| RULE NO.,DESCRIPTION,LAYOUT RULE |
| Layer,Contact --- Contact, |
| CO.1,Min/max contact size,0.22 |
| CO.2a,Space,0.25 |
| CO.2b,Space in 4x4 or larger contact array,0.28 |
| CO.3,Poly2 overlap of contact,0.10 |
| CO.4,COMP overlap of contact,0.10 |
| CO.5a,NPLUS overlap of contact on active,0.10 |
| CO.5b,PPLUS overlap of contact on active,0.10 |
| CO.6,"Metal1 overlap of contact |
| |
| I\) Metal1 (< 0.34μm) end-of-line overlap (1) |
| |
| II\) If Metal1 overlaps contact by < 0.04μm on one side, adjacent metal1 edges overlap |
| |
| III\) Minimum Metal1 overlap of contact on all sides for minimum contact resistance variation* (guideline)","0.005 |
| |
| 0.06 |
| |
| 0.06 |
| |
| 0.12" |
| CO.7,Space from active contact to Poly2,0.16 |
| CO.8,Space from Poly2 contact to active,0.20 |
| CO.9,Contact on NCOMP to PCOMP butting edge is forbidden (contact must not straddle butting edge), |
| CO.10,Contact on Poly2 gate over COMP is forbidden., |
| CO.11,Contact on field oxide is forbidden., |
