| RULE NO., DESCRIPTION ,LAYOUT RULE |
| Layer ,Vn --- Vian (where n = 1 to 5), |
| Vn.1 ,Min./Max. Vian size (1 ≤ n ≤ 5), 0.26 |
| Vn.2 ,Min. Vian Space (1 ≤ n ≤ 5) ,0.26 |
| Vn.3 ,"Min. Metaln enclose Vian |
| |
| i. METALn (< 0.34μm) end-of-line overlap1 |
| ii. If METALn overlap VIAn by < 0.04μm on one side, adjacent |
| METALn edges overlap |
| iii. Minimum METALn overlap of VIAn on all sides for minimum |
| VIAn resistance variation (guideline)","0.00 ( n = 1 ) |
| 0.01 (2 ≤ n ≤ 5) |
| |
| 0.06 |
| 0.06 |
| 0.12" |
| Vn.4 ,"Metal[n+1] overlap of VIAn |
| i. METALn (< 0.34μm) end-of-line overlap1 |
| ii. If METAL[n+1] overlap VIAn by < 0.04μm on one side, adjacent |
| METAL[n+1] edges overlap |
| iii. Minimum METAL[n+1] overlap of VIAn on all sides for minimum |
| VIAn resistance variation (guideline)","0.01 |
| 0.06 |
| 0.06 |
| 0.12" |
| Vn.5 ,VIAn stack2 over contact is permitted, |
