| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| |
| if BEOL |
| |
| #==================================================== |
| #----------------- Metal1 Slotting ------------------ |
| #==================================================== |
| |
| metal1_slot = metal1.holes |
| |
| # Rule MSLOT.1_M1 : Maximum metal1 width without slotting |
| logger.info('Executing rule MSLOT.1_M1') |
| mslot1_m1 = metal1.not(metal1.width(30.001.um).polygons(0.001)).not_interacting(metal1_slot) |
| mslot1_m1.output('MSLOT.1_M1','MSLOT.1_M1 : Maximum metal1 width without slotting ') |
| mslot1_m1.forget |
| |
| # Rule MSLOT.2_M1 : Minimum metal1 slot width (slot layers) |
| logger.info('Executing rule MSLOT.2_M1') |
| mslot2_m1 = metal1_slot.width(2.0.um).polygons(0.001) |
| mslot2_m1.output('MSLOT.2_M1','MSLOT.2_M1 : Minimum metal1 slot width (slot layers)') |
| mslot2_m1.forget |
| |
| # Rule MSLOT.3a_M1 : Minimum metal1 Slot length (slot mark layers) |
| logger.info('Executing rule MSLOT.3a_M1') |
| mslot3a_m1 = metal1_slot.with_bbox_max(nil,10.um) |
| mslot3a_m1.output('MSLOT.3a_M1','MSLOT.3a_M1 : Minimum Slot length (slot mark layers) ') |
| mslot3a_m1.forget |
| |
| # Rule MSLOT.3b_M1 : Maximum metal1 Slot length (slot mark layers) is 250 um |
| logger.info('Executing rule MSLOT.3b_M1') |
| mslot3b_m1 = metal1_slot.with_bbox_max(250.001,nil) |
| mslot3b_m1.output('MSLOT.3b_M1','MSLOT.3b_M1 : Maximum Slot length (slot mark layers) is 250 um') |
| mslot3b_m1.forget |
| |
| # Rule MSLOT.4a_M1 : Minimum metal1 Slot space (slot mark layers) is 10 um |
| logger.info('Executing rule MSLOT.4a_M1') |
| mslot4a_m1 = metal1_slot.space(10.um).polygons(0.001) |
| mslot4a_m1.output('MSLOT.4a_M1','MSLOT.4a_M1 : Minimum metal1 Slot space (slot mark layers) is 10 um') |
| mslot4a_m1.forget |
| |
| if metal1_slot.count() > 1 |
| # Rule MSLOT.4b_M1 : Maximum metal1 Slot space (slot mark layers) is 30 um |
| logger.info('Executing rule MSLOT.4b_M1') |
| mslot4b_m1 = metal1_slot.not_interacting(metal1_slot.space(30.um).polygons(0.001)) |
| mslot4b_m1.output('MSLOT.4b_M1','MSLOT.4b_M1 : Maximum metal1 Slot space (slot mark layers) is 30µm') |
| mslot4b_m1.forget |
| end |
| |
| # Rule MSLOT.5_M1 : Minimum metal1 slot (slot mark layers) to metal1 edge spacing is 10 um |
| logger.info('Executing rule MSLOT.5_M1') |
| mslot5_m1_l1 = metal1.or(metal1_slot).enclosing(metal1_slot,10.0.um).polygons(0.001) |
| mslot5_m1_l2 = metal1.or(metal1_slot).not_inside(metal1.extents) |
| mslot5_m1 = mslot5_m1_l1.or(mslot5_m1_l2) |
| mslot5_m1.output('MSLOT.5_M1','MSLOT.5_M1 : Minimum metal1 slot (slot mark layers) to metal1 edge spacing is 10 um') |
| mslot5_m1_l1.forget |
| mslot5_m1_l2.forget |
| mslot5_m1.forget |
| |
| # Rule MSLOT.7_M1 : Minimum space from via1 to metal1 slot is 0.2 um |
| logger.info('Executing rule MSLOT.7_M1') |
| mslot7_m1 = via1.separation(metal1_slot,0.2.um).polygons(0.001).or(via1.not_outside(metal1_slot)) |
| mslot7_m1.output('MSLOT.7_M1','MSLOT.7_M1 : Minimum space from via1 to metal1 slot is 0.2 um') |
| mslot7_m1.forget |
| |
| # Rule MSLOT.8_M1 : Minimum space from contact to metal1 slot is 0.2 um |
| logger.info('Executing rule MSLOT.8_M1') |
| mslot8_m1 = contact.separation(metal1_slot,0.2.um).polygons(0.001).or(contact.not_outside(metal1_slot)) |
| mslot8_m1.output('MSLOT.8_M1','MSLOT.8_M1 : Minimum space from contact to metal1 slot is 0.2 um') |
| mslot8_m1.forget |
| |
| end #BEOL |
