| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| |
| if BEOL |
| |
| if METAL_LEVEL == '5LM' || METAL_LEVEL == '6LM' |
| #================================================ |
| #---------------------METAL5--------------------- |
| #================================================ |
| |
| # Rule M5.1: min. metal5 width is 0.28µm |
| logger.info('Executing rule M5.1') |
| m51_l1 = metal5.width(0.28.um, euclidian).polygons(0.001) |
| m51_l1.output('M5.1', 'M5.1 : min. metal5 width : 0.28µm') |
| m51_l1.forget |
| |
| # Rule M5.2a: min. metal5 spacing is 0.28µm |
| logger.info('Executing rule M5.2a') |
| m52a_l1 = metal5.space(0.28.um, euclidian).polygons(0.001) |
| m52a_l1.output('M5.2a', 'M5.2a : min. metal5 spacing : 0.28µm') |
| m52a_l1.forget |
| |
| # Rule M5.2b: Space to wide Metal5 (length & width > 10um) is 0.3µm |
| logger.info('Executing rule M5.2b') |
| m52b_l1 = metal5.separation(metal5.not_interacting(metal5.edges.with_length(nil, 10.um)), 0.3.um, euclidian).polygons(0.001) |
| m52b_l1.output('M5.2b', 'M5.2b : Space to wide Metal5 (length & width > 10um) : 0.3µm') |
| m52b_l1.forget |
| |
| # Rule M5.3: Minimum metal5 area is 0.1444µm² |
| logger.info('Executing rule M5.3') |
| m53_l1 = metal5.with_area(nil, 0.1444.um) |
| m53_l1.output('M5.3', 'M5.3 : Minimum metal5 area : 0.1444µm²') |
| m53_l1.forget |
| end #METAL_LEVEL |
| end #BEOL |
