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RULE NO., DESCRIPTION ,LAYOUT RULE
Layer ,MT --- MetalTop,
MT.1 ,Min. MetalTop Width ,0.44
MT.2a ,Min. MetalTop Space ,0.46
MT.2b ,Min. Space between wide (length & width > 10μm) MetalTop ,0.60
MT.3 ,"MetalTop coverage over the entire die shall be >30%
(Refer to section 13.0 for Dummy Metal-fill guidelines. Customer
needs to ensure enough dummy metal to satisfy METALn
coverage)",
MT.4 ,Minimum MetalTop area ,0.5625μm²