rules/klayout/drc/rule_decks/sab.drc

# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
#     https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.

#=============================================================================================================================================================
#------------------------------------------------------------- GF 0.18um MCU DRC RULE DECK (SAB) -------------------------------------------------------------
#=============================================================================================================================================================

require 'time'
require "logger"

exec_start_time = Time.now

logger = Logger.new(STDOUT)

logger.formatter = proc do |severity, datetime, progname, msg|
  "#{datetime}: Memory Usage (" + `pmap #{Process.pid} | tail -1`[10,40].strip + ") : #{msg}
"
end

#================================================
#----------------- FILE SETUP -------------------
#================================================

# optional for a batch launch :   klayout -b -r gf180mcu.drc -rd input=design.gds -rd report=gf180mcu_main.lyrdb

logger.info("Starting running GF180MCU Klayout DRC runset on %s" % [$input])

if $input
    if $topcell
        source($input, $topcell)
    else
        source($input)
    end
end

logger.info("Loading database to memory is complete.")

if $report
    logger.info("GF180MCU Klayout DRC runset output at: %s" % [$report])
    report("DRC Run Report at", $report)
else
    logger.info("GF180MCU Klayout DRC runset output at default location." % [File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb").path])
    report("DRC Run Report at", File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb"))
end

if $thr
    logger.info("Number of threads to use %s" % [$thr])
    threads($thr)
else
    logger.info("Number of threads to use 16")
    threads(16)
end

# === TILING MODE ===
if $run_mode == "tiling"
  # use a tile size of 1mm - not used in deep mode-
  # tiles(500.um)
  # use a tile border of 10 micron:
  # tile_borders(10.um)
  tiles(1000)
  logger.info("Tiling  mode is enabled.")

elsif $run_mode == "deep"
  #=== HIER MODE ===
  deep
  logger.info("deep  mode is enabled.")

elsif $run_mode == "flat"
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

else
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

end # run_mode

#================================================
#------------- LAYERS DEFINITIONS ---------------
#================================================

v5_xtor        = polygons(112, 1 )
dualgate       = polygons(55 , 0 )
poly2          = polygons(30 , 0 )
nplus          = polygons(32 , 0 )
pplus          = polygons(31 , 0 )
comp           = polygons(22 , 0 )
nwell          = polygons(21 , 0 )
sab            = polygons(49 , 0 )
esd            = polygons(24 , 0 )
contact        = polygons(33 , 0 )
otp_mk         = polygons(173, 5 )
lvs_io         = polygons(119, 5 )
esd_mk         = polygons(24 , 5 )

logger.info("Starting deriving base layers.")
#================================================
#------------- LAYERS DERIVATIONS ---------------
#================================================

ncomp      =  comp      & nplus
pcomp      =  comp      & pplus
tgate      =  poly2     & comp
ngate      =  nplus     & tgate
pgate      =  pplus     & tgate

#================================================
#------------------ SWITCHES --------------------
#================================================
logger.info("Evaluate switches.")

# FEOL
if $feol == "false"
  FEOL = $feol
  logger.info("FEOL is disabled.")
else
  FEOL = "true"
  logger.info("FEOL is enabled.")
end # FEOL

# BEOL
if $beol == "false"
  BEOL = $beol
  logger.info("BEOL is disabled.")
else
  BEOL = "true"
  logger.info("BEOL is enabled.")
end # BEOL

# connectivity rules
if $conn_drc == "true"
  CONNECTIVITY_RULES = $conn_drc
  logger.info("connectivity rules are enabled.")
else
  CONNECTIVITY_RULES = false
  logger.info("connectivity rules are disabled.")
end # connectivity rules

# METAL_TOP
if $metal_top
  METAL_TOP = $metal_top
else
  METAL_TOP = "9K"
end # METAL_TOP

logger.info("METAL_TOP Selected is %s" % [METAL_TOP])

# METAL_LEVEL
if $metal_level
  METAL_LEVEL = $metal_level
else
  METAL_LEVEL = "6LM"
end # METAL_LEVEL

logger.info("METAL_STACK Selected is %s" % [METAL_LEVEL])

# WEDGE
if $wedge == "false"
  WEDGE = $wedge
else
  WEDGE = "true"
end # WEDGE

logger.info("Wedge enabled  %s" % [WEDGE])

# BALL
if $ball == "false"
  BALL = $ball
else
  BALL = "true"
end # BALL

logger.info("Ball enabled  %s" % [BALL])

# GOLD
if $gold == "false"
  GOLD = $gold
else
  GOLD = "true"
end # GOLD

logger.info("Gold enabled  %s" % [GOLD])

if $mim_option
  MIM_OPTION = $mim_option
else
  MIM_OPTION = "Nan"
end

logger.info("MIM Option selected %s" % [MIM_OPTION])

# OFFGRID
if $offgrid == "false"
  OFFGRID = false
else
  OFFGRID = true
end # OFFGRID

logger.info("Offgrid enabled  %s" % [OFFGRID])

#================================================
#----------------------SAB-----------------------
#================================================


if FEOL
logger.info("FEOL section")

# Rule SB.1: min. sab width is 0.42µm
logger.info("Executing rule SB.1")
sb1_l1  = sab.width(0.42.um, euclidian).polygons(0.001)
sb1_l1.output("SB.1", "SB.1 : min. sab width : 0.42µm")
sb1_l1.forget

# Rule SB.2: min. sab spacing is 0.42µm
logger.info("Executing rule SB.2")
sb2_l1  = sab.outside(otp_mk).space(0.42.um, euclidian).polygons(0.001)
sb2_l1.output("SB.2", "SB.2 : min. sab spacing : 0.42µm")
sb2_l1.forget

# Rule SB.3: Space from salicide block to unrelated COMP. is 0.22µm
logger.info("Executing rule SB.3")
sb3_l1  = sab.outside(comp).outside(otp_mk).separation(comp.outside(sab), 0.22.um, euclidian).polygons(0.001)
sb3_l1.output("SB.3", "SB.3 : Space from salicide block to unrelated COMP. : 0.22µm")
sb3_l1.forget

# Rule SB.4: Space from salicide block to contact.
logger.info("Executing rule SB.4")
sb4_l1 = sab.outside(otp_mk).separation(contact, 0.15.um, euclidian).polygons(0.001).or(sab.outside(otp_mk).and(contact))
sb4_l1.output("SB.4", "SB.4 : Space from salicide block to contact.")
sb4_l1.forget

# Rule SB.5a: Space from salicide block to unrelated Poly2 on field. is 0.3µm
logger.info("Executing rule SB.5a")
sb5a_l1  = sab.outside(poly2.not(comp)).outside(otp_mk).separation(poly2.not(comp).outside(sab), 0.3.um, euclidian).polygons(0.001)
sb5a_l1.output("SB.5a", "SB.5a : Space from salicide block to unrelated Poly2 on field. : 0.3µm")
sb5a_l1.forget

# Rule SB.5b: Space from salicide block to unrelated Poly2 on COMP. is 0.28µm
logger.info("Executing rule SB.5b")
sb5b_l1  = sab.outside(tgate).outside(otp_mk).separation(tgate.outside(sab), 0.28.um, euclidian).polygons(0.001)
sb5b_l1.output("SB.5b", "SB.5b : Space from salicide block to unrelated Poly2 on COMP. : 0.28µm")
sb5b_l1.forget

# Rule SB.6: Salicide block extension beyond related COMP. is 0.22µm
logger.info("Executing rule SB.6")
sb6_l1 = sab.enclosing(comp, 0.22.um, euclidian).polygons(0.001)
sb6_l1.output("SB.6", "SB.6 : Salicide block extension beyond related COMP. : 0.22µm")
sb6_l1.forget

# Rule SB.7: COMP extension beyond related salicide block. is 0.22µm
logger.info("Executing rule SB.7")
sb7_l1 = comp.enclosing(sab, 0.22.um, euclidian).polygons
sb7_l1.output("SB.7", "SB.7 : COMP extension beyond related salicide block. : 0.22µm")
sb7_l1.forget

# Rule SB.8: Non-salicided contacts are forbidden.
logger.info("Executing rule SB.8")
sb8_l1 = contact.inside(sab)
sb8_l1.output("SB.8", "SB.8 : Non-salicided contacts are forbidden.")
sb8_l1.forget

# Rule SB.9: Salicide block extension beyond unsalicided Poly2. is 0.22µm
logger.info("Executing rule SB.9")
sb9_l1 = sab.outside(otp_mk).enclosing(poly2.and(sab), 0.22.um, euclidian).polygons
sb9_l1.output("SB.9", "SB.9 : Salicide block extension beyond unsalicided Poly2. : 0.22µm")
sb9_l1.forget

# Rule SB.10: Poly2 extension beyond related salicide block. is 0.22µm
logger.info("Executing rule SB.10")
sb10_l1 = poly2.enclosing(sab, 0.22.um, euclidian).polygons(0.001)
sb10_l1.output("SB.10", "SB.10 : Poly2 extension beyond related salicide block. : 0.22µm")
sb10_l1.forget

# Rule SB.11: Overlap with COMP. is 0.22µm
logger.info("Executing rule SB.11")
sb11_l1 = sab.outside(otp_mk).overlap(comp, 0.22.um, euclidian).polygons
sb11_l1.output("SB.11", "SB.11 : Overlap with COMP. : 0.22µm")
sb11_l1.forget

# Rule SB.12: Overlap with Poly2 outside ESD_MK. is 0.22µm
logger.info("Executing rule SB.12")
sb12_l1 = sab.outside(otp_mk).outside(esd_mk).overlap(poly2.outside(otp_mk).outside(esd_mk), 0.22.um, euclidian).polygons
sb12_l1.output("SB.12", "SB.12 : Overlap with Poly2 outside ESD_MK. : 0.22µm")
sb12_l1.forget

# Rule SB.13: Min. area (um2). is 2µm²
logger.info("Executing rule SB.13")
sb13_l1  = sab.outside(otp_mk).with_area(nil, 2.um)
sb13_l1.output("SB.13", "SB.13 : Min. area (um2). : 2µm²")
sb13_l1.forget
# Rule SB.14a: Space from unsalicided Nplus Poly2 to unsalicided Pplus Poly2. (Unsalicided Nplus Poly2 must not fall within a square of 0.56um x 0.56um at unsalicided Pplus Poly2 corners). is 0.56µm
logger.info("Executing rule SB.14a")
sb14a_l1 = poly2.and(nplus).and(sab).separation(poly2.and(pplus).and(sab), 0.56.um, square).polygons
sb14a_l1.output("SB.14a", "SB.14a : Space from unsalicided Nplus Poly2 to unsalicided Pplus Poly2. (Unsalicided Nplus Poly2 must not fall within a square of 0.56um x 0.56um at unsalicided Pplus Poly2 corners). : 0.56µm")
sb14a_l1.forget

# Rule SB.14b: Space from unsalicided Nplus Poly2 to P-channel gate. (Unsalicided Nplus Poly2 must not fall within a square of 0.56um x 0.56um at P-channel gate corners). is 0.56µm
logger.info("Executing rule SB.14b")
sb14b_l1 = poly2.and(nplus).and(sab).separation(pgate, 0.56.um, square).polygons
sb14b_l1.output("SB.14b", "SB.14b : Space from unsalicided Nplus Poly2 to P-channel gate. (Unsalicided Nplus Poly2 must not fall within a square of 0.56um x 0.56um at P-channel gate corners). : 0.56µm")
sb14b_l1.forget

# Rule SB.15a: Space from unsalicided Poly2 to unrelated Nplus/Pplus. is 0.18µm
logger.info("Executing rule SB.15a")
sb15a_l1  = poly2.and(sab).separation(nplus.or(pplus), 0.18.um, euclidian).polygons(0.001)
sb15a_l1.output("SB.15a", "SB.15a : Space from unsalicided Poly2 to unrelated Nplus/Pplus. : 0.18µm")
sb15a_l1.forget

sb_15b_1 = poly2.interacting(nplus.or(pplus)).and(sab).edges.not(poly2.edges.and(sab)).separation(nplus.or(pplus).edges, 0.32.um, projection).polygons(0.001)
sb_15b_2 = poly2.interacting(nplus.or(pplus)).and(sab).separation(nplus.or(pplus), 0.32.um, projection).polygons(0.001)
# Rule SB.15b: Space from unsalicided Poly2 to unrelated Nplus/Pplus along Poly2 line. is 0.32µm
logger.info("Executing rule SB.15b")
sb15b_l1 = sb_15b_1.and(sb_15b_2).outside(otp_mk)
sb15b_l1.output("SB.15b", "SB.15b : Space from unsalicided Poly2 to unrelated Nplus/Pplus along Poly2 line. : 0.32µm")
sb15b_l1.forget

sb_15b_1.forget
sb_15b_2.forget
# Rule SB.16: SAB layer cannot exist on 3.3V and 5V/6V CMOS transistors' Poly and COMP area of the core circuit (Excluding the transistors used for ESD purpose). It can only exist on CMOS transistors marked by LVS_IO, OTP_MK, ESD_MK layers.
logger.info("Executing rule SB.16")
sb16_l1 = sab.outside(otp_mk).outside(otp_mk.or(lvs_io).or(esd_mk)).not_outside(ngate.or(pgate.and(nwell)))
sb16_l1.output("SB.16", "SB.16 : SAB layer cannot exist on 3.3V and 5V/6V CMOS transistors' Poly and COMP area of the core circuit (Excluding the transistors used for ESD purpose). It can only exist on CMOS transistors marked by LVS_IO, OTP_MK, ESD_MK layers.")
sb16_l1.forget


end #FEOL


exec_end_time = Time.now
run_time = exec_end_time - exec_start_time
logger.info("DRC Run time %f seconds" % [run_time])