rules/klayout/drc/rule_decks/efuse.drc

# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
#     https://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.

#=============================================================================================================================================================
#------------------------------------------------------------ GF 0.18um MCU DRC RULE DECK (EFUSE) ------------------------------------------------------------
#=============================================================================================================================================================

require 'time'
require "logger"

exec_start_time = Time.now

logger = Logger.new(STDOUT)

logger.formatter = proc do |severity, datetime, progname, msg|
  "#{datetime}: Memory Usage (" + `pmap #{Process.pid} | tail -1`[10,40].strip + ") : #{msg}
"
end

#================================================
#----------------- FILE SETUP -------------------
#================================================

# optional for a batch launch :   klayout -b -r gf180mcu.drc -rd input=design.gds -rd report=gf180mcu_main.lyrdb

logger.info("Starting running GF180MCU Klayout DRC runset on %s" % [$input])

if $input
    if $topcell
        source($input, $topcell)
    else
        source($input)
    end
end

logger.info("Loading database to memory is complete.")

if $report
    logger.info("GF180MCU Klayout DRC runset output at: %s" % [$report])
    report("DRC Run Report at", $report)
else
    logger.info("GF180MCU Klayout DRC runset output at default location." % [File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb").path])
    report("DRC Run Report at", File.join(File.dirname(RBA::CellView::active.filename), "gf180_drc.lyrdb"))
end

if $thr
    logger.info("Number of threads to use %s" % [$thr])
    threads($thr)
else
    logger.info("Number of threads to use 16")
    threads(16)
end

# === TILING MODE ===
if $run_mode == "tiling"
  # use a tile size of 1mm - not used in deep mode-
  # tiles(500.um)
  # use a tile border of 10 micron:
  # tile_borders(10.um)
  tiles(1000)
  logger.info("Tiling  mode is enabled.")

elsif $run_mode == "deep"
  #=== HIER MODE ===
  deep
  logger.info("deep  mode is enabled.")

elsif $run_mode == "flat"
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

else
  #=== FLAT MODE ===
  flat
  logger.info("flat  mode is enabled.")

end # run_mode

#================================================
#------------- LAYERS DEFINITIONS ---------------
#================================================

v5_xtor        = polygons(112, 1 )
dualgate       = polygons(55 , 0 )
poly2          = polygons(30 , 0 )
nplus          = polygons(32 , 0 )
pplus          = polygons(31 , 0 )
comp           = polygons(22 , 0 )
sab            = polygons(49 , 0 )
esd            = polygons(24 , 0 )
contact        = polygons(33 , 0 )
metal1         = polygons(34 , 0 )
metal2         = polygons(36 , 0 )
resistor       = polygons(62 , 0 )
lvs_source     = polygons(100, 8 )
plfuse         = polygons(125, 5 )
efuse_mk       = polygons(80 , 5 )

logger.info("Starting deriving base layers.")
#================================================
#------------- LAYERS DERIVATIONS ---------------
#================================================

ncomp      =  comp      & nplus
pcomp      =  comp      & pplus
tgate      =  poly2     & comp
ngate      =  nplus     & tgate
pgate      =  pplus     & tgate

#================================================
#------------------ SWITCHES --------------------
#================================================
logger.info("Evaluate switches.")

# FEOL
if $feol == "false"
  FEOL = $feol
  logger.info("FEOL is disabled.")
else
  FEOL = "true"
  logger.info("FEOL is enabled.")
end # FEOL

# BEOL
if $beol == "false"
  BEOL = $beol
  logger.info("BEOL is disabled.")
else
  BEOL = "true"
  logger.info("BEOL is enabled.")
end # BEOL

# connectivity rules
if $conn_drc == "true"
  CONNECTIVITY_RULES = $conn_drc
  logger.info("connectivity rules are enabled.")
else
  CONNECTIVITY_RULES = false
  logger.info("connectivity rules are disabled.")
end # connectivity rules

# METAL_TOP
if $metal_top
  METAL_TOP = $metal_top
else
  METAL_TOP = "9K"
end # METAL_TOP

logger.info("METAL_TOP Selected is %s" % [METAL_TOP])

# METAL_LEVEL
if $metal_level
  METAL_LEVEL = $metal_level
else
  METAL_LEVEL = "6LM"
end # METAL_LEVEL

logger.info("METAL_STACK Selected is %s" % [METAL_LEVEL])

# WEDGE
if $wedge == "false"
  WEDGE = $wedge
else
  WEDGE = "true"
end # WEDGE

logger.info("Wedge enabled  %s" % [WEDGE])

# BALL
if $ball == "false"
  BALL = $ball
else
  BALL = "true"
end # BALL

logger.info("Ball enabled  %s" % [BALL])

# GOLD
if $gold == "false"
  GOLD = $gold
else
  GOLD = "true"
end # GOLD

logger.info("Gold enabled  %s" % [GOLD])

if $mim_option
  MIM_OPTION = $mim_option
else
  MIM_OPTION = "Nan"
end

logger.info("MIM Option selected %s" % [MIM_OPTION])

# OFFGRID
if $offgrid == "false"
  OFFGRID = false
else
  OFFGRID = true
end # OFFGRID

logger.info("Offgrid enabled  %s" % [OFFGRID])

#================================================
#---------------------EFUSE----------------------
#================================================

# Rule EF.01: Min. (Poly2 butt PLFUSE) within EFUSE_MK and Pplus.
logger.info("Executing rule EF.01")
ef01_l1 = poly2.or(plfuse).interacting(efuse_mk).not_inside(efuse_mk.and(pplus))
ef01_l1.output("EF.01", "EF.01 : Min. (Poly2 butt PLFUSE) within EFUSE_MK and Pplus.")
ef01_l1.forget

# Rule EF.02: Min. Max. PLFUSE width. is 0.18µm
logger.info("Executing rule EF.02")
ef02_l1 = plfuse.drc(width != 0.18.um).extended(0, 0, 0.001, 0.001)
ef02_l1.output("EF.02", "EF.02 : Min. Max. PLFUSE width. : 0.18µm")
ef02_l1.forget

# Rule EF.03: Min. Max. PLFUSE length. is 1.26µm
logger.info("Executing rule EF.03")
ef03_l1 = plfuse.edges.interacting(poly2.edges.and(plfuse.edges).centers(0, 0.95)).without_length(1.26.um).extended(0, 0, 0.001, 0.001)
ef03_l1.output("EF.03", "EF.03 : Min. Max. PLFUSE length. : 1.26µm")
ef03_l1.forget

# Rule EF.04a: Min. Max. PLFUSE overlap Poly2 (coinciding permitted) and touch cathode and anode.
logger.info("Executing rule EF.04a")
ef04a_l1 = plfuse.not_in(plfuse.interacting(poly2.not(plfuse), 2, 2)).inside(efuse_mk).or(plfuse.not(poly2).inside(efuse_mk))
ef04a_l1.output("EF.04a", "EF.04a : Min. Max. PLFUSE overlap Poly2 (coinciding permitted) and touch cathode and anode.")
ef04a_l1.forget

# Rule EF.04b: PLFUSE must be rectangular. is -µm
logger.info("Executing rule EF.04b")
ef04b_l1 = plfuse.non_rectangles
ef04b_l1.output("EF.04b", "EF.04b : PLFUSE must be rectangular. : -µm")
ef04b_l1.forget

cathode = poly2.inside(efuse_mk).not(lvs_source.or(plfuse))
# Rule EF.04c: Cathode Poly2 must be rectangular. is -µm
logger.info("Executing rule EF.04c")
ef04c_l1 = cathode.non_rectangles
ef04c_l1.output("EF.04c", "EF.04c : Cathode Poly2 must be rectangular. : -µm")
ef04c_l1.forget

anode = poly2.and(lvs_source).inside(efuse_mk)
# Rule EF.04d: Anode Poly2 must be rectangular. is -µm
logger.info("Executing rule EF.04d")
ef04d_l1 = anode.non_rectangles
ef04d_l1.output("EF.04d", "EF.04d : Anode Poly2 must be rectangular. : -µm")
ef04d_l1.forget

# Rule EF.05: Min./Max. LVS_Source overlap Poly2 (at Anode).
logger.info("Executing rule EF.05")
ef05_l1 = poly2.not(plfuse).interacting(lvs_source).not(lvs_source).inside(efuse_mk).or(lvs_source.not(poly2).inside(efuse_mk))
ef05_l1.output("EF.05", "EF.05 : Min./Max. LVS_Source overlap Poly2 (at Anode).")
ef05_l1.forget

cathode_width = cathode.edges.not_interacting(cathode.edges.interacting(plfuse)).or(cathode.edges.interacting(plfuse))
# Rule EF.06: Min./Max. Cathode Poly2 width. is 2.26µm
logger.info("Executing rule EF.06")
ef06_l1 = cathode_width.without_length(2.26.um).extended(0, 0, 0.001, 0.001)
ef06_l1.output("EF.06", "EF.06 : Min./Max. Cathode Poly2 width. : 2.26µm")
ef06_l1.forget

# Rule EF.07: Min./Max. Cathode Poly2 length. is 1.84µm
logger.info("Executing rule EF.07")
ef07_l1 = cathode.edges.not(cathode_width).without_length(1.84.um).extended(0, 0, 0.001, 0.001)
ef07_l1.output("EF.07", "EF.07 : Min./Max. Cathode Poly2 length. : 1.84µm")
ef07_l1.forget

anode_width = anode.edges.not_interacting(anode.edges.interacting(plfuse)).or(anode.edges.interacting(plfuse))
# Rule EF.08: Min./Max. Anode Poly2 width. is 1.06µm
logger.info("Executing rule EF.08")
ef08_l1 = anode_width.without_length(1.06.um).extended(0, 0, 0.001, 0.001)
ef08_l1.output("EF.08", "EF.08 : Min./Max. Anode Poly2 width. : 1.06µm")
ef08_l1.forget

# Rule EF.09: Min./Max. Anode Poly2 length. is 2.43µm
logger.info("Executing rule EF.09")
ef09_l1 = anode.edges.not(anode_width).without_length(2.43.um).extended(0, 0, 0.001, 0.001)
ef09_l1.output("EF.09", "EF.09 : Min./Max. Anode Poly2 length. : 2.43µm")
ef09_l1.forget

# Rule EF.10: Min. Cathode Poly2 to Poly2 space. is 0.26µm
logger.info("Executing rule EF.10")
ef10_l1  = cathode.space(0.26.um, euclidian).polygons(0.001)
ef10_l1.output("EF.10", "EF.10 : Min. Cathode Poly2 to Poly2 space. : 0.26µm")
ef10_l1.forget

# Rule EF.11: Min. Anode Poly2 to Poly2 space. is 0.26µm
logger.info("Executing rule EF.11")
ef11_l1  = anode.space(0.26.um, euclidian).polygons(0.001)
ef11_l1.output("EF.11", "EF.11 : Min. Anode Poly2 to Poly2 space. : 0.26µm")
ef11_l1.forget

cont_ef = contact.and(plfuse.inside(efuse_mk))
# Rule EF.12: Min. Space of Cathode Contact to PLFUSE end.
logger.info("Executing rule EF.12")
ef12_l1 = plfuse.inside(efuse_mk).separation(contact.inside(cathode), 0.155.um).polygons(0.001).or(cont_ef)
ef12_l1.output("EF.12", "EF.12 : Min. Space of Cathode Contact to PLFUSE end.")
ef12_l1.forget

# Rule EF.13: Min. Space of Anode Contact to PLFUSE end.
logger.info("Executing rule EF.13")
ef13_l1 = plfuse.inside(efuse_mk).separation(contact.inside(anode), 0.14.um).polygons(0.001).or(cont_ef)
ef13_l1.output("EF.13", "EF.13 : Min. Space of Anode Contact to PLFUSE end.")
ef13_l1.forget

cont_ef.forget
# Rule EF.14: Min. EFUSE_MK enclose LVS_Source.
logger.info("Executing rule EF.14")
ef14_l1 = lvs_source.not_outside(efuse_mk).not(efuse_mk)
ef14_l1.output("EF.14", "EF.14 : Min. EFUSE_MK enclose LVS_Source.")
ef14_l1.forget

# Rule EF.15: NO Contact is allowed to touch PLFUSE.
logger.info("Executing rule EF.15")
ef15_l1 = plfuse.interacting(contact)
ef15_l1.output("EF.15", "EF.15 : NO Contact is allowed to touch PLFUSE.")
ef15_l1.forget

# Rule EF.16a: Cathode must contain exact number of Contacts at each ends. is 4µm
logger.info("Executing rule EF.16a")
ef16a_l1 = cathode.not_covering(contact, 4, 4)
ef16a_l1.output("EF.16a", "EF.16a : Cathode must contain exact number of Contacts at each ends. : 4µm")
ef16a_l1.forget

# Rule EF.16b: Anode must contain exact number of Contacts at each ends. is 4µm
logger.info("Executing rule EF.16b")
ef16b_l1 = anode.not_covering(contact, 4, 4)
ef16b_l1.output("EF.16b", "EF.16b : Anode must contain exact number of Contacts at each ends. : 4µm")
ef16b_l1.forget

# Rule EF.17: Min. Space of EFUSE_MK to EFUSE_MK. is 0.26µm
logger.info("Executing rule EF.17")
ef17_l1  = efuse_mk.space(0.26.um, euclidian).polygons(0.001)
ef17_l1.output("EF.17", "EF.17 : Min. Space of EFUSE_MK to EFUSE_MK. : 0.26µm")
ef17_l1.forget

# Rule EF.18: PLFUSE must sit on field oxide (NOT COMP), no cross with any COMP, Nplus, Pplus, ESD, SAB, Resistor, Metal1, Metal2.
logger.info("Executing rule EF.18")
ef18_l1 = plfuse.not_outside(comp.or(nplus).or(esd).or(sab).or(resistor).or(metal1).or(metal2))
ef18_l1.output("EF.18", "EF.18 : PLFUSE must sit on field oxide (NOT COMP), no cross with any COMP, Nplus, Pplus, ESD, SAB, Resistor, Metal1, Metal2.")
ef18_l1.forget

# Rule EF.19: Min. PLFUSE space to Metal1, Metal2.
logger.info("Executing rule EF.19")
ef19_l1 = plfuse.not_outside(metal1.or(metal2))
ef19_l1.output("EF.19", "EF.19 : Min. PLFUSE space to Metal1, Metal2.")
ef19_l1.forget

# Rule EF.20: Min. PLFUSE space to COMP, Nplus, Pplus, Resistor, ESD, SAB. is 2.73µm
logger.info("Executing rule EF.20")
ef20_l1  = plfuse.separation(comp.or(nplus).or(esd).or(sab).or(resistor), 2.73.um, euclidian).polygons(0.001)
ef20_l1.output("EF.20", "EF.20 : Min. PLFUSE space to COMP, Nplus, Pplus, Resistor, ESD, SAB. : 2.73µm")
ef20_l1.forget

ef_21_fuse    = poly2.interacting(plfuse).inside(efuse_mk.and(pplus)).extents.edges
ef_21_anode   = anode.edges.not_interacting(anode.edges.interacting(plfuse))
ef_21_cathode = cathode.edges.not_interacting(cathode.edges.interacting(plfuse))
# Rule EF.21: Min./Max. eFUSE Poly2 length. is 5.53µm
logger.info("Executing rule EF.21")
ef21_l1 = ef_21_fuse.not_interacting(ef_21_anode.or(ef_21_cathode).centers(0, 0.95)).without_length(5.53.um).extended(0, 0, 0.001, 0.001)
ef21_l1.output("EF.21", "EF.21 : Min./Max. eFUSE Poly2 length. : 5.53µm")
ef21_l1.forget

ef_21_fuse.forget
ef_21_anode.forget
ef_21_cathode.forget
# Rule EF.22a: Min./Max. Cathode Poly2 overlap with PLFUSE in width direction. is 1.04µm
logger.info("Executing rule EF.22a")
ef22a_l1 = cathode.edges.interacting(plfuse).not(plfuse.edges).without_length(1.04.um).extended(0, 0, 0.001, 0.001)
ef22a_l1.output("EF.22a", "EF.22a : Min./Max. Cathode Poly2 overlap with PLFUSE in width direction. : 1.04µm")
ef22a_l1.forget

# Rule EF.22b: Min./Max. Anode Poly2 overlap with PLFUSE in width direction. is 0.44µm
logger.info("Executing rule EF.22b")
ef22b_l1 = anode.edges.interacting(plfuse).not(plfuse.edges).without_length(0.44.um).extended(0, 0, 0.001, 0.001)
ef22b_l1.output("EF.22b", "EF.22b : Min./Max. Anode Poly2 overlap with PLFUSE in width direction. : 0.44µm")
ef22b_l1.forget


exec_end_time = Time.now
run_time = exec_end_time - exec_start_time
logger.info("DRC Run time %f seconds" % [run_time])