| RULE NO., DESCRIPTION, LAYOUT RULE | |
| Layer ,Mn --- METALn (where n = 1 to 5), | |
| Mn.1 ,Min. METALn Width,"0.23 (n = 1) | |
| 0.28 (2 ≤ n ≤ 5)" | |
| Mn.2a ,Min. METALn Space ,"0.23 (n = 1) | |
| 0.28 (2 ≤ n ≤ 5)" | |
| Mn.2b ,Min. METALn Space to wide METALn (length & width > 10μm), 0.30 | |
| Mn.3 ,Min. METALn area ,0.1444 μm2 | |
| Mn.4, "METALn coverage over the entire die shall be >30% | |
| (Refer to section 13.0 for Dummy Metal fill guidelines. Customer | |
| needs to ensure enough dummy metal to satisfy METALn coverage)", |