METALTOP) -----------------------------------------------------------
#=============================================================================================================================================================

require 'time'
require "logger"

exec_start_time = Time.now

logger = Logger.new(STDOUT)

logger.formatter = proc do |severity, datetime, progname, msg|
  "#{datetime}: Memory Usage (" + `pmap #{Process.pid} | tail -1`[10,40].strip + ") : #{msg}
"
end

#================================================
#----------------- FILE SETUP -------------------
#================================================

# optional for a batch launch :   klayout -b -r gf180mcu.drc -rd input=design.gds -rd report=gf180mcu_main.lyrdb

logger.info("Starting running GF180MCU Klayout DRC runset on %s" % [$input])

if $input
    if $topcell
        source($input, $topcell)
    else
        source($input)
    end
end

logger.info("Loading database to memory is complete.")

if $report
    logger.info("GF180MCU Klayout DRC runset output at: %s" % [$report])
    report("DRC Run Report at", $report)
else
    logger.info("GF180MCU Klayout DRC runset output at default location." % [File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb").path])
    report("DRC Run Report at", File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb"))
end

if $thr
    logger.info("Number of threads to use %s" % [$thr])
    threads($thr)
else
    logger.info("Number of threads to use 16")
    threads(16)
end

# === TILING MODE ===
if $run_mode == "tiling"
  # use a tile size of 1mm - not used in deep mode-
  # tiles(500.um)
  # use a tile border of 10 micron:
  # tile_borders(10.um)
  tiles(1000)
  logger.info("Tiling  mode is enabled.")

elsif $run_mode == "deep"
  #=== HIER MODE ===
  deep
  logger.info("deep  mode is enabled.")

elsif $run_mode == "flat"
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

else
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

end # run_mode

#================================================
#------------- LAYERS DEFINITIONS ---------------
#================================================

v5_xtor        = polygons(112, 1 )
dualgate       = polygons(55 , 0 )
poly2          = polygons(30 , 0 )
nplus          = polygons(32 , 0 )
pplus          = polygons(31 , 0 )
comp           = polygons(22 , 0 )
metaltop       = polygons(53 , 0 )
fusetop        = polygons(75 , 0 )
guard_ring_mk  = polygons(167, 5 )

logger.info("Starting deriving base layers.")
#================================================
#------------- LAYERS DERIVATIONS ---------------
#================================================

ncomp      =  comp      & nplus
pcomp      =  comp      & pplus
tgate      =  poly2     & comp
ngate      =  nplus     & tgate
pgate      =  pplus     & tgate

#================================================
#------------------ SWITCHES --------------------
#================================================
logger.info("Evaluate switches.")

# FEOL
if $feol == "false"
  FEOL = $feol
  logger.info("FEOL is disabled.")
else
  FEOL = "true"
  logger.info("FEOL is enabled.")
end # FEOL

# BEOL
if $beol == "false"
  BEOL = $beol
  logger.info("BEOL is disabled.")
else
  BEOL = "true"
  logger.info("BEOL is enabled.")
end # BEOL

# connectivity rules
if $conn_drc == "true"
  CONNECTIVITY_RULES = $conn_drc
  logger.info("connectivity rules are enabled.")
else
  CONNECTIVITY_RULES = false
  logger.info("connectivity rules are disabled.")
end # connectivity rules

# METAL_TOP
if $metal_top
  METAL_TOP = $metal_top
else
  METAL_TOP = "9K"
end # METAL_TOP

logger.info("METAL_TOP Selected is %s" % [METAL_TOP])

# METAL_LEVEL
if $metal_level
  METAL_LEVEL = $metal_level
else
  METAL_LEVEL = "6LM"
end # METAL_LEVEL

logger.info("METAL_STACK Selected is %s" % [METAL_LEVEL])

# WEDGE
if $wedge == "false"
  WEDGE = $wedge
else
  WEDGE = "true"
end # WEDGE

logger.info("Wedge enabled  %s" % [WEDGE])

# BALL
if $ball == "false"
  BALL = $ball
else
  BALL = "true"
end # BALL

logger.info("Ball enabled  %s" % [BALL])

# GOLD
if $gold == "false"
  GOLD = $gold
else
  GOLD = "true"
end # GOLD

logger.info("Gold enabled  %s" % [GOLD])

if $mim_option
  MIM_OPTION = $mim_option
else
  MIM_OPTION = "Nan"
end

logger.info("MIM Option selected %s" % [MIM_OPTION])

# OFFGRID
if $offgrid == "false"
  OFFGRID = false
else
  OFFGRID = true
end # OFFGRID

logger.info("Offgrid enabled  %s" % [OFFGRID])

#================================================
#------------- METAL LEVEL SWITCHES -------------
#================================================


if METAL_LEVEL == "6LM"
    via4           = polygons(41 , 0 )
    metal5         = polygons(81 , 0 )
    via5           = polygons(82 , 0 )
    metaltop       = polygons(53 , 0 )
    top_via       = via5
    topmin1_via   = via4
    top_metal     = metaltop
    topmin1_metal = metal5
elsif METAL_LEVEL == "5LM"
    via3           = polygons(40 , 0 )
    metal4         = polygons(46 , 0 )
    via4           = polygons(41 , 0 )
    metal5         = polygons(81 , 0 )
    top_via       = via4
    topmin1_via   = via3
    top_metal     = metal5
    topmin1_metal = metal4
elsif METAL_LEVEL == "4LM"
    via2           = polygons(38 , 0 )
    metal3         = polygons(42 , 0 )
    via3           = polygons(40 , 0 )
    metal4         = polygons(46 , 0 )
    top_via       = via3
    topmin1_via   = via2
    top_metal     = metal4
    topmin1_metal = metal3
elsif METAL_LEVEL == "3LM"
    via1           = polygons(35 , 0 )
    metal2         = polygons(36 , 0 )
    via2           = polygons(38 , 0 )
    metal3         = polygons(42 , 0 )
    top_via       = via2
    topmin1_via   = via1
    top_metal     = metal3
    topmin1_metal = metal2
elsif METAL_LEVEL == "2LM"
    metal1         = polygons(34 , 0 )
    via1           = polygons(35 , 0 )
    metal2         = polygons(36 , 0 )
    top_via       = via1
    topmin1_via   = via1
    top_metal     = metal2
    topmin1_metal = metal1
end #METAL_LEVEL


#================================================
#--------------------METALTOP--------------------
#================================================


if BEOL
logger.info("BEOL section")

if METAL_TOP == "6K"
logger.info("MetalTop thickness 6k section")

# Rule MT.1: min. metaltop width is 0.36µm
logger.info("Executing rule MT.1")
mt1_l1  = metaltop.width(0.36.um, euclidian).polygons(0.001)
mt1_l1.output("MT.1", "MT.1 : min. metaltop width : 0.36µm")
mt1_l1.forget

# Rule MT.2a: min. metaltop spacing is 0.38µm
logger.info("Executing rule MT.2a")
mt2a_l1  = metaltop.space(0.38.um, euclidian).polygons(0.001)
mt2a_l1.output("MT.2a", "MT.2a : min. metaltop spacing : 0.38µm")
mt2a_l1.forget

# Rule MT.4: Minimum MetalTop area is 0.5625µm²
logger.info("Executing rule MT.4")
mt4_l1  = metaltop.with_area(nil, 0.5625.um)
mt4_l1.output("MT.4", "MT.4 : Minimum MetalTop area : 0.5625µm²")
mt4_l1.forget
elsif METAL_TOP == "9K"
logger.info("MetalTop thickness 9k/11k section")

# Rule MT.1: min. metaltop width is 0.44µm
logger.info("Executing rule MT.1")
mt1_l1  = metaltop.width(0.44.um, euclidian).polygons(0.001)
mt1_l1.output("MT.1", "MT.1 : min. metaltop width : 0.44µm")
mt1_l1.forget

# Rule MT.2a: min. metaltop spacing is 0.46µm
logger.info("Executing rule MT.2a")
mt2a_l1  = metaltop.space(0.46.um, euclidian).polygons(0.001)
mt2a_l1.output("MT.2a", "MT.2a : min. metaltop spacing : 0.46µm")
mt2a_l1.forget

# Rule MT.4: Minimum MetalTop area is 0.5625µm²
logger.info("Executing rule MT.4")
mt4_l1  = metaltop.with_area(nil, 0.5625.um)
mt4_l1.output("MT.4", "MT.4 : Minimum MetalTop area : 0.5625µm²")
mt4_l1.forget
elsif METAL_TOP == "30K"
logger.info("MetalTop thickness 30K section")

# Rule MT30.1a: Min. thick MetalTop width. is 1.8µm
logger.info("Executing rule MT30.1a")
mt301a_l1  = metaltop.width(1.8.um, euclidian).polygons(0.001)
mt301a_l1.output("MT30.1a", "MT30.1a : Min. thick MetalTop width. : 1.8µm")
mt301a_l1.forget

# Rule MT30.1b: Min width for >1000um long metal line (based on metal edge). is 2.2µm
logger.info("Executing rule MT30.1b")
mt301b_l1  = metaltop.interacting(metaltop.edges.with_length(1000.um, nil)).width(2.2.um, euclidian).polygons(0.001)
mt301b_l1.output("MT30.1b", "MT30.1b : Min width for >1000um long metal line (based on metal edge). : 2.2µm")
mt301b_l1.forget

# Rule MT30.2: Min. thick MetalTop space. is 1.8µm
logger.info("Executing rule MT30.2")
mt302_l1  = metaltop.space(1.8.um, euclidian).polygons(0.001)
mt302_l1.output("MT30.2", "MT30.2 : Min. thick MetalTop space. : 1.8µm")
mt302_l1.forget

# Rule MT30.3: The separation of two corners should satisfy the minimum spacing. is 1.8µm
logger.info("Executing rule MT30.3")
mt303_l1  = metaltop.space(1.8.um, euclidian).polygons(0.001)
mt303_l1.output("MT30.3", "MT30.3 : The separation of two corners should satisfy the minimum spacing. : 1.8µm")
mt303_l1.forget

# Rule MT30.4: The separation of single metal line from a any degree metal line should satisfy the minimum spacing. is 1.8µm
logger.info("Executing rule MT30.4")
mt304_l1  = metaltop.space(1.8.um, euclidian).polygons(0.001)
mt304_l1.output("MT30.4", "MT30.4 : The separation of single metal line from a any degree metal line should satisfy the minimum spacing. : 1.8µm")
mt304_l1.forget

# Rule MT30.5: Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed].
logger.info("Executing rule MT30.5")
mt305_l1 = top_metal.enclosing(top_via, 0.12.um, euclidian).polygons(0.001).or(top_via.not_inside(top_metal))
mt305_l1.output("MT30.5", "MT30.5 : Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed].")
mt305_l1.forget

mt30p6_cond = top_metal.drc( width <= 0.34.um)
mt30p6_eol = top_metal.edges.with_length(nil, 0.34.um).interacting(mt30p6_cond.first_edges).interacting(mt30p6_cond.second_edges).not(mt30p6_cond.first_edges).not(mt30p6_cond.second_edges)
# Rule MT30.6: Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed].
logger.info("Executing rule MT30.6")
mt306_l1 = mt30p6_eol.enclosing(top_via.edges,0.25.um, projection).polygons(0.001).or(top_via.not_inside(top_metal))
mt306_l1.output("MT30.6", "MT30.6 : Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed].")
mt306_l1.forget

mt30p6_cond.forget
mt30p6_eol.forget
mt30p8_via_no_mim  = top_via.sized(0.18.um).sized(-0.18.um).with_bbox_min(0.78.um , nil).extents.inside(top_metal)
mt30p8_via_mim     = top_via.interacting(fusetop).sized(0.3.um).sized(-0.3.um).with_bbox_min(1.02.um , nil).extents.inside(top_metal)
mt30p8_via         = mt30p8_via_no_mim.or(mt30p8_via_mim)
mt30p8_mask        = mt30p8_via.size(1).not(top_via).with_holes(4, nil)
mt30p8_slct_via    = top_via.interacting(mt30p8_mask)
# Rule MT30.8: There shall be minimum 2X2 array of vias (top vias) at one location connecting to 3um thick top metal.
logger.info("Executing rule MT30.8")
mt308_l1 = topmin1_metal.outside(guard_ring_mk).not_interacting(mt30p8_slct_via)
mt308_l1.output("MT30.8", "MT30.8 : There shall be minimum 2X2 array of vias (top vias) at one location connecting to 3um thick top metal.")
mt308_l1.forget

mt30p8_via.forget
mt30p8_mask.forget
mt30p8_slct_via.forget
end #METAL_TOP

end #BEOL


exec_end_time = Time.now
run_time = exec_end_time - exec_start_time
logger.info("DRC Run time %f seconds" % [run_time])