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c6f9eebdecbf9a2d50b2a7ae84bb5958ad655d40
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docs
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physical_verification
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design_manual
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tables_clear
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28_ANTENNA3_69.csv
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,
Poly2
,
Metal1
,
Metal2
,
Metal3
,
Metal4
,
Metal5
,
"MetalTop
(6K Å)"
,
"MetalTop.1
(9K Å)"
,
"MetalTop.2
(11K Å)"
,
"MetalTop.3
(30K Å)"
t
(
um
),
0.2um
,
0.54um
,
0.54um
,
0.54um
,
0.54um
,
0.54um
,
0.69um
,
0.99um
,
1.19um
,
3.035um
