RULE NO., DESCRIPTION ,LAYOUT RULE | |
Layer ,MT --- MetalTop, | |
MT.1 ,Min. MetalTop Width ,0.44 | |
MT.2a ,Min. MetalTop Space ,0.46 | |
MT.2b ,Min. Space between wide (length & width > 10μm) MetalTop ,0.60 | |
MT.3 ,"MetalTop coverage over the entire die shall be >30% | |
(Refer to section 13.0 for Dummy Metal-fill guidelines. Customer | |
needs to ensure enough dummy metal to satisfy METALn | |
coverage)", | |
MT.4 ,Minimum MetalTop area ,0.5625μm² |