| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| |
| if BEOL |
| |
| if METAL_LEVEL == '5LM' || METAL_LEVEL == '6LM' |
| #==================================================== |
| #----------------- Metal5 Slotting ------------------ |
| #==================================================== |
| |
| metal5_slot = metal5.holes |
| |
| # Rule MSLOT.1_M5 : Maximum metal5 width without slotting is 30um. |
| logger.info('Executing rule MSLOT.1_M5') |
| mslot1_m5 = metal5.not(metal5.width(30.001.um).polygons(0.001)) |
| mslot1_m5.output('MSLOT.1_M5','MSLOT.1_M5 : Maximum metal5 width without slotting: 30.um') |
| mslot1_m5.forget |
| |
| # Rule MSLOT.2_M5 : Minimum metal5 slot width (slot layers) is 2.0um |
| logger.info('Executing rule MSLOT.2_M5') |
| mslot2_m5 = metal5_slot.width(2.0.um).polygons(0.001) |
| mslot2_m5.output('MSLOT.2_M5','MSLOT.2_M5 : Minimum metal5 slot width (slot layers): 2.0 um') |
| mslot2_m5.forget |
| |
| # Rule MSLOT.3a_M5 : Minimum metal5 Slot length (slot mark layers) is 10.um |
| logger.info('Executing rule MSLOT.3a_M5') |
| mslot3a_m5 = metal5_slot.with_bbox_max(nil,10.um) |
| mslot3a_m5.output('MSLOT.3a_M5','MSLOT.3a_M5 : Minimum metal5 Slot length (slot mark layers): 10um ') |
| mslot3a_m5.forget |
| |
| # Rule MSLOT.3b_M5 : Maximum metal5 Slot length (slot mark layers) is 250 um |
| logger.info('Executing rule MSLOT.3b_M5') |
| mslot3b_m5 = metal5_slot.with_bbox_max(250.001,nil) |
| mslot3b_m5.output('MSLOT.3b_M5','MSLOT.3b_M5 : Maximum Slot length (slot mark layers): 250 um') |
| mslot3b_m5.forget |
| |
| # Rule MSLOT.4a_M5 : Minimum metal5 Slot space (slot mark layers) is 10 um |
| logger.info('Executing rule MSLOT.4a_M5') |
| mslot4a_m5 = metal5_slot.space(10.um).polygons(0.001) |
| mslot4a_m5.output('MSLOT.4a_M5','MSLOT.4a_M5 : Minimum metal5 Slot space (slot mark layers): 10 um') |
| mslot4a_m5.forget |
| |
| if metal5_slot.count() > 1 |
| # Rule MSLOT.4b_M5 : Maximum metal5 Slot space (slot mark layers) is 30 um |
| logger.info('Executing rule MSLOT.4b_M5') |
| mslot4b_m5 = metal5_slot.not_interacting(metal5_slot.space(30.001.um).polygons(0.001)) |
| mslot4b_m5.output('MSLOT.4b_M5','MSLOT.4b_M5 : Maximum metal5 Slot space (slot mark layers): 30µm') |
| mslot4b_m5.forget |
| end |
| |
| # Rule MSLOT.5_M5 : Minimum metal5 slot (slot mark layers) to metal5 edge spacing is 10 um |
| logger.info('Executing rule MSLOT.5_M5') |
| mslot5_m5_l1 = metal5.or(metal5_slot).enclosing(metal5_slot,10.0.um).polygons(0.001) |
| mslot5_m5_l2 = metal5.or(metal5_slot).not_inside(metal5.extents) |
| mslot5_m5 = mslot5_m5_l1.or(mslot5_m5_l2) |
| mslot5_m5.output('MSLOT.5_M5','MSLOT.5_M5 : Minimum metal5 slot (slot mark layers) to metal5 edge spacing: 10 um') |
| mslot5_m5_l1.forget |
| mslot5_m5_l2.forget |
| mslot5_m5.forget |
| end #METAL_LEVEL |
| end #BEOL |
