| RULE NO.,DESCRIPTION,LAYOUT RULE | |
| Layer,Mn --- Metaln (where n = 1 to 5), | |
| Mn.1,Width,"0.23 (n = 1) | |
| 0.28 (2 <= n <= 5)" | |
| Mn.2a,Space,"0.23 (n = 1) | |
| 0.28 (2 <= n <= 5)" | |
| Mn.2b,Space to wide Metaln (length & width > 10μm),0.3 | |
| Mn.3,Minimum Metaln area,0.1444 um2 | |
| Mn.4,"Metaln coverage over the entire die shall be >30% | |
| (Refer to section 13.0 for Dummy Metal fill guidelines. | |
| Customer needs to ensure enough dummy metal to satisfy Metaln coverage)", |