| Levels of Metal,BEOL metal and via to be included | |
| 6LM,"Metal1, Via1, Metal2, Via2, Metal3, Via3, Metal4, Via4, Metal5, Via5, MetalTop." | |
| 5LM,"Metal1, Via1, Metal2, Via2, Metal3, Via3, Metal4, Via4, Metal5. | |
| Metal 5 must comply with MetalTop rule." | |
| 4LM,"Metal1, Via1, Metal2, Via2, Metal3, Via3, Metal4. | |
| Metal 4 must comply with MetalTop rule." | |
| 3LM,"Metal1, Via1, Metal2, Via2, Metal3. | |
| Metal 3 must comply with MetalTop rule." | |
| 2LM,"Metal1, Via1, Metal2. | |
| Metal 2 must comply with MetalTop rule." |