| RULE NO.,DESCRIPTION,LAYOUT RULE | |
| Layer,MT --- MetalTop, | |
| MT.1,Width,0.36/0.44* | |
| MT.2a,Space,0.38/0.46* | |
| MT.2b,Space between wide (length & width > 10um) MetalTop,0.50/0.60* | |
| MT.4,Minimum MetalTop area,0.5625μm2 | |
| MT.3,"MetalTop coverage over the entire die shall be >30% | |
| (Refer to section 13.0 for Dummy Metal-fill guidelines. Customer needs | |
| to ensure enough dummy metal to satisfy Metaln coverage) ", | |