| RULE NO. ,DESCRIPTION, LAYOUT RULE |
| Layer ,MT30 = 3um Metal Top, |
| MT30.1 ,"(a) Min. thick MetalTop width |
| (b) Min width for >1000um long metal line (based on metal edge)"," |
| 1.80 |
| 2.2" |
| MT30.2, Min. thick MetalTop space ,1.80 |
| MT30.3, The separation of two corners should satisfy the minimum spacing ,1.80 |
| MT30.4, "The separation of single metal line from a any degree metal line should satisfy |
| the minimum spacing",1.80 |
| MT30.5 ,"Minimum thick MetalTop enclose underlying via (for example: via5 for 6LM |
| case) [Outside Not Allowed]",0.12 |
| MT30.6 ,"Thick MetalTop end-of-line (width <2.5um) enclose underlying via (for |
| example: via5 for 6LM case) [Outside Not Allowed]",0.25 |
| MT30.7 ,"Thick MetalTop coverage over the entire die shall be >30% |
| (Refer to section 13.0 for Dummy Metal-fill guidelines. Customer needs to |
| ensure enough dummy metal to satisfy Metaln coverage)", |
| MT30.8a ,"As via size compare to min thick-metal width is very small. Single top via |
| (e.g Via3 for 4 layer metal process with 3.0um thick top metal option, in other |
| words via connecting to thick metal) at one location cannot exit under the |
| thick (3um thick) metal.",DRC check |
| MT30.8b ,"There shall be minimum 2X2 array of vias (top vias) at one location |
| connecting to 3um thick top metal.",DRC check |
| ,"Note: This rule will not checked for seal ring area (identified by |
| GUARD_RING_MK as the via rules in this area are separately covered |
| under seal ring section)", |
