rules/klayout/drc/rule_decks/pplus.drc

# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
#     https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.

#=============================================================================================================================================================
#------------------------------------------------------------ GF 0.18um MCU DRC RULE DECK (PPLUS) ------------------------------------------------------------
#=============================================================================================================================================================

require 'time'
require "logger"

exec_start_time = Time.now

logger = Logger.new(STDOUT)

logger.formatter = proc do |severity, datetime, progname, msg|
  "#{datetime}: Memory Usage (" + `pmap #{Process.pid} | tail -1`[10,40].strip + ") : #{msg}
"
end

#================================================
#----------------- FILE SETUP -------------------
#================================================

# optional for a batch launch :   klayout -b -r gf180mcu.drc -rd input=design.gds -rd report=gf180mcu_main.lyrdb

logger.info("Starting running GF180MCU Klayout DRC runset on %s" % [$input])

if $input
    if $topcell
        source($input, $topcell)
    else
        source($input)
    end
end

logger.info("Loading database to memory is complete.")

if $report
    logger.info("GF180MCU Klayout DRC runset output at: %s" % [$report])
    report("DRC Run Report at", $report)
else
    logger.info("GF180MCU Klayout DRC runset output at default location." % [File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb").path])
    report("DRC Run Report at", File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb"))
end

if $thr
    logger.info("Number of threads to use %s" % [$thr])
    threads($thr)
else
    logger.info("Number of threads to use 16")
    threads(16)
end

# === TILING MODE ===
if $run_mode == "tiling"
  # use a tile size of 1mm - not used in deep mode-
  # tiles(500.um)
  # use a tile border of 10 micron:
  # tile_borders(10.um)
  tiles(1000)
  logger.info("Tiling  mode is enabled.")

elsif $run_mode == "deep"
  #=== HIER MODE ===
  deep
  logger.info("deep  mode is enabled.")

elsif $run_mode == "flat"
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

else
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

end # run_mode

#================================================
#------------- LAYERS DEFINITIONS ---------------
#================================================

v5_xtor        = polygons(112, 1 )
dualgate       = polygons(55 , 0 )
poly2          = polygons(30 , 0 )
nplus          = polygons(32 , 0 )
pplus          = polygons(31 , 0 )
comp           = polygons(22 , 0 )
dnwell         = polygons(12 , 0 )
nwell          = polygons(21 , 0 )
lvpwell        = polygons(204, 0 )
sab            = polygons(49 , 0 )
resistor       = polygons(62 , 0 )

logger.info("Starting deriving base layers.")
#================================================
#------------- LAYERS DERIVATIONS ---------------
#================================================

ncomp      =  comp      & nplus
pcomp      =  comp      & pplus
tgate      =  poly2     & comp
ngate      =  nplus     & tgate
pgate      =  pplus     & tgate

#================================================
#------------------ SWITCHES --------------------
#================================================
logger.info("Evaluate switches.")

# FEOL
if $feol == "false"
  FEOL = $feol
  logger.info("FEOL is disabled.")
else
  FEOL = "true"
  logger.info("FEOL is enabled.")
end # FEOL

# BEOL
if $beol == "false"
  BEOL = $beol
  logger.info("BEOL is disabled.")
else
  BEOL = "true"
  logger.info("BEOL is enabled.")
end # BEOL

# connectivity rules
if $conn_drc == "true"
  CONNECTIVITY_RULES = $conn_drc
  logger.info("connectivity rules are enabled.")
else
  CONNECTIVITY_RULES = false
  logger.info("connectivity rules are disabled.")
end # connectivity rules

# METAL_TOP
if $metal_top
  METAL_TOP = $metal_top
else
  METAL_TOP = "9K"
end # METAL_TOP

logger.info("METAL_TOP Selected is %s" % [METAL_TOP])

# METAL_LEVEL
if $metal_level
  METAL_LEVEL = $metal_level
else
  METAL_LEVEL = "6LM"
end # METAL_LEVEL

logger.info("METAL_STACK Selected is %s" % [METAL_LEVEL])

# WEDGE
if $wedge == "false"
  WEDGE = $wedge
else
  WEDGE = "true"
end # WEDGE

logger.info("Wedge enabled  %s" % [WEDGE])

# BALL
if $ball == "false"
  BALL = $ball
else
  BALL = "true"
end # BALL

logger.info("Ball enabled  %s" % [BALL])

# GOLD
if $gold == "false"
  GOLD = $gold
else
  GOLD = "true"
end # GOLD

logger.info("Gold enabled  %s" % [GOLD])

if $mim_option
  MIM_OPTION = $mim_option
else
  MIM_OPTION = "Nan"
end

logger.info("MIM Option selected %s" % [MIM_OPTION])

# OFFGRID
if $offgrid == "false"
  OFFGRID = false
else
  OFFGRID = true
end # OFFGRID

logger.info("Offgrid enabled  %s" % [OFFGRID])

#================================================
#---------------------PPLUS----------------------
#================================================


if FEOL
logger.info("FEOL section")

# Rule PP.1: min. pplus width is 0.4µm
logger.info("Executing rule PP.1")
pp1_l1  = pplus.width(0.4.um, euclidian).polygons(0.001)
pp1_l1.output("PP.1", "PP.1 : min. pplus width : 0.4µm")
pp1_l1.forget

# Rule PP.2: min. pplus spacing is 0.4µm
logger.info("Executing rule PP.2")
pp2_l1  = pplus.space(0.4.um, euclidian).polygons(0.001)
pp2_l1.output("PP.2", "PP.2 : min. pplus spacing : 0.4µm")
pp2_l1.forget

# Rule PP.3a: Space to NCOMP for NCOMP (1) inside LVPWELL (2) outside NWELL and DNWELL. is 0.16µm
logger.info("Executing rule PP.3a")
pp3a_l1  = pplus.separation((ncomp.inside(lvpwell)).or(ncomp.outside(nwell).outside(dnwell)), 0.16.um, euclidian).polygons(0.001)
pp3a_l1.output("PP.3a", "PP.3a : Space to NCOMP for NCOMP (1) inside LVPWELL (2) outside NWELL and DNWELL. : 0.16µm")
pp3a_l1.forget

pp_3bi = ncomp.edges.not(lvpwell.inside(dnwell).sized(0.429.um))
# Rule PP.3bi: Space to NCOMP: For Inside DNWELL. (i) NCOMP space to LVPWELL >= 0.43um. is 0.08µm
logger.info("Executing rule PP.3bi")
pp3bi_l1  = pplus.inside(dnwell).edges.separation(pp_3bi, 0.08.um, euclidian).polygons(0.001)
pp3bi_l1.output("PP.3bi", "PP.3bi : Space to NCOMP: For Inside DNWELL. (i) NCOMP space to LVPWELL >= 0.43um. : 0.08µm")
pp3bi_l1.forget

pp_3bi.forget
pp_3bii = ncomp.edges.and(lvpwell.inside(dnwell).sized(0.429.um))
# Rule PP.3bii: Space to NCOMP: For Inside DNWELL. (ii) NCOMP space to LVPWELL < 0.43um. is 0.16µm
logger.info("Executing rule PP.3bii")
pp3bii_l1  = pplus.inside(dnwell).edges.separation(pp_3bii, 0.16.um, euclidian).polygons(0.001)
pp3bii_l1.output("PP.3bii", "PP.3bii : Space to NCOMP: For Inside DNWELL. (ii) NCOMP space to LVPWELL < 0.43um. : 0.16µm")
pp3bii_l1.forget

pp_3bii.forget
pp_3ci_extend = nwell.outside(dnwell).sized(-0.429.um)
pp_3ci = ncomp.edges.and(pp_3ci_extend)
# Rule PP.3ci: Space to NCOMP: For Outside DNWELL, inside Nwell: (i) NWELL Overlap of NCOMP >= 0.43um. is 0.08µm
logger.info("Executing rule PP.3ci")
pp3ci_l1  = pplus.outside(dnwell).edges.separation(pp_3ci, 0.08.um, euclidian).polygons(0.001)
pp3ci_l1.output("PP.3ci", "PP.3ci : Space to NCOMP: For Outside DNWELL, inside Nwell: (i) NWELL Overlap of NCOMP >= 0.43um. : 0.08µm")
pp3ci_l1.forget

pp_3ci_extend.forget
pp_3ci.forget
pp_3cii_extend = nwell.outside(dnwell).not(nwell.outside(dnwell).sized(-0.429.um))
pp_3cii = ncomp.edges.and(pp_3cii_extend)
# Rule PP.3cii: Space to NCOMP: For Outside DNWELL, inside Nwell: (ii) NWELL Overlap of NCOMP 0.43um. is 0.16µm
logger.info("Executing rule PP.3cii")
pp3cii_l1  = pplus.outside(dnwell).edges.separation(pp_3cii, 0.16.um, euclidian).polygons(0.001)
pp3cii_l1.output("PP.3cii", "PP.3cii : Space to NCOMP: For Outside DNWELL, inside Nwell: (ii) NWELL Overlap of NCOMP 0.43um. : 0.16µm")
pp3cii_l1.forget

pp_3cii_extend.forget
pp_3cii.forget
# Rule PP.3d: Min/max space to a butted NCOMP.
logger.info("Executing rule PP.3d")
pp3d_l1 = pplus.not_outside(ncomp)
pp3d_l1.output("PP.3d", "PP.3d : Min/max space to a butted NCOMP.")
pp3d_l1.forget

# Rule PP.3e: Space to NCOMP edge adjacent to a butting edge.
logger.info("Executing rule PP.3e")
pp3e_l1 = pplus.not_outside(ncomp)
pp3e_l1.output("PP.3e", "PP.3e : Space to NCOMP edge adjacent to a butting edge.")
pp3e_l1.forget

# Rule PP.4a: Space related to N-channel gate at a butting edge parallel to gate. is 0.32µm
logger.info("Executing rule PP.4a")
pp4a_l1 = pplus.edges.and(ncomp.edges).separation(ngate.edges, 0.32.um, projection).polygons(0.001)
pp4a_l1.output("PP.4a", "PP.4a : Space related to N-channel gate at a butting edge parallel to gate. : 0.32µm")
pp4a_l1.forget

pp_4b_poly = poly2.edges.interacting(ngate.edges.not(ncomp.edges)).centers(0, 0.99).and(ngate.sized(0.32.um))
# Rule PP.4b: Within 0.32um of channel, space to N-channel gate extension perpendicular to the direction of Poly2.
logger.info("Executing rule PP.4b")
pp4b_l1 = pplus.interacting(pplus.edges.separation(pp_4b_poly, 0.22.um, projection).polygons(0.001))
pp4b_l1.output("PP.4b", "PP.4b : Within 0.32um of channel, space to N-channel gate extension perpendicular to the direction of Poly2.")
pp4b_l1.forget

pp_4b_poly.forget
# Rule PP.5a: Overlap of P-channel gate. is 0.23µm
logger.info("Executing rule PP.5a")
pp5a_l1 = pplus.enclosing(pgate, 0.23.um, euclidian).polygons(0.001)
pp5a_l2 = pgate.not_outside(pplus).not(pplus)
pp5a_l  = pp5a_l1.or(pp5a_l2)
pp5a_l.output("PP.5a", "PP.5a : Overlap of P-channel gate. : 0.23µm")
pp5a_l1.forget
pp5a_l2.forget
pp5a_l.forget

# Rule PP.5b: Extension beyond COMP for COMP (1) Inside NWELL (2) outside LVPWELL but inside DNWELL. is 0.16µm
logger.info("Executing rule PP.5b")
pp5b_l1 = pplus.not_outside(nwell).or(pplus.outside(lvpwell).inside(dnwell)).edges.not(nplus).enclosing(comp.edges, 0.16.um, euclidian).polygons(0.001)
pp5b_l1.output("PP.5b", "PP.5b : Extension beyond COMP for COMP (1) Inside NWELL (2) outside LVPWELL but inside DNWELL. : 0.16µm")
pp5b_l1.forget

pp_5ci_background = pplus.not_outside(lvpwell).inside(dnwell).edges.not(nplus.edges)
pp_5ci_extend = lvpwell.inside(dnwell).sized(-0.429.um)
pp_5ci_foreground = pcomp.not_outside(lvpwell).inside(dnwell).edges.not(nplus.edges).inside_part(pp_5ci_extend)
# Rule PP.5ci: Extension beyond COMP: For Inside DNWELL, inside LVPWELL: (i) For LVPWELL overlap of Pplus >= 0.43um for LVPWELL tap. is 0.02µm
logger.info("Executing rule PP.5ci")
pp5ci_l1 = pp_5ci_background.enclosing(pp_5ci_foreground, 0.02.um, euclidian).polygons(0.001)
pp5ci_l1.output("PP.5ci", "PP.5ci : Extension beyond COMP: For Inside DNWELL, inside LVPWELL: (i) For LVPWELL overlap of Pplus >= 0.43um for LVPWELL tap. : 0.02µm")
pp5ci_l1.forget

pp_5ci_background.forget
pp_5ci_extend.forget
pp_5ci_foreground.forget
pp_5cii_background = pplus.not_outside(lvpwell).inside(dnwell).edges
pp_5cii_extend = lvpwell.inside(dnwell).not(lvpwell.inside(dnwell).sized(-0.429.um))
pp_5cii_foreground = pcomp.not_outside(lvpwell).inside(dnwell).edges.not(nplus.edges).and(pp_5cii_extend)
# Rule PP.5cii: Extension beyond COMP: For Inside DNWELL, inside LVPWELL: (ii) For LVPWELL overlap of Pplus < 0.43um for the LVPWELL tap. is 0.16µm
logger.info("Executing rule PP.5cii")
pp5cii_l1 = pp_5cii_background.enclosing(pp_5cii_foreground, 0.16.um, projection).polygons(0.001)
pp5cii_l1.output("PP.5cii", "PP.5cii : Extension beyond COMP: For Inside DNWELL, inside LVPWELL: (ii) For LVPWELL overlap of Pplus < 0.43um for the LVPWELL tap. : 0.16µm")
pp5cii_l1.forget

pp_5cii_background.forget
pp_5cii_extend.forget
pp_5cii_foreground.forget
pp_5di_background = pplus.outside(dnwell).edges
pp_5di_foreground = pcomp.outside(dnwell).edges.not(nplus.edges).not(nwell.outside(dnwell).sized(0.429.um))
# Rule PP.5di: Extension beyond COMP: For Outside DNWELL (i) For Pplus to NWELL space >= 0.43um for Pfield or LVPWELL tap. is 0.02µm
logger.info("Executing rule PP.5di")
pp5di_l1 = pp_5di_background.enclosing(pp_5di_foreground, 0.02.um, projection).polygons(0.001)
pp5di_l1.output("PP.5di", "PP.5di : Extension beyond COMP: For Outside DNWELL (i) For Pplus to NWELL space >= 0.43um for Pfield or LVPWELL tap. : 0.02µm")
pp5di_l1.forget

pp_5di_background.forget
pp_5di_foreground.forget
pp_5dii_background = pplus.outside(dnwell).edges
pp_5dii_foreground = pcomp.outside(dnwell).edges.not(nplus.edges).and(nwell.outside(dnwell).sized(0.429.um))
# Rule PP.5dii: Extension beyond COMP: For Outside DNWELL (ii) For Pplus to NWELL space < 0.43um for Pfield or LVPWELL tap. is 0.16µm
logger.info("Executing rule PP.5dii")
pp5dii_l1 = pp_5dii_background.enclosing(pp_5dii_foreground, 0.16.um, projection).polygons(0.001)
pp5dii_l1.output("PP.5dii", "PP.5dii : Extension beyond COMP: For Outside DNWELL (ii) For Pplus to NWELL space < 0.43um for Pfield or LVPWELL tap. : 0.16µm")
pp5dii_l1.forget

pp_5dii_background.forget
pp_5dii_foreground.forget
# Rule PP.6: Overlap with PCOMP butted to NCOMP. is 0.22µm
logger.info("Executing rule PP.6")
pp6_l1 = comp.interacting(pplus).enclosing(ncomp.interacting(pplus), 0.22.um, projection).polygons
pp6_l1.output("PP.6", "PP.6 : Overlap with PCOMP butted to NCOMP. : 0.22µm")
pp6_l1.forget

# Rule PP.7: Space to unrelated unsalicided Poly2. is 0.18µm
logger.info("Executing rule PP.7")
pp7_l1  = pplus.separation(poly2.and(sab), 0.18.um, euclidian).polygons(0.001)
pp7_l1.output("PP.7", "PP.7 : Space to unrelated unsalicided Poly2. : 0.18µm")
pp7_l1.forget

# Rule PP.8a: Minimum Pplus area (um2). is 0.35µm²
logger.info("Executing rule PP.8a")
pp8a_l1  = pplus.with_area(nil, 0.35.um)
pp8a_l1.output("PP.8a", "PP.8a : Minimum Pplus area (um2). : 0.35µm²")
pp8a_l1.forget
# Rule PP.8b: Minimum area enclosed by Pplus (um2). is 0.35µm²
logger.info("Executing rule PP.8b")
pp8b_l1  = pplus.holes.with_area(nil, 0.35.um)
pp8b_l1.output("PP.8b", "PP.8b : Minimum area enclosed by Pplus (um2). : 0.35µm²")
pp8b_l1.forget
# Rule PP.9: Overlap of unsalicided Poly2. is 0.18µm
logger.info("Executing rule PP.9")
pp9_l1 = pplus.enclosing(poly2.not_interacting(resistor).and(sab), 0.18.um, euclidian).polygons(0.001)
pp9_l2 = poly2.not_interacting(resistor).and(sab).not_outside(pplus).not(pplus)
pp9_l  = pp9_l1.or(pp9_l2)
pp9_l.output("PP.9", "PP.9 : Overlap of unsalicided Poly2. : 0.18µm")
pp9_l1.forget
pp9_l2.forget
pp9_l.forget

# Rule PP.10: Overlap of unsalicided COMP. is 0.18µm
logger.info("Executing rule PP.10")
pp10_l1 = pplus.enclosing(comp.and(sab), 0.18.um, euclidian).polygons(0.001)
pp10_l1.output("PP.10", "PP.10 : Overlap of unsalicided COMP. : 0.18µm")
pp10_l1.forget

pp_11_in_dnwell = pplus.interacting(pplus.edges.and(ncomp.edges).and(lvpwell.inside(dnwell).sized(0.429.um)))
pp_11_out_dnwell = pplus.interacting(pplus.edges.and(ncomp.edges).and(nwell.outside(dnwell).not(nwell.outside(dnwell).sized(-0.429.um))))
# Rule PP.11: Butting Pplus and NCOMP is forbidden within 0.43um of Nwell edge (for outside DNWELL) and of LVPWELL edge (for inside DNWELL case).
logger.info("Executing rule PP.11")
pp11_l1 = pp_11_in_dnwell.or(pp_11_out_dnwell)
pp11_l1.output("PP.11", "PP.11 : Butting Pplus and NCOMP is forbidden within 0.43um of Nwell edge (for outside DNWELL) and of LVPWELL edge (for inside DNWELL case).")
pp11_l1.forget

pp_11_in_dnwell.forget
pp_11_out_dnwell.forget
# Rule PP.12: Overlap with N-channel Poly2 gate extension is forbidden within 0.32um of N-channel gate.
logger.info("Executing rule PP.12")
pp12_l1 = pplus.interacting(pplus.edges.separation(ngate.edges.and(ncomp.edges), 0.32.um, euclidian).polygons(0.001))
pp12_l1.output("PP.12", "PP.12 : Overlap with N-channel Poly2 gate extension is forbidden within 0.32um of N-channel gate.")
pp12_l1.forget


end #FEOL


exec_end_time = Time.now
run_time = exec_end_time - exec_start_time
logger.info("DRC Run time %f seconds" % [run_time])