| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| if BEOL |
| |
| if METAL_LEVEL == '6LM' |
| #================================================ |
| #----------------------VIA5---------------------- |
| #================================================ |
| |
| # Rule V5.1: Min/max Via5 size . is 0.26µm |
| logger.info('Executing rule V5.1') |
| v51_l1 = via5.edges.without_length(0.26.um).extended(0, 0, 0.001, 0.001) |
| v51_l1.output('V5.1', 'V5.1 : Min/max Via5 size . : 0.26µm') |
| v51_l1.forget |
| |
| # Rule V5.2: min. via5 spacing is 0.26µm |
| logger.info('Executing rule V5.2') |
| v52a_l1 = via5.space(0.26.um, euclidian).polygons(0.001) |
| v52a_l1.output('V5.2', 'V5.2 : min. via5 spacing : 0.26µm') |
| v52a_l1.forget |
| |
| v5p3a_cond = metal5.drc(width <= 0.34.um).with_length(0.28.um,nil,both).edges.interacting(metal5.corners(90)) |
| v5p3a_m = metal5.edges.interacting(v5p3a_cond) |
| # Rule V5.3a : Min. Metal5 enclose Via5 [Metal5 with width <0.34um, Protrusion >=0.28um] is 0.06 |
| v5p3a_l1 = v5p3a_m.enclosing(via5.edges,0.06.um,square).polygons(0.001).or(via5.not_outside(metal5).not(metal5)) |
| v5p3a_l1.output('V5.3a','V5.3a: Min. Metal5 enclose Via5 [Metal5 with width <0.34um, Protrusion >=0.28um] is 0.06') |
| |
| v5p3a_cond.forget |
| v5p3a_m.forget |
| v5p3a_l1.forget |
| v5p3a_l1.forget |
| |
| # rule V5.3d is not a DRC check |
| |
| v5p3c_ed_s1 = via5.drc(enclosed(metal5, projection) <= 0.01.um).polygons(0.001) |
| v5p3c_ed_s2 = via5.drc(0.01.um < enclosed(metal5, projection) < 0.04.um) |
| # Rule V5.3c : Min. Metal5 enclose Via5 by sides (a, b, c, d) is (0.01,0.06,0.01,0.06) or (0.04,0.04,0.04,0.04) |
| v5p3c_l1 = metal5.enclosing(via5,0.06.um,projection).polygons(0.001).interacting(v5p3c_ed_s1).not(v5p3c_ed_s1) |
| v5p3c_l2 = metal5.edges.enclosing(v5p3c_ed_s2,0.04.um).polygons(0.001) |
| v5p3c_l3 = (v5p3c_l1.or(v5p3c_l2)).or(via5.not_outside(metal5).not(metal5)) |
| v5p3c_l3.output('V5.3c','V5.3c : Min. Metal5 enclose Via5 by sides (a, b, c, d) is (0.01,0.06,0.01,0.06) or (0.04,0.04,0.04,0.04)') |
| |
| v5p3c_ed_s1.forget |
| v5p3c_ed_s2.forget |
| v5p3c_l1.forget |
| v5p3c_l2.forget |
| v5p3c_l3.forget |
| |
| v5p4a_cond = (metaltop.drc(width <= 0.34.um).with_length(0.28.um,nil,both).edges.interacting(metaltop.corners(90))) |
| v5p4a_m = metaltop.edges.interacting(v5p4a_cond) |
| # Rule V5.4a : Min. Metaltop enclose Via5 [Metaltop with width <0.34um, Protrusion >=0.28um] is 0.06 |
| v5p4a_l1 = v5p4a_m.enclosing(via5.edges,0.06.um,square).polygons(0.001).or(via5.not_outside(metaltop).not(metaltop)) |
| v5p4a_l1.output('V5.4a','V5.4a : Min. Metaltop enclose Via5 [Metaltop with width <0.34um, Protrusion >=0.28um] is 0.06 ') |
| |
| v5p4a_cond.forget |
| v5p4a_m.forget |
| v5p4a_l1.forget |
| |
| v5p4b_ed_s1 = via5.drc(enclosed(metaltop, projection) <= 0.01.um).polygons(0.001) |
| v5p4b_ed_s2 = via5.drc(0.01.um < enclosed(metaltop, projection) < 0.04.um) |
| # Rule V5.4b : Min. Metaltop enclose Via5 by sides (a, b, c, d) is (0.01,0.06,0.01,0.06) or (0.04,0.04,0.04,0.04) |
| v5p4b_l1 = metaltop.enclosing(via5,0.06.um,projection).polygons(0.001).interacting(v5p4b_ed_s1).not(v5p4b_ed_s1) |
| v5p4b_l2 = metaltop.edges.enclosing(v5p4b_ed_s2,0.04.um).polygons(0.001) |
| v5p4b_l3 = (v5p4b_l1.or(v5p4b_l2)).or(via5.not_outside(metaltop).not(metaltop)) |
| v5p4b_l3.output('V5.4b','V5.4b : Min. Metaltop enclose Via5 by sides (a, b, c, d) is (0.01,0.06,0.01,0.06) or (0.04,0.04,0.04,0.04)') |
| |
| v5p4b_ed_s1.forget |
| v5p4b_ed_s2.forget |
| v5p4b_l1.forget |
| v5p4b_l2.forget |
| v5p4b_l3.forget |
| |
| # rule V5.4c is not a DRC check |
| end # METAL_LEVEL |
| end #BEOL |
