| RULE NO., DESCRIPTION ,LAYOUT RULE |
| Layer ,Vn --- Vian (where n = 1 to 5), |
| Vn.1 ,Min./Max. Vian size (1 ≤ n ≤ 5), 0.26 |
| Vn.2 ,Min. Vian Space (1 ≤ n ≤ 5) ,0.26 |
| Vn.3a ,"Min. Metaln enclose Vian [Metaln with width <0.34um, |
| Protrusion >=0.28um] [Outside Not Allowed]", 0.06 |
| Vn.3b ,"Min. Metal1 enclose Via1by sides (a: b: c: d) [Outside |
| Not Allowed] 1 |
| (Vn.3b rule need to pass Set1 or Set2)"," |
| Set 1: (0: 0.06: 0: 0.06) |
| Set 2: (0.04: 0.04: 0.04: 0.04)" |
| Vn.3c ,"Min. Metaln (2 ≤ n ≤ 5) enclose Vian (2 ≤ n ≤ 5) by sides |
| (a: b: c: d) [Outside Not Allowed] 1 |
| (Vn.3c rule need to pass Set1 or Set2)"," |
| Set 1: (0.01: 0.06: 0.01: 0.06) |
| Set 2: (0.04: 0.04: 0.04: 0.04)" |
| G.Vn.3d ,"Min. Metaln enclose Vian on all sides for min. Vian |
| resistance variation [Outside Not Allowed] (Guileline)",0.12 |
| Vn.4a ,"Min. Metal [n+1] enclose Vian [Metaln with width |
| <0.34um, Protrusion >=0.28um] [Outside Not Allowed]",0.06 |
| Vn.4b ,"Min. Metal [n+1] enclose Vian by sides (a: b: c: d) |
| [Outside Not Allowed] 1 |
| (Vn.4b rule need to pass Set1 or Set2)"," |
| Set 1: (0.01: 0.06: 0.01: 0.06) |
| Set 2: (0.04: 0.04: 0.04: 0.04)" |
| G.Vn.4c ,"Min. Metal [n+1] enclose Vian on all sides for min. Vian |
| resistance variation [Outside Not Allowed] (Guideline)",0.12 |
