| ################################################################################################ |
| # Copyright 2022 GlobalFoundries PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the 'License'); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an 'AS IS' BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| ################################################################################################ |
| |
| if BEOL |
| |
| #========================================================== |
| #----------------- Metal Shield Slotting ------------------ |
| #========================================================== |
| |
| # Rule MSLOT.1_MS : Maximum metal shield width without slotting ((Exclude Top Metal layer overlapping with TANRES_MK)) |
| logger.info('Executing rule MSLOT.1_MS') |
| mslot1_ms = metal_shield.not(metal_shield.width(30.001.um).polygons(0.001)).not_interacting(metal_shield_slot).not(top_metal.interacting(tanres_mk)) |
| mslot1_ms.output('MSLOT.1_MS','MSLOT.1_MS : Maximum metaltop width without slotting ((Exclude Top Metal layer overlapping with TANRES_MK))') |
| mslot1_ms.forget |
| |
| # Rule MSLOT.2_MS : Minimum metal_shield slot width (slot layers) |
| logger.info('Executing rule MSLOT.2_MS') |
| mslot2_ms = metal_shield_slot.width(2.0.um).polygons(0.001) |
| mslot2_ms.output('MSLOT.2_MS','MSLOT.2_MS : Minimum metal_shield slot width (slot layers)') |
| mslot2_ms.forget |
| |
| # Rule MSLOT.3a_MS : Minimum metal_shield Slot length (slot mark layers) |
| logger.info('Executing rule MSLOT.3a_MS') |
| mslot3a_ms = metal_shield_slot.with_bbox_max(nil,10.um) |
| mslot3a_ms.output('MSLOT.3a_MS','MSLOT.3a_MS : Minimum metal_shield Slot length (slot mark layers) ') |
| mslot3a_ms.forget |
| |
| # Rule MSLOT.3b_MS : Maximum metal_shield Slot length (slot mark layers) is 250 um |
| logger.info('Executing rule MSLOT.3b_MS') |
| mslot3b_ms = metal_shield_slot.with_bbox_max(250.001,nil) |
| mslot3b_ms.output('MSLOT.3b_MS','MSLOT.3b_MS : Maximum Slot length (slot mark layers) is 250 um') |
| mslot3b_ms.forget |
| |
| # Rule MSLOT.4a_MS : Minimum metal_shield Slot space (slot mark layers) is 10 um |
| logger.info('Executing rule MSLOT.4a_MS') |
| mslot4a_ms = metal_shield_slot.space(10.um).polygons(0.001) |
| mslot4a_ms.output('MSLOT.4a_MS','MSLOT.4a_MS : Minimum metal_shield Slot space (slot mark layers) is 10 um') |
| mslot4a_ms.forget |
| |
| if metal_shield_slot.count() > 1 |
| # Rule MSLOT.4b_MS : Maximum metal_shield Slot space (slot mark layers) is 30 um |
| logger.info('Executing rule MSLOT.4b_MS') |
| mslot4b_ms = metal_shield_slot.not_interacting(metal_shield_slot.space(30.001.um).polygons(0.001)) |
| mslot4b_ms.output('MSLOT.4b_MS','MSLOT.4b_MS : Maximum metal_shield Slot space (slot mark layers) is 30µm') |
| mslot4b_ms.forget |
| end |
| |
| # Rule MSLOT.5_MS : Minimum metal_shield slot (slot mark layers) to metal_shield edge spacing is 10 um |
| logger.info('Executing rule MSLOT.5_MS') |
| mslot5_ms_l1 = metal_shield.enclosing(metal_shield_slot,10.0.um).polygons(0.001) |
| mslot5_ms_l2 = metal_shield_slot.not_inside(metal_shield) |
| mslot5_ms = mslot5_ms_l1.or(mslot5_ms_l2) |
| mslot5_ms.output('MSLOT.5_MS','MSLOT.5_MS : Minimum metal_shield slot (slot mark layers) to metal_shield edge spacing is 10 um') |
| mslot5_ms_l1.forget |
| mslot5_ms_l2.forget |
| mslot5_ms.forget |
| |
| # Rule MSLOT.8_MS : Minimum space from metal_shield_via to metal_shield slot is 0.2 um |
| logger.info('Executing rule MSLOT.8_MS') |
| mslot8_ms = metal_shield_via.separation(metal_shield_slot,0.2.um).polygons(0.001).or(metal_shield_via.not_outside(metal_shield_slot)) |
| mslot8_ms.output('MSLOT.8_MS','MSLOT.8_MS : Minimum space from metal_shield_via to metal_shield slot is 0.2 um') |
| mslot8_ms.forget |
| |
| # Rule MSLOT.9a : No slotting allowed for Top Metal or METAL_SHIELD area directly under the Pad , Minimum distance to pad is 5.0 um |
| logger.info('Executing rule MSLOT.9a') |
| mslot9a_l1 = top_metal_slot.or(metal_shield_slot).interacting(pad) |
| mslot9a_l2 = top_metal_slot.or(metal_shield_slot).separation(pad,5.0.um).polygons(0.001) |
| mslot9a_l3 = top_metal.holes.or(metal_shield.holes).interacting(pad) |
| mslot9a_l = mslot9a_l1.or(mslot9a_l2.or(mslot9a_l3)) |
| mslot9a_l.output('MSLOT.9a','MSLOT.9a : No slotting allowed for Top Metal or METAL_SHIELD area directly under the Pad , Minimum distance to pad is 5.0 um ') |
| mslot9a_l.forget |
| mslot9a_l1.forget |
| mslot9a_l2.forget |
| mslot9a_l3.forget |
| |
| if TANRES_OPTION == 'B' |
| # Rule MSLOT.9b_TANRES_OptionB : No slotting allowed for Bottom plate directly under TANRES , Minimum distance to TANRES is 5.0 um |
| mslot9b_tanB_l1 = top_metal_slot.or(top_metal.holes).interacting(tanres) |
| mslot9b_tanB_l2 = top_metal_slot.separation(tanres,5.0.um).polygons(0.001) |
| mslot9b_tanB = mslot9b_tanB_l1.or(mslot9b_tanB_l2) |
| mslot9b_tanB.output('MSLOT.9b_TANRES_OptionB','MSLOT.9b_TANRES_OptionB : No slotting allowed for Bottom plate directly under TANRES , Minimum distance to TANRES is 5.0 um') |
| mslot9b_tanB_l1.forget |
| mslot9b_tanB_l2.forget |
| mslot9b_tanB.forget |
| |
| # Rule MSLOT.9d_TANRES_OptionB : metal_shield slots are not allowed to interact with metal_shield_via in TANRES area |
| logger.info('Executing rule MSLOT.9d_TANRES_OptionB') |
| mslot9d_l1 = metal_shield_slot.interacting(metal_shield_via).interacting(tanres_mk) |
| mslot9d_l1.output('MSLOT.9d_TANRES_OptionB','MSLOT.9d_TANRES_OptionB : metal_shield slots are not allowed to interact with metal_shield_via in TANRES area ') |
| mslot9d_l1.forget |
| end |
| |
| mslot9c_sl = top_metal_slot.or(topmin1_metal_slot.interacting(metal_shield)) |
| mslot9c_hl = top_metal.holes.or(topmin1_metal.holes.interacting(metal_shield)) |
| # Rule MSLOT.9c :No slotting allowed for the following cases : Without metal shielding, Top Metal1 directly under FuseWindow_D With metal shielding, Top Metal1 and Top Metal–12 directly under FuseWindow_D |
| logger.info('Executing rule MSLOT.9c') |
| mslot9c_l1 = mslot9c_sl.or(mslot9c_hl).interacting(fusewindow_d) |
| mslot9c_l2 = mslot9c_sl.or(mslot9c_hl).separation(fusewindow_d,5.0.um).polygons(0.001) |
| mslot9c_l = mslot9c_l1.or(mslot9c_l2) |
| mslot9c_l.output('MSLOT.9c','MSLOT.9c :No slotting allowed for the following cases : Without metal shielding, Top Metal1 directly under FuseWindow_D With metal shielding, Top Metal1 and Top Metal–12 directly under FuseWindow_D') |
| mslot9c_l1.forget |
| mslot9c_l2.forget |
| mslot9c_l.forget |
| |
| ubm = ubmpperi.or(ubmparray.or(ubmeplate)) |
| # Rule MSLOT.9e : No slotting allowed for Top Metal or METAL_SHIELD area directly under UMB layers |
| logger.info('Executing rule MSLOT.9e') |
| mslot9e_l1 = top_metal_slot.or(metal_shield_slot.or(top_metal.holes.or(metal_shield.holes))).interacting(ubm) |
| mslot9e_l2 = top_metal_slot.or(metal_shield_slot.or(top_metal.holes.or(metal_shield.holes))).separation(ubm,5.0.um).polygons(0.001) |
| mslot9e_l = mslot9e_l1.or(mslot9e_l2) |
| mslot9e_l.output('MSLOT.9e','MSLOT.9e : No slotting allowed for Top Metal or METAL_SHIELD area directly under UMB layers') |
| mslot9e_l1.forget |
| mslot9e_l2.forget |
| mslot9e_l.forget |
| |
| # Rule MSLOT.10_MS : Slot mark layer (metal_shield slot) on the metal_shield hole are not allowed |
| logger.info('Executing rule MSLOT.10_MS') |
| mslot10_ms = metal_shield_slot.interacting(metal_shield.holes) |
| mslot10_ms.output('MSLOT.10_MS','MSLOT.10_MS : Slot mark layer (metal_shield slot) on the metal_shield hole are not allowed') |
| mslot10_ms.forget |
| |
| end #BEOL |
