| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| if BEOL |
| |
| #================================================ |
| #--------------------METALTOP-------------------- |
| #================================================ |
| |
| if METAL_TOP == '9K' |
| logger.info('MetalTop thickness 9k/11k section') |
| |
| # Rule MT.1: min. metaltop width is 0.44µm |
| logger.info('Executing rule MT.1') |
| mt1_l1 = top_metal.width(0.44.um, euclidian).polygons(0.001) |
| mt1_l1.output('MT.1', 'MT.1 : min. metaltop width : 0.44µm') |
| mt1_l1.forget |
| |
| # Rule MT.2a: min. metaltop spacing is 0.46µm |
| logger.info('Executing rule MT.2a') |
| mt2a_l1 = top_metal.space(0.46.um, euclidian).polygons(0.001) |
| mt2a_l1.output('MT.2a', 'MT.2a : min. metaltop spacing : 0.46µm') |
| mt2a_l1.forget |
| |
| # Rule MT.2b: Space to wide metal top (length & width > 10um) is 0.6µm |
| logger.info('Executing rule MT.2b') |
| wide_top_metal = top_metal.not_interacting(top_metal.edges.with_length(nil, 10.um)) |
| mt2b_l1 = top_metal.separation(wide_top_metal, 0.6.um, euclidian) |
| mt2b_l1.output('MT.2b', 'MT.2b : Space to wide metal top (length & width > 10um) : 0.6µm') |
| mt2b_l1.forget |
| wide_top_metal.forget |
| |
| # Rule MT.4: Minimum MetalTop area is 0.5625µm² |
| logger.info('Executing rule MT.4') |
| mt4_l1 = top_metal.with_area(nil, 0.5625.um) |
| mt4_l1.output('MT.4', 'MT.4 : Minimum MetalTop area : 0.5625µm²') |
| mt4_l1.forget |
| |
| elsif METAL_TOP == '30K' |
| logger.info('MetalTop thickness 30K section') |
| |
| # Rule MT30.1a: Min. thick MetalTop width. is 1.8µm |
| logger.info('Executing rule MT30.1a') |
| mt301a_l1 = top_metal.width(1.8.um, euclidian).polygons(0.001) |
| mt301a_l1.output('MT30.1a', 'MT30.1a : Min. thick MetalTop width. : 1.8µm') |
| mt301a_l1.forget |
| |
| # Rule MT30.1b: Min width for >1000um long metal line (based on metal edge). is 2.2µm |
| logger.info('Executing rule MT30.1b') |
| mt301b_l1 = top_metal.interacting(top_metal.edges.with_length(1000.um, nil)).width(2.2.um, euclidian).polygons(0.001) |
| mt301b_l1.output('MT30.1b', 'MT30.1b : Min width for >1000um long metal line (based on metal edge). : 2.2µm') |
| mt301b_l1.forget |
| |
| # Rule MT30.2: Min. thick MetalTop space. is 1.8µm |
| logger.info('Executing rule MT30.2') |
| mt302_l1 = top_metal.space(1.8.um, euclidian).polygons(0.001) |
| mt302_l1.output('MT30.2', 'MT30.2 : Min. thick MetalTop space. : 1.8µm') |
| mt302_l1.forget |
| |
| # Rule MT30.3: The separation of two corners should satisfy the minimum spacing. is 1.8µm |
| logger.info('Executing rule MT30.3') |
| mt303_l1 = top_metal.space(1.8.um, euclidian).polygons(0.001) |
| mt303_l1.output('MT30.3', 'MT30.3 : The separation of two corners should satisfy the minimum spacing. : 1.8µm') |
| mt303_l1.forget |
| |
| # Rule MT30.4: The separation of single metal line from a any degree metal line should satisfy the minimum spacing. is 1.8µm |
| logger.info('Executing rule MT30.4') |
| mt304_l1 = top_metal.space(1.8.um, euclidian).polygons(0.001) |
| mt304_l1.output('MT30.4', 'MT30.4 : The separation of single metal line from a any degree metal line should satisfy the minimum spacing. : 1.8µm') |
| mt304_l1.forget |
| |
| # Rule MT30.5: Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed] is 0.12um. |
| logger.info('Executing rule MT30.5') |
| mt305_l1 = top_metal.enclosing(top_via, 0.12.um, euclidian).polygons(0.001).or(top_via.not_inside(top_metal)) |
| mt305_l1.output('MT30.5', 'MT30.5 : Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed] is 0.12um.') |
| mt305_l1.forget |
| |
| mt30p6_cond = top_metal.drc( width < 2.5.um) |
| mt30p6_eol = top_metal.edges.with_length(nil, 2.5.um).interacting(mt30p6_cond.first_edges).interacting(mt30p6_cond.second_edges).not(mt30p6_cond.first_edges).not(mt30p6_cond.second_edges) |
| # Rule MT30.6: Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed] is 0.25um. |
| logger.info('Executing rule MT30.6') |
| mt306_l1 = mt30p6_eol.enclosing(top_via.edges,0.25.um, projection).polygons(0.001).or(top_via.not_inside(top_metal)) |
| mt306_l1.output('MT30.6', 'MT30.6 : Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for example: via5 for 6LM case) [Outside Not Allowed] is 0.25um.') |
| mt306_l1.forget |
| |
| #mt30p6_cond.forget |
| |
| #mt30p6_eol.forget |
| |
| mt30p8_via_no_mim = top_via.sized(0.18.um).sized(-0.18.um).with_bbox_min(0.78.um , nil).extents.inside(top_metal) |
| mt30p8_via_mim = top_via.interacting(fusetop).sized(0.3.um).sized(-0.3.um).with_bbox_min(1.02.um , nil).extents.inside(top_metal) |
| mt30p8_via = mt30p8_via_no_mim.or(mt30p8_via_mim) |
| mt30p8_mask = mt30p8_via.size(1).not(top_via).with_holes(4, nil) |
| mt30p8_slct_via = top_via.interacting(mt30p8_mask) |
| # Rule MT30.8: There shall be minimum 2X2 array of vias (top vias) at one location connecting to 3um thick top metal. |
| logger.info('Executing rule MT30.8') |
| mt308_l1 = topmin1_metal.outside(guard_ring_mk).not_interacting(mt30p8_slct_via) |
| mt308_l1.output('MT30.8', 'MT30.8 : There shall be minimum 2X2 array of vias (top vias) at one location connecting to 3um thick top metal.') |
| mt308_l1.forget |
| |
| mt30p8_via.forget |
| |
| mt30p8_mask.forget |
| |
| mt30p8_slct_via.forget |
| |
| end #METAL_TOP |
| end #BEOL |
