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3.39 1P5M (TM 11KA with MIM) Structure
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MIM was placed in between Metal2 and Metal3; SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF
.. image:: images/2_cross_section_39.png
:width: 600
:align: center
:alt: 1P5M (TM 11KA with MIM) Structure