| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| |
| if BEOL |
| |
| #================================================ |
| #----------------------VIA1---------------------- |
| #================================================ |
| |
| # Rule V1.1: Min/max Via1 size . is 0.26µm |
| logger.info('Executing rule V1.1') |
| v1_1_l1 = via1.edges.without_length(0.26.um).extended(0, 0, 0.001, 0.001) |
| v1_1_l1.output('V1.1', 'V1.1 : Min/max Via1 size . : 0.26µm') |
| v1_1_l1.forget |
| |
| # Rule V1.2: min. via1 spacing is 0.26µm |
| logger.info('Executing rule V1.2') |
| v1_2_l1 = via1.space(0.26.um, euclidian).polygons(0.001) |
| v1_2_l1.output('V1.2', 'V1.2 : min. via1 spacing : 0.26µm') |
| v1_2_l1.forget |
| |
| # Rule V1.3a: metal-1 overlap of via1. is 0 um. |
| logger.info('Executing rule V1.3a') |
| v1_3a_l1 = via1.not(metal1) |
| v1_3a_l1.output('V1.3a', 'V1.3a : metal-1 overlap of via1. : 0um') |
| v1_3a_l1.forget |
| |
| v1_3b_cond = metal1.drc( width <= 0.34.um).with_length(0.28.um,nil,both) |
| v1_3b_eol = metal1.edges.with_length(nil, 0.34.um).interacting(v1_3b_cond.first_edges).interacting(v1_3b_cond.second_edges).not(v1_3b_cond.first_edges).not(v1_3b_cond.second_edges) |
| # Rule V1.3b: metal-1 (< 0.34um) end-of-line overlap. is 0.06µm |
| logger.info('Executing rule V1.3b') |
| v1_3b_l1 = v1_3b_eol.enclosing(via1.edges,0.06.um, projection).polygons(0.001) |
| v1_3b_l1.output('V1.3b', 'V1.3b : metal-1 (< 0.34um) end-of-line overlap. : 0.06µm') |
| v1_3b_l1.forget |
| v1_3b_cond.forget |
| v1_3b_eol.forget |
| |
| v1_3c_1 = via1.edges.interacting(via1.drc(enclosed(metal1, projection) < 0.04.um).edges.centers(0, 0.5)) |
| v1_3c_2 = via1.edges.interacting(via1.drc(0.04.um <= enclosed(metal1, projection) < 0.06.um).centers(0, 0.5)) |
| v1_3c_3 = v1_3c_1.extended(0, 0, 0, 0.001, joined).corners(90) |
| # Rule V1.3c: If metal-1 overlap via1 by < 0.04um on one side, adjacent metal-1 edges overlap. is 0.06µm |
| logger.info('Executing rule V1.3c') |
| v1_3c_l1 = v1_3c_2.not_in(v1_3c_1).interacting(v1_3c_1).or(v1_3c_1.interacting(v1_3c_3)).enclosed(metal1.edges, 0.06.um).polygons(0.001) |
| v1_3c_l1.output('V1.3c', 'V1.3c : If metal-1 overlap via1 by < 0.04um on one side, adjacent metal-1 edges overlap. : 0.06µm') |
| v1_3c_l1.forget |
| v1_3c_1.forget |
| v1_3c_2.forget |
| v1_3c_3.forget |
| |
| # rule V1.3d is not a DRC check |
| |
| # Rule V1.4a: metal-2 overlap of via1. is 0.01um |
| logger.info('Executing rule V1.4a') |
| v1_4a_l1 = metal2.enclosing(via1, 0.01.um, euclidian).polygons(0.001) |
| v1_4a_l2 = via1.interacting(metal2).not(metal2) |
| v1_4a_l = v1_4a_l1.join(v1_4a_l2) |
| v1_4a_l.output('V1.4a', 'V1.4a : metal-2 overlap of via1.: 0.01um') |
| v1_4a_l1.forget |
| v1_4a_l2.forget |
| v1_4a_l.forget |
| |
| v1_4b_cond = metal2.drc( width <= 0.34.um).with_length(0.28.um,nil,both) |
| v1_4b_eol = metal2.edges.with_length(nil, 0.34.um).interacting(v1_4b_cond.first_edges).interacting(v1_4b_cond.second_edges).not(v1_4b_cond.first_edges).not(v1_4b_cond.second_edges) |
| # Rule V1.4b: metal-2 (< 0.34um) end-of-line overlap. is 0.06µm |
| logger.info('Executing rule V1.4b') |
| v1_4b_l1 = v1_4b_eol.enclosing(via1.edges,0.06.um, projection).polygons(0.001) |
| v1_4b_l1.output('V1.4b', 'V1.4b : metal-2 (< 0.34um) end-of-line overlap. : 0.06µm') |
| v1_4b_l1.forget |
| v1_4b_cond.forget |
| v1_4b_eol.forget |
| |
| v1_4c_1 = via1.edges.interacting(via1.drc(enclosed(metal2, projection) < 0.04.um).edges.centers(0, 0.5)) |
| v1_4c_2 = via1.edges.interacting(via1.drc(0.04.um <= enclosed(metal2, projection) < 0.06.um).centers(0, 0.5)) |
| v1_4c_3 = v1_4c_1.extended(0, 0, 0, 0.001, joined).corners(90) |
| # Rule V1.4c: If metal-2 overlap via1 by < 0.04um on one side, adjacent metal-2 edges overlap. is 0.06µm |
| logger.info('Executing rule V1.4c') |
| v1_4c_l1 = v1_4c_2.not_in(v1_4c_1).interacting(v1_4c_1).or(v1_4c_1.interacting(v1_4c_3)).enclosed(metal2.edges, 0.06.um).polygons(0.001) |
| v1_4c_l1.output('V1.4c', 'V1.4c : If metal-2 overlap via1 by < 0.04um on one side, adjacent metal-2 edges overlap. : 0.06µm') |
| v1_4c_l1.forget |
| v1_4c_1.forget |
| v1_4c_2.forget |
| v1_4c_3.forget |
| |
| # rule V1.4d is not a DRC check |
| |
| # rule V1.5 is not a DRC check |
| |
| end #BEOL |
