| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| |
| if BEOL |
| |
| if METAL_LEVEL == '3LM' || METAL_LEVEL == '4LM' || METAL_LEVEL == '5LM' || METAL_LEVEL == '6LM' |
| #================================================ |
| #----------------------VIA2---------------------- |
| #================================================ |
| |
| # Rule V2.1: Min/max Via2 size . is 0.26µm |
| logger.info('Executing rule V2.1') |
| v2_1_l1 = via2.edges.without_length(0.26.um).extended(0, 0, 0.001, 0.001) |
| v2_1_l1.output('V2.1', 'V2.1 : Min/max Via2 size . : 0.26µm') |
| v2_1_l1.forget |
| |
| # Rule V2.2: min. via2 spacing is 0.26µm |
| logger.info('Executing rule V2.2') |
| v2_2_l1 = via2.space(0.26.um, euclidian).polygons(0.001) |
| v2_2_l1.output('V2.2', 'V2.2 : min. via2 spacing : 0.26µm') |
| v2_2_l1.forget |
| |
| # Rule V2.3a: metal2 overlap of via2. is 0.01um |
| logger.info('Executing rule V2.3a') |
| v2_3a_l1 = metal2.enclosing(via2, 0.01.um, euclidian).polygons(0.001).or(via2.not(metal2)) |
| v2_3a_l1.output('V2.3a', 'V2.3a : metal2 overlap of via2. : 0.01um') |
| v2_3a_l1.forget |
| |
| v2_3b_cond = metal2.drc( width <= 0.34.um).with_length(0.28.um,nil,both) |
| v2_3b_eol = metal2.edges.with_length(nil, 0.34.um).interacting(v2_3b_cond.first_edges).interacting(v2_3b_cond.second_edges).not(v2_3b_cond.first_edges).not(v2_3b_cond.second_edges) |
| # Rule V2.3b: metal2 (< 0.34um) end-of-line overlap. is 0.06µm |
| logger.info('Executing rule V2.3b') |
| v2_3b_l1 = v2_3b_eol.enclosing(via2.edges,0.06.um, projection).polygons(0.001) |
| v2_3b_l1.output('V2.3b', 'V2.3b : metal2 (< 0.34um) end-of-line overlap. : 0.06µm') |
| v2_3b_l1.forget |
| v2_3b_cond.forget |
| v2_3b_eol.forget |
| |
| v2_3c_1 = via2.edges.interacting(via2.drc(enclosed(metal2, projection) < 0.04.um).edges.centers(0, 0.5)) |
| v2_3c_2 = via2.edges.interacting(via2.drc(0.04.um <= enclosed(metal2, projection) < 0.06.um).centers(0, 0.5)) |
| v2_3c_3 = v2_3c_1.extended(0, 0, 0, 0.001, joined).corners(90) |
| # Rule V2.3c: If metal2 overlap via2 by < 0.04um on one side, adjacent metal2 edges overlap. is 0.06µm |
| logger.info('Executing rule V2.3c') |
| v2_3c_l1 = v2_3c_2.not_in(v2_3c_1).interacting(v2_3c_1).or(v2_3c_1.interacting(v2_3c_3)).enclosed(metal2.edges, 0.06.um).polygons(0.001) |
| v2_3c_l1.output('V2.3c', 'V2.3c : If metal2 overlap via2 by < 0.04um on one side, adjacent metal2 edges overlap. : 0.06µm') |
| v2_3c_l1.forget |
| v2_3c_1.forget |
| v2_3c_2.forget |
| v2_3c_3.forget |
| |
| # rule V2.3e is not a DRC check |
| |
| # Rule V2.4a: metal3 overlap of via2. is 0.01um |
| logger.info('Executing rule V2.4a') |
| v2_4a_l1 = metal3.enclosing(via2, 0.01.um, euclidian).polygons(0.001) |
| v2_4a_l2 = via2.interacting(metal3).not(metal3) |
| v2_4a_l = v2_4a_l1.join(v2_4a_l2) |
| v2_4a_l.output('V2.4a', 'V2.4a : metal3 overlap of via2. : 0.01um') |
| v2_4a_l1.forget |
| v2_4a_l2.forget |
| v2_4a_l.forget |
| |
| v2_4b_cond = metal3.drc( width <= 0.34.um).with_length(0.28.um,nil,both) |
| v2_4b_eol = metal3.edges.with_length(nil, 0.34.um).interacting(v2_4b_cond.first_edges).interacting(v2_4b_cond.second_edges).not(v2_4b_cond.first_edges).not(v2_4b_cond.second_edges) |
| # Rule V2.4b: metal3 (< 0.34um) end-of-line overlap. is 0.06µm |
| logger.info('Executing rule V2.4b') |
| v2_4b_l1 = v2_4b_eol.enclosing(via2.edges,0.06.um, projection).polygons(0.001) |
| v2_4b_l1.output('V2.4b', 'V2.4b : metal3 (< 0.34um) end-of-line overlap. : 0.06µm') |
| v2_4b_l1.forget |
| |
| v2_4b_cond.forget |
| v2_4b_eol.forget |
| |
| v2_4c_1 = via2.edges.interacting(via2.drc(enclosed(metal3, projection) < 0.04.um).edges.centers(0, 0.5)) |
| v2_4c_2 = via2.edges.interacting(via2.drc(0.04.um <= enclosed(metal3, projection) < 0.06.um).centers(0, 0.5)) |
| v2_4c_3 = v2_4c_1.extended(0, 0, 0, 0.001, joined).corners(90) |
| # Rule V2.4c: If metal3 overlap via2 by < 0.04um on one side, adjacent metal3 edges overlap. is 0.06µm |
| logger.info('Executing rule V2.4c') |
| v2_4c_l1 = v2_4c_2.not_in(v2_4c_1).interacting(v2_4c_1).or(v2_4c_1.interacting(v2_4c_3)).enclosed(metal3.edges, 0.06.um).polygons(0.001) |
| v2_4c_l1.output('V2.4c', 'V2.4c : If metal3 overlap via2 by < 0.04um on one side, adjacent metal3 edges overlap. : 0.06µm') |
| v2_4c_l1.forget |
| v2_4c_1.forget |
| v2_4c_2.forget |
| v2_4c_3.forget |
| |
| # rule V2.4d is not a DRC check |
| |
| # rule V2.5 is not a DRC check |
| end #METAL_LEVEL |
| end #BEOL |
