rules/klayout/drc/rule_decks/via3.drc

# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
#     https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.

#=============================================================================================================================================================
#------------------------------------------------------------ GF 0.18um MCU DRC RULE DECK (VIA3) -------------------------------------------------------------
#=============================================================================================================================================================

require 'time'
require "logger"

exec_start_time = Time.now

logger = Logger.new(STDOUT)

logger.formatter = proc do |severity, datetime, progname, msg|
  "#{datetime}: Memory Usage (" + `pmap #{Process.pid} | tail -1`[10,40].strip + ") : #{msg}
"
end

#================================================
#----------------- FILE SETUP -------------------
#================================================

# optional for a batch launch :   klayout -b -r gf180mcu.drc -rd input=design.gds -rd report=gf180mcu_main.lyrdb

logger.info("Starting running GF180MCU Klayout DRC runset on %s" % [$input])

if $input
    if $topcell
        source($input, $topcell)
    else
        source($input)
    end
end

logger.info("Loading database to memory is complete.")

if $report
    logger.info("GF180MCU Klayout DRC runset output at: %s" % [$report])
    report("DRC Run Report at", $report)
else
    logger.info("GF180MCU Klayout DRC runset output at default location." % [File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb").path])
    report("DRC Run Report at", File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb"))
end

if $thr
    logger.info("Number of threads to use %s" % [$thr])
    threads($thr)
else
    logger.info("Number of threads to use 16")
    threads(16)
end

# === TILING MODE ===
if $run_mode == "tiling"
  # use a tile size of 1mm - not used in deep mode-
  # tiles(500.um)
  # use a tile border of 10 micron:
  # tile_borders(10.um)
  tiles(1000)
  logger.info("Tiling  mode is enabled.")

elsif $run_mode == "deep"
  #=== HIER MODE ===
  deep
  logger.info("deep  mode is enabled.")

elsif $run_mode == "flat"
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

else
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

end # run_mode

#================================================
#------------- LAYERS DEFINITIONS ---------------
#================================================

v5_xtor        = polygons(112, 1 )
dualgate       = polygons(55 , 0 )
poly2          = polygons(30 , 0 )
nplus          = polygons(32 , 0 )
pplus          = polygons(31 , 0 )
comp           = polygons(22 , 0 )
metal3         = polygons(42 , 0 )
via3           = polygons(40 , 0 )
metal4         = polygons(46 , 0 )

logger.info("Starting deriving base layers.")
#================================================
#------------- LAYERS DERIVATIONS ---------------
#================================================

ncomp      =  comp      & nplus
pcomp      =  comp      & pplus
tgate      =  poly2     & comp
ngate      =  nplus     & tgate
pgate      =  pplus     & tgate

#================================================
#------------------ SWITCHES --------------------
#================================================
logger.info("Evaluate switches.")

# FEOL
if $feol == "false"
  FEOL = $feol
  logger.info("FEOL is disabled.")
else
  FEOL = "true"
  logger.info("FEOL is enabled.")
end # FEOL

# BEOL
if $beol == "false"
  BEOL = $beol
  logger.info("BEOL is disabled.")
else
  BEOL = "true"
  logger.info("BEOL is enabled.")
end # BEOL

# connectivity rules
if $conn_drc == "true"
  CONNECTIVITY_RULES = $conn_drc
  logger.info("connectivity rules are enabled.")
else
  CONNECTIVITY_RULES = false
  logger.info("connectivity rules are disabled.")
end # connectivity rules

# METAL_TOP
if $metal_top
  METAL_TOP = $metal_top
else
  METAL_TOP = "9K"
end # METAL_TOP

logger.info("METAL_TOP Selected is %s" % [METAL_TOP])

# METAL_LEVEL
if $metal_level
  METAL_LEVEL = $metal_level
else
  METAL_LEVEL = "6LM"
end # METAL_LEVEL

logger.info("METAL_STACK Selected is %s" % [METAL_LEVEL])

# WEDGE
if $wedge == "false"
  WEDGE = $wedge
else
  WEDGE = "true"
end # WEDGE

logger.info("Wedge enabled  %s" % [WEDGE])

# BALL
if $ball == "false"
  BALL = $ball
else
  BALL = "true"
end # BALL

logger.info("Ball enabled  %s" % [BALL])

# GOLD
if $gold == "false"
  GOLD = $gold
else
  GOLD = "true"
end # GOLD

logger.info("Gold enabled  %s" % [GOLD])

if $mim_option
  MIM_OPTION = $mim_option
else
  MIM_OPTION = "Nan"
end

logger.info("MIM Option selected %s" % [MIM_OPTION])

# OFFGRID
if $offgrid == "false"
  OFFGRID = false
else
  OFFGRID = true
end # OFFGRID

logger.info("Offgrid enabled  %s" % [OFFGRID])

#================================================
#----------------------VIA3----------------------
#================================================


if BEOL
logger.info("BEOL section")

# Rule V3.1: Min/max Via3 size . is 0.26µm
logger.info("Executing rule V3.1")
v31_l1 = via3.edges.without_length(0.26.um).extended(0, 0, 0.001, 0.001)
v31_l1.output("V3.1", "V3.1 : Min/max Via3 size . : 0.26µm")
v31_l1.forget

# Rule V3.2a: min. via3 spacing is 0.26µm
logger.info("Executing rule V3.2a")
v32a_l1  = via3.space(0.26.um, euclidian).polygons(0.001)
v32a_l1.output("V3.2a", "V3.2a : min. via3 spacing : 0.26µm")
v32a_l1.forget

merged_via3   = via3.sized(0.18.um).sized(-0.18.um).with_bbox_min(1.82.um , nil).extents.inside(metal3)
via3_mask     = merged_via3.size(1).not(via3).with_holes(16, nil)
selected_via3 = via3.interacting(via3_mask)
# Rule V3.2b: Via3 Space in 4x4 or larger via3 array is 0.36µm
logger.info("Executing rule V3.2b")
v32b_l1  = selected_via3.space(0.36.um, euclidian).polygons(0.001)
v32b_l1.output("V3.2b", "V3.2b : Via3 Space in 4x4 or larger via3 array : 0.36µm")
v32b_l1.forget

merged_via3.forget
via3_mask.forget
selected_via3.forget
# rule V3.3a is not a DRC check

# Rule V3.3b: metal3  overlap of via3.
logger.info("Executing rule V3.3b")
v33b_l1 = metal3.enclosing(via3, 0.01.um, euclidian).polygons(0.001).or(via3.not(metal3))
v33b_l1.output("V3.3b", "V3.3b : metal3  overlap of via3.")
v33b_l1.forget

v3p3c_cond = metal3.drc( width <= 0.34.um).with_length(0.28.um,nil,both)
v3p3c_eol = metal3.edges.with_length(nil, 0.34.um).interacting(v3p3c_cond.first_edges).interacting(v3p3c_cond.second_edges).not(v3p3c_cond.first_edges).not(v3p3c_cond.second_edges)
# Rule V3.3c: metal3 (< 0.34um) end-of-line overlap. is 0.06µm
logger.info("Executing rule V3.3c")
v33c_l1 = v3p3c_eol.enclosing(via3.edges,0.06.um, projection).polygons(0.001)
v33c_l1.output("V3.3c", "V3.3c : metal3 (< 0.34um) end-of-line overlap. : 0.06µm")
v33c_l1.forget

v3p3c_cond.forget
v3p3c_eol.forget
v3_3d_1 = via3.edges.interacting(via3.drc(enclosed(metal3, projection) < 0.04.um).edges.centers(0, 0.5))
v3_3d_2 = via3.edges.interacting(via3.drc(0.04.um <= enclosed(metal3, projection) < 0.06.um).centers(0, 0.5))
v3_3d_3 = v3_3d_1.extended(0, 0, 0, 0.001, joined).corners(90)
# Rule V3.3d: If metal3 overlap via3 by < 0.04um on one side, adjacent metal3 edges overlap. is 0.06µm
logger.info("Executing rule V3.3d")
v33d_l1 = v3_3d_2.not(v3_3d_1).interacting(v3_3d_1).or(v3_3d_1.interacting(v3_3d_3)).enclosed(metal3.edges, 0.06.um).polygons(0.001)
v33d_l1.output("V3.3d", "V3.3d : If metal3 overlap via3 by < 0.04um on one side, adjacent metal3 edges overlap. : 0.06µm")
v33d_l1.forget

v3_3d_1.forget
v3_3d_2.forget
v3_3d_3.forget
# rule V3.3e is not a DRC check

# Rule V3.4a: metal4 overlap of via3.
logger.info("Executing rule V3.4a")
v34a_l1 = metal4.enclosing(via3, 0.01.um, euclidian).polygons(0.001).or(via3.not(metal4))
v34a_l1.output("V3.4a", "V3.4a : metal4 overlap of via3.")
v34a_l1.forget

v3p4b_cond = metal4.drc( width <= 0.34.um).with_length(0.28.um,nil,both)
v3p4b_eol = metal4.edges.with_length(nil, 0.34.um).interacting(v3p4b_cond.first_edges).interacting(v3p4b_cond.second_edges).not(v3p4b_cond.first_edges).not(v3p4b_cond.second_edges)
# Rule V3.4b: metal4 (< 0.34um) end-of-line overlap. is 0.06µm
logger.info("Executing rule V3.4b")
v34b_l1 = v3p4b_eol.enclosing(via3.edges,0.06.um, projection).polygons(0.001)
v34b_l1.output("V3.4b", "V3.4b : metal4 (< 0.34um) end-of-line overlap. : 0.06µm")
v34b_l1.forget

v3p4b_cond.forget
v3p4b_eol.forget
v3_4c_1 = via3.edges.interacting(via3.drc(enclosed(metal4, projection) < 0.04.um).edges.centers(0, 0.5))
v3_4c_2 = via3.edges.interacting(via3.drc(0.04.um <= enclosed(metal4, projection) < 0.06.um).centers(0, 0.5))
v3_4c_3 = v3_4c_1.extended(0, 0, 0, 0.001, joined).corners(90)
# Rule V3.4c: If metal4 overlap via3 by < 0.04um on one side, adjacent metal4 edges overlap. is 0.06µm
logger.info("Executing rule V3.4c")
v34c_l1 = v3_4c_2.not_in(v3_4c_1).interacting(v3_4c_1).or(v3_4c_1.interacting(v3_4c_3)).enclosed(metal4.edges, 0.06.um).polygons(0.001)
v34c_l1.output("V3.4c", "V3.4c : If metal4 overlap via3 by < 0.04um on one side, adjacent metal4 edges overlap. : 0.06µm")
v34c_l1.forget

v3_4c_1.forget
v3_4c_2.forget
v3_4c_3.forget
# rule V3.4d is not a DRC check

# rule V3.5 is not a DRC check


end #BEOL


exec_end_time = Time.now
run_time = exec_end_time - exec_start_time
logger.info("DRC Run time %f seconds" % [run_time])