| 4.1 Drawn layer definition and abbreviation |
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| .. csv-table:: Drawn layers |
| :file: tables_clear/4.1_table_layerdiff.csv |
| :widths: 100, 200, 400, 100, 100 |
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| .. note:: |
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| 1. Used in the dummy COMP, dummy poly2 & dummy metal generation algorithm (YI-141-GR003). |
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| 2. See section 11 for complete list of analog-specific layers and masks. |
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| 3. Based on the spec YI-103-SC001/YI-141-SC001. |
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| 4. Metal1_Dummy and Metal2_Dummy are dummy fills for Metal1 and Metal2. Data type is used to |
| differentiate between circuits and dummy Metal1 and Metal2. This separation is to facilitate |
| generation of dummy poly2. Dummy poly2 needs to be generated when prime die poly2 density |
| falls below poly2 density requirement. Circuit and metal dummy fill will be “OR” after dummy |
| poly2 is generated (where applicable). |
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| 5. Metal3_Dummy, Metal4_Dummy, Metal5_Dummy and MetalTop_Dummy are metal dummy |
| fills. These are separated from circuit metal by using different data type. |
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| 6. Used for all logic, analog and RF processes. |
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| 7. ESD is optional mask to provide ESD implant for MV I/Os. |
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| 8. CAP_MK is used to define the bottom plate of the MIM Capacitor for DRC purpose. It will also |
| be used for LVS purposes. Refer to EDA-CAD-000-GS003 (LVS Recognition and Extraction |
| Guideline) for more information and guidelines on LVS marking layers. |
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| 9. DRC_BJT is used for DRC purpose to avoid PL.6 and DF.3C rule. |
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| 10. V5_XTOR is used as a marking layer to define 5V MV CMOS transistor. Minimum channel |
| length for 5V device is 0.5um while 6V device minimum channel length is 0.6um. Whenever |
| transistor is enclosed by V5_Xtor layer, the minimum channel length is 0.5um. |
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| 11. MIM_L_MK marking layer is used to indicate the length of MIM capacitor. The width of |
| MIM_L_MK is fixed to 0.1um and its length equals to the length of the MIM capacitor in which |
| layer MIM_L_MK exists. |
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| 12. MOS_CAP_MK layer is used to identify the NMOS or PMOS capacitor |