| RULE NO., DESCRIPTION, LAYOUT RULE |
| Layer ,CO --- Contact, |
| CO.1 ,Min/max contact size ,0.22 |
| CO.2a ,Min. Contact Space ,0.25 |
| CO.2b ,"Min. Contact Array (>= 4x4) Space |
| (Note: spacing between 0.28um and 0.32um will be considered as part of any |
| array.)",0.28 |
| CO.2c ,"Max. Space for well tap guard ring contacts for High Voltage LDMOS |
| (Recognized by well taps with LDMOS_XTOR mark layer)",11 |
| CO.3 ,Min. Poly2 enclose contact ,0.10 |
| CO.4 ,Min. COMP enclose contact ,0.10 |
| CO.6a,"Min. Metal1 enclose Contact [Metal1 with width <0.34um:Protrusion |
| >=0.24um] [Outside Not Allowed]",0.06 |
| CO.6b ,"Min. Metal1 enclose Contact by sides (a-b-c-d) [Outside Not Allowed] |
| 1(CO.5b rule need to pass Set1 or Set2)","Set 1: (0.005: 0.06: 0.005: 0.06) |
| Set 2: (0.04: 0.04: 0.04: 0.04)" |
| G.CO.6c ,"Min. Metal1 enclose contact on all sides for minimum contact resistance |
| variation [Outside Not Allowed] (Guideline)",0.12 |
| CO.7a ,Min. Space from COMP contact to Poly2 on COMP ,0.16 |
| CO.7b ,"Min. COMP contact space to Poly2 on COMP for drain side of asymmetric |
| HVNMOS /HVPMOS",0.7/0.6 |
| CO.7c ,"Min. COMP contact space to Poly2 on COMP for source side of asymmetric |
| HVNMOS and HVPMOS",0.16 |
| CO.8 ,Min. Poly2 contact space to COMP ,0.20 |
| CO.10 ,Contact on Poly2 must be outside (Poly2 AND COMP), |
| CO.11,"Contact enclosed by field oxide ((Not COMP) AND (NOT Poly2)) is |
| forbidden.", |
| CO.12,Butted source NCOMP overlap with contact,0.16 |
| CO.13,Butted source PCOMP overlap with contact,0.16 |
| CO.14a,"Min Pbody (butted PCOMP with contact but not interacting with poly) width |
| with a shredded contact straddled NCOMP & Pbody = 0.42",0.42 |
| CO.14b,"There must be at least one row of contact inside (P-Body interacting with |
| contact) and they are fully enclosed by Pplus ( Note: DRC can only check at |
| least one such contact exist and it cannot check for the existence of a row)",-- |
| CO.14c,"Min Pbody contact (Pbody contacts are the contacts not touching NCOMP) |
| enclosure by butted PCOMP)",0.10 |
| CO.15a,Min Nbody (butted NCOMP with contact but not interacting with poly),0.42 |
| CO.15b,"width with a shredded contact straddled PCOMP & Nbody = 0.42 |
| There must be at least one row of contact inside (Nbody interacting with |
| contact) and they are fully enclosed by Nplus ( Note: DRC can only check at |
| least one such contact exist and it cannot check for the existence of a row)",-- |
| CO.15c,"Min Nbody contact (Nbody contacts are the contacts not touching PCOMP) |
| enclosure by butted NCOMP",0.10 |
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