| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| |
| if BEOL |
| |
| #================================================ |
| #--------------------METALTOP-------------------- |
| #================================================ |
| |
| if METAL_TOP == '9K' |
| logger.info('MetalTop thickness 6k section') |
| |
| # Rule MT.1: min. metaltop width is 0.44µm |
| logger.info('Executing rule MT.1') |
| mt1_l1 = top_metal.width(0.44.um, euclidian).polygons(0.001) |
| mt1_l1.output('MT.1', 'MT.1 : min. metaltop width : 0.44µm') |
| mt1_l1.forget |
| |
| # Rule MT.2a: min. metaltop spacing is 0.46µm |
| logger.info('Executing rule MT.2a') |
| mt2a_l1 = top_metal.space(0.46.um, euclidian).polygons(0.001) |
| mt2a_l1.output('MT.2a', 'MT.2a : min. metaltop spacing : 0.46µm') |
| mt2a_l1.forget |
| |
| # Rule MT.2b: Space to wide metal top (length & width > 10um) is 0.6µm |
| logger.info('Executing rule MT.2b') |
| wide_top_metal = top_metal.not_interacting(top_metal.edges.with_length(nil, 10.um)) |
| mt2b_l1 = top_metal.separation(wide_top_metal, 0.6.um, euclidian) |
| mt2b_l1.output('MT.2b', 'MT.2b : Space to wide metal top (length & width > 10um) : 0.6µm') |
| mt2b_l1.forget |
| wide_top_metal.forget |
| |
| # Rule MT.4: Minimum MetalTop area is 0.5625µm² |
| logger.info('Executing rule MT.4') |
| mt4_l1 = top_metal.with_area(nil, 0.5625.um) |
| mt4_l1.output('MT.4', 'MT.4 : Minimum MetalTop area : 0.5625µm²') |
| mt4_l1.forget |
| |
| elsif METAL_TOP == '20K' |
| logger.info('MetalTop thickness 20K section') |
| |
| # Rule MT20.1 : Minimum width of thick MetalTop is 1.50 um |
| logger.info('Executing rule MT20.1') |
| mt20_1_l1 = top_metal.width(1.5.um).polygons(0.001) |
| mt20_1_l1.output('MT20.1','MT20.1 : Minimum width of thick MetalTop is 1.50 um ') |
| mt20_1_l1.forget |
| |
| # Rule MT20.2 : Minimum space between thick MetalTop is 1.50 um |
| logger.info('Executing rule MT20.2') |
| mt20_2_l1 = top_metal.space(1.5.um).polygons(0.001) |
| mt20_2_l1.output('MT20.2','MT20.2 : Minimum space between thick MetalTop is 1.50 um') |
| mt20_2_l1.forget |
| |
| # Rule MT20.3 : The separation of two corners should satisfy the minimum spacing is 1.50 um |
| logger.info('Executing rule MT20.3') |
| mt20_3_l1 = top_metal.space(1.5.um).polygons(0.001) |
| mt20_3_l1.output('MT20.3','MT20.3 : The separation of two corners should satisfy the minimum spacing is 1.50 um') |
| mt20_3_l1.forget |
| |
| # Rule MT20.4: The separation of single metal line from a any degree metal line should satisfy the minimum spacing. is 1.5µm |
| logger.info('Executing rule MT20.4') |
| mt20_4_l1 = top_metal.space(1.5.um).polygons(0.001) |
| mt20_4_l1.output('MT20.4', 'MT20.4 : The separation of single metal line from a any degree metal line should satisfy the minimum spacing. : 1.5µm') |
| mt20_4_l1.forget |
| |
| # Rule MT20.5: Minimum thick MetalTop overlap of underlying via (for example: via5 for 6LM case) is 0.12 um. |
| logger.info('Executing rule MT20.5') |
| mt20_5_l1 = top_metal.enclosing(top_via, 0.12.um).polygons(0.001).or(top_via.not_inside(top_metal)) |
| mt20_5_l1.output('MT20.5', 'MT20.5 : Minimum thick MetalTop overlap of underlying via (for example: via5 for 6LM case) is 0.12 um.') |
| mt20_5_l1.forget |
| |
| mt20_6_cond = top_metal.drc( width <= 2.0.um) |
| mt20_6_eol = top_metal.edges.with_length(nil, 2.0.um).interacting(mt20_6_cond.first_edges).interacting(mt20_6_cond.second_edges).not(mt20_6_cond.first_edges).not(mt20_6_cond.second_edges) |
| # Rule MT20.6: Thick MetalTop end-of-line (width <2.0um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed] is 0.25 um. |
| logger.info('Executing rule MT20.6') |
| mt20_6_l1 = mt20_6_eol.enclosing(top_via.edges,0.25.um, projection).polygons(0.001).or(top_via.not_inside(top_metal)) |
| mt20_6_l1.output('MT20.6', 'MT20.6 : Thick MetalTop end-of-line (width <2.0um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed] is 0.25 um.') |
| mt20_6_l1.forget |
| mt20_6_cond.forget |
| mt20_6_eol.forget |
| |
| mt20_8_via = top_via.sized(0.18.um).sized(-0.18.um).with_bbox_min(0.78.um , nil).extents.inside(top_metal) |
| mt20_8_mask = mt20_8_via.size(1).not(top_via).with_holes(4, nil) |
| mt20_8_slct_via = top_via.interacting(mt20_8_mask) |
| # Rule MT20.8: There shall be minimum 2X2 array of vias (top vias) at one location connecting to 2um thick top metal. |
| logger.info('Executing rule MT20.8') |
| mt20_8_l1 = topmin1_metal.not_interacting(mt20_8_slct_via) |
| mt20_8_l1.output('MT20.8', 'MT20.8 : There shall be minimum 2X2 array of vias (top vias) at one location connecting to 2um thick top metal.') |
| mt20_8_l1.forget |
| mt20_8_via.forget |
| mt20_8_mask.forget |
| mt20_8_slct_via.forget |
| |
| elsif METAL_TOP == '30K' |
| logger.info('MetalTop thickness 30K section') |
| |
| # Rule MT30.1: Min. thick MetalTop width. is 1.8µm |
| logger.info('Executing rule MT30.1') |
| mt301_l1 = top_metal.width(1.8.um, euclidian).polygons(0.001) |
| mt301_l1.output('MT30.1', 'MT30.1 : Min. thick MetalTop width. : 1.8µm') |
| mt301_l1.forget |
| |
| # Rule MT30.2: Min. thick MetalTop space. is 1.8µm |
| logger.info('Executing rule MT30.2') |
| mt302_l1 = top_metal.space(1.8.um, euclidian).polygons(0.001) |
| mt302_l1.output('MT30.2', 'MT30.2 : Min. thick MetalTop space. : 1.8µm') |
| mt302_l1.forget |
| |
| # Rule MT30.3: The separation of two corners should satisfy the minimum spacing. is 1.8µm |
| logger.info('Executing rule MT30.3') |
| mt303_l1 = top_metal.space(1.8.um, euclidian).polygons(0.001) |
| mt303_l1.output('MT30.3', 'MT30.3 : The separation of two corners should satisfy the minimum spacing. : 1.8µm') |
| mt303_l1.forget |
| |
| # Rule MT30.4: The separation of single metal line from a any degree metal line should satisfy the minimum spacing. is 1.8µm |
| logger.info('Executing rule MT30.4') |
| mt304_l1 = top_metal.space(1.8.um, euclidian).polygons(0.001) |
| mt304_l1.output('MT30.4', 'MT30.4 : The separation of single metal line from a any degree metal line should satisfy the minimum spacing. : 1.8µm') |
| mt304_l1.forget |
| |
| # Rule MT30.5: Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed]. |
| logger.info('Executing rule MT30.5') |
| mt305_l1 = top_metal.enclosing(top_via, 0.12.um, euclidian).polygons(0.001).or(top_via.not_inside(top_metal)) |
| mt305_l1.output('MT30.5', 'MT30.5 : Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed].') |
| mt305_l1.forget |
| |
| mt30p6_cond = top_metal.drc( width <= 2.5.um) |
| mt30p6_eol = top_metal.edges.with_length(nil, 2.5.um).interacting(mt30p6_cond.first_edges).interacting(mt30p6_cond.second_edges).not(mt30p6_cond.first_edges).not(mt30p6_cond.second_edges) |
| # Rule MT30.6: Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed]. |
| logger.info('Executing rule MT30.6') |
| mt306_l1 = mt30p6_eol.enclosing(top_via.edges,0.25.um, projection).polygons(0.001).or(top_via.not_inside(top_metal)) |
| mt306_l1.output('MT30.6', 'MT30.6 : Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed].') |
| mt306_l1.forget |
| mt30p6_cond.forget |
| mt30p6_eol.forget |
| |
| mt30p8_via = top_via.sized(0.18.um).sized(-0.18.um).with_bbox_min(0.78.um , nil).extents.inside(top_metal) |
| mt30p8_mask = mt30p8_via.size(1).not(top_via).with_holes(4, nil) |
| mt30p8_slct_via = top_via.interacting(mt30p8_mask) |
| # Rule MT30.8: There shall be minimum 2X2 array of vias (top vias) at one location connecting to 3um thick top metal. |
| logger.info('Executing rule MT30.8') |
| mt308_l1 = topmin1_metal.not_interacting(mt30p8_slct_via) |
| mt308_l1.output('MT30.8', 'MT30.8 : There shall be minimum 2X2 array of vias (top vias) at one location connecting to 3um thick top metal.') |
| mt308_l1.forget |
| mt30p8_via.forget |
| mt30p8_mask.forget |
| mt30p8_slct_via.forget |
| end #METAL_TOP |
| end #BEOL |
